• 제목/요약/키워드: spark plasma sintering (SPS)

검색결과 194건 처리시간 0.022초

Ti-Al-Si-N 박막 제작을 위한 합금 타겟 제조 및 박막의 기계적 특성 (Fabrication of Alloy Target for Formation of Ti-Al-Si-N Composite Thin Film and Their Mechanical Properties)

  • 이한찬
    • 한국전기전자재료학회논문지
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    • 제29권10호
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    • pp.665-670
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    • 2016
  • Prevailing dissemination of machine tools and cutting technology have caused drastic developments of high speed dry machining with work materials of high hardness, and demands on the high-hardness-materials with high efficiency have become increasingly important in terms of productivity, cost reduction, as well as environment-friendly issue. Addition of Si to TiAlN has been known to form nano-composite coating with higher hardness of over 30 GPa and oxidation temperature over $1,000^{\circ}C$. However, it is not easy to add Si to TiAlN by using conventional PVD technologies. Therefore, Ti-Al-Si-N have been prepared by hybrid process of PVD with multiple target sources or PVD combined with PECVD of Si source gas. In this study, a single composite target of Ti-Al-Si was prepared by powder metallurgy of MA (mechanical alloying) and SPS (spark plasma sintering). Properties of he resulting alloying targets were examined. They revealed a microstructure with micro-sized grain of about $1{\sim}5{\mu}m$, and all the elements were distributed homogeneously in the alloying target. Hardness of the Ti-Al-Si-N target was about 1,127 Hv. Thin films of Ti-Al-Si-N were prepared by unbalanced magnetron sputtering method by using the home-made Ti-Al-Si alloying target. Composition of the resulting thin film of Ti-Al-Si-N was almost the same with that of the target. The thin film of Ti-Al-Si-N showed a hardness of 35 GPa and friction coefficient of 0.66.

$Cu-TiB_2$ 나노 금속복합재의 물성치에 대한 연구 (Study on material properties of $Cu-TiB_2$ nanocomposite)

  • 김지순;장명규;염영진
    • Composites Research
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    • 제19권2호
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    • pp.28-34
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    • 2006
  • 고온자전합성법과 스파크 플라즈마 소결법으로 여러 가지 $TiB_2$ 함유량을 갖는 $Cu-TiB_2$ 금속복합재료를 제조하였다. 점용접 전극과 미끄럼 접촉재로 사용하기 위해 인장특성, 경도, 마모저항 등의 물성치를 조사하였다. 강화재의 형상, 크기, 부피분율 등에 의해 복합재료의 특성이 달라지므로 유효물성치를 예측하기 위한 모델링이 필수적이다. 유한요소해석결과 유효탄성 계수가 실험치와 일치하는 것을 확인하였고 Eshelby 모델, Mori-Tanaka의 평균장 이론이 결합된 Eshelby 모델, 혼합법칙 등으로 복합재료의 탄성계수를 예측한 결과 Mori-Tanaka의 평균장 이론이 결합된 Eshelby 모델이 실험치를 사장 잘 묘사하는 것으로 나타났다.

고체산화물연료전지의 핵심기술과 개발 현황 (The development status and key technologies of Solid oxide fuel cell)

  • 김호성;강주희;김효신;김영미;이종호;오익현
    • 한국신재생에너지학회:학술대회논문집
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    • 한국신재생에너지학회 2010년도 춘계학술대회 초록집
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    • pp.127.1-127.1
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    • 2010
  • 고체산화물연료전지는 고효율 및 무공해의 전기화학 에너지 변환장치로서, 최근 국내외에서 활발한 연구개발이 수행되고 있다. 특히, 고체산화물 연료전지 시스템의 조기 상용화를 위해 시스템의 작동온도를 약 $800^{\circ}C$ 이하로 낮추고 저가로 생산 할 수 있는 제조공정 개발에 대한 연구를 적극적으로 수행하고 있다. 본 연구에서는 고체산화물연료전지의 단위셀를 구성하는 연료극지지체 및 박막 전해질에 대해서 저가 양산의 테이프케스팅법 및 동시소성 공정, 그리고 연료극 지지체 전해질(anode-supported electrolyte)에 대한 공기극 페이스트 프린팅 제조공정에 대해 소개한다. 또한 고체산 화물연료전지의 제조공정 및 시간을 단축하기 위해 방전플라즈마 소결공법(SPS)에 의한 연료극 지지체 제조 공정, 단위셀의 성능 최적화를 위한 나노 스케일의 고성능 전해질 소재 분말합성 공정(crystallite size: 5~10nm, surface area : $100m^2/g$ 이상) 그리고 테이프케스팅에 의한 박막 전해질 제조 공정(thin film : $10{\mu}m$ 이하) 등 주요 단위셀 소재 및 부품의 제조공정 특성 그리고 단위셀의 전기화학적 특성(max. power density : 1.0 W/$cm^2$)에 대해 소개하며, 최종적으로 평판형 대면적 고체산화물연료전지(max. $20cm{\times}15cm$)의 단위셀 상용화 제조 기술 및 성능평가 기술에 대해서도 소개 할 예정이다.

