• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2000.04a
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• pp.613-617
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• 2000

This paper descries the effect of the stylus tip size on the measuring error in surface topography measurement. To analyze the distortional effect of an actual surface geometry originating from the finite stylus size, the surface is modeled as a sinusoid and the stylus tip as a circle. the measuring error is defined as the ratio of the standard deviation of a tracing profile and an original profile. It is shown that this measuring error depends on the amplitude and wavelength of an original profile. In this paper, the spectrum analysis is applied to investigate the distortional effect due to the mechanical filtering of the stylus in the frequency domain. and, the cumulative power spectrum is applied to determinate the minimum wavelength limits to be measured with the various stylus tip radius from these results, a new method to select proper stylus tip radius is proposed.

• Journal of the Korean Society for Precision Engineering
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• v.7 no.3
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• pp.37-47
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• 1990

In accordance with the high precision of mechanical elements, it has been required to high precision in surface roughness measurement and, therefore, stylus tip radius is manufa- ctured less than 2 .mu. m through ion sputter machining. In this experiment, by suing ion sputter machined stylus pf fine tip, radius and lapping machined stylus, surface roughness of standard specimens, silicon wafer were measured and then Rmax, Ra, RMS value were investi- gatedaccording to the variation of tip radius of stylus. As a result, measuring error due to the variation of stylus tip radius in surface roughness measurement was decreased by using ion sputter machined stylus and also the measuring accuracy was improved. And the measuring variation of Ra, RMS calculated from correlation coefficient lager than 0.9 on the wave of short period and amplitude using ion sputter machined stylus of fine tip radius.

• International Journal of Precision Engineering and Manufacturing
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• v.7 no.1
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• pp.9-12
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• 2006

A spectral analysis and numerical simulation are employed to assess the effects of the stylus tip radius on measuring surface profiles. Original profiles with fractal spectral densities are generated and then are numerically traced with circular tipped stylus. Instead of their spectral densities, the accumulative power spectrums of traced profiles are analyzed. It is shown that the minimum wavelength of traced profile relates directly to the radius r of the stylus tip and the root-mean-square (rms) roughness ${\sigma}_o$ of original profile. From this accumulation spectral analysis, a formula is developed to estimate the minimum wavelength of traced profile. By using the concept of the minimum wavelength, an appropriate stylus tip radius can be chosen for the given rms roughness ${\sigma}_o$ of the profile.

• Transactions of the Korean Society of Mechanical Engineers
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• v.14 no.6
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• pp.1495-1508
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• 1990

There are requirement of surface roughness in mechanical elements that has minute surface of several nm degree. When high precision surface roughness measurement is made with stylus type surface roughness measuring apparatus, measuring accuracy depend on the tip radius of diamond stylus. Therefore, ultra precision machining was accomplished using ion sputter machining in order to machining the stylus tip radius less than 0.5.mu.m, which is impossible through lapping machining. In this study, optimal machining condition for the ion sputter machining was obtained through the experiment under the various varing machinbing quantity and condition of diamond stylus. And as the result of applying this optimal condition, the good result was obtained that machining probability of stylus tip radius less than o.5.mu.m is 93%.

• Journal of the Korean Society for Precision Engineering
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• v.8 no.3
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• pp.105-113
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• 1991

The practicability of Ion-Sputter machining renders it possible to make diamond stylus for surface roughness measurement with micro stylus tip radius less than 2${\mu}mR$, and to measure surface roughness of fine-machined surface. In this study, we researched the wear or Ion-Sputtered stylus with 0.1${\mu}mR$ and 0.5${\mu}mR$ for micro-figure measurement and polished stylus with 0.5${\mu}mR$ according to measurement distance. As a result, we know that the case of Ion-Sputtered stylus is worn down easilier the case of polished stylus. And we know that in the evaluation of stylus wear, it is more useful method that examine the wear by measuring the variation of stylus tip radius than by evaluating the variation of Ra values.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.12
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• pp.174-181
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• 1999

This paper describes the effect of the stylus tip size on the shape error in surface topography measurement. To analyze the distortional effect of an actual surface geometry origination from the finite stylus size, the surface is modeled as a sinusoid and the stylus tip as a circle. The magnitude of this distortion is defined as the ration of standard deviation, and this is expressed as an analytic function of the stylus tip radius and the geometrical parameter of a sinusoid. In this paper, the spectrum analysis of the profile is applied to investigate the distortional effect due to the mechanical filtering of the stylus in the frequency domain. and, the cumulative power spectrum is proposed to assess the shape error of measured data according to the various stylus tip sizes. From these results, a new method to select proper stylus tip radius is proposed.

