• 제목/요약/키워드: sticking

검색결과 373건 처리시간 0.03초

Thermal imprint를 이용한 고밀도 line패턴 형성방법 (High density line patterns fabricated by thermal imprint)

  • 이상문;곽정복;이환수
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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    • pp.270-270
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    • 2008
  • We present details of experimental results in the fabrication of high density line patterns, using imprint technique that can provide a simple and comparatively cost-effective manufacturing means. Barrier array structures for display or interconnects for semiconductor applications were the aims of this study. For pattern fabrication, a polymer layer (Ajinomoto GX-13 dielectric film) with a thickness of 38um that can act as either an insulating or a dielectric layer was laminated on a substrate. Fine tracks were then formed using a patterned stamp under isostatic pressure. The line width was ranged between 10 to 60 mm. A self-assembled monolayer (SAM) of fluorinated alkylchlorosilane [$CF_3(CF_2)5(CH_2)2SiCl_3$] as an anti-sticking layer was coated on the surface of the stamp prior to thermal imprint to improve the de-molding characteristic.

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순환잔골재를 사용한 라텍스 개질 모르타르의 강도 특성 (The Strength Properties of Latex-Modified Mortar using Recycled Fine Aggregate)

  • 이원영;이대근;한상일;곽은구;김재원;김진만
    • 한국건축시공학회:학술대회논문집
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    • 한국건축시공학회 2009년도 추계 학술논문 발표대회
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    • pp.179-182
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    • 2009
  • Concrete containing styrene-butadiene latex is widely used, nowadays, as a protective system for bridge. Latex modification mortar have taken advantage of latex modification concrete advantage that is used in existing, Also, when repair, protection and sticking performance of concrete overlay waterproof agent were known as that are good. Replace and experimented from fine aggregate to recycled aggregate to secure economic performance than existing latex modification concrete. Recycled fine aggregate has low quality because it contains large amount of old mortar. So, its usage is limited to a lower value-add, such as the roadbed material etc. This study is purposed to improve the performance of mortar made of recycled fine aggregate. For this, recycled aggregate mortar was produced with latex, and fluidity, strength were examined. Test result indicate that mortar using recycled fine aggregate is higher compressive and flexural strength than mortar using river sand.

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세미워터제트형 연안어선 개발에 관한 연구 (A Study on the Development for the Coastal Fishing Boat attached Protected-Tunnel for Propeller)

  • 고재용;심상목;박충환;서성부;배동균
    • 한국항해항만학회:학술대회논문집
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    • 한국항해항만학회 2003년도 춘계공동학술대회논문집
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    • pp.16-20
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    • 2003
  • 최근 어선어업 주변환경의 급속한 변화는 기존 어선어업의 구조조정과 새로운 사회, 경제적 환경에 부응하는 선형개발의 요구로 이어지고 있다. 한편, 서ㆍ남해 연안에서 작업 및 항해하는 연안어선들은 노출된 프로펠러에 어망, 로프 등이 감기는 사고가 매년 증가하고 있는 실정이다. 본 연구는 이상과 같은 관점에서 연안어선의 해난사고 방지를 위해 기존 선미형상을 수정한 프로펠러 보호터널 부착 연안어선을 대상으로 모형시험을 통하여 세미워터제트형 연안어선의 주요성능을 분석, 검토한 것이다.

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$Ar/Cl_{2}/CF_{4}$ 코밀도 플라즈마를 이용한 강유전체 $YMnO_3$의 건식식각 특성연구 (Dry Etch Characteristic of Ferroelectric $YMnO_3$ Thin Films Using High Density $Ar/Cl_{2}/CF_{4}$ $PAr/Cl_{2}/CF_{4}$)

  • 박재화;김창일;장의구;이철인;이병기
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 추계학술대회 논문집
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    • pp.213-216
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    • 2001
  • Etching behaviors of ferroelectric YMn $O_3$ thin films were studied by an inductively coupled plasma (ICP). Etch characteristic on ferroelectric YMn $O_3$ thin film have been investigated in terms of etch rate, selectivity and etch profile. The maximum etch rate of YMn $O_3$ thin film is 300 $\AA$/min at Ar/C $l_2$ of 2/8, RF power of 800W, dc bias voltage of 200V, chamber pressure of 15mTorr and substrate temperature of 3$0^{\circ}C$. Addition of C $F_4$ gas decrease the etch rate of YMn $O_3$ thin film. From the results of XPS analysis, Y $F_{X}$ compunds were found on the surface of YMn $O_3$ thin film which is etched in Ar/C1/C $F_4$ plasma. The etch profile of YMn $O_3$ film is improved by addition of C $F_4$ gas into the Ar/C $l_2$ plasma. These results suggest that fluoride yttrium acts as a sidewall passivants which reduce the sticking coefficient of chlorine on YMn $O_3$.>.

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스퍼터링 법과 증발 법으로 제작한 초전도 박막의 비교 (Comparison between Superconducting Thin Films Fabricated by Using the Sputtering and the Evaporation Method)

  • 천민우;박노봉;양승호;박용필;김혜정
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 제6회 학술대회 논문집 일렉트렛트 및 응용기술연구회
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    • pp.39-42
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    • 2004
  • The $Bi_2Sr_2Ca_nCu_{n+1}O_x$ superconducting thin film fabricated by using the sputtering method was compared with the $Bi_2Sr_2Ca_nCu_{n+1}O_x$ superconducting thin film fabricated by using the evaporation method. In doing the ultra-low deposition because each element can exist on the substrate surface, both the sputtering method and the evaporation method could easily fabricate single phase of the Bi2212 phase. Also, it is cofirmed that by optimizing the deposition condition, each single phase of the Bi2201 phase and the Bi2212 phase can be fabricated, the sticking coefficient of Bi element is clearly related to the changing of substrate temperature and the formation of the Bi2212 phase.

