• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.128-131
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• 2002

Three Dimensional measuring system using optical interference is greatly needed for semiconductor surface or optical surface. The application of this system are : MEMS product, semiconductor surfaces, optical components, precise machined surface, etc. In this paper, Interferometry based measurement system is introduced, which is nondestructive and noncontact inspection system. This system have relatively many advantage, compared with AFM/STM, SEM, Stylus, etc. The developed system can measure the surface topography with high precision and resolution, and with few seconds. And the associated software algorithm is also developed for the ultra precision 3D measuring surface. Various samples that is measured using this system is showed in the latter of this paper.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2018.06a
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• pp.42.1-42.1
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• 2018

정전용량방식 터치스크린패널은 모바일에서 차량용 디스플레이에 이르기까지 휴대용 전자장치를 위한 직관적인 사용자 인터페이스 덕분에 최근 몇 년간 관심이 집중 되었다. 본 연구에서는 우수한 성형성과 정확성 및 고감도 터치패널 제작을 위해 Ionized Physical Vapor Deposition (IPVD)시스템을 이용하여 멀티레이어(Oxide/Metal/Oxide)의 투명전극을 형성 하였다. 멀티레이어 전극은 5.1 ohm/sq의 면저항과 89.5%의 투과율을 나타내며, 높은 신뢰성 및 접촉력의 특성을 나타내는 것을 확인 하였다. 이를 통해, 기존의 패턴크기보다 작은 3.8mm pitch 패턴의 15인치 GFF타입 터치패널을 성공적으로 제작 하였으며, 터치센서는 우수한 선형성, 정확성 및 고감도 스타일러스펜 (직경=1mm)의 멀티터치를 구현 하였다.

• 한국정보디스플레이학회:학술대회논문집
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• 2005.07a
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• pp.187-190
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• 2005

Alignment pattern of checkerboard was constructed by the stylus of atomic force microscope. Orientational bistability of the nematic liquid crystal was realized on that frustrated surface alignment. Macroscopic orientational switching between two perpendicular directions took place by an appropriate in-plane electric field. The threshold electric fields decreased in both switching directions as temperature increased. The focused laser heated up only the limited domains in the cell including a light-absorbing medium. Irradiating the laser concurrently with an appropriate electric field, we switched the selected unit domains in the alignment pattern. The switched domains maintained stably the switched direction without the disturbance from the exterior. Extending and repeating this process, we realized extremely fine devices of bistable switching.

• Korean Journal of Optics and Photonics
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• v.2 no.2
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• pp.96-102
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• 1991

Monitoring the surface profile real time on the manufacturing line of planar products has been accomplished by employing the scattering of a laser light. The laser beam was focused onto the surface and the direction of the reflected beam was utilized to obtain the slope of the surface facet. By taking data fast enough, it was possible to obtain the microscopic surface structure. The mean roughness thus obtained agreed well with the ones found with the mechanical stylus instrument. There was discrepancy between the two results as to the number of peaks per com. A simple model based on the deconvolution of the raw data was found adequate to improve the agreement to an acceptable level.

• Journal of the Korean Vacuum Society
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• v.8 no.3A
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• pp.249-255
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• 1999

Deposition characteristics of Cu thin films using Ar carrier gas and $H_2$ processing gas at various working pressures and substrate temperatures were investigated. Also, effects of $H_2$ pretreatment using plasma at $200^{\circ}C$ of substrate temperature and 0.6 Torr of chamber pressure were stdied. Cu thin films were deposited on TiN/Si substrate at working pressure of 0.5~1.5 Torr, substrate temperatures of 140~$240^{\circ}C$ with (hface)Cu(tmvs). Substrates were pretreated by $H_2$ plasma, and Cu films deposited in situ using twofold shower head. The purity, electrical resistivity, thickness, surface morphology, optical properties of the deposited Cu films were measured b the AES, four point probe, stylus profiler, SEM,. and the uv-visible spectrophotometer. This study suggests that $H_2$ plasma is an effective method for enhancing deposition rate and for producing high quality copper thin films.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.5 s.170
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• pp.55-62
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• 2005

This paper presents mainly a procedure to get the mathematical form of the manufactured aspherical lens. Generally Schulz formula describes the aspherical lens profile. Therefore, the base curvature, conic constant. and high-order polynomial coefficient should be set to get the approximated design equation. To find the best-approximated aspherical form, lens profile is measured by a commercial stylus profiler, which has a sub-micrometer measurement resolution. The optimization tool is based on the minimization of the root mean square of error sum to get the estimated aspherical surface equation from the scanned aspherical profile. Error minimization step uses the Nelder-Mead simplex (direct search) method. The result of the lens refractive power measurement shows the experimental consistency with the curvature distribution of the best-approximated aspherical surface equation

• Current Optics and Photonics
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• v.6 no.1
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• pp.1-9
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• 2022

This paper proposes a robust, simple zonal wavefront-estimation method in a grid sampling model. More slopes are added to the integral equation of the algorithm to improve the accuracy and convergence rate of this approach, especially for higher-order optical aberrations. The Taylor theorem is applied to clarify the mathematical description of the remaining error in the proposed method. Several numerical simulations are conducted to ensure the performance and improvement in comparison to the Southwell and previous algorithm. An experiment is also conducted according to deflectometry output and the results are verified using a reference measured with a stylus system.

