• 제목/요약/키워드: sub-micro pattern

검색결과 38건 처리시간 0.028초

마이크로 박판 미세 패턴 성형공정에 대한 해석적 연구 (On the analysis of micro pattern forming on the thin sheet metal)

  • 차성훈;신명수;김종호;김종봉;송정한;이혜진
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2009년도 추계학술대회 논문집
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    • pp.53-56
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    • 2009
  • Roll forming process is one of important metal processing technology because the process is simple and economical. These days, roll forming process is tried to be employed in manufacturing the circuit board, barrier ribs and solar cell plate for productivity. However, it is difficult to apply to the forming of micro scale or sub-micro scale pattern. In this study, the roll forming processing for the micro scale is designed and analyzed. In this study, the forming of micro pattern for solar cell plate by incremental roll forming process is analyzed. The solar cell plate may have thousands of patterns, and the analysis of forming considering all the patterns is impossible due to the computational costs. In this study, analyses are carried out for various numbers of patterns and the results are compared. It is shown that the analyses results with four row patterns and twelve row patterns are same. So, it is considered that the analysis can be carried out for only four rows of pattern for the design of incremental roll forming process. Also experiment is carried out process that is designed through simulation.

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마이크로 박판 미세 패턴 성형공정에 대한 해석 효율성 연구 (On the effective analysis method of micro pattern forming on the thin sheet metal)

  • 차성훈;신명수;김종호;김종봉;이혜진;송정한
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2009년도 춘계학술대회 논문집
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    • pp.56-59
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    • 2009
  • Roll forming process is one of important metal processing technology because the process is simple and economical. These days, roll forming process is tried to be employed in manufacturing the circuit board, barrier ribs and solar cell plate for productivity. However, it is difficult to apply to the forming of micro scale or sub-micro scale pattern. In this study, the roll forming processing for the micro scale is designed and analyzed. In this study, the forming of micro pattern for solar cell plate by incremental roll forming process is analyzed. The solar cell plate may have thousands of patterns, and the analysis of forming considering all the patterns is impossible due to the computational costs. In this study, analyses are carried out for various numbers of patterns and the results are compared. It is shown that the analyses results with four row patterns and twelve row patterns are same. So, it is considered that the analysis can be carried out for only four rows of pattern for the design of incremental roll forming process.

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Identification of Gas Mixture with the MEMS Sensor Arrays by a Pattern Recognition

  • Bum-Joon Kim;Jung-Sik Kim
    • 한국재료학회지
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    • 제34권5호
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    • pp.235-241
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    • 2024
  • Gas identification techniques using pattern recognition methods were developed from four micro-electronic gas sensors for noxious gas mixture analysis. The target gases for the air quality monitoring inside vehicles were two exhaust gases, carbon monoxide (CO) and nitrogen oxides (NOx), and two odor gases, ammonia (NH3) and formaldehyde (HCHO). Four MEMS gas sensors with sensing materials of Pd-SnO2 for CO, In2O3 for NOX, Ru-WO3 for NH3, and hybridized SnO2-ZnO material for HCHO were fabricated. In six binary mixed gas systems with oxidizing and reducing gases, the gas sensing behaviors and the sensor responses of these methods were examined for the discrimination of gas species. The gas sensitivity data was extracted and their patterns were determined using principal component analysis (PCA) techniques. The PCA plot results showed good separation among the mixed gas systems, suggesting that the gas mixture tests for noxious gases and their mixtures could be well classified and discriminated changes.

