• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 춘계학술대회 논문집 반도체재료
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• pp.34-37
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• 2001

As the integrated circuit device shrinks to smaller dimensions, chemical mechanical polishing (CMP) process was required for the global planarization of inter-metal dielectric (IMD) layer with free-defect. However, as the inter-metal dielectrics (IMD) layer gets thinner, micro-scratches are becoming as major defects. Micro-scratches are generated by agglomerated slurry, solidified and attached slurry in pipe line of slurry supply system. To prevent agglomerated slurry particle from inflow, we installed 0.5${\mu}m$ POU (point of use) filter, which is depth-type filter and has 80% filtering efficiency for the $1.0{\mu}m$ size particle. In this paper, we studied the relationship between defect generation and pad count to understand the exact efficiency of the slurry filtration, and to find out the appropriate pad usage. Our preliminary results showed that it is impossible to prevent defect-causing particles perfectly through the depth-type filter. Thus, we suggest that it is necessary to optimize the flow rate of slurry to overcome depth type filters weak-point, and to install the high spray of de-ionized Water (DIW) with high pressure.

• 한국표면공학회지
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• 제33권5호
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• pp.329-338
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• 2000

In this study, as an effort to improve the brittlement of coating layer, aluminum bronze coatings formed on steel substrates by arc jet spray process were subjected to post heat treatment. After each treatment, mechanical properties such as hardness, and UTS, and microstructural characterization of the specimens were investigated. The results showed that the hardness in the coatings slightly decreased with increasing heat treatment tine and temperature. The UTS of as-sprayed coatings was 4.31kgf/$\textrm{mm}^2$ and slightly increased to 5.51kgf/$\textrm{mm}^2$ after heat treatment at $900^{\circ}C$ for 120min. On the other hand, the interdiffusion of copper and aluminum particles after heat treatment lead to decrease of the porosity density and increase the bond strength.

• 한국표면공학회지
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• 제34권2호
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• pp.161-168
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• 2001

A Thermal Barrier Coating (TBC) can play an important role in protecting parts from harmful environments at high temperatures such as oxidation, corrosion, and wear in order to improve the efficiency of aircraft engines by lowering the surface temperature of the turbine blade. The TBC can increase the life span of the product and improve the operating properties. Therefore, in this study the mechanical and thermal properties of the TBC such as oxidation, fatigue and shock at high temperatures were evaluated. A samples of a bond coat (CoNiCrAlY) produced by the High Velocity Oxygen Fuel (HVOF) and Low Pressure Plasma Spray (LPPS) method were used. The thickness of the HVOF coating layer was approximately $450\mu\textrm{m}$ to 500$\mu\textrm{m}$ and the hardness number of the coating layer was between 350Hv and 400Hv. The thickness of the LPPS coating was about 350$\mu\textrm{m}$ to 400$\mu\textrm{m}$ and the hardness number of the coating was about 370Hv to 420Hv. The X-ray diffraction analysis showed that CoNiCrAlY coating layer of the HVOF and LPPS was composed of the $\beta$and ${\gamma}$phase. After the high temperature oxidation test, the oxide scale with about l0$\mu\textrm{m}$ to 20$\mu\textrm{m}$ thickness appeared at the coating surface on the Al-depleted zone was observed under the oxide scale layer.

• 한국전기전자재료학회논문지
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• 제25권8호
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• pp.584-592
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• 2012

Room temperature powder spray in vacuum process, so called Aerosol deposition (AD) is a room temperature (RT) process to fabricate thick and dense ceramic films, based on collision of solid ceramic particles. This technique can provide crack-free dense thin and thick films with thicknesses ranging from sub micrometer to several hundred micrometers with very fast deposition rates at RT. In addition, this technique is using solid particles to form the ceramic films at RT, thus there is few limitation of the substrate and easy to control the compositions of the films. In this article, we review the progress made in synthesis of piezoelectric thin/thick films, multi-layer structures, NTC thermistor thin/thick films, oxide electrode thin films for actuators or sensor applications by AD at Korea Institute of Materials Science (KIMS) during the last 4 years.

• 한국재료학회지
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• 제24권7호
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• pp.357-362
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• 2014

Thermal barrier coatings(TBCs) are being applied in many industrial fields such as thermal power generation, aviation and seasonal fields. $ZrO_2-Y_2O_3$(8%) thermal spray coating powders are commercially used as thermal-barrier coating materials to protect against oxidation and corrosion of heat-resistant alloys at elevated temperatures. Currently, $ZrO_2-Y_2O_3$(8%) thermal-spray powder is made using the industrial co-precipitation process, which is very complex and requires a lot of time. In this study, orthorhombic $ZrO_2$ and $Y_2O_3$ powders were fabricated by mechanical mixing, which is more economical than the co-precipitation process. A tetragonal, yttria-stabilized zirconia(YSZ) coating-layer was produced by plasma spraying, using orthorhombic $ZrO_2-Y_2O_3$(8%) powder. Our experimental results indicate that $ZrO_2-Y_2O_3$(8%) mixed powder can be used economically in industry because it is no longer necessary to make this powder by liquid and gas-phase methods.