• KOMUNHWA
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• no.70
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• pp.63-88
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• 2007

The purpose of this writing is to examine the places and instruments of the dissection for deformed animal carcasses excavated in shellfish stacks of the period of the Proto-Three Kingdoms(삼한) and the Three Kingdoms(삼국). The remains were chosen, which had been excavated and finished in the analysis of the animal carcasses, and the main objects are all shells and deer, especially among Mammalia. As the result, the dissection of shells was not taken place in the habitats of the animals, but inside or around of the residence of the people. For deer, too, it was done in the public place or specific area around and inside the residence. As concerns the method of dissection for shells, for Pelecypoda(부족류), represented by Meretrix lusoria(백합), the inner meat was taken out by wrenching the shell with a kind of small knives, or by boiling, and sometimes by cracking the middle of the shell in the case of big Meretrix lusoria and Dosinorbis japonicus(떡조개). For Rapana venosa(피뿔고둥), representative of Gastropoad(배발류), the people broke the top or some parts of the body to get the inner meat or used some kind of needles and stylus to pick the inner meat out after boiling. Abalones‘ meat was attached firmly to the shell, so very sharp and proper metal instruments were used to take the meat out Relatively small-sized Reishia clavigera(대수리),Top shell(밤고둥) meats were taken out by breaking the top parts after boiling, then sucking the meats, or by picking them out by using needles and stylus in the original shape. In the case of large Mammalia like deer, in the full consideration of the point that deer itself are used in various ways, they were dissected in the order of skinning, taking out the internal organs, cutting front and rear legs, separating joint parts and meats, extracting bone-marrow by 철정, 철부, ironed hand knife in very delicate ways. It seems that skinning, and front and rear legs' cutting were taken place in the place around the residence, on the other hand joint parts' separating and bone-marrow extracting in the residence. The tools for the dissection were confirmed to be hand-knife, honed ax, hammer stone, bondstone, needles and stylus, and some other sharp instrument. They were used properly according to objects.

• Journal of the Korean Vacuum Society
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• v.7 no.4
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• pp.403-409
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• 1998

In this study, the effects of multi-dipole type of magnets on the characteristics of the inductively coupled plasmas and $SiO_2$ etch properties were investigated. As the magnets, 4 pairs of permanent magnets were used and, to etch $SiO_2, C_2F_6, CHF_3, C_4F_8, H_2$, and their combinations were used. The characteristics of the magnetized inductively coupled plasmas were investigated using a Langmuir probe and an optical emission spectrometer, and $SiO_2$ etch rates and the etch selectivity over photoresist were measured using a stylus profilometer. The use of multi-dipole magnets increased the uniformity of the ion density over the substrate location even though no significant increase of ion density was observed with the magnets. The use of the magnets also increased the electron temperature and radical densities while reducing the plasma potential. When $SiO_2$ was etched using the fluorocarbon gases, the significant increase of $SiO_2$ etch rates and also the increase of etch uniformity over the substrate were obtained using the magnets. In case of gas combinations with hydrogen, $C_4F_8/H_2$ showed the highest etch rates and etch selectivities over photoresist among the gas combinations with hydrogen used in the experiment. By optimizing process parameters at 1000 Watts of inductive power with the magnets, the highest $SiO_2$ etch rate of 8000 $\AA$/min could be obtained for 50% $C_4F_8/50% H_2$.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2002.10b
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• pp.457-458
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• 2002

The fractal dimension is the characteristics that can quantitatively define the irregularity in natural. It is useful in describing the morphology or various rubbed surface for hydraulic piston motor instead of the stylus profiling method. But fractal parameters had not constructed on the morphological characteristic or rubbed surface because of the insufficient knowledge about a conception of fractal dimension. In this study, for the purpose or applying fractal I parameters practically, we have suggested way to establish the morphological characteristic of rubbed surface with fractal parameters, and we carried out an experiment on the lubricant friction and wear by using Ball-ON-Disk type tester. Materials were the brass and the bronze which are used to slipper-pad in the hydraulic piston motor. We searched for fractal parameters or surface structure with the digital image processing, Surface fractal dimension can be determined by sum of intensity difference of surface pixel. Using the image processing and fractal parameters for rubbed surface in the friction and wear test, morphology of rubbed sur race can be effectively obtained by fractal dimensions.