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가스분무법에 의한 Fe계 비정질 분말의 제조와 볼밀링공정에 의한 연질 Cu 분말과의 복합화 및 SPS 거동 (I) - I. 가스분무 및 복합화 - (Production of Fe Amorphous Powders by Gas-atomization Process and Subsequent Spark Plasma Sintering of Fe Amorphous-ductile Cu Composite Powders Produced by Ball-milling Process (I) - I. Gas Atomization and Production of Composite Powders -)

  • 류호진;임재현;김지순;김진천;김휘준
    • 한국분말재료학회지
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    • 제16권5호
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    • pp.316-325
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    • 2009
  • Fe based (Fe$_{68.2}$C$_{5.9}$Si$_{3.5}$B$_{6.7}$P$_{9.6}$Cr$_{2.1}$Mo$_{2.0}$Al$_{2.0}$) amorphous powder, which is a composition of iron blast cast slag, were produced by a gas atomization process, and sequently mixed with ductile Cu powder by a mechanical ball milling process. The experiment results show that the as-prepared Fe amorphous powders less than 90 $\mu$m in size has a fully amorphous phase and its weight fraction was about 73.7%. The as-atomized amorphous Fe powders had a complete spherical shape with very clean surface. Differential scanning calorimetric results of the as-atomized Fe powders less than 90 $\mu$m showed that the glass transition, T$_g$, onset crystallization, T$_x$, and super-cooled liquid range $\Delta$T=T$_x$-T$_g$ were 512, 548 and 36$^{\circ}C$, respectively. Fe amorphous powders were mixed and deformed well with 10 wt.% Cu by using AGO-2 high energy ball mill under 500 rpm.

MA법으로 제조된 Ni기 합금에서 Y2O3 첨가에 따른 인장강도변화와 시효처리 효과 (Variation of Tensile Strength by Addition of Y2O3 and Effect of Aging Treatment in Ni Base Alloy Fabricated by MA Method)

  • 김일호;이원식;고세현;장진만;권숙인
    • 한국분말재료학회지
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    • 제15권1호
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    • pp.23-30
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    • 2008
  • Ni-20Cr-20Fe-5Nb alloy with or without $Y_2O_3$ was manufactured by mechanical alloying process and consolidated by spark plasma sintering (SPS). The grain size of the alloy with $Y_2O_3$ was smaller than that of alloy without $Y_2O_3$ which results from the effect of $Y_2O_3$ suppressing grain growth. The tensile strength at room temperature was increased by the addition of $Y_2O_3$ but decreased abruptly at temperature above $600^{\circ}C$. It seems to result from the change of deformation mechanism due to fine grain size, that is, grain boundary sliding is predominant at above $600^{\circ}C$ while internal dislocation movement is predominant at below $600^{\circ}C$. After conventional heat treatment process of solution treatment and aging, a small amount of ${\delta}(Ni_3Nb)$ phase was formed in Ni-20Cr-20Fe-5Nb alloy while a large amount of ${\gamma}"(Ni_3Nb)$ was formed in Inconel 718 in the previous report. This is due to exhaustion of Nb content by the formation of NbC during consolidation.

