High -Rate Laser Ablation For Through-Wafer Via Holes in SiC Substrates and GaN/AlN/SiC Templates |
Kim, S.
(Department of Chemical Engineering, University of Florida)
Bang, B.S. (Department of Chemical Engineering, University of Florida) Ren, F. (Department of Chemical Engineering, University of Florida) d'Entremont, J. (Lenox Laser Inc.) Blumenfeld, W. (Lenox Laser Inc.) Cordock, T. (Lenox Laser Inc.) Pearton, S.J. (Department of Material Science and Engineering University of Florida) |
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