• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2001.05a
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• pp.521-527
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• 2001

The dynamic performance analyses and tests for a 50kW turbo-generator (KIMM-TG50) were carried out. The operating concept of this machine is that it gets the initial driving force from the built-in motor-generator until it reaches its self-sustaining speed of 40,000 rpm, and then the driving mode is changed to self-operating mode by the combustor installed between the centrifugal compressor and the turbine. Due to winding mistake of motor-generator, the system could go only up to 22000 rpm by the motor so that high pressure air externally fed into the turbine was utilized to get the system to run up to 62,000 rpm thereafter. The vibration data collected during the tests revealed that the first bending critical speed is in near 5,600 rpm as predicted in the design stage of the rotor-bearing system, and that there were no other identifiable critical speeds up until 62,000 rpm due to high damping from the squeeze film damper-bearings supporting the rotor. This paper presented some of the experimental results along with dynamic performance predictions made in the design stage as a part of progress being made.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2000.11a
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• pp.256-261
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• 2000

Electro-Rheological(ER) fluid is applied to a controllable squeeze film damper(SFD) for stabilizing a flexible rotor system. ER fluid is a class of functional fluid whose yield stress varies according to the applied electric field strength, which is observed as viscosity variation of the fluid. In applying ER fluid to a SFD, a pair of rings of the damper can be used as electrodes. When the electrodes are divided into a horizontal pair and a vertical one, the SFD can produce damping force in each direction independently. A prototype of the directionally controllable SFD was constructed and its performance was experimentally and numerically investigated in the present work.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2002.11b
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• pp.381-387
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• 2002

In this work, the dynamic characteristics of an oil-lubricated, short SFD with a central feeding groove are derived based on a theoretical analysis considering the effect of a groove. The validity of the analysis is investigated experimentally using an Active Magnetic Bearing (AMB) system as an exciter. For the theoretical solution, the fluid film forces of a grooved SFD are analytically derived so that the dynamic coefficients of a SFD are expressed in terms of its design parameters. For the experimental validation of the analysis, a test rig using AMB as an exciter is proposed to identify the dynamic characteristics of a short SFD with a central groove. As an exciter, the AMB represents a mechatronic device to levitate and position the test journal without any mechanical contact, to generate relative motions of the journal inside the tested SFD and to measure the generated displacements during experiments with fairly high accuracy. Using this test rig, experiments are extensively conducted with different clearance, which is one of the most important design parameters, in order to investigate its effect on the dynamic characteristics and the performance of SFDs. Damping and inertia coefficients of the SFD that are experimentally identified are compared with the analytical results to demonstrate the effectiveness of the analysis. It is also shown that AMB is an ideal device for tests of SFDs.

• 제어로봇시스템학회:학술대회논문집
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• 1996.10a
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• pp.401-404
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• 1996

A new method for the electrostatic suspension of disk-shaped objects is proposed which is based on a switched-voltage control scheme. It operates according to a relay feedback control and deploys only a single high-voltage power supply capable of delivering a dc voltage of positive and/or negative polarity. In addition to the unique feature that no high-voltage amplifiers are needed, this method provides a remarkable system simplification relative to conventional methods. It is shown that despite the inherent limit cycle property of relay feedback based control, an excellent performance in vibration suppression is attained due to the presence of a relatively large squeeze film damping. In this paper, the functional principle of the switched voltage control scheme, numerical analysis, stator electrode design, and a nonlinear dynamic model of the suspension system are described. Experimental results will be presented for a 4-inch silicon wafer that clearly reveal the capability of the proposed control structure to suspend the wafer stably at an airgap length of 50 .mu.m.