펄스레이저 공정으로 제조한 Sb가 도핑된 SnO2 박막의 전기적 및 광학적 특성 (Electrical and Optical Properties of Sb-doped SnO2 Thin Films Fabricated by Pulsed Laser Deposition)

  • 장기선;이정우;김중원;유상임
    • 한국세라믹학회지
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    • 제51권1호
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    • pp.43-50
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    • 2014
  • We fabricated undoped and Sb-doped $SnO_2$ thin films on glass substrates by a pulsed laser deposition (PLD) process. Undoped and 2 - 8 wt% $Sb_2O_3$-doped $SnO_2$ targets with a high density level of ~90% were prepared by the spark plasma sintering (SPS) process. Initially, the effects of the deposition temperature on undoped $SnO_2$ thin films were investigated in the region of $100-600^{\circ}C$. While the undoped $SnO_2$ film exhibited the lowest resistivity of $1.20{\times}10^{-2}{\Omega}{\cdot}cm$ at $200^{\circ}C$ due to the highest carrier concentration generated by the oxygen vacancies, 2 wt% Sb-doped $SnO_2$ film exhibited the lowest resistivity value of $5.43{\times}10^{-3}{\Omega}{\cdot}cm$, the highest average transmittance of 85.8%, and the highest figure of merit of 1202 ${\Omega}^{-1}{\cdot}cm^{-1}$ at $400^{\circ}C$ among all of the doped films. These results imply that 2 wt% $Sb_2O_3$ is an optimum doping content close to the solubility limit of $Sb^{5+}$ substitution for the $Sb^{4+}$ sites of $SnO_2$.

Bi-Te계 n형 열전분말의 열전특성에 미치는 Cu 도핑의 영향 (Thermoelectric Properties in the Cu Doping Effects of the n-type Bi-Te Powders)

  • 박민수;구혜영;하국현;박용호
    • 한국분말재료학회지
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    • 제22권4호
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    • pp.254-259
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    • 2015
  • $Bi_2Te_3$ related compounds show the best thermoelectric properties at room temperature. However, n-type $Bi_2Te_{2.7}Se_{0.3}$ showed no improvement on ZT values. To improve the thermolectric propterties of n-type $Bi_2Te_{2.7}Se_{0.3}$, this research has Cu-doped n-type powder. This study focused on effects of Cu-doping method on the thermoelectric properties of n-type materials, and evaluated the comparison between the Cu chemical and mechanical doping. The synthesized powder was manufactured by the spark plasma sintering(SPS). The thermoelectric properties of the sintered body were evaluated by measuring their Seebeck coefficient, electrical resistivity, thermal conductivity, and hall coefficient. An introduction of a small amount of Cu reduced the thermal conductivity and improved the electrical properties with Seebeck coefficient. The authors provided the optimal concentration of $Cu_{0.1}Bi_{1.99}Se_{0.3}Te_{2.7}$. A figure of merit (ZT) value of 1.22 was obtained for $Cu_{0.1}Bi_{1.9}Se_{0.3}Te_{2.7}$ at 373K by Cu chemical doping, which was obviously higher than those of $Cu_{0.1}Bi_{1.9}Se_{0.3}Te_{2.7}$ at 373K by Cu mechanical doping (ZT=0.56) and Cu-free $Bi_2Se_{0.3}Te_{2.7}$ (ZT=0.51).

Al2O3/CNTs 하이브리드소재의 와이어 방전연삭을 이용한 마이크로 방전가공 특성 (Characteristics of Micro EDM using Wire Electrical Discharge Grinding for Al2O3/CNTs Hybrid Materials)

  • 탁현석;김종훈;임한석;이춘태;정영근;강명창
    • 한국분말재료학회지
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    • 제17권4호
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    • pp.319-325
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    • 2010
  • Electrical discharge machining (EDM) is an attractive machining technique but it requires electrically conductive ceramic materials. In this study, Alumina matrix composites reinforced with CNTs were fabricated through CNT purification, mixing, compaction and spark plasma sintering (SPS) processes. $Al_2O_3$ nanocomposites with the different CNT concentrations were synthesized. The mechanical and electrical characteristics of $Al_2O_3$/CNTs composites were examined in order to apply the materials to the EDM process. In addition, micro-EDM using wire electrical discharge grinding (WEDG) was conducted under the various EDM parameters to investigate the machining characteristics of machined hole by Field Emission Scanning Electron Microscope (FE-SEM). The results show that $Al_2O_3$/CNTs 10%Vol. was more suitable than the other materials because high conductivity and large discharge energy caused violent sparks resulting in bad machining accuracy and surface quality.

