• Title/Summary/Keyword: sidewall

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High -Rate Laser Ablation For Through-Wafer Via Holes in SiC Substrates and GaN/AlN/SiC Templates

  • Kim, S.;Bang, B.S.;Ren, F.;d'Entremont, J.;Blumenfeld, W.;Cordock, T.;Pearton, S.J.
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.4 no.3
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    • pp.217-221
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    • 2004
  • [ $CO_2$ ]laser ablation rates for bulk 4H-SiC substrates and GaN/AIN/SiC templates in the range 229-870 ${\mu}m.min^{-1}$ were obtained for pulse energies of 7.5-30 mJ over diameters of 50·500 ${\mu}m$ with a Q-switched pulse width of ${\sim}30$ nsec and a pulse frequency of 8 Hz. The laser drilling produces much higher etch rates than conventional dry plasma etching (0.2 - 1.3 ${\mu}m/min$) making this an attractive maskless option for creating through-wafer via holes in SiC or GaN/AlN/SiC templates for power metal-semiconductor field effect transistor applications. The via entry can be tapered to facilitate subsequent metallization by control of the laser power and the total residual surface contamination can be minimized in a similar fashion and with a high gas throughput to avoid redeposition. The sidewall roughness is also comparable or better than conventional via holes created by plasma etching.

Effect of Contaminant Source Location on Indoor Air Quality

  • Lee, Hee-Kwan;Kim, Shin-Do
    • Journal of Korean Society for Atmospheric Environment
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    • v.14 no.E
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    • pp.1-7
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    • 1998
  • This paper presents an experimental study for understanding the indoor air quality in a room. A model room, which had a ceiling-mounted supply and a sidewall-mounted exhaust, was used to examine the effect of air exchange rate (AER) and contaminant source location (CSL) as a function of the elapsed time. A tracer gas method, using carbon monoxide tracer, gas analyzers, and a data acquisition system, was applied to study the ventilation air distribution and the tracer removal efficiency, so-called pollutant removal efficiency, in the model room. The experiment was composed of two parts; firstly the AER was varied to examine its effect on the ventilation air distribution and the ventilation effectiveness and secondly both AER and CSL were considered to determine their effect on the pollutant removal efficiency. It was found that the ventilation effectiveness in the model was proportional to AER but not linearly. It was also found that changing the CSL can improve the pollutant removal efficiency. In some cases, the efficiency improvement by increasing AER was achieved by simply changing CSL.

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Convective Boiling Two-phase Flow in Trapezoidal Microchannels : Part 1-Pressure Drop Characteristics (사다리꼴 미세유로의 대류비등 2상유동 : 1부-압력강하 특성)

  • Kim, Byong-Joo;Kim, Geon-Il
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.23 no.1
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    • pp.87-94
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    • 2011
  • Characteristics of two-phase pressure drop in microchannels were investigated experimentally. The microchannels consisted of 9 parallel trapezoidal channels with each channel having $205\;{\mu}m$ of bottom width, $800\;{\mu}m$ of depth, $3.6^{\circ}$ of sidewall angle, and 7 cm of length. Pressure drops in convective boiling of Refrigerant 113 were measured in the range of inlet pressure 105~195 kPa, mass velocity $150{\sim}920\;kg/m^2s$, and heat flux $10{\sim}100\;kW/m^2$. The total pressure drop generally increased with increasing mass velocity and/or heat flux. Two-phase frictional pressure drop across the microchannels increased rapidly with exit quality and showed bigger gradient at higher mass velocity. A critical review of correlations in the literature suggested that existing correlations were not able to match the experimental results obtained for two-phase pressure drop associated with convective boiling in microchannels. A new correlation suitable for predicting two-phase friction multiplier was developed based on the separated flow model and showed good agreement with the experimental data.

Tendency of Each Space of Unit Plans for Brand Apartments (브랜드 아파트의 단위평면 각 실의 경향분석)

  • Oh, Hye-Kyung;Hong, Yi-Kyung
    • Korean Institute of Interior Design Journal
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    • v.20 no.1
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    • pp.128-137
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    • 2011
  • This study aims to examine each space characteristics of unit plans for brand apartments. Through construction companies' web-sites and real estate web-sites, all the apartment unit plans with $66m^2{\sim}164m^2$ unit among the brand apartments were analyzed. On the analysis of the apartment unit plans($66m^2{\sim}164m^2$) provided by top 8 construction companies from March 2004 to December 2008. The remarkable changes compared to existing apartments include an increase in the number of bays; front side allocation of bedrooms beside the main bedroom; installation of a vestibule, a dressing room, and a powder room; installation of built-in closets in bedrooms beside the main bedroom; and installation of a receipt spot on the sidewall in the balcony. Besides, as for minor opinions there were opinions of front side allocation of kitchen/dining room, back side allocation of the main bedroom, and installation of dressing room in bedrooms beside the main bedroom. Therefore, construction companies should pay attention to research result about the unit area ranges of apartment unit plans, and reflect it positively to develop apartment unit plans to satisfy consumers.

