• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 추계학술대회 논문집 Vol.14 No.1
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• pp.390-393
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• 2001

This study demonstrated the feasibility of tape casting method to fabricate soda borosilicate glass-coated stainless steel electrostatic chucks(ESC) for low temperature semiconductor processes. The glass coatings on the stainless steel substrates ranged from $100{\mu}m$ to $150{\mu}m$ thick. The adhesion of the glass coatings was found to be excellent such that it was able to withstand moderate impact tests and temperature cycling to over $300^{\circ}C$ without cracking and delamination. The electrostatic clamping pressure generally followed the theoretical voltage-squared curve except at elevated temperatures and higher applied voltages when deviations were observed to occur. The deviation is due to increased leakage current at higher temperature and applied voltage as the electrical resistivity drops.

• 마이크로전자및패키징학회지
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• 제9권1호
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• pp.49-52
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• 2002

본 연구를 통하여 저온 반도체 공정용 정전퍽(ESC)을 테이프캐스팅 공정에 의하여 스테인레스스틸에 소다붕규산염유리가 도포된 형태로 제작할 수 있음을 입증하였다. 스테인레스스틸 기판위의 유리 도포층은 125 $\mu\textrm{m}$의 두께로 제작되었다. 유리 도포층의 접합력은 매우 우수하여 $300^{\circ}C$이상의 온도변화에서도 균열이나 층간갈라짐 현상이 발생하지 않았다. 정전 고착압력은 전반적으로 이론적 관계인 전압의 제곱에 비례하는 경향을 보였으나, 고온과 고인가전압에서는 이 관계에서 벗어나는 것으로 나타났다. 이러한 이탈현상은 고온과 고인가전압에서 전기비저항의 감소에 따른 누설전류의 증가에 기인한다.

• 한국세라믹학회지
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• 제16권3호
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• pp.178-183
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• 1979

The carborundum abrasive specimens bonded with a soda-borosilicate glass were prepared. Samples fired at specified temperatures with various mixing ratio and forming pressure were examined in terms of the structure, bonding strength, and microscopic observations. Increasing the forming pressure up to 400kg/$\cm^2$, the structure became denser in proportion to the forming pressure. The bonding strength was generally increased with increasing the mixing ratio (Vb/Vg), but the bloating phenomena were observed when samples were fired above 95$0^{\circ}C$ with mixing ratio above 20%, consequently, the bonding strength was decreased. Samples fired at the temperature range 900~95$0^{\circ}C$ with mixing ratio 15~30% had the dense structure with various grades.

• 한국군사과학기술학회지
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• 제16권4호
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• pp.507-513
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• 2013

Transparent bulletproof windows play an important role in the munitions industry. The thickness of bulletproof windows including soda-lime silicate(SLS) glass, polyvinyl butyral, poly urethane, main defense(200MD), and safety film was reduced from 40mm to 29mm by adjustment of SLS glass laminated array. Borosilicate glasses generally have lower surface density and more excellent mechanical properties than SLS glass. Borosilicate glass was strengthened by ion exchange in the $KNO_3$ powder. The maximum mechanical properties were observed at $550^{\circ}C$ for 10min. The Vickers hardness, fracture toughness and 3-point bending strength of ion exchanged samples were about $775kg/mm^2$, $1.91MPa{\cdot}m^{1/2}$ and 764MPa each, which are about 27%, 149% and 249% higher than parent borosilicate glass, respectively. The penetration depth of K+ ion at $550^{\circ}C$ for 10min was $59.8{\mu}m$. As a result, the transparent bulletproof windows were predicted to be more lightweight by ion exchange of borosilicate glass. If the SLS glass for bulletproof windows is replaced by ion exchanged borosilicate glass, the bulletproof windows can be expected to be lightweight and thinner.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 추계학술대회 논문집
• /
• pp.390-393
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• 2001

This study demonstrated the feasibility of tape casting method to fabricate soda borosilicate glass-coated stainless steel electrostatic chucks(ESC) for low temperature semiconductor processes. The glass coatings on the stainless steel substrates ranged from 100 $\mu\textrm{m}$ to 150 $\mu\textrm{m}$ thick. The adhesion of the glass coatings was found to be excellent such that it was able to withstand moderate impact tests and temperature cycling to over 300$^{\circ}C$ without cracking and delamination. The electrostatic clamping pressure generally followed the theoretical voltage-squared curve except at elevated temperatures and higher applied voltages when deviations were observed to occur. The deviation is due to increased leakage current at higher temperature and applied voltage as the electrical resistivity drops.

• 한국진공학회지
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• 제17권6호
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• pp.481-486
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• 2008

나트륨(Na) 함유량이 다른 세 종류의 유리관인 Borosilicate($Na_2O$ 4%), Soda-Lime($Na_2O$ 14%), 그리고 Aluminosilicate($Na_2O$ 0.06%) 유리관의 방전 실험을 통하여 유리관 내벽의 흑화를 관측하였다. 수은 혼합기체(Ne+Ar+Hg)의 방전에서 나트륨 함유량이 많은 유리관일수록 흑화가 심하게 나타난다. 무수은 가스(Ne+Ar)의 방전에서는 흑화가 나타나지 않는다. 나트륨 함유량이 많은 수은 방전 램프에서 봉입 기체의 압력이 작을수록 흑화의 정도가 커진다. 흑화 방지재를 도포한 유리관은 흑화가 미약하게 나타난다. 이 실험을 통하여 흑화는 유리재의 나트륨 성분과 수은 이온의 결합에 의한 아말감($NaHg_2$)이 유리관 내벽에 형성된 것으로 분석된다.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권1호
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• pp.367-370
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• 2007

An EEFL with the sodium free alumino-silicate glass of high K and low $tan{\delta}$, has been investigated. As compared with borosilicate and the soda-lime EEFLs, the luminous efficiency as well as the pinhole stability of new EEFLs improves remarkably without blackening of $NaHg_2$.