유한요소해석을 이용한 마이크로 박판 미세 패턴 롤-롤 성형공정 설계 (Design of Roll-to-Roll Forming Process for Micro Pattern on the Thin Sheet Metal by Finite Element Analysis)

  • 차성훈;신명수;이혜진;김종봉
    • 소성∙가공
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    • 제19권3호
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    • pp.167-172
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    • 2010
  • Roll-to-roll forming process is one of important metal processing technology because the process is simple and economical. These days, with these merits, roll-to-roll forming process is tried to be employed in manufacturing the circuit board, barrier ribs and solar cell plate. However, it is difficult to apply to the forming of micro scale or sub-micro scale pattern. In this study, the roll forming processing for the micro scale is designed and analyzed. The forming of micro pattern for small electric device such as LCD panel by incremental roll forming process is analyzed. Firstly, the optimum analysis conditions are found by several analyses. And then, formability is analyzed for various protrusion shapes at various forming temperatures. The formability is evaluated in terms of filling ratio and damage value. The filling ratio is defined from the tool geometry and critical damage is determined from the analysis of uniaxial tensile test. Finally, optimum forming conditions that guarantee the successful forming are found.

집속이온빔의 가공 공정 메카니즘 연구 (Manufacturing Mechanism of FIB-CVD using Focused Ion Beam)

  • 강은구;최병열;이석우;홍원표;최헌종
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2004년도 추계학술대회 논문집
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    • pp.925-928
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    • 2004
  • The application of focused ion beam (FIB) technology in micro/nano machining has become increasingly popular. Its use in micro/nano machining has advantages over contemporary photolithography or other micro/nano machining technologies such as small feature resolution, the ability to process without masks and being accommodating for a variety of materials and geometries. This paper was carried out some experiments and verifications of mechanism on FIB-CVD using SMI8800 made by Seiko. FIB-CVD has in fact proved to be commercially useful for repair processes because the beam can be focused down to 0.05$\mu\textrm{m}$ dimensions and below and because the same tool can be used to sputter off material with sub-micrometer precision simply by turning off the gas ambient. Recently the chemical vapour deposition induced ion beam has been required more deposition rate and accurate pattern because of trying to manufacture many micro and nano parts. Therefore this paper suggested the optimization parameters and discussed some mechanism of chemical vapour deposition induced ion beam on FIB-CVD for simple pattern.

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Sensing Characterization of Metal Oxide Semiconductor-Based Sensor Arrays for Gas Mixtures in Air

  • Jung-Sik Kim
    • 한국재료학회지
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    • 제33권5호
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    • pp.195-204
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    • 2023
  • Micro-electronic gas sensor devices were developed for the detection of carbon monoxide (CO), nitrogen oxides (NOx), ammonia (NH3), and formaldehyde (HCHO), as well as binary mixed-gas systems. Four gas sensing materials for different target gases, Pd-SnO2 for CO, In2O3 for NOx, Ru-WO3 for NH3, and SnO2-ZnO for HCHO, were synthesized using a sol-gel method, and sensor devices were then fabricated using a micro sensor platform. The gas sensing behavior and sensor response to the gas mixture were examined for six mixed gas systems using the experimental data in MEMS gas sensor arrays in sole gases and their mixtures. The gas sensing behavior with the mixed gas system suggests that specific adsorption and selective activation of the adsorption sites might occur in gas mixtures, and allow selectivity for the adsorption of a particular gas. The careful pattern recognition of sensing data obtained by the sensor array made it possible to distinguish a gas species from a gas mixture and to measure its concentration.

서브 마이크로 구조를 가진 실리콘 표면의 마찰 특성 연구 (Study on Frictional Characteristics of Sub-micro Structured Silicon Surfaces)

  • 한지희;한규범;장동영;안효석
    • Tribology and Lubricants
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    • 제33권3호
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    • pp.92-97
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    • 2017
  • The understanding of the friction characteristics of micro-textured surface is of great importance to enhance the tribological properties of nano- and micro-devices. We fabricate rectangular patterns with submicron-scale structures on a Si wafer surface with various pitches and heights by using a focused ion beam (FIB). In addition, we fabricate tilted rectangular patterns to identify the influence of the tilt angle ($45^{\circ}$ and $135^{\circ}$) on friction behaviour. We perform the friction test using lateral force microscopy (LFM) employing a colloidal probe. We fabricate the colloidal probe by attaching a $10{\pm}1-{\mu}m$-diameter borosilicate glass sphere to a tipless silicon cantilever by using a ultraviolet cure adhesive. The applied normal loads range between 200 nN and 1100 nN and the sliding speed was set to $12{\mu}m/s$. The test results show that the friction behavior varied depending on the pitch, height, and tilt angle of the microstructure. The friction forces were relatively lower for narrower and deeper pitches. The comparison of friction force between the sub-micro-structured surfaces and the original Si surface indicate an improvement of the friction property at a low load range. The current study provides a better understanding of the influence of pitch, height, and tilt angle of the microstructure on their tribological properties, enabling the design of sub-micro- and micro-structured Si surfaces to improve their mechanical durability.

