• Journal of Information Display
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• v.8 no.1
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• pp.14-17
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• 2007

The toner type paper-like display (PLD) has been developed with two polymer particles having opposite polarity composed of polymer, colorant and external additives (nano-sized silica). Nano-sized silica with triboelectric charge was used for the charge control agent (CCA) and influenced on the electrostatic properties of the silica-coated polymer particles. The surface morphology and the cohesiveness of silica-coated polymer particles were changed with the silica coating time. From these results, it was verified that the PLD cell using silica-coated particles (200 seconds) shows a good white appearance and low driving voltage.

• Korean Chemical Engineering Research
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• v.53 no.1
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• pp.78-82
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• 2015

Hollow silica particles were prepared using sodium silicate and organic templates. Polystyrene latex (PSL) particles produced by dispersion polymerization were used as organic templates. PSL particles ranged from $1{\mu}m$ to $3{\mu}m$ in diameter were synthesized by adjusting the amount of 2,2'-azobisisobutyronitrile (AIBN). The PSL/$SiO_2$ core-shell particles were prepared by coating of silica nanoparticles originated from sodium silicate using sol-gel method. The organic templates were removed by the organic solvent, tetrahydrofuran (THF). Morphology of hollow silica particles was investigated with respect to types of the reaction medium and pH during the process. By changing the solvent from ethanol to water, hollow silica particles were successfully formed. Hollow silica particles with the uniform shell thickness were produced at low pH as well. The reflectivity of the as-prepared silica particles was measured in the range of the wavelength of UV and visible light. Hollow silica particles showed much better reflective properties than the commercial light reflector, Insuladd.

• Journal of Powder Materials
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• v.23 no.6
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• pp.442-446
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• 2016

The sol-gel method is the simplest method for synthesizing monodispersed silica particles. The purpose of this study is to synthesize uniform, monodisperse spherical silica nanoparticles using tetraethylorthosilicate (TEOS) as the silica precursor, ethanol, and deionized water in the presence of ammonia as a catalyst. The reaction time and temperature and the concentration of the reactants are controlled to investigate the effect of the reaction parameters on the size of the synthesized particles. The size and morphology of the obtained silica particles are investigated using transmission electron microscopy and particle size analysis. The results show that monodispersed silica particles over a size range of 54-504 nm are successfully synthesized by the sol-gel method without using any additional process. The nanosized silica particles can be synthesized at higher TEOS/$H_2O$ ratios, lower ammonia concentrations, and especially, higher reaction temperatures.

• Journal of Korean Society of Occupational and Environmental Hygiene
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• v.25 no.1
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• pp.36-44
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• 2015

Objectives: This study aimed to elucidate the physicochemical properties of silica powder and airborne particles as by-products generated from fabrication processes to reduce unknown risk factors in the semiconductor manufacturing work environment. Materials and Methods: Sampling was conducted at 200 mm and 300 mm semiconductor wafer fabrication facilities. Thirty-two powder and airborne by-product samples, diffusion(10), chemical vapor deposition(10), chemical mechanical polishing(5), clean(5), etch process(2), were collected from inner chamber parts from process and 1st scrubber equipment during maintenance and process operation. The chemical composition, size, shape, and crystal structure of silica by-product particles were determined by using scanning electron microscopy and transmission electron microscopy techniques equipped with energy dispersive spectroscopy, and x-ray diffractometry. Results: All powder and airborne particle samples were composed of oxygen(O) and silicon(Si), which means silica particle. The by-product particles were nearly spherical $SiO_2$ and the particle size ranged 25 nm to $50{\mu}m$, and most of the particles were usually agglomerated within a particle size range from approximately 25 nm to 500 nm. In addition, the crystal structure of the silica powder particles was found to be an amorphous silica. Conclusions: The silica by-product particles generated from the semiconductor manufacturing processes are amorphous $SiO_2$, which is considered a less toxic form. These results should provide useful information for alternative strategies to improve the work environment and workers' health.

• Bulletin of the Korean Chemical Society
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• v.26 no.7
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• pp.1083-1089
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• 2005

Most experimental studies available in the literature on filtration are based on observed average zeta potential of particles (usually 10 measurements). However, analyses of data using the average zeta potential alone can lead to misleading and erroneous conclusions about the attachment behavior because of the variation of particle zeta potentials and the heterogeneous distribution of the collector surface charge. To study characteristics of zeta potential, zeta potential distributions (ZPDs) of silica particles under 9 different chemical conditions were investigated. Contrary to many researchers’ assumptions, most of the ZPDs of silica particles were broad. The solids concentration removal was better near the isoelectric point (IEP) as many researchers have noticed, thus proper destabilization of particles is very important to achieve better particle removal in particle separation processes. While, the mean zeta potential of silica particles at a given coagulant dose was a function of particle concentration; the amount of needed coagulant for particle destabilization was proportional to the total surface charge area of particles in the suspension.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.161-161
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• 2008

The oxide film of silicon wafer has been mainly polished by fumed silica, colloidal silica or ceria slurry. Because colloidal silica slurry is uniform and highly dispersed composed of spherical shape particles, by which the oxide film polished remains to be less scratched in finishing polishing process. Even though the uniformity and spherical shape is advantage for reducing the scratch, it may also be the factor to decrease the removal rate. We have studied the correlation of silica abrasive particles and CMP characteristics by varying pH, down force, and table rotation rate in polishing. It was found that the CMP polishing is dependent on the morphology, aggregation, and the surface property of the silica particles.

