• Title/Summary/Keyword: single buffer layer

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Effect of ZnO Buffer Layers on the Crystallization of ITO Thin Film at Low Temperature

  • Seong, Chung-Heon;Shin, Yong-Jun;Jang, Gun-Eik
    • Transactions on Electrical and Electronic Materials
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    • v.13 no.4
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    • pp.208-211
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    • 2012
  • In the present study, a ZnO thin film, as a buffer layer of ITO (indium tin oxide) film was deposited on glass substrates by RF magnetron sputtering at low temperature of $150^{\circ}C$. In order to estimate the optical characteristics and compare with the experimental results in Glass/ZnO(100 nm)/ITO(35 nm) multilayered film, the simulation program, EMP (Essential Macleod Program) was adopted. The sheet resistance and optical transmittance of the films were measured using the four-point probe method and spectrophotometer, respectively. From X-ray diffraction patterns, all the films deposited at $150^{\circ}C$ demonstrated only the amorphous phase. Optical transmittance was the highest at a ZnO thickness of 100 nm. The ITO(35 nm)/ZnO(100 nm) film exhibits an optical transmittance of >92% at 550 nm. The multilayered film showed an electrical sheet resistance of 407 ${\Omega}/sq.$, which is significantly better than that of a single-layer ITO film without a ZnO buffer layer (815 ${\Omega}/sq.$).

Texture Development of CeO2 Buffer Layer and its Effect on Superconducting MOD-YBCO Films (CeO2 완충층의 결정성장 특성 및 금속 유기물 증착법으로 제조된 초전도 YBCO층에 미치는 영향)

  • Chung, Kook Chae;Kim, Y.K.;Wang, X.L.;Dou, S.X.
    • Korean Journal of Metals and Materials
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    • v.47 no.10
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    • pp.681-685
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    • 2009
  • $CeO_2$ buffer layers have been deposited on YSZ single crystal substrates via a radio-frequency sputtering method. We focused on the texture development of $CeO_2$ with out-of-plane alignment and its effects on a superconducting YBCO layer, which was deposited by metal organic deposition. $CeO_2$ layers were grown epitaxially on single crystal YSZ substrates and subsequent YBCO layers were also grown epitaxially from $CeO_2$ layers. It was observed that the intensity of $CeO_2$(200) decreased with deposition temperature. ${\theta}-2{\theta}$ scan FWHM values of $CeO_2$(200) were inversely proportional to the peak intensities of $CeO_2$(200). The sample with the lowest $CeO_2$(200) intensity and poor out-of-plane alignment showed a strong reaction with the MOD-YBCO layer resulting in a thicker $BaCeO_3$ layer. The texture and superconducting property of the YBCO layer were affected indirectly by the formation of a $BaCeO_3$ layer at the interface between the $CeO_2$ and YBCO layers.

Investigation of the Polarity in GaN Grown by HVPE (HVPE법으로 성장시킨 GaN의 극성 분석)

  • 정회구;정수진
    • Korean Journal of Crystallography
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    • v.14 no.2
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    • pp.93-104
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    • 2003
  • The crystals of group-Ⅲ nitride semiconductors with wurtzite structure exhibit a strong polarity. Especially, GaN has characteristics of different growth rate, anisotropic electrical and optical properties due to the polarity. In this work, GaN epilayer was grown and the polarities of the crystals were observed by the chemical wet etching and SP-EFM. GaN thin films were deposited on c-plane A1₂O₃ substrate under the variations of growth conditions by HVPE such as the deposition temperature of the buffer layer, the deposition time, the ratio of Group-V and Ⅲ and the deposition temperature of the film. The adquate results were obtained under the conditions of 500℃, 90 seconds, 1333 and 1080℃, respectively. It is observed that the GaN layer grown without the buffer layer has N-polarity and the GaN layer grown on the buffer layer has Ga-polarity. Fine crystal single particles were grown on c-plane A1₂O₃ and SiO₂, layer. The external shape of the crystal shows {10-11}{10-10}(000-1) planes as expected in the PBC theory and anisotropic behavior along c-axis is obvious. As a result of etching on each plane, (000-1) and {10-11}planes were etched strongly due to the N-polarity and {10-10} plane was not affected due to the non-polarity. In the case of the crystal grown on c-plane A1₂O₃, two types of crystals were grown. They were hexagonal pyramidal-shape with {10-11}plane and hexagonal prism with basal plane. The latter might be grown by twin plane reentrant edge (TPRE) growth.

