UV Nanoimprint Lithography using an Elementwise Patterned Stamp and Pressurized Air (Elementwise Patterned Stamp와 부가압력을 이용한 UV 나노임프린트 리소그래피)
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- Proceedings of the Korean Society of Precision Engineering Conference
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- 2005.06a
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- pp.672-675
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- 2005