• Journal of the Korean Magnetic Resonance Society
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• v.4 no.1
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• pp.50-63
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• 2000

Titanium dioxide particles with three different average sizes, prepared by three different methods, were incorporated into silica gel pores by impregnation. The titanium dioxide incorporated into the silica gel pores was photoionized by 240-400 nm irradiation at 77 K by a one-photon process to from trapped hole centers on OH group and trapped electron centers on titanium which were detected by electron paramagnetic resonance at 77 K. During the impregnation the smallest size range of TiO2 particles can be incorporated into silica gels with 2.5-1.5 nm pores. However, the largest size range of TiO2 particles can only be incorporated into silica gels with 6-15 nm pores and not into silica gels with 2.5-4 nm pores. The photoyield and stability of photoinduced hole and electron centers depends on the silica pore sizes of silica gels and surface area as well as on the TiO2 loading. In large pore silica gels and large particle size of TiO2, photoinduced charge separation reaches to a plateau at shorter irradiation times and the trapped hole and electron centers are more stable to decay.

• Macromolecular Research
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• v.16 no.4
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• pp.329-336
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• 2008

Core/shell ($\pm$)PS/(-)silica nanocomposite particles were synthesized by dispersion polymerization using an amphoteric initiator, 2,2'-azobis [N-(2-carboxyethyl)-2,2-methylpropionamidine] ($HOOC(CH_2)_2HN$(HN=) $C(CH_3)_2CN$=NC $(CH_3)_2C$(=NH)NH $(CH_2)_2COOH$), VA-057. Negatively charged (-6.9 mV) silica was used as the stabilizer. The effects of silica addition time and silica and initiator concentrations were investigated in terms of polymerization kinetics, ultimate particle morphology, and size/size distribution. Uniform hybrid microspheres with a well-defined, core-shell structure were obtained at the following conditions: silica content = 10-15 wt% to styrene, VA-057 content=above 2 wt% to styrene and silica addition time=0 min after initiation. The delay in silica addition time retarded the polymerization kinetics and broadened the particle size distribution. The rate of polymerization was strongly affected by the silica content: it increased up to 15 wt% silica but then decreased with further increase in silica content. However, the particle size was only marginally influenced by the silica content. The zeta potential of the composite particles slightly decreased with increasing silica content. With increasing VA-057 concentration, the PS microspheres were entirely coated with silica sol above 1.0 wt% initiator.

• Applied Chemistry for Engineering
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• v.17 no.1
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• pp.12-15
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• 2006

The purpose of this study was to investigate the effect of reaction conditions, solvents, and surfactants on the average size and size distribution of silica particles in preparing silica fine powders by sodium silicate. Silica fine particles were synthesized by varying kinds of solvents and surfactants using the emulsion method. Span 20, Span 40, Span 60, and Span 80 were used as nonionic surfactants, Dispersing solvents were n-Hexane, n-Heptane, iso-Octane, and n-Decane of the alkane group. In these experiments, it was known that the optimum dispersion stirring time to form the emulsion of the constant size was around 6 min. The mean sizes of silica particles, at a variety of the dispersion stirring speeds, decreased as the dispersion stirring speed increased. Also, in the case of the solvents, the size of the formed silica particles decreased when the molecular weight of the solvent increased. Lastly, in the case of the surfactants, the mean size of silica particles increased as the hydrophobic lipophilic balance (HLB) value of the surfactant decreased.

• Macromolecular Research
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• v.16 no.5
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• pp.399-403
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• 2008

Monodisperse, micron-sized, hybrid particles having a core-shell structure were prepared by coating the surface of poly(methyl methacrylate)(PMMA) microspheres with silica and by copolymerizing acrylamide (AAm) to supply the hydrogen bonding effect by means of the amide groups. Tetraethoxysilane (TEOS) was then slowly dropped onto the medium under certain conditions. Because of the hydrogen bonding between the amide of the PMMA particles and the hydroxyl group of the hydrolyzed silanol, a silica shell was generated on the PMMA core particles. The morphology of the hybrid particles was investigated with transmission (TEM) and scanning (SEM) electron microscopy as a function of the medium conditions and the amount of TEOS. Improved thermal properties were observed by TGA analysis.