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Choi, Guk-Jong;Lim, Geon;Park, No-Cheol
- Transactions of the Society of Information Storage Systems
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- 제10권1호
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- pp.1-6
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- 2014
Plasmonic lithography is the latest technique to overcome diffraction limit of previous optical lithography. In the plasmonic lithography, the nano gap between nano metal wave guide and photoresist should be in sub-wavelength region. SIL-based plasmonic lithography is the one of the solutions to maintain small air gap. However, the nano gap control is so sensitive that a little disturbance is able to have a large effect on the nano gap control. So, we analyzed the characteristics of disturbance, and then modified the previous controller to suppress the disturbance. We applied two peak filters which were fixed one and adaptively changeable one. We experimentally confirmed the improvement of the nano gap control, which reduced nano gap error by 30 %. The proposed control will improve the quality of lithography pattern.
https://doi.org/10.9797/TSISS.2014.10.1.001 인용 PDF KSCI

Kim, Joong-Gon;Kim, Tae-Hun;Jeong, Jun;Park, No-Cheol;Yang, Hyun-Seok;Park, Young-Pil
- Transactions of the Society of Information Storage Systems
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- 제3권1호
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- pp.1-4
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- 2007
A high density optical data storage device has been required for many years. In the field of the optical data storage, a near-field recording (NFR) technology is considered as a next generation one for achieving the high data density. Due to an evanescent wave effect occurred under 100nm distance which is the excessively small distance between the SIL and the disc, the most significant and difficult problem in this technology is to maintain a gap between a solid immersion lens (SIL) and a disc. Also, maintaining the gap under at least 50nm is required in the NFR gap servo system to use the evanescent wave effect efficiently. There are some institutes that have shown the novel gap servo control. In general, they use a mode switching servo method which consists of approach, hand-over and gap control mode. However there is a critical problem such as an overshoot at the tuning point from the approach mode to the hand-over mode, which may cause a collision between the SIL and the disc. In this paper, we show our NFR system and an improved gap servo system using an exponential function as the approach mode which can reduce the overshoot.
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Han, Gee-Pyeong;Kim, Tae-Youb;Sohn, Yeung-Joon;Kim, Yark-Yeon;Paek, Mun-Cheol
- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 한국전기전자재료학회 2002년도 하계학술대회 논문집 Vol.3 No.2
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- pp.992-993
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- 2002
We have fabricated the diffractive optical head(DOH) for optical pick up, which one adaptable to a optical recoding information storage. DOH consists of a focusing grating coupler(FGC) and a solid immersion Jens(SIL). FGC is device that the light converge into a focus by surface lattice. FGC have been studied as a potential application of pick up head for the information storage. In this study, FGC was designed and fabricated to make focus near to possible diffraction limit. We also fabricated recording head combined with SIL. The focus was measured in the range of $1.1{\mu}m$ as near to possible diffraction limit in the FGC having a focusing length of $600{\mu}m$ and a lattice area of 500 * $500{\mu}m$.
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Lee, Yong-Eun;Lee, Yong-Hyun;Kim, Ki-Honn;Kim, Seok-Hwan;Park, No-Cheol;Park, Young-Pil;Park, Kyoung-Su
- Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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- 한국소음진동공학회 2008년도 추계학술대회논문집
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- pp.220-222
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- 2008
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Shin, Won-Ho;Kim, Jung-Gon;Hwang, Hyun-Woo;Park, Kyoung-Su;Park, No-Cheol;Yang, Hyung-Seok;Park, Young-Pil
- Proceedings of the Korean Society of Precision Engineering Conference
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- 한국정밀공학회 2009년도 춘계학술대회 논문집
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- pp.259-260
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- 2009
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