Extraction of tire information markings using a surface reflection model (표면의 반사 특성을 이용한 타이어 정보 마크의 추출)

  • Ha, Jong-Eun;Lee, Jae-Yong;Gwon, In-So
    • Journal of Institute of Control, Robotics and Systems
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    • v.2 no.4
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    • pp.324-329
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    • 1996
  • In this paper, we present a vision algorithm to extract the tire information markings on the sidewall of tires. Since the appearance of tire marks is the same as its background, a primary feature to distinguish tire marks from their background is the roughness. Generally, the roughness of tire marks is different from that of its bakground: the surface of tire marks is smoother than the backgrounds. Light incident on the tire surface is reflected differently according to the roughness. For smoother surfaces, the surface irradiance is much stronger than that of rough surfaces. Based on these phenomena and observation, we propose an optimal illumination condition based on Torrance-Sparrow reflection model. We also develop an efficient reflectance-ratio based operator to extract the boundary of tire marks. Even with a very simple masking operation, we were able to obtain remarkable boundary extraction results from real experiments using many tires. By explicitly using the surface reflection model to explain the intensity variation on the black tire surface, we demonstrate that a physics-based vision method is powerful and feasible in extracting surface markings on tires.

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A Study on Maximum Sidewall Pressure for Underground Transmission Cables (지중송전케이블 허용측압에 관한 연구 및 기술정립)

  • Kim, Du-Jin;Lee, Ji-Yeol;Suk, Kwang-Hyun;Kim, Jae-Seung;Kim, Tai-Young;Min, Byeong-Wook
    • Proceedings of the KIEE Conference
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    • 2011.07a
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    • pp.553-554
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    • 2011
  • 도심지간 대용량 전력수송을 담당하는 지중송전케이블의 설비 신뢰성 향상과 공사원가 절감을 위해 적정 포설길이의 결정과 접속함의 최적 배치가 중요하며, 이러한 시스템 설계에 있어서 허용 포설장력과 측압은 여러 중요 요소 중 하나가 된다. 특히, 허용측압 계산과정에서 적용중인 최대 측압값에 대한 실증적 검증과 건정성 확인시험을 통해 케이블 특성에 가장 적정한 값을 도출하고, 실 계통에 적용함으로서 최적 시스템 설계가 구현될 것이다. 따라서 본 연구에서는 지중송전케이블을 관로에 포설시 곡률부에서 발생하는 측압을 여러 case별로 모의할 수 있도록 실증설비를 구축하였고, 실제 작용되는 측면하중을 로드셀을 이용하여 측정하였다. 본 연구결과로 안전율을 고려한 최적의 허용측압이 결정되었으며, 이러한 허용측압의 확대를 통해 장경간 케이블 포설의 이론 정립이 가능하게 되었다.

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A Study on the Etching Characteristics of $YMnO_3$ Thin Films in High Density $Cl_2/Ar$ Plasma (고밀도 $Cl_2/Ar$ 플라즈마를 이용한 $YMnO_3$ 박막의 식각 특성에 관한 연구)

  • 민병준;김창일;장의구
    • Proceedings of the Korean Institute of Navigation and Port Research Conference
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    • 2000.11a
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    • pp.21-24
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    • 2000
  • Ferroelectric YMnO$_3$thin films are excellent dielectric materials for high integrated ferroelectric random access memory (FRAM) with metal-ferroelectric-silicon field effect transistor (MFSFET) structure. In this study, YMnO$_3$thin films were etched with Cl$_2$/Ar gas chemistries in inductively coupled plasma (ICP). The maximum etch rate of YMnO$_3$thin films is 285 $\AA$/min under Cl$_2$/Ar of 10/0, 600 W/-200 V and 15 mTorr. The selectivities of YMnO$_3$over CeO$_2$and $Y_2$O$_3$are 2.85, 1.72, respectively. The results of x-ray photoelectron spectroscopy (XPS) reflect that Y is removed dominantly by chemical reaction between Y and Cl, while Mn is removed more effective by Ar ion bombardment than chemical reaction. The results of secondary ion mass spectrometer (SIMS) were equal to these of XPS. The etch profile of the etched YMnO$_3$film is approximately 65$^{\circ}$and free of residues at the sidewall.