• Tribology and Lubricants
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• v.24 no.5
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• pp.241-249
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• 2008

This paper describes the tribological effects on the nonlinear behavior of a spur gear pair with one-way clutch according to the direct contact elastic deformation model over a wide range of speeds, considering the hydrodynamic effects. The effects of various lubrication parameters, such as viscosity, film width, and friction, on the nonlinear dynamic behavior were analyzed. Forces due to the entraining velocity and the hydrodynamic friction were about two orders smaller than normal forces over the whole speed range. While the viscosity has a strong effect on the behavior of gear pair systems, friction has very little effect on torsional behavior. The inclusion of the hydrodynamic effect facilitates nonlinearity by increasing the overlap and damping, as well as decreasing elastic deformation and tooth reaction forces.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.6 s.183
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• pp.104-110
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• 2006

A design and control of electrostatic suspension system for flexible objects is presented. A number of electrode pairs of which the number depends on the object flexibility are positioned above the object and the voltages applied to each electrode pair are controlled, independently on the others, on the basis of the gap length. To implement the system with low cost and compactness, switched-voltage control scheme that is based on the relay feedback control is utilized. Relay feedback control method deploys only a single high-voltage power supply that can deliver a DC voltage of positive and/or negative polarity and thus high voltage amplifiers that are costly and bulky are not needed any more. It is shown that despite the inherent limit cycle property of the relay feedback based control, an excellent performance in vibration suppression is attained due to the presence of a relatively large squeeze film damping originating from the electrodes and levitated object. Employing fourteen electrode pairs, a thin aluminum plate with a thickness of 0.1 mm has been suspended at a gap length of 0.75mm.

• Transactions on Electrical and Electronic Materials
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• v.14 no.5
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• pp.225-230
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• 2013

This paper presents a novel shunt radio frequency microelectromechanical system switch on a quartz substrate with stiff ribs around the membrane. The buckling effects in the switch membrane and stiction problem are the primary concerns with RF MEMS switches. These effects can be reduced by the proposed design approach due to the stiffness of the ribs around the membrane. A lower mass of the beam and a reduction in the squeeze film damping is achieved due to the slots and holes in the membrane, which further aid in attaining high switching speeds. The proposed switch is optimized to operate in the k-band, which results in a high isolation of -40 dB and low insertion loss of -0.047 dB at 21 GHz, with a low actuation voltage of only 14.6 V needed for the operation the switch. The membrane does not bend with this membrane design approach. Finite element modeling is used to analyze the stress and pull-in voltage.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.6
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• pp.71-79
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• 2008

In the manufacture of flat panel display devices, there is a strong demand for contactless glass panel handling devices that can manipulate a glass panel without contaminating or damaging it. To fulfill this requirement, an electrostatic suspension device far glass panels where the glass panel is supported by electrostatic forces without any mechanical contact is proposed. To implement the system with low cost and compactness, switched-voltage control scheme that is based on the relay feedback control is utilized. Relay feedback control method deploys only a single high-voltage power supply that can deliver a DC voltage of positive and/or negative polarity and thus high voltage amplifiers that are costly and bulky are not needed any more. It is shown that despite the inherent limit cycle property of the relay feedback based control, an excellent performance in vibration suppression is attained due to the presence of a relatively large squeeze film damping originating from the electrodes and levitated object. Using this scheme, a $100{\times}100mm^2$ glass panel was levitated stably with airgap variation decreasing down to $1\;{\mu}m$ at an airgap of $100\;{\mu}m$.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.6 s.183
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• pp.166-173
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• 2006

In this study, a probe array has been developed for use in a data storage device that is based on scanning probe microscope (SPM) and MEMS technology. When recording data bits by poling the PZT thin layer and reading them by sensing its piezoresponse, commercial probes of which the tip heights are typically shorter than $3{\mu}m$ raise a problem due to the electrostatic forces occurring between the probe body and the bottom electrode of a medium. In order to reduce this undesirable effect, a poly-silicon probe with a high aspect-ratio tip was fabricated using a molding technique. Poly-silicon probes fabricated by the molding technique have several features. The tip can be protected during the subsequent fabrication processes and have a high aspect ratio. The tip radius can be as small as 15 nm because sharpening oxidation process is allowed. To drive the probe, electrostatic actuation mechanism was employed since the fabrication process and driving/sensing circuit is very simple. The natural frequency and DC sensitivity of a fabricated probe were measured to be 18.75 kHz and 16.7 nm/V, respectively. The step response characteristic was investigated as well. Overshoot behavior in the probe movement was hardly observed because of large squeeze film air damping forces. Therefore, the probe fabricated in this study is considered to be very useful in probe-based data storages since it can stably approach toward the medium and be more robust against external shock.