• Current Optics and Photonics
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• 제2권2호
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• pp.172-178
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• 2018

We propose a precise 3D endoscopic technique for medical and industrial applications. As the 3D measuring principle, the continuously scanning structured illumination microscopy (CSSIM), which enables to obtain 3D sectional images by the synchronous axial scanning of the target with the lateral scanning of the sinusoidal pattern, is adopted. In order to reduce the size of the probe end, the illumination and detection paths of light are designed as coaxial and a coherent imaging fiber bundle is used for transferring the illumination pattern to the target and vice versa. We constructed and experimentally verified the proposed system with a gauge block specimen. As the result, it was confirmed that the 3D surface profile was successfully measured with $16.1{\mu}m$ repeatability for a gauge block specimen. In order to improve the contrast of the sinusoidal illumination pattern reflected off on the target, we used polarizing optical components and confirmed that the visibility of the pattern was suitable in CSSIM.

• 조명전기설비학회논문지
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• 제24권12호
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• pp.122-130
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• 2010

This paper presents an active ranging system based on laser structured-light image. The structured-light image processing is computationally efficient in comparison with the conventional stereo image processing, since the burdensome correspondence problem is avoidable. In order to achieve robustness against environmental illumination noise, an efficient image processing algorithm, i.e., integration of difference images with structured-light modulation is proposed. Distance equation from the measured structured light pixel distance and system parameter calibration are addressed in this paper. Experiments and analysis are carried out to verify performance of the proposed ranging system.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2012년도 추계학술대회 논문집
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• pp.525-526
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• 2012

• 대한기계학회논문집A
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• 제36권5호
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• pp.505-512
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• 2012

본 논문에서 태양전지 실리콘 웨이퍼 검사를 위해 광학스캐닝 메커니즘 기반 검사장비를 개발하였다. 그 중에서 다양한 결함검사 요구와 적절한 조명조건을 만족하는 구조적 하이브리드 조명시스템을 설계하였다. 그 다음으로 실험계획법을 이용하여 구조적 하이브리드 조명시스템의 최적 조명조건을 마스터 유리와 실리콘 웨이퍼에서 선정하였다. 마스터 유리에서 최적 조명조건은 B-강, BG-강, BR-강, BGR-강 이며, 실리콘 웨이퍼에서 최적조건은 R-중-B-중 이다. 이 최적조명조건을 적용하여 실리콘 웨이퍼 표면을 검사한 결과, 핀홀, 스크래치, 치핑 등 다수의 표면결함을 정확하게 검출하였다. 구조적 하이브리드 조명시스템은 태양전지 실리콘 웨이퍼 표면결함 검사에 유용하게 사용될 수 있다.

• Current Optics and Photonics
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• 제4권4호
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• pp.317-325
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• 2020

Accurate estimation of spatial frequencies and phases for illumination patterns are essential to reconstructing super-resolution images in structured illumination microscopy (SIM). In this manuscript, we propose the improved component cross-correlation (ICC) algorithm, which is based on optimization of the cross-correlation values of the overlapping information between various spectral components. Compared to other algorithms for spatial-frequency and phase determination, the results calculated by the ICC algorithm are more accurate when the modulation depths of the illumination patterns are low. Moreover, the ICC algorithm is able to calculate the spatial frequencies and phases simultaneously. Simulation results indicate that even if the modulation depth is lower than 0.1, the ICC algorithm still estimates the parameters precisely; the images reconstructed by the ICC algorithm are much clearer than those reconstructed by other algorithms. In experiments, our home-built SIM system was used to image bovine pulmonary artery endothelial (BPAE) cells. Drawing support from the ICC algorithm, super-resolution images were reconstructed without artifacts.

• 제어로봇시스템학회논문지
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• 제19권12호
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• pp.1089-1093
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• 2013

Depth extraction using the structured illumination method is popularly applied since it has the benefit of measuring the object without contact. With multiple spatial frequencies and phase-shifting techniques, it is possible to extract the depth of objects with large discontinuity. For applications such as 3D (Three Dimensional) displays, 3D information of the object is required and is useful if corresponding to each view of the display. For this purpose, hypercentric optics is appropriate to measure the depth information of an object with a large field of view that is applicable for a 3D display. By experiment, we present the feasibility for phase-shifting profilometry using hypercentric optics to obtain the depth information of an object with the field of view appropriate for a 3D display.

• 반도체디스플레이기술학회지
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• 제11권3호
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• pp.1-6
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• 2012

In this paper, inspection system based on optical scanning mechanism is designed and developed for solar cell wafer. It consists of optical scanning mechanism, NIR camera optics, machinery and control system, algorithm of defect detection and software. Optical scanning mechanism is composed of geometrical camera optics and structured hybrid illumination system. It is used to inspection of surface defects. NIR camera optics is used for inspection of defects inside solar cell wafer. It is shown that surface and internal micro defects can be detected in developed inspection system for solar cell wafer.

• 제어로봇시스템학회논문지
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• 제21권4호
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• pp.309-314
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• 2015

In this study, an embedded ranging system based on a laser structured light image is developed. The distance measurement by the structured light image processing has efficient computation because the burdensome correspondence problem is avoidable. In order to achieve robustness against environmental illumination noise and real-time laser structured light image processing, a bandpass optical filter is adopted in this study. The proposed ranging system has an embedded image processor performing the whole image processing and distance measurement, and so reduces the computational burden in the main control system. A system calibration algorithm is presented to compensate for the lens distortion.

• 제어로봇시스템학회논문지
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• 제18권5호
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• pp.479-486
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• 2012

In this paper, a ranging system is proposed that is able to measure 360 degree omnidirectional distances to environment objects. The ranging system is based on the structured light imaging system with catadioptric omnidirectional mirror. In order to make the ranging system robust against environmental illumination, efficient structured light image processing algorithms are developed; sequential integration of difference images with modulated structured light and radial search based on Bresenham line drawing algorithm. A dedicated FPGA image processor is developed to speed up the overall image processing. Also the distance equation is derived in the omnidirectional imaging system with a hyperbolic mirror. It is expected that the omnidirectional ranging system is useful for mapping and localization of mobile robot. Experiments are carried out to verify the performance of the proposed ranging system.

• 제어로봇시스템학회논문지
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• 제16권8호
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• pp.751-755
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• 2010

In this paper, we proposed an omnidirectional ranging system that is able to obtain $360^{\circ}$ all directional distances effectively based on structured light image. The omnidirectional ranging system consists of laser structured light source and a catadioptric omnidirectional camera with a curved mirror. The proposed integro-differential structured light image processing algorithm makes the ranging system robust against environmental illumination condition. The omnidirectional ranging system is useful for map-building and self-localization of a mobile robot.