• 한국진공학회지
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• 제16권5호
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• pp.330-337
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• 2007

유전 장벽 방전이 특징인 외부전극 형광램프(External Electrode Fluorescent Lamp, EEFL)에서 유리재의 유전 특성인 유전상수 K와 유전손실 tan ${\delta}$가 램프에 미치는 영향을 조사하기 위하여 4 종류의 유리관을 사용하였다. 종래 일반적으로 사용되는 Borosilicate 유리재는 유전상수 $K=5.6{\sim}5.9$이고 유전 손실 tan ${\delta}=5.0{\times}10^{-3}{\sim}6.0{\times}10^{-3}$이다. Aluminosilicatae는 K=6.6이고 유전손실이 작은 tan ${\delta}=1{\times}10^{-4}$이다. Soda-lime 유리관은 유전상수가 큰 K=7.7이고, 유전 손실이 매우 큰 tan ${\delta}=1.37{\times}10^{-2}$이다. 유전 상수 K가 크면 외부전극 자체의 캐패시터를 크게 하여 방전 효율이 증가한다. 그러나 유전 손실이 크면 외부전극 자체의 전력 소모로 인하여 효율 저하와 핀홀 발생의 원인이 된다. 높은 유전상수 및 낮은 유전손실의 Aluminosilicate 외부전극 형광램프는 종래의 Borosilicate 외부전극 형광램프에 비하여 휘도와 효율이 $12{\sim}20%$ 증가하고, 핀홀에 매우 강하다. 유전상수와 유전손실이 큰 Soda-lime 외부전극 형광램프는 효율이 다소 낮고, 핀홀에도 매우 취약하다. 따라서 외부전극 형광램프는 유전상수 K가 크고 유전손실 tan ${\delta}$가 작은 유리관이 최적이다.

• 대한화학회지
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• 제12권2호
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• pp.65-80
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• 1968

9種의 選擇된 탈리움硼硅酸유리와 21種의 同類組成을 變化시킨 유리에 對하여 物理化學的 性質을 檢討하였다. 이들 組成에 依한 性質의 變化曲線은 여러 點에서 酸化리티움, 소다 및 酸化鉛들을 包含하는 다른 硼硅酸유리와 類似하였다. 탈리움 硼硅酸유리의 組成에 따른 成質의 變化曲線에 極少點이 나타났는데, 이는 $Na_2O-B_2O_3-SiO_2$유리에서 關察된 바와 같이 硼素結合의 變化에 基因되는 것 같다. 탈리움 이온이 硼硅酸유리에 미치는 主 影響을 綜合해 보면 다음과 같다. 1) 탈리움 이온을 添加함으로써 密度, 屈折率, 물에 對한 溶解度, 熱線膨脹係數, 誘電恒數 等이 增加되었다. 2) 탈리움 濃度을 增加시킴으로써 유리의 軟化點이 降下되었고, 紫外線 照射에 依하여 螢光이 생겼으며, 赤外線 $15{\mu}$까지의 吸收端이 不明確해 졌다. $Tl_2O-B_2O_3-SiO_2$ 系에서 廣範한 液體不混合性이 電子顯微鏡에 依해 밝혀졌다. 不混合性은 $B_2O_3-SiO_2$ 二成分系에 對하여 約 $Tl_2O$ 55wt.%의 組成範圍內에서 나타났다. 不混合性유리는 多硅酸과 多硅素相으로 分離 構成되어 있음이 酸處理에 依하여 밝혀졌다.

• Tribology and Lubricants
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• 제21권5호
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• pp.209-215
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• 2005

Nano/micro friction with the contact area was studied on Si-wafer (100) and diamond-like carbon (DLC) film. Borosilicate balls of radii $0.32{\mu}m,\;0.5{\mu}m,\;1.25{\mu}m\;and\;2.5{\mu}m$ mounted on the top of AFM tip (NPS) were used for nano-scale contact and Soda Lime glass balls of radii 0.25mm, 0.5mm, 1mm were used for micro-scale contact. At nano-scale, the friction between ball and surface was measured with the applied normal load using an atomic force microscope (AFM), and at micro scale it was measured using ball-on flat type micro-tribotester. All the experiments were conducted at controlled conditions of temperature $(24\pm1^{\circ}C)$ and humidity $(45\pm5\%)$. Friction was measured as a function of applied normal load in the range of 0-160nN at nano scale and in the range of $1000{\mu}N,\; 1500{\mu}N,\;3000{\mu}N\;and\;4800{\mu}N$ at micro scale. Results showed that the friction at nano scale increased with the applied normal load and ball size for both kinds of samples. Similar behavior of friction with the applied normal load and ball size was observed for Si-wafer at micro scale. However, for DLC friction decreased with the ball size. This difference of in behavior of friction in DLC nano- and microscale was attribute to the difference in the operating mechanisms. The evidence of the operating mechanisms at micro-scale were observed using scanning electron microscope (SEM). At micro-scale, solid-solid adhesion was dominant in Silicon-wafer, while plowing in DLC. Contrary to the nano scale that shows almost a wear-less situation, wear was prominent at micro-scale. At nano- and micro-scale, effect of contact area on the friction was discussed with the different applied normal load and ball size.