Deposition of YBCO/BaZrO$_3$ films on MgO single crystal substrates by pulsed laser deposition (펄스레이저법으로 MgO 단결정 기판위에 YBCO/BaZrO$_3$ 박막의 증착)

  • Chung Jun-Ki;Ko Rock-Kil;Kim Hosup;Ha Hong-Soo;Song Kyu-Jeong;Moon Seung-Hyun;Yoo Sang-Im;Kim Cheol-Jin;Park Chan
    • Progress in Superconductivity and Cryogenics
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    • v.6 no.3
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    • pp.12-15
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    • 2004
  • There are two major approaches to obtain texture template for HTS coated conductor (CC) ---IBAD and RABiTS. CC's with IBAD template showed both longer and higher Ic results so far. IBAD for CC began with YSZ, the processing of which is very slow compared to other processings needed for the fabrication of CC. Because of this very slow processing speed, IBAD with other materials such as Gd$_2$Zr$_2$O$_{7}$(GZO) and MgO have been developed. The processings of IBAD-GZO and IBAD-MgO are known to be up to 3times and 100 times. respectively, as fast as the processing of IBAD-YSZ. IBAD-MgO is very attractive in that the processing is very fast. IBAD-MgO also needs additional buffer layer(s). Many materials are being investigated to be used as a buffer layer on top of the MgO. BaZrO$_3$ (BZO) is a good candidate as the buffer layer on top of the IBAD-MgO because it is chemically stable and does not react with YBCO at high temperatures. It also has good lattice match with MgO. The BZO film has been deposited on single crystal MgO, and YBCO film was deposited on BZO/MgO to investigate the possibility of using BZO as both the buffer and capping layer of the CC.C.

Low Index Contrast Planar SiON Waveguides Deposited by PECVD (PECVD 법에 의해 제작된 저굴절률 차이 평판 SiON광도파로)

  • Kim, Yong-Tak;Yoon, Seok-Gyu;Yoon, Dae-Ho
    • Journal of the Korean Ceramic Society
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    • v.42 no.3 s.274
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    • pp.178-181
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    • 2005
  • Silicon oxynitride (SiON) layers deposited upon a $SiO_2/Si$ buffer layer placed upon silicon wafers have been obtained by using PECVD from $SiH_4,\;N_2O$, and $N_2$. It can be seen that the refractive index, measured by using a prism coupler, for the SiON films can be varied between 1.4480 and 1.4958 at a wavelength of 1552 nm by changing the process parameters. Optical planar waveguides with a thickness of $6{\mu}m$ and a refractive index contrast ($\Delta$n) of $0.36\% have been deposited. Also, etching experiments were performed using ICP dry etching equipment on thick SiON films grown onto Si substrates covered by a thick $SiO_2$ buffer layer. A polarization maintaining single-mode fiber was used for the input and a microscope objective for the output at $1.55{\mu}m$. As a result, a low index contrast SiON based waveguide is fabricated with easily adjustable refractive index of core layer. It illustrates that the output intensity mode is a waveguiding single-mode.

High-Performance Amorphous Indium-Gallium Zinc Oxide Thin-Film Transistors with Inorganic/Organic Double Layer Gate Dielectric

  • Lee, Tae-Ho;Kim, Jin-U;No, Yong-Han
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.465-465
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    • 2013
  • Inorganic 물질인 SiO2 dielectric 위에 organic dielectric PVP (4-vinyphenol)를 spin coating으로 올려, inorganic/organic dielectric 형태의 double layer구조로 High-performance amorphous indiumgallium zinc oxide thin-film transistors (IGZO TFT)를 제작하여 보았다. SiO2 dielectric을 buffer layer로 80 nm, PVP는 10Wt% 400 nm로 구성하였으며, 200 nm single SiO2 dielectric과 동일한 수준의 leakage current 특성을 MIM Capacitor 구조를 통해서 확인할 수 있었다. 이 소자의 장점은 용액공정의 도입으로 공정 시간의 단축 및 원가 절감을 이룰 수 있으며, dielectric과 channel 사이의 균일한 interface의 형성으로 interface trap 개선 및 Yield 향상의 장점을 갖는다. 우리는 실험을 통해서 SiO2 buffer layer가 수직 electric field에 의한 leakage current을 제어하고, PVP dielectric은 interface를 개선하는 것을 확인하였다. Vth의 negative shift 및 slope의 향상으로 구동전압이 줄어들고, 균일한 I-V Curve 형성을 통해서 Process Yield의 향상을 확인하였다.

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The Effect of $ZrO_2-Y_2O_3\;(YSZ)$ Buffer Layer on Layer on Low-Field Magnetoresistance of LSMO Thin Films ($ZrO_2-Y_2O_3\;(YSZ)$ 중간층이 저 자장영역에서의 LSMO 박막의 자기저항 특성에 미치는 영향)

  • 심인보;오영제;최세영
    • Journal of the Korean Magnetics Society
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    • v.9 no.6
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    • pp.306-311
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    • 1999
  • $La_{2/3}Sr_{1/3}MnO_3(LSMO)/YSZ/SiO_2/Si(100)$ polycrystalline thin films were fabricated be chelated sol-gel method The effect of YSZ buffer layer at low field (120 Oe) spin-polarized tunneling magnetotransport (TMR) properties of LSMO thin film was studied at room temperature. Single perovskite LSMO thin films was obtained. The maximum TMR ratio was increased from 0.2 to 0.42 % by the insertion of YSZ buffer. YSZ as diffusion barrier was attributed to the fine microstructure of LSMO thin films and the reduction of dead layer between LSMO and $SiO_2/Si(100)$ interfaces.