• 한국자동차공학회논문집
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• 제22권5호
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• pp.20-28
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• 2014

The high velocity oxygen fuel spraying (HVOF) is a kind of surface modification process technology to form the sprayed coating layer after spraying the powder to molten or semi-molten state by the ultra-high speed at the high-temperature heat source and conflicting with a substrate. It is desirable to melt completely the thermal spray powder in order to produce the coating layer with an optimal adhesion, however, because a semi-molten powder in a spray process has the low efficiency and become a factor that degrades the mechanical property by the inducement of pore-forming within the coating layer. To improve the wear resistance, corrosion resistance and heat resistance, in this study, the plungers of high-speed and ultra-high pressure reciprocating hydraulic pumps for oil and water used in ironwork are produced with $420J_2$ and the coating layers of plungers are formed by the powders of WC-Co-Cr and WC-Cr-Ni including the high hardness WC. The surface of these plungers is modified by the super-mirror face grinding machine using variable air pressure developed in this laboratory, and then the characteristics of cross-sectional microstructure, and surface roughness and hardness values between no operation and 100 days-operation are examined and made a comparison. The fine tops and bottoms on surface roughness curve of oil-hydraulic pump plunger sprayed by WC-Cr-Ni are molded more and higher than those of water-hydraulic pump sprayed by WC-Co-Cr because the plunger diameter of oil-hydraulic pump is 0.4 times smaller than that of water-hydraulic pump and the pressure of oil-hydraulic pump exerted on the plunger is operated with the 70 bars higher than that of water-hydraulic pump. As a result, it is found that the values of centerline average surface roughness and maximum height for oil-hydraulic pump plunger are bigger than those of water-hydraulic pump plunger.

• Tribology and Lubricants
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• 제27권6호
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• pp.351-355
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• 2011

Al/SiC composites were fabricated by thermal spray process, and the dry sliding wear tests were performed using the various sliding speed of 10, 30, 60 and 90 RPM through 1000 cycles. The applied load was 10 N and radius of wear track was 15 mm. Wear tracks on the Al/SiC composites were investigated using scanning electron microscope(SEM) and energy dispersive X-ray spectroscopy (EDS). In the case of sliding speed of 10 RPM, adhesive wear behavior caused by plastic deformation of composits surface was observed. In the cases of sliding speed of 30, 60, 90 RPM, abrasive wear behavior on the adhered layer formed by debris were observed. Through this study, it was found that the wear behavior of Al/SiC composites was mainly influenced by the sliding speed.

• Korean Chemical Engineering Research
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• 제49권6호
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• pp.710-714
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• 2011

본 연구에서는 열 플라스마 용사 코팅 법을 사용하여 고체산화물 연료전지에서 사용되는 $La_{0.8}Ca_{0.2}CrO_{3}$(LCC), $La_{0.8}Sr_{0.2}CrO_{3}$(LSC), $La_{0.8}Ca_{0.2}CrO_{0.9}Co_{0.1}O_{3}$(LCCC) 세라믹 연결재를 코팅하여 코팅 층의 특성평가를 수행하였다. 열 플라즈마 코팅에 앞서 각 세라믹 연결재 입자의 특성평가를 위해 X선 회절, 미세 구조, 입자 측정 및 비표면적 분석을 수행하였다. 세라믹 연결재 입자의 특성평가 후, 열 플라스마 용사 코팅 법을 사용하여 연료극 지지체 위에 코팅하였으며, 코팅 층의 특성을 평가하기 위해 코팅 층의 표면, 파단면 분석, 가스 누출 속도 및 전기 전도도 측정을 수행하였다. 이러한 특성 평가 결과를 바탕으로 열 플라스마 용사 코팅 법을 통해 코팅된 LCCC 코팅 층이 고체산화물 연료전지의 세라믹 연결재로서 적합함을 확인하였다.

• 한국표면공학회지
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• 제54권6호
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• pp.365-370
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• 2021

In this research, we proceeded with research on plasma resistance of the cleaning process of APS(Atmospheric Plasma Spray)-Y₂O₃ coated parts used for semiconductor and display plasma process equipment. CF₄, O₂, and Ar mixed gas were used for the plasma environment, and respective alconox, surfactant, and piranha solution was used for the cleaning process. After APS-Y₂O₃ was exposed to CF₄ plasma, the surface changed from Y₂O₃ to YF₃ and a large amount of carbon was deposited. For this reason, the plasma corrosion resistance was lowered and contamination particles were generated. We performed a cleaning process to remove the defect-inducing surface YF₃ layer and carbon layer. Among three cleaning solutions, the piranha cleaning process had the highest detergency and the alconox cleaning process had the lowest detergency. Such results could be confirmed through the etching amount, morphology, composition, and accumulated contamination particle analysis results. Piranha cleaning process showed the highest detergency, but due to the very large thickness reduction, the base metal was exposed and a large number of contaminated particles were generated. In contrast, the surfactant cleaning process exhibit excellent properties in terms of surface detergency, etching amount, and accumulated contamination particle analysis.

• Corrosion Science and Technology
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• 제22권4호
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• pp.257-264
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• 2023

Ti-6Al-4V alloys are mainly used as dental materials due to their excellent biocompatibility, corrosion resistance, and chemical stability. However, they have a low bioactivity with bioinertness in the body. Therefore, they could not directly bond with human bone. To improve their applications, their bone bonding ability and bone formation capacity should be improved. Thus, the objective of this study was to improve the bioinert surface of titanium alloy substrate to show bioactive characteristics by performing surface modification using wollastonite powder. Commercial bioactive wollastonite powder was successfully deposited onto Ti-6Al-4V alloy using a room temperature spray process. It was found that wollastonite-coated layer showed homogeneous microstructure and uniform thickness. Corrosion resistance of Ti-6Al-4V alloy was also improved by plasma electrolytic oxidation treatment. Its wettability and bioactivity were also greatly increased by wollastonite coating. Results of this study indicate that both plasma electrolytic oxidation treatment and wollastonite coating by room temperature spray process could be used to improve surface bioactivity of Ti-6Al-4V alloy substrate.