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AC PDP의 MgO 결정방향성과 증착조건간의 상관관계에 관한 연구 (The study of the relationships between the MgO crystal orientation and the conditions of deposition on AC-PDP)

  • 장용민;허정은;김덕원;신중홍;박정후
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2006년도 제37회 하계학술대회 논문집 C
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    • pp.1523-1524
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    • 2006
  • There arc several important issues in AC PDP researches such as cost reduction, reliability, and good image quality. The properties of MgO layer is thought to be one of the most important (actors that affects the panel reliability through the firing voltage variation. The MgO thin film mainly has (111), (200) and (220) crystal orientation. It is reported that (111)-oriented film helps decreasing the discharge voltage, and (200)-oriented film improves the misfiring on high temperature and the image sticking. In this study, we investigated the relations between the crystal orientation and e-beam evaporation process parameters such asdeposition rate, temperature of substrate, and distance between the target(MgO tablet) and the substrate.

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The Image Resolution Compare to Having Lead Plate or Not Lumbar Lateral Projection

  • Kim, Hyun-Soo;Min, Jung-Whan;Dong, Kyung-Rae
    • 대한디지털의료영상학회논문지
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    • 제13권4호
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    • pp.145-151
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    • 2011
  • The purpose of this study is to know some changes of resolution and image if we remove scattered ray using lead plate when doing lumbar lateral projection. Using 3 DR system(2 FD types, 1 CCD type) equipments and 2 film system equipments, we gain the image whether the phantom of abdomen equivalent sticking resolution chart has lead plate or not, whether we do collimation or not. Also, we use ion chamber, measure radiation exposure rate and change to entrance surface dose from it. we gain that images in the greatest condition of taking in clinic. 5 people in this group decoded resolution with our eyes, measured thickness of images and compared them from each equiments. Resolution has difference to size of collimation in DR FD type. Also there is no difference the original image with the new image which we abbreviated mAs. In DR CCD type, resolution didn't have difference whether lead plate is or not and whether we do collimation or not. In film type, existing or nonexisting of lead plate didn't influence on resolution. Lead plate makes the quality of image higher due to reducing scattered ray, it doesn't influence on resolution.

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순차 스퍼터 법과 증발 법으로 제작한 박막의 특성 (Characteristics of Thin Films Fabricated by Using the Layer-by-Layer Sputtering and Evaporation Method)

  • 천민우;박용필;김정호
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 추계학술대회 논문집 Vol.16
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    • pp.571-574
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    • 2003
  • The thin films fabricated by using the layer-by-layer sputtering was compared with the thin film fabricated by using the evaporation method. Re-evaporation in the form of Bi atoms or $Bi_2O_3$ molecules easily bring out the deficiency of Bi atoms in thin film due to the long sputtering time of the layer-by-layer deposition. On the other hand, the respective atom numbers corresponding to BiSrCaCuO phase is concurrently supplied on the film surface in the evaporation deposition process and leads to BiSrCaCuO phase formation. Also, it is cofirmed that by optimizing the deposition condition, each single phase of the Bi2201 phase and the Bi2212 phase can be fabricated, the sticking coefficient of Bi element is clearly related to the changing of substrate temperature and the formation of the Bi2212 phase.

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강유전체 YMnO3 박막 식각에 대한 CF4첨가효과 (Effect of CF4 Addition on Ferroelectric YMnO3Thin Film Etching)

  • 박재화;김경태;김창일;장의구;이철인
    • 한국전기전자재료학회논문지
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    • 제15권4호
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    • pp.314-318
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    • 2002
  • The etching behaviors of the ferroelectric $YMnO_3$ thin films were studied by an inductively coupled plasma (ICP). The maximum etch rate of $YMnO_3$ thin film is 300 ${\AA}/min$ at Ar/$Cl_2$of 2/8, RF power of 800W, dc bias voltage of 200V, chamber pressure of 15mTorr and substrate temperature of $30^{\circ}C$. Addition of $CF_4$ gas decrease the etch rate of $YMnO_3$ thin film. From the results of XPS analysis, nonvolatile $YF_x$ compounds were found on the surface of $YMnO_3$ thin film which is etched in Ar/$Cl_2$/CF$_4$plasma. The etch profile of YMnO$_3$film is improved by addition of $CF_4$ gas into the Ar/$Cl_2$ plasma. These results suggest that YF$_{x}$ compound acts as a sidewall passivants which reduce the sticking coefficient of chlorine on $YMnO_3$.

V 형상을 가지는 원자현미경 Cantilever의 정량적 마찰력 교정 (Quantitative Lateral Force Calibration of V-shaped AFM Cantilever)

  • 이희준;김광희;김현태;강보람;정구현
    • Tribology and Lubricants
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    • 제28권5호
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    • pp.203-211
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    • 2012
  • Atomic force microscopy (AFM) has been used as a tool, not only for imaging surfaces, but also for measuring surface forces and mechanical properties at the nano-scale. Force calibration is crucial for quantitatively measuring the forces that act between the AFM probe of a force sensing cantilever and a sample. In this work, the lateral force calibrations of a V-shaped cantilever were performed using the finite element method, multiple pivot loading, and thermal noise methods. As a result, it was shown that the multiple pivot loading method was appropriate for the lateral force calibration of a V-shaped cantilever. Further, through crosschecking of the abovementioned methods, it was concluded that the thermal noise method could be used for determining the lateral spring constants as long as the lateral deflection sensitivity was accurately determined. To obtain the lateral deflection sensitivity from the sticking portion of the friction loop, the contact stiffness should be taken into account.