• Proceedings of the IEEK Conference
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• 2003.07b
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• pp.727-730
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• 2003

Thin tin oxide film with nano-size particle was prepared on silicon substrate by hydrothermal synthetic method and successive sol-gel spin coating method. The fabrication method of tin oxide film with ultrafine nano-size crystalline structure was tried to be applied to fabrication of micro gas sensor array on silicon substrate. The tin oxide film on silicon substrate was well patterned by chemical etching upto 5${\mu}{\textrm}{m}$width and showed very uniform flatness. The tin oxide film preparation method and patterning method were successfully applied to newly proposed 2-dimensional micro sensor fabrication.

• 한국초전도학회:학술대회논문집
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• v.11
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• pp.67-67
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• 2001

• Nuclear Engineering and Technology
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• v.1 no.2
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• pp.103-106
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• 1969

A new representation for the Dirac equation, which may be appropriate to describe the interaction of the charged particle with the electric field, is derived by introducing a gauge-independent unitary transformation. It is shown that in this representation the effective Hamiltonian without potentials has a new feature in the non-relativistic limit.

• Journal of the Korean Ceramic Society
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• v.39 no.1
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• pp.12-15
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• 2002

Ultrafine cadmium ferrite particles have been investigated by X-ray diffractometry, transmission electron microscopy and SQUID magnetometry. All peaks of X-ray diffraction patterns are broad, but correspond to a cubic spinel structure with the lattice constant of 8.65 $\AA$. The average particle size determined by TEM is 9.7 nm and the size distribution of particles is not normal, but lognormal. The maximal magnetization measured at 5 K was 17.7 emu/g. The experimental data show a transi-tion from a disorder ferrimagnetic phase to a spin-glass phase (i.e. reentrant behavior) with a freezing temperature (T$\_$f/) of 30 K. Superparamagnetic behavior of the particles is confirmed by the coincidence of the plots of M vs. H/T for 100 and 300 K.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2003.12a
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• pp.64-67
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• 2003

본 연구는 nano-level 디바이스 제조를 위한 새로운 금속 전극인 W 과 Ti metal 표면 세정에 관한 연구이다. 기존 $SC-1(NH_4OH/H_2O_2/H_2O)$ 세정 용액에서 산화제 ($H_2O_2$)를 사용하지 않는 dilute $NH_4$OH 세정은 전극 사이 절연막 표면의 particle 제거가 가능하면서 노출된 metal 막의 세정 damage를 최소화 시키는 것을 확인했다. SC-1 용액 내에 산화제 미 첨가 효과는, metal 막의 식각 현상을 억제시키고, 절연막 표면의 particle 제거 효과에 영향을 미치지 않는 것으로 판단된다. 이러한 방법은 short time 공정이 필요한 관계로, spin type wet 장비 채택으로 세정 효과의 극대화를 얻을 수 있을 것으로 판단된다.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.19 no.7
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• pp.667-672
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• 2006

Ferroelectric $Pb(Zr_{0.52}Ti_{0.48})O_3$ (PZT(52/48)) thick films were fabricated by the screen-Printing method on the alumina substrates, and $PbTiO_3$ (PT) Precursor solution, which prepared by sol-gel method, was spin-coated on the PZT(52/48) thick films to obtain a densification. Its structural and electrical properties of the PZT(52/48) thick films with the treatment of PT precursor solution coating were investigated. The particle size of the thick films was increased with increasing the number of coatings and the thickness of the PZT-6 (6: number of coatings) films was about $60{\mu}m$. The relative dielectric constant increased and the dielectric loss decreased with increasing the number of PT sol coatings. The relative dielectric constant and dielectric loss of the PZT-6 thick film were 475 and 2 %, respectively. The remanent polarization, coercive field and breakdown strength of the PZT-6 film were $32.6{\mu}C/cm^2$, 15 kV/cm and 60 kV/cm, respectively.

• Journal of the Korean Ceramic Society
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• v.48 no.6
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• pp.516-519
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• 2011

Indium tin oxide (ITO) coatings were made using an ITO slurry and an ITO sol. This was achieved by dispersing nanosized ITO powder in a mixed solvent without any dispersant and developing an adhesive ITO sol from indium acetate and tin tetrachloride in a mixture of DMF and n-butanol. Coating was carried out in one step by spin coating an ITO slurry, which was then followed by an ITO sol over it. Here, the sol penetrates into the nano ITO particle layers to make them adhere to each other as well as to a glass substrate. This is then followed by sintering at 500$^{\circ}C$ for 1 h to produce a uniform film consisting of ITO particles of about 50 nm and 10 nm. ITO films were obtained with sheet resistances from 450 to 1500 ohm/${\Box}$ by varying spin speed and concentration. Transmittance is higher than 90% at 550 nm.

• Journal of Magnetics
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• v.11 no.3
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• pp.115-118
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• 2006

Co-ferrite nanoparticles have been synthesized by the decomposition of iron(III) acetylacetonate, $Fe(acac)_3$ and Co acetylacetonate, $Co(acac)_2$ in benzyl/phenyl ether in the presence of oleic acid and oleyl amine at the refluxingtemperature of $295^{\circ}C$/$265^{\circ}C$ for 30 min. before cooling to room temperature. Particle diameter detected by PSA can be turned from 4 nm to 20 nm by seed-mediated growth and reaction conditions. Structural and magneticcharacterization of Co-ferrite were measured by use of HRTEM, SAED (selected area electron diffraction), XRD and SQUID. The as-synthesized Co-ferrite nanoparticles have a cubic spinel structure and coercivity of 20 nm $CoFe_{2}O_{4} nanoparticles reached 1 kOe at room temperature and 18 kOe at 10 K.

• Korean Journal of Materials Research
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• v.28 no.7
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• pp.411-416
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• 2018

Tungsten oxide($WO_3$) films with uniform surface morphology are fabricated using a spin-coating method for applications of electrochromic(EC) devices. To improve the EC performances of the $WO_3$ films, we control the heating rate of the annealing process to 10, 5, and $1^{\circ}C/min$. Compared to the other samples, the $WO_3$ films fabricated at a heating rate of $5^{\circ}C/min$ shows superior EC performances for transmittance modulation(49.5 %), response speeds(8.3 s in a colored state and 11.2 s in a bleached state), and coloration efficiency($37.3cm^2/C$). This performance improvement is mainly related to formation of a uniform surface morphology with increased particle size without any cracks by an optimized annealing heating rate, which improves the electrical conductivity and electrochemical activity of the $WO_3$ films. Thus, the $WO_3$ films with a uniform surface morphology prepared by the optimized annealing heating rate can be used as a potential candidate for performance improvement of the EC devices.

• Journal of the Korean Ceramic Society
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• v.34 no.2
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• pp.188-194
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• 1997

Wet gel with surface modification by TMCS was redispersed in EtOH and redispersed silica sol for coat-ing was prepared. After spin coating of redispersed sol was conducted on silicon substrate, processes of drying(8$0^{\circ}C$) and heat treatment(>25$0^{\circ}C$) were, followed at ambient pressure. The influence of heat treat-ment of properties of film was observed, changing temperature at heat treatment. The optimum redisp-ersion condition for stable silica sol was wet gel:EtOH=1g:110$m\ell$ and the concentration and viscosity of redispersed silica sol with average particle size of 30nm were 0.11 M, 2.0-2.2 cP respectively. Crack-free thin film with the refractive index of 1.14 and thickness of 400 nm was obtained through drying at 8$0^{\circ}C$ and subsequent heat treatment at 45$0^{\circ}C$ for 2 hrs respectively after spin coating of 1500rpm, 10 times.