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$Y_{2}O_3$ Films as a Buffer layer for a Single Transistor Type FRAM (단일 트랜지스터용 강유전체 메모리의 Buffer layer용 $Y_{2}O_3$의 연구)

  • Jang, Bum-Sik;Lim, Dong-Gun;Choi, Suk-Won;Mun, Sang-Il;Yi, Jun-Shin
    • Proceedings of the KIEE Conference
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    • 2000.07c
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    • pp.1646-1648
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    • 2000
  • This paper investigated structural and electrical properties of $Y_{2}O_3$ as a buffer layer of sin91r transistor FRAM (ferroelectric RAM). $Y_{2}O_3$ buffer layers were deposited at a low substrate temperature below 400$^{\circ}C$ and then RTA (rapid thermal anneal) treated. Investigated parameters are substrate temperature, $O_2$ partial pressure, post- annealing temperature, and suppression of interfacial $SiO_2$ layer generation. for a well-fabricated sample, we achieved that leakage current density ($J_{leak}$) in the order of $10^{-7}A/cm2$, breakdown electric field ($E_{br}$) about 2 MV/cm for $Y_{2}O_3$ film. Capacitance versus voltage analysis illustrated dielectric constants of 7.47. We successfully achieved an interface state density of $Y_{2}O_3$/Si as low as $8.72{\times}10^{10}cm^{-2}eV^{-1}$. The low interface states were obtained from very low lattice mismatch less than 1.75%.

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Fabrication of YSZ buffer layer for YBCO coated conductor by MOCVD method (MOCVD법에 의한 YBCO coated conductor용 YSZ 완충층 제작)

  • 선종원;김형섭;정충환;전병혁;김찬중
    • Proceedings of the Korea Institute of Applied Superconductivity and Cryogenics Conference
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    • 2003.02a
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    • pp.129-132
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    • 2003
  • Yttria stabilized zirconia (YSZ) buffer layers were deposited by a metal organic chemical vapor deposition (MOCVD) technique using single liquid source for the application of YBa$_2$Cu$_3$$O_{7-x}$ (YBCO) coated conductor. Y:Zr mole ratio was 0.2:0.8, and tetrahydrofuran (THF) was used as a solvent. The (100) single crystal MgO substrate was used for searching deposition condition. Bi-axially oriented CeO$_2$ and NiO films were fabricated on {100}〈001〉 Ni substrate by the same method and used as templates. At a constant working pressure of 10 Torr, the deposition temperatures (660~80$0^{\circ}C$) and oxygen flow rates (100~500 sccm) were changed to find the optimum deposition condition. The best (100) oriented YSZ film on MgO was obtained at 74$0^{\circ}C$ and $O_2$ flow rate of 300 sccm. For YSZ buffer layer with this deposition condition on CeO$_2$/Ni template, full width half maximum (FWHM) values of the in-plane and out-of-plane alignments were 10.6$^{\circ}$ and 9.8$^{\circ}$, respectively. The SEM image of YSZ film on CeO$_2$/Ni showed surface morphologies without microcrack.k.

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An Adaptive Buffer Tuning Mechanism for striped transport layer connection on multi-homed mobile host (멀티홈 모바일 호스트상에서 스트라이핑 전송계층 연결을 위한 적응형 버퍼튜닝기법)

  • Khan, Faraz-Idris;Huh, Eui-Nam
    • Journal of Internet Computing and Services
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    • v.10 no.4
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    • pp.199-211
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    • 2009
  • Recent advancements in wireless networks have enabled support for mobile applications to transfer data over heterogeneous wireless paths in parallel using data striping technique [2]. Traditionally, high performance data transfer requires tuning of multiple TCP sockets, at sender's end, based on bandwidth delay product (BDP). Moreover, traditional techniques like Automatic TCP Buffer Tuning (ATBT), which balance memory and fulfill network demand, is designed for wired infrastructure assuming single flow on a single socket. Hence, in this paper we propose a buffer tuning technique at senders end designed to ensure high performance data transfer by striping data at transport layer across heterogeneous wireless paths. Our mechanism has the capability to become a resource management system for transport layer connections running on multi-homed mobile host supporting features for wireless link i.e. mobility, bandwidth fluctuations, link level losses. We show that our proposed mechanism performs better than ATBT, in efficiently utilizing memory and achieving aggregate throughput.

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