• Journal of the Korean Society for Precision Engineering
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• v.3 no.1
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• pp.69-76
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• 1986

The measuring Method by stylus, which measures surface roughness, has been widely used since G. Schmaltz developed the first equipment of that type. Withe the resent development of the measuring method by stylus, surface foughness testing instruments of the very high magnification ratio, hundreds of thousands, are manu- factured. However, as the techniques of the high precision roughness measurement are being required, the response problems due to the tip shapes and the plastic deformations of measured surface of mild material are to be serious factors. In this study, diamond stylus of tip radius $0.5\mu\textrm{m}$, $2\mu\textrm{m}$, $5\mu\textrm{m}$ and $10\mu\textrm{m}$ were used under the measuring force of 0.01gf, 0.02gf, 0.07gf, 0.4gf and 1.6gf, and from the experimental data, maximum measured value devrements between $2\mu\textrm{mR}$ stylus and $5\mu\textrm{mR}$ stylus, $2\mu\textrm{mR}$ stylus and $10\mu\textrm{mR}$ stylus are 22% and 31%, respectively when the measured value of $2\mu\textrm{mR}$ stylus goes to $0.01\mu\textrm{m Ra}$, $\lambda$ c2.5mm. And it is shown that plastic deformations on the plastic deformations on the measured surface are proportional to W/R(W;measured force, R;stylus tip radius).

• Journal of the Korean Society for Precision Engineering
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• v.29 no.8
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• pp.845-852
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• 2012

The diaphragm-type stylus probe was developed for ultra-precision on-machine measurement (OMM) application. This probe is equipped with two diaphragms which are parallel and one capacitive sensor is used for detecting the vertical motion of end tip in the stylus when it is contacted to the optical freeform surface. For better performance of proposed probes, several design parameters such as axial stiffness and the lateral deformations were investigated with finite element analysis techniques. To verify the feasibility, the profiles of the master sphere ball were measured on the ultra-precision milling machine. The measurement results show that the proposed probe can calculate the radius of the circle within the accuracy of 0.1 ${\mu}m$ for the ultraprecision optical surface.

• Journal of the Korean Wood Science and Technology
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• v.8 no.1
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• pp.22-27
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• 1980

Quantitative assessment of edge blunting of saw-teeth was carried out by TALYSURF. 1. Using the following equation, the real shape of a saw-tooth can be traced on the graph of TALYSURF. ${\frac{{\Delta}h}{h}}={\frac{V{\Delta}_x}{V_x}}$ {${\Delta}h$: vertical distance of stylus h: vertical distance in chart $V{\Delta}_x$: Velocity of stylus $V_x$: velocity of chart} 2. As shown on Fig 2, the error from stylus itself can be calculated by following equation. i) 13.8${\mu}{\leqq}$x<20.4${\mu}$ y=-0.2246x+4.59${\mu}$ ii) 0${\leqq}$x<13.8${\mu}$ y=${\sqrt{(-18{\mu})^2-x^2}}-1.42x+32.7{\mu}}$ 3. The relationship between profile of saw-tooth and error from stylus itself can be calculated by following equation. $E(%)=\frac{f(r){\times}{\frac{4}{18{\mu}}}}{f(R){\times}{\frac{R}{18.5{\mu}}}-f(r){\times}{\frac{r}{18{\mu}}}}{\times}100$ {E(%)${\frac{error\;of\;stylus}{dullness\;of\;saw\;tooth}}{\times}100$ r: radius of stylus tip R: radius of tip which is drawn in graph of talysurf f(r) : error of stylus f(R) : dullness of tip which is drawn in graph of talysurf} 4. The graph of maximum error and profile of saw-tooth was parabola.