• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
• /
• pp.436-437
• /
• 2012

Double patterning technology (DPT) has been suggested as a promising candidates of the next generation lithography technology in FLASH and DRAM manufacturing in sub-40nm technology node. DPT enables to overcome the physical limitation of optical lithography, and it is expected to be continued as long as e-beam lithography takes place in manufacturing. Several different processes for DPT are currently available in practice, and they are litho-litho-etch (LLE), litho-etch-litho-etch (LELE), litho-freeze-litho-etch (LFLE), and self-aligned double patterning (SADP) [1]. The self-aligned approach is regarded as more suitable for mass production, but it requires precise control of sidewall space etch profile for the exact definition of hard mask layer. In this paper, we propose etch end point detection (EPD) in spacer etching to precisely control sidewall profile in SADP. Conventional etch EPD notify the end point after or on-set of a layer being etched is removed, but the EPD in spacer etch should land-off exactly after surface removal while the spacer is still remained. Precise control of real-time in-situ EPD may help to control the size of spacer to realize desired pattern geometry. To demonstrate the capability of spacer-etch EPD, we fabricated metal line structure on silicon dioxide layer and spacer deposition layer with silicon nitride. While blanket etch of the spacer layer takes place in inductively coupled plasma-reactive ion etching (ICP-RIE), in-situ monitoring of plasma chemistry is performed using optical emission spectroscopy (OES), and the acquired data is stored in a local computer. Through offline analysis of the acquired OES data with respect to etch gas and by-product chemistry, a representative EPD time traces signal is derived. We found that the SE-EPD is useful for precise control of spacer etching in DPT, and we are continuously developing real-time SE-EPD methodology employing cumulative sum (CUSUM) control chart [2].

• 한국전기전자재료학회논문지
• /
• 제27권6호
• /
• pp.377-382
• /
• 2014

We have investigated the effects of spacer layer inserted between blue and red doped emission layers on the emission and efficiency characteristics of phosphorescent OLEDs. N,N'-di-carbazolyl-3,5-benzene (mCP) was used as a host layer. Iridium(III)bis[(4,6-di-fluorophenyl)- pyridinato-N,$C^2$']picolinate (FIrpic) and tris(1-phenyl-isoquinolinato-$C^2$,N)iridium(III) [Ir(piq)3] were used as blue and red dopants, respectively. The emission layer structure was mCP (1-x) nm/mCP:$Ir(piq)_3$ (5 nm, 10%)/mCP (x nm)/mCP:FIrpic (5 nm, 10%). The thickness of mCP spacer layer was varied from 0 to 15 nm. The emission from $Ir(piq)_3$ and the efficiency of the device were dominated by energy transfer from mCP host and FIrpic molecules, and by diffusion of mCP host triplet excitons.

• Journal of Korean Vacuum Science & Technology
• /
• 제6권2호
• /
• pp.76-78
• /
• 2002

We have carried out the first-principle electronic structure calculations to investigate the spacer layer formation of Fe/Si multilayered films (MLF) and compared with the results obtained by optical spectroscopy. The computer-simulated spectra based on various structural models of MLF showed that neither FeSi$_2$ nor B2O-phase FeSi, which are semiconducting, could be considered as the spacer layers in the Fe/Si MLF for the strong antiferromagnetic coupling. The optical properties of the spacer extracted from the effective optical response of the MLF strongly support its metallic nature. The optical conductivity spectra of various phases of Fe-Si compounds were calculated and compared with the extracted optical properties of the spacer. From the above theoretical investigations it is concluded that a E2-phase metallic FeSi compound is spontaneously formed at the interfaces during deposition.

• 센서학회지
• /
• 제16권5호
• /
• pp.325-330
• /
• 2007

For the application to optic devices, wafer level package including spacer with particular thickness according to optical design could be required. In these cases, the uniformity of spacer thickness is important for bonding strength and optical performance. Packaging process has to be performed at low temperature in order to prevent damage to devices fabricated before packaging. And if photosensitive material is used as spacer layer, size and shape of pattern and thickness of spacer can be easily controlled. This paper presents polymer bonding using thick, uniform and patterned spacing layer of SU-8 2100 photoresist for wafer level package. SU-8, negative photoresist, can be coated uniformly by spin coater and it is cured at $95^{\circ}C$ and bonded well near the temperature. It can be bonded to silicon well, patterned with high aspect ratio and easy to form thick layer due to its high viscosity. It is also mechanically strong, chemically resistive and thermally stable. But adhesion of SU-8 to glass is poor, and in the case of forming thick layer, SU-8 layer leans from the perpendicular due to imbalance to gravity. To solve leaning problem, the wafer rotating system was introduced. Imbalance to gravity of thick layer was cancelled out through rotating wafer during curing time. And depositing additional layer of gold onto glass could improve adhesion strength of SU-8 to glass. Conclusively, we established the coating condition for forming patterned SU-8 layer with $400{\mu}m$ of thickness and 3.25 % of uniformity through single coating. Also we improved tensile strength from hundreds kPa to maximum 9.43 MPa through depositing gold layer onto glass substrate.

