• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2004.04b
• /
• pp.34-37
• /
• 2004

Recently advancing mobile communication tools and I.T industry, semiconductor device is requested more integrated, faster operation time and more scaled-down. Because of these reasons semiconductor device is requested multilayer interconnection. For the multilayer interconnection chemical mechanical polishing (CMP) becomes one of the most useful process in semiconductor manufacturing process. In this experiment, we focus on understand the characterize and improve the CMP technology by control of slurry flow rate. Consequently, we obtain that optimal flow rate of slurry is 170ml/min, since optimal conditions are less chemical flow and performance high with good selectivity to Ta. If we apply this results to copper CMP process. it is thought that we will be able to obtain better yield.

• Journal of the Korean Society for Precision Engineering
• /
• v.21 no.11
• /
• pp.46-52
• /
• 2004

CMP (Chemical-Mechanical Polishing) is a process in which both chemical and mechanical mechanisms act simultaneously to produce the planarized wafer. CMP process is an extensive usage and continuing high growth rates in the semiconductor industry. The understanding of the process, however, is much slower. The nature of material removal from the wafer is still undefined and ambiguous. Material removal rate according to the slurry flow rate is also undefined and ambiguous. Thus, in this study, the basic mechanism of material removal rate as slurry flow rate is defined in terms of energy supply and energy loss.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
• /
• v.14 no.5
• /
• pp.391-397
• /
• 2002

Pressure drop were experimentally investigated for ice slurry flowing in the acrylic pipes with inner diameter of 24 mm. Ice slurry was made from 6.5% ethylene glycol-water solution, and the pipes is consisted of horizontal, vertical (upward and downward) and $90^{\circ}$ elbow pipe. The ice Packing factor (IPF) and the flow rate of the experiments were varied from 0 to 30% and from 5 to 70kg/min respectively The measured pressure drop in various pipe positions were compared with those for the solution flow (IPF=0). The pressure drop was larder than that for solution flows as the IPF increased when the flow rate was low or very high. Sharp increases in pressure drop were observed for the cases when IPF is more than 70% in horizontal and vertical pipes, whereas the pressure drop increased with the IPF simultaneously in an elbow pipe.

• Proceedings of the Korea Committee for Ocean Resources and Engineering Conference
• /
• 2001.10a
• /
• pp.160-163
• /
• 2001

In order to develop a nodule conveying system through a flexible pipe out of the deep-seabed manganese nodule miner, an experimental study of the solid-water slurry flow in vertical pipe is performed as the first stage of total experiments. Hydraulic characteristics of the pipe slurry flow such as slip velocity, transport concentration and pressure gradient are investigated for the size of particle, load ratio, and flow rate of water. The higher the load ratio is, the larger the transport concentration and pressure gradient become. The bigger the size of particles is, the larger the pressure gradient becomes. The effectiveness of the flow rate to hydraulic performance is also investigated. This results are to be used for designing crusher and pump, and operating the conveying device.

• Geomechanics and Engineering
• /
• v.29 no.4
• /
• pp.391-405
• /
• 2022

A newly proposed grouting simulation method, the sequential diffusion solidification method was introduced into the numerical simulation of combined bi-borehole grouting. The traditional, critical and difficult numerical problem for the temporal and spatial variation simulation of the slurry is solved. Thus, numerical simulation of grouting and blocking of flowing water in karst conduits is realized and the mechanism understanding of the combined bi-borehole technology is promoted. The sensitivity analysis of the influence factors of combined bi-borehole grouting was investigated. Through orthogonal experiment, the influences of proximal and distal slurry properties, the initial flow velocity of the conduit and the proximal and distal slurry injection rate on the blocking efficiency are compared. The velocity variation, pressure variation and slurry deposition phenomenon were monitored, and the flow field characteristics and slurry outflow behavior were analyzed. The interaction mechanism between the proximal and distal slurries in the combined bi-borehole grouting is revealed. The results show that, under the orthogonal experiment conditions, the slurry injection rate has the greatest impact on blocking. With a constant slurry injection rate, the blocking efficiency can be increased by more than 30% when using slurry with weak time-dependent viscosity behavior in the distal borehole and slurry with strong time-dependent viscosity behavior in the proximal borehole respectively. According to the results of numerical simulation, the grouting scheme of "intercept the flow from the proximal borehole by quick-setting slurry, and grout cement slurry from the distal borehole" is put forward and successfully applied to the water inflow treatment project of China Resources Cement (Pingnan) Limestone Mine.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
• /
• v.14 no.5
• /
• pp.385-390
• /
• 2002

