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http://dx.doi.org/10.4313/JKEM.2012.25.8.584

Fabrication and Characterization of Multi-layered Thick Films by Room Temperature Powder Spray in Vacuum Process  

Ryu, Jung-Ho (Korea Institute of Materials Science (KIMS), Functional Ceramics Group)
Ahn, Cheol-Woo (Korea Institute of Materials Science (KIMS), Functional Ceramics Group)
Kim, Jong-Woo (Korea Institute of Materials Science (KIMS), Functional Ceramics Group)
Choi, Jong-Jin (Korea Institute of Materials Science (KIMS), Functional Ceramics Group)
Yoon, Woon-Ha (Korea Institute of Materials Science (KIMS), Functional Ceramics Group)
Hahn, Byung-Dong (Korea Institute of Materials Science (KIMS), Functional Ceramics Group)
Choi, Joon-Hwan (Korea Institute of Materials Science (KIMS), Functional Ceramics Group)
Park, Dong-Soo (Korea Institute of Materials Science (KIMS), Functional Ceramics Group)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.25, no.8, 2012 , pp. 584-592 More about this Journal
Abstract
Room temperature powder spray in vacuum process, so called Aerosol deposition (AD) is a room temperature (RT) process to fabricate thick and dense ceramic films, based on collision of solid ceramic particles. This technique can provide crack-free dense thin and thick films with thicknesses ranging from sub micrometer to several hundred micrometers with very fast deposition rates at RT. In addition, this technique is using solid particles to form the ceramic films at RT, thus there is few limitation of the substrate and easy to control the compositions of the films. In this article, we review the progress made in synthesis of piezoelectric thin/thick films, multi-layer structures, NTC thermistor thin/thick films, oxide electrode thin films for actuators or sensor applications by AD at Korea Institute of Materials Science (KIMS) during the last 4 years.
Keywords
Piezoelectric; Oxide electrode; NTC Thermistor; Room temperature powder spray in vacuum; Aerosol deposition; Thin/thick film; Multi-layer;
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