• Industrial Engineering and Management Systems
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• v.14 no.4
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• pp.392-400
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• 2015

Monitoring of plasma etch processes for fault detection is one of the hallmark procedures in semiconductor manufacturing. Optical emission spectroscopy (OES) has been considered as a gold standard for modeling plasma etching processes for on-line diagnosis and monitoring. However, statistical quantitative methods for processing the OES data are still lacking. There is an urgent need for a statistical quantitative method to deal with high-dimensional OES data for improving the quality of etched wafers. Therefore, we propose a robust relevance vector machine (RRVM) for regression with statistical quantitative features for modeling etch rate and uniformity in plasma etch processes by using OES data. For effectively dealing with the OES data complexity, we identify seven statistical features for extraction from raw OES data by reducing the data dimensionality. The experimental results demonstrate that the proposed approach is more suitable for high-accuracy monitoring of plasma etch responses obtained from OES.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2010.10a
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• pp.236-241
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• 2010

This paper presents a wear diagnosis method for centrifugal impellers by using an accelerometer. The features are calculated from raw and wavelet transformed signals with several statistical methods applied in time or frequency domains. From the effectiveness coefficient test, it is shown that 7th level of wavelet transformed signal is suitable for wear classification problems. A neural network with 5 feature sets is applied to diagnose the wear magnitude of pump impellers. The verification result reveals that high accuracy for the wear diagnosis of impellers can be obtained by using wavelet features transformed from acceleration signals.

• International Journal of Fluid Machinery and Systems
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• v.2 no.1
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• pp.61-71
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• 2009

Machine fault diagnostic and prognostic techniques have been the considerable subjects of condition-based maintenance system in the recent time due to the potential advantages that could be gained from reducing downtime, decreasing maintenance costs, and increasing machine availability. For the past few years, research on machine fault diagnosis and prognosis has been developing rapidly. These publications covered in the wide range of statistical approaches to model-based approaches. With the aim of synthesizing and providing the information of these researches for researcher's community, this paper attempts to summarize and classify the recent published techniques in diagnosis and prognosis of rotating machinery. Furthermore, it also discusses the opportunities as well as the challenges for conducting advance research in the field of machine prognosis.

• Journal of Advanced Marine Engineering and Technology
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• v.30 no.2
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• pp.247-252
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• 2006

Almost ship monitoring systems are event driven alarm system which warn only when the measurement value is over or under set point. These kinds of system cannot warn until signal is growing to abnormal state that the signal is over or under the set point. therefore cannot play a role for preventive maintenance system. This paper proposes fault diagnosis method which is able to diagnose and forecast the fault from present operating condition by analyzing monitored signals with present ship monitoring system without any additional sensors. By analyzing the data with high correlation coefficient(CC), correlation level of interactive data can be defined. Knowledge base of abnormal detection can be built by referring level of CC(Fault Detection CC. FDCC) to detect abnormal data among monitored data from monitoring system and knowledge base of diagnosis built by referring CC among interactive data for related machine each other to diagnose fault part.

• Proceedings of the Korean Society of Marine Engineers Conference
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• 2005.06a
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• pp.281-286
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• 2005

Almost ship monitoring systems are event driven alarm system which warn only when the measurement value is over or under set point. These kinds of system cannot warn while signal is growing to abnormal state until the signal is over or under the set point and cannot play a role for preventive maintenance system. This paper proposes fault diagnosis method which is able to diagnose and forecast the fault from present operating condition by analyzing monitored signals with present ship monitoring system without additional sensors. By analyzing this data having high correlation coefficient(CC), correlation level of interactive data can be understood. Knowledge base of abnormal detection can be built by referring level of CC(Fault Detection CC, FDCC) to detect abnormal data among monitored data from monitoring system and knowledge base of diagnosis built by referring CC among interactive data for related machine each other to diagnose fault part.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.4 no.3
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• pp.57-62
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• 2005

Neural networks, which have learning and self-organizing abilities, can be advantageously used in the pattern recognition. Neural network techniques have been widely used in monitoring and diagnosis, and compare favourable with traditional statistical pattern recognition algorithms, heuristic rule-based approaches, and fuzzy logic approaches. In this study the fault diagnosis of the face-milling using the artificial neural network was investigated. After training, the sample which measure load current was monitored by constant output results.

• Journal of the Korean Data and Information Science Society
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• v.23 no.2
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• pp.227-234
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• 2012

Hamming distances in medical science are used for the diagnosis of diseases. The differences of the distances, however, are often very small, and is not in the general statistical form such as normal or chi-square distribution. In this study, we explore the characteristics and significance of the differences of Hamming distances generated in medical diagnosis.

• Journal of the Korean Society of Safety
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• v.29 no.4
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• pp.73-77
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• 2014

In the field of fault diagnosis, the deviations from normal operating conditions are monitored to identify the type of faults and find their root causes. One of the most representative methods is the statistical approaches, due to a large amount of advantages. However, ambiguous diagnosis results can be generated according to fault magnitudes, even if the same fault occurs. To tackle this issue, this work proposes principal component analysis (PCA) based method with qualitative information. The PCA model is constructed under normal operation data and the residuals from faulty conditions are calculated. The significant changes of these residuals are recorded to make the information for identifying the types of fault. This model can be employed easily and the tasks for building are smaller than these of other common approaches. The efficacy of the proposed model is illustrated in Tennessee Eastman process.

• Journal of information and communication convergence engineering
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• v.20 no.1
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• pp.58-64
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• 2022

Breast ultrasonic reading is critical as a primary screening test for the early diagnosis of breast cancer. However, breast ultrasound examinations show significant differences in diagnosis based on the difference in image quality according to the ultrasonic equipment, experience, and proficiency of the examiner. Accordingly, studies are being actively conducted to analyze the texture characteristics of normal breast tissue, positive tumors, and malignant tumors using breast ultrasonography and to use them for computer-assisted diagnosis. In this study, breast ultrasonography was conducted to select 247 ultrasound images of 71 normal breast tissues, 87 fibroadenomas among benign tumors, and 89 malignant tumors. The selected images were calculated using a statistical method with 21 feature parameters extracted using the gray level co-occurrence matrix algorithm, and classified as normal breast tissue, benign tumor, and malignancy. In addition, we proposed five feature parameters that are available for computer-aided diagnosis of breast cancer classification. The average classification rate for normal breast tissue, benign tumors, and malignant tumors, using this feature parameter, was 82.8%.

• Journal of Korean Medicine Rehabilitation
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• v.27 no.3
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• pp.107-115
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• 2017

Objectives This study is planned to classify correlation between HIVD of L-spine MRI and Digital Infrared Thermal Image (DITI). Methods We measured the temperature of both leg whose 120 men and 116 women patients with lumbar pain in Bucheon Jaseng Korean Medicine Hospital. And We use Magnetic Resonance Imaging (MRI) for classifying the patients who has lumbar intervertebral disc or not. Results 1) There was no statistical relation between difference of both leg's temperature and gender (p>0.05). 2) There was meaningful statistical relation between difference of both leg's temperature and age (p<0.05). 3) There was meaningful statistical relation between direction of HIVD of L-spine and direction of temperature reduction. 4) There was meaningful statistical relation between the severity of HIVD of L5/S1 and degree of temperature reduction. But there was no statistical relation between the severity of HIVD of L3/4, L4/5 and degree of temperature reduction. Conclusions We can use Digital Infrared thermal image (DITI) on low back pain patients for diagnosis. But we should not use DITI alone. DITI has limit in diagnosis.