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The Correction of Severe Inverted Nipple: Using Under Skin Dermal Flaps, Throughout Sutures and Purse-String Sutures. (피부 밑 진피피판법과 관통봉합 및 쌈지봉합을 이용한 심한 함몰유두 교정)

  • Yoon, Sang Yub;Kang, Min Go
    • Archives of Plastic Surgery
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    • v.36 no.3
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    • pp.322-326
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    • 2009
  • Purpose: Severe type of inverted nipple (cannot be pulled out above the areola plane by manipulation, grade III) usually cannot be corrected by a relatively simple purse - string suture technique. Most patients want to avoid visible scars. To treat the severe case and avoid visible stigma, we introduce this invisible dermal flap method. Methods: This new surgical procedure makes bilateral incisions on the sidewall of nipple and dissections vertically to free the ducts from the contracted tissues. After dissection, the tunnel is formed. We insert "dermal flaps" into the tunnel underneath nipple base. Then through - and - through sutures are performed vertically (6 o'clock and 12 o'clock positions) and the purse - string suture is added with 4 - 0 nylon. Results: We had treated 35 primary inverted nipples (grade III) in 27 patients and 13 recurrent nipples in 7 cases. The results were excellent in 45 nipples (93.7%). All but 3 recurred cases was fully or very satisfied with the results. Conclusion: This technique is effective for the correction of severe inverted nipples and recurrent cases. We can avoid the visible scars on the areola surface.

Facet Growth of InGaAs on GaAs(100) by Chemical Beam Epitaxy Using Unprecracked Monoethylarsine (GaAs(100) 기판에 사전 열분해하지 않은 Monoethylarsine을 사용하는 Chemical Beam Epitaxy방법에 의한 InGaAs박막의 Facet 성장에 관한 연구)

  • 김성복;박성주;노정래;이일항
    • Journal of the Korean Vacuum Society
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    • v.5 no.3
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    • pp.199-205
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    • 1996
  • InGaAs eqitaxial layers have been selectively grown on patterned GaAs(100) substrates by chemical beam epitaxy (CBE) using triethylgallium (TEGa), trimethylindium (TMIn), and unprecracked monoethylarsine (MEAs). Facet growth of InGaAs epilayers has also been investigated at the various growth temperatures and Si4N4 dielectric pattern directions. In [011] jirection of mask, the change from (311), (377) and (111) facets to (311) facet with increasing growth temperature was observed. In [011] direction, however, the change from (011) and (111) facets to (111) facet with increasing growth temperature was observed. These results are attributed to the sidewall growth caused by different surface migration lengths of reactants. The formation of U-shaped (100) top surface is also discussed in terms of dangling bond model.

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브롬화 부틸고무에 대하여 [제 2 부 응용(應用)]

  • Choe, Jun-Chul
    • Elastomers and Composites
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    • v.12 no.1
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    • pp.43-46
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    • 1977
  • 브롬화 부틸고무는 새로운 연속적(連續的)인 방법(方法)에 의해 제품(製品)의 질(質)이 균일(均一)하고 안정(安定)한 제품(製品)을 얻을 수 있는 바 이것은 소위(所謂) 상품명(商品名)으로 Folysar Bromobutyl X2라 한다. 이 고무는 일반(一般) 부틸고무와는 달리 여러가지 장점(長點)을 지니고 있다. 다시 말하면 일반(一般) 부틸고무에 비(比)해 첫째 가황속도(加黃速度)가 빠르며, 둘째 천연(天然)고무 또는 SBR과 같은 불포화(不飽化) 고무들과 혼합사용(混合使用)이 가능(可能)하며, 셋째 이러한 고무들과의 혼합사용시(混合使用時) 접착력(接着力)도 우수(優秀)하며 마지막으로 글로로프렌이나 EPDM과도 혼합(混合)이 가능(可能)하기 때문에 여러가지 용도(用途)로 사용(使用)할 수 있다. 이러한 점(點)을 참작(參酌)하여 브롬화 부틸고무의 이용도(利用度)는 (1) 타이어중, tubeless 타이어의 inner liner, white side wall, sidewall coverstrip 그러고 라디얼 타이어에 이용(利用)될 수 있고, (2) 내열성(耐熱性)이 요구(要求)되는 고속용(高速用) 또는 heavy-duty 타이어의 튜우브, 자동차(自動車) 부품(部品) 예(例)컨대 mount등(等)에 이용(利用)할 수 있을 뿐만 아니라 행크 라인닝, 고무 호오스, 콘베어 고무벨트, 의료용 병마개, 접착제등(等)에 광범위(廣範圍)하게 이용(利用)할 수 있다.

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