Cu 함유량에 따른 Mo-Cu 박막의 특성 평가

  • 이한찬;문경일;신승용;이붕주;신백균
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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    • pp.259-259
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    • 2012
  • Mo-Cu 합금은 열전도도, 전기전도도가 우수하고 합금조성에 따라 열팽창계수의 조절이 가능하여 반도체소재, 방열소재, 접점소재 등에 적용가능성이 높은 재료로 주목받고 있다. 또한 상태도 상에서 고용도가 전혀 없기 때문에 박막을 제작하였을 경우, 나노 복합체 형성이 용이하고 질소 분위기에서는 MoN-Cu로 상분리가 가능하여 하드상과 소프트상의 물성을 동시에 보유한 박막 제작이 가능하다. 또한 고온에서 산화반응에 의해 생기는 $MoO_3$, $CuO_3$와 같은 준안정상의 산화물들은 육방정계 구조(HCP)를 가지며 전단특성이 우수하여 자동차 저마찰 코팅재료로써 많은 연구가 진행되고 있다. 반면, Mo-Cu 는 상호간에 고상은 물론 액상에서도 고용도가 전혀 없기 때문에 일반적인 방법으로는 합금화 또는 복합화가 어렵다. 또한 Mo-Cu 박막을 제작할 경우 복수의 타겟을 이용해야 하기 때문에 성분조절과 구조적 제어가 불리하고 공정의 복잡화라는 단점을 가지고 있으며 추가적으로 다른 원소를 첨가하여 3원계, 4원계 이상의 박막을 형성하는 것에 한계가 있다. 따라서 본 연구에서는 위와 같은 문제점을 해결하기 위하여 상호간의 고용도가 없는 재료의 합금화가 용이한 기계적 합금화법(Mechanical Alloying)을 이용하여 Mo-Cu 합금분말을 제조하였고, 준안정상태의 구조의 유지가 가능한 방전 플라즈마 소결법(Spark Plasma Sintering)을 이용하여 합금타겟을 제작하였다. Mo-Cu 박막은 제작된 합금타겟을 사용하여 DC 스퍼터링 공정으로 제작하였다. Mo-Cu 박막의 공정조건으로는 타겟조성, 공정분위기, 가스 비율로 정하여 실험을 진행하였다. 제작된 박막은 자동차 코팅재료로써의 적용가능성을 보기 위해서 내열성, 내식성, 내마모성의 특성을 평가하였다.

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그래핀 산화물 분말 첨가에 의한 비스무스 텔루라이드 기지 복합재료의 열전에너지변환 특성 고찰 (Investigation on the Thermoelectric Properties of Bismuth Telluride Matrix Composites by Addition of Graphene Oxide Powders)

  • 김경태;민태식;김동원
    • 한국분말재료학회지
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    • 제23권4호
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    • pp.263-269
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    • 2016
  • Graphene oxide (GO) powder processed by Hummer's method is mixed with p-type $Bi_2Te_3$ based thermoelectric materials by a high-energy ball milling process. The synthesized GO-dispersed p-type $Bi_2Te_3$ composite powder has a composition of $Bi_{0.5}Sb_{1.5}Te_3$ (BSbT), and the powder is consolidated into composites with different contents of GO powder by using the spark plasma sintering (SPS) process. It is found that the addition of GO powder significantly decreases the thermal conductivity of the pure BSbT material through active phonon scattering at the newly formed interfaces. In addition, the electrical properties of the GO/BSbT composites are degraded by the addition of GO powder except in the case of the 0.1 wt% GO/BSbT composite. It is found that defects on the surface of GO powder hinder the electrical transport properties. As a result, the maximum thermoelectric performance (ZT value of 0.91) is achieved from the 0.1% GO/BSbT composite at 398 K. These results indicate that introducing GO powder into thermoelectric materials is a promising method to achieve enhanced thermoelectric performance due to the reduction in thermal conductivity.