CO2 Laser Assisted Fabrication of Micro-lensed Single-mode Optical Fiber

  • Choi, Hun-Kook;Yoo, Dongyoon;Sohn, Ik-Bu;Noh, Young-Chul;Sung, Jae-Hee;Lee, Seong-Ku;Jeong, Tae-Moon;Ahsan, Md. Shamim;Kim, Jin-Tae
    • Journal of the Optical Society of Korea
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    • 제19권4호
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    • pp.327-333
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    • 2015
  • This paper reports the fabrication of various micro-lensed single-mode optical fibers through the use of an enhanced peak power $CO_2$ laser beam. The end faces of the optical fibers are exposed to the $CO_2$ laser beam to form convex, concave, and conical shape optical fiber tips. Peak power of the $CO_2$ laser beam was varied from 0.8 W to 1.5 W depending on the shape of the optical fiber tip. We also discover the dependence of the angle of the optical fiber tip on the rotation angle and the number of $CO_2$ laser irradiations. The angle shows an increasing trend with both these parameters. We achieve a wide range of lenticular fibers with end face angle varying from $4.47^{\circ}$ to $8.13^{\circ}$. Furthermore, we investigate the emission pattern of light from the developed micro-lensed fibers. The proposed $CO_2$ laser based optical fiber reshaping technique shows great consistency, and thus is suitable for commercial applications.

LGP 사출성형 시의 미세충전 특성해석 (Investigation on micro/nano filling behavior in LGP injection molding)

  • 조기철;신홍규;김헌영;김병희
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2006년도 춘계학술대회 논문집
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    • pp.91-94
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    • 2006
  • In this paper, in order to get micro or nano size optical patterns, an analytical and experimental investigation on a LGP (light guide plate) injection molding process has performed. The LGP, which diffusing and emitting the light from the CCFL or the LEDs to the panel front direction uniformly, typically has an under 1mm thick base substrate and numerous 60 to $170{\mu}m$ width and 6 to $10{\mu}m$ thick dot patterns on it. Generally, the small size LGPs, for mobile devices, have been and are being made of PMMA through the injection molding process. However, the substrate thickness and the dot pattern size are decreasing, it becomes hard to fill the micro to sub-micro cavities completely. To investigate the flow behavior of resin in micro/nano cavities and identify the characteristics of the LGP injection molding process, we carried out the flow analyses with respect to the variations of the substrate thickness, the dot pattern size and the pitch of a cavity.

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미세접촉인쇄기법을 이용한 미세패턴 제작 (Fabrication of Micropattern by Microcontact Printing)

  • 조정대;이응숙;최대근;양승만
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2003년도 춘계학술대회 논문집
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    • pp.1224-1226
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    • 2003
  • In this work, we developed a high resolution printing technique based on transferring a pattern from a PDMS stamp to a Pd and Au substrate by microcontact printing Also, we fabricated various 2D metallic and polymeric nano patterns with the feature resolution of sub-micrometer scale by using the method of microcontact printing (${\mu}$CP) based on soft lithography. Silicon masters for the micro molding were made by e-beam lithography. Composite poly(dimethylsiloxane) (PDMS) molds were composed of a thin, hard layer supported by soft PDMS layer. From this work, it is certificated that composite PDMS mold and undercutting technique play an important role in the generation of a clear SAM nanopattern on Pd and Au substrate.

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