• 대한치과보철학회지
• /
• 제37권5호
• /
• pp.640-650
• /
• 1999

As an optimal quality of the restorations, there should be a least amount of seating discrepancy between the casting and abutment teeth. However, high viscosity of the cementing medium and its resulting thickness may prevent complete seating of the restoration. The use of die spacing material provides adequate internal relief for the cementing medium. The purpose of this study is to compare the thickness of three commonly used die spacing materials. Materials and Methods: Stone plates were fabricated and divided into 12 sections to be painted with die spacers. Tru-Fit, Whip-Mix and Belle do St. Claire die spacer which are commonly used in dental practice were tested in this study. Each die spacers were painted layer by layer according to the manufacturer's recommendation. The average thickness of each die spacers were measured with light microscope(${\times}100$) and compared between them. Results and Conclusions. A silver-colored Tru-Fit die spacer has the lowest value of thickness without statistical significance comparing with a gold-colored Tru-Fit die spacer and a gray layer of Whip-Mix die spacer has the highest value of thickness without any statistical significance comparing with Belle de St. Claire die spacer. Three and four layers of Tru-Fit die spacer and two layers of Whip-Mix and Belle de St. Claire die spacers seem to be in the acceptable range of thickness of 25 to $45{\mu}m$ for optimal seating of the restorations. The standard experimental design and method should be fur thor evaluated for more consistent and objective results.

• 한국광학회지
• /
• 제7권4호
• /
• pp.440-444
• /
• 1996

10Gbps급 이상의 광통신에 적합한 성능을 가지는 InAlAs/InGaAs 다중양자우물 구조(MQW) 애벌런치 광다이오드(APD)를 제작하였다. 본 논문에서는 MBE로 성장된 에피구조에서 높은 농도로 도핑된 field butter layer의 Be dopant의 다중양자우물 구조로의 indiffusion이 소자의 암전류 특성과 이득 특성에 이치는 영향을 분석하였다. Be의 indiffusion은 작은 양으로도 소자의 특성에 큰 영향을 끼칠 수 있음이 보여졌으며 spacer layer를 삽입함으로써 높은 대역폭을 유지하면서 낮은 암전류 특성을 나타내는 소자를 제작함으로써 space layer의 삽입이 indiffusion의 영향을 효과적으로 막을 수 있음을 보였다.

• 한국전기전자재료학회논문지
• /
• 제17권8호
• /
• pp.871-874
• /
• 2004

In recent, it is said that the trend of LCD is direction to pursue high qualities like as high transmittance, high contrast ratio, wide viewing angle, fast response time, and so on. Especially, it is known that these qualities are essential to large size LCD like as LCD TV and we can realize them through to uniform cell gap and deep black state. Until now, the ball spacer has been used to control of uniform cell gap. However, the existence of ball spacer inside the cell causes the deformation of the liquid crystal molecules and damage to alignment layer. Such a deformation of the liquid crystal causes light-leakage in the dark state, which lowers contrast ratio of the display. Nowadays, this problem has been solved by using Patterned Spacer on Color Filter. but Side Effect just as gravity mura has been induced. In this paper, we studied the mechanism on gravity mura in case of using patterned spacer on color filter.

• 전자공학회논문지A
• /
• 제31A권3호
• /
• pp.46-52
• /
• 1994

We investigated theoretically the current-voltage characteristics of resonant tunneling diodes with a single quantum well structure. using a self-consistent method. This method is a numerical analysis which is able to include the effects of the undoped spacer layer and the band bending by charge accumulation and depletion on the contact layers which have not been considered in the flat-band model reported by Esaki. so that it is better suited to explain experimental results. The structure used is an $AL_{0.5}Ga_{0.5}AS/GaAs/Al_{0.5}Ga_{0.5}AS$ single quantum well. In this work. we estimate the theoretical current-voltage characteristics of the same structure, and then, the dependence of the current-voltage curves on the thickness of undoped spacer layers sandwiched between the barrier and highly n-doped GaAs contact layer.

• 한국광학회지
• /
• 제3권1호
• /
• pp.11-15
• /
• 1992

본 연구에서는 집적 거울 etalon에서 spacer층에서의 흡수율과 다층박막의 경계에서 발생되는 산란 손실 그리고 입사빔의 focusing등에 의한 효과를 해석한다.

• 대한전자공학회논문지SD
• /
• 제45권2호
• /
• pp.13-20
• /
• 2008

본 논문에서는 CMOS 이미지 센서의 웨이퍼 레벨 어셈블리를 위한 스페이스 제작 방법을 설명하였다. 스페이스 제작을 위해서 SU-8, PDMS, Si-interposer를 이용하는 세 가지 방법을 제안하였다. SU-8 스페이스에서는 균일한 두께 특성을 위해서 웨이퍼 회전 장치를 고안했으며, PDMS 스페이스에서는 glass/PDMS/glass 구조의 정렬 접합을 위해서 새로운 접합 방법을 제안하였다. Si-interposer를 이용한 스페이스 제작에서는 DRF을 이용한 접합 조건을 확립하였다. 세 가지의 실험 결과 Si-interposer를 이용한 스페이스 제작 시 glass/스페이스/glass 구조의 접합력이 가장 뛰어났으며, 접합력의 크기는 32.3MPa의 전단응력을 나타내었다.