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Electrostatic Suspension System of Glass Panels using Relay Feedback Control  

Jeon, Jong-Up (울산대학교 기계자동차공학부)
Publication Information
Journal of the Korean Society for Precision Engineering / v.25, no.6, 2008 , pp. 71-79 More about this Journal
Abstract
In the manufacture of flat panel display devices, there is a strong demand for contactless glass panel handling devices that can manipulate a glass panel without contaminating or damaging it. To fulfill this requirement, an electrostatic suspension device far glass panels where the glass panel is supported by electrostatic forces without any mechanical contact is proposed. To implement the system with low cost and compactness, switched-voltage control scheme that is based on the relay feedback control is utilized. Relay feedback control method deploys only a single high-voltage power supply that can deliver a DC voltage of positive and/or negative polarity and thus high voltage amplifiers that are costly and bulky are not needed any more. It is shown that despite the inherent limit cycle property of the relay feedback based control, an excellent performance in vibration suppression is attained due to the presence of a relatively large squeeze film damping originating from the electrodes and levitated object. Using this scheme, a $100{\times}100mm^2$ glass panel was levitated stably with airgap variation decreasing down to $1\;{\mu}m$ at an airgap of $100\;{\mu}m$.
Keywords
Electrostatic suspension; Electrostatic farce; Glass panel; Relay control; Contactless support; Liquid crystal display; Plasma panel display;
Citations & Related Records
Times Cited By KSCI : 3  (Citation Analysis)
연도 인용수 순위
1 Jeon, J. U. and Lee, S., "Electrostatic Suspension System of Silicon Wafer using Relay Feedback Control," J. Korean Soc. Precision Eng., Vol. 22, No. 10, pp. 56-64, 2005   과학기술학회마을
2 Jeon, J. U. and Kim, S. M., "Electrostatic Suspension System of Flexible Objects using Relay Feedback Control," J. Korean Soc. Precision Eng., Vol. 23, No. 6, pp. 104-110, 2006   과학기술학회마을
3 Jeon, J. U., Park, K. T. and Park, K. Y., "A Measurement Apparatus of Lateral Restoring Force Exerted on Electrostatically Suspended Object," J. Korean Soc. Precision Eng., Vol. 22, No. 2, pp. 60-69, 2005   과학기술학회마을
4 Jeon, J. U. and Higuchi, T., "Electrostatic Suspension of Dielectrics," IEEE Trans. Industrial Electronics, Vol. 45, No. 6, pp. 938-946, 1998   DOI   ScienceOn
5 Jeon, J. U., Park, K. Y. and Higuchi, T., "Contactless Suspension and Transportation of Glass Panels by Electrostatic Forces," Sensors and Actuators A, Vol. 134, Issue 2, pp. 565-574, 2007   DOI   ScienceOn