To clarify the hydraulic characteristics of ice slurry which made from 6.5% ethylene glycol-water solution flowing through circular pipes of small diameter, experimental studies were performed. The flow pattern was observed and the pressure drop was measured in acrylic pipes with inner diameter of 24 mm. The results of flow visualization revealed that ice particles flowed along the top of pipes in the ranges of small ice fraction and low flow rate, while Ice particles diffused into the whole region of pipes flowed like a homogeneous flow for high flow rate and high ice fraction. An increase in frictional pressure drop was measured as the ice fraction increased in all pipes and unstable flow was observed for up-ward vertical pipe.

• Journal of Korean Society for Atmospheric Environment
• /
• v.12 no.4
• /
• pp.449-457
• /
• 1996

The main purpose of this study was to investigate sulfur dioxide removal performance of flue gas desulfurization system utilizing a Spray Absorption/Drying Reactor. In this system, the size of droplets was considered the most significant factor and tested using a PDA system. Lime slurry flow rate, operating temperature, calcium/sulfur (Ca/S) ratio and applied air pressure were selected as major operation variables and tested/analyzed in terms of system performance. The results are as follows. 1. The $SO_2$ removal efficiencies were 49%, 74%, 85% for Ca$(OH)_2$ slurry flow rate of 10, 20, 30 ml/min, which implies that the increase of slurry flow rate improves removal efficiency. The optimum slurry flow rate in this study was, however, considered 20 ml/min because of constraints of system troubles and absorbent utilization. 2. As Ca/S ratio increased, $SO_2$ removal efficiency was observed to increase. 3. As air pressure, at the atomizing nozzole, increased from 3 to 5 $kg/cm^2, SO_2$ removal efficiency increased from 74% to 80%, because of droplet size reduction due to pressure increase during atomizing process and the increase of surface area, helping mass transfer between gas and liquid phase.

• Proceedings of the SAREK Conference
• /
• 2006.06a
• /
• pp.144-149
• /
• 2006

In this study ice making characteristics are experimentally investigated for the ice slurry generating system which is pneumatically operated. The experimentations are conducted under the various test conditions such as chilled water inlet temperature, aqueous solution concentration, flow rate of cooling water, scraper pitch and frequency of cylinder stroke. For the above experimental conditions, ice making characteristics of the slurry ice generating system are evaluated in terms of the overall heat transfer coefficient, heat transfer rate and the amount of slurry ice generation. And the experimental results show that the heat transfer rate of the system increases as the flow rate of cooling water solution increases and the concentration of ethylene glycol and inlet temperature of chilled water decreases.

• Journal of Navigation and Port Research
• /
• v.35 no.5
• /
• pp.365-370
• /
• 2011

The ice-thermal energy storage cooling system has been applied to relief a significant portion of the peak demand of electricity during the daytime in summer. Slurry ice type system is one kind of ice-thermal storage cooling system utilizing cheaper off-peak electricity. This study is experimented to observe an influence of experimental conditions on production characteristics of slurry ice by using reversing flow, which is putting reversing material into test section to disturb ice adhesion. At this experiment, poly propylene ball of dimeter 10 mm was used as reversing material, and ethylene glycol-water solution of 20wt% concentration was used as flow material. The experimental apparatus was constructed of the slurry ice making and storage tank(test section), the brine tank, pumps for ethylene glycol-water solution and brine circulating, a mass flow-meter, data logger for fluid temperature measuring. The experiments were carried out under various conditions, with volumetric flow rate, ball filling rate and air filling rate.

• Journal of Advanced Marine Engineering and Technology
• /
• v.30 no.3
• /
• pp.382-388
• /
• 2006

This study experimented to understand the effect of transporting ice slurry through in pipe with valve. And at this experiment it used ethylene glycol-water solution and a concentration is 30wt%. The experimental apparatus was constructed of ice slurry generation tank, turbo flow meter, manometers for differential pressure measuring, PIV system for flow pattern measuring. illumination and along a horizontal circular tube with valve as test section. The experiments were carried out under various conditions, with velocity of fluid at the entry ranging from 0.5 to 1.5 m/s and concentration of IPF is 30%. Also valve open rate is 50%, 75%, 100%.