• Journal of Institute of Control, Robotics and Systems
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• v.11 no.5
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• pp.463-470
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• 2005

This paper describes a method aimed at improving dead-reckoning accuracy with gyroscopes in mobile robots. The method is a precision calibration procedure for gyroscopes, which effectively reduces the ill effects of nonlinearity of the scale-factor and temperature dependency. This paper also describes the methods of gyro data collection fur all ambient temperature$(-40^{\circ}C{\~}+80^{\circ}C)$ using cubic spline interpolation and defining the error function. The sensor used was a vibrating gyroscope called the EWTS82NA21, which is low lost and commonly used in car navigation system, made by Panasonic. This angular rate sensor utilizes Coriolis force generated by a vibrating tuning fork. The paper also provides experimental results to check the performance and the effectiveness of the proposed method.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1997.11a
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• pp.9-12
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• 1997

The fabrication and performance of a thin film pressure sensor are described. Cu-Ni thin film strain gauges have been fabricated by RF magnetron sputtering. For all the gauges, the relative chance in resistance ΔR/R with pressure is of the order 10$^{-3}$ for the maximum pressure. The output characteristic is found to be linear over the entire Pressure range (0-30kgf/cm$^2$) and the output sensitivity is 1.6 mV/V. The maximum nonlinearity observed in output characteristics is 0.34%FS for 5V excitation and the hysteresis is less than 0.1%FS.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.34 no.4
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• pp.391-398
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• 2010

In this paper, we propose a sensor design by using a polysilicon strain gauge bonded to a metal diaphragm. The fabrication process of the thin polysilicon strain gauges having thicknesses of $50\;{\mu}m$ was established using conventional MEMS technologies; further, the technique of glass frit bonding of the polysilicon strain gauge to the stainless steel diaphragm was established. Performance of the polysilicon strain gauge bonded to the metal cantilever beam was evaluated. The gauge factor, temperature coefficient of resistance (TCR), nonlinearity, and hysteresis of the polysilicon strain gauge were measured. The results demonstrate that the resistance increases linearly with tensile stress, while it decreases with compressive stress. The value of the gauge factor, which represents the sensitivity of strain gauges, is 34.0; this value is about 7.15 times higher than the gauge factor of a metal-foil strain gauge. The resistance of the polysilicon strain gauge decreases linearly with an increase in the temperature, and TCR is $-328\;ppm/^{\circ}C$. Further, nonlinearity and hysteresis are 0.21 % FS and 0.17 % FS, respectively.

• Journal of Sensor Science and Technology
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• v.4 no.1
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• pp.21-28
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• 1995

A portable type K thermocouple thermometer is designed and fabricated to compensate the linearity to the high temperature $1000^{\circ}C$. The problems to be solved, which use a thermocouple thermometer are the compensation of the nonlinearity characters and reference compensation. The nonlinear character of the thermocouple is compensated, using an EPROM, and the reference compensation done using an IC AD595A. Before this compensation, there was the maximum error of $23.6^{\circ}C$(2.69%) at $876^{\circ}C$. However the results measured by the portable type K thermocouple thermometer fabricated show the character of the error of ${\pm}2^{\circ}C$(0.2%) in the range of the total temperature. This character satisfies the precision specifications of the type K thermal sensors in the range available $1000^{\circ}C$, which can be measured by the use of type K thermocouples. Therefore the portable type K thermocouple thermometer fabricated can be comparatively exactly used for the wide range of temperature of interest. Then this technique of compensating the nonlinear characters can be applied to the other kinds of thermal sensor compensation.

• Journal of Institute of Control, Robotics and Systems
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• v.14 no.9
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• pp.956-962
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• 2008

This paper is devoted to yarn tension control problem in winding machines. The passive take-up unit is replaced by active one with ADRC(Active Disturbance Rejection Control) and it was compared with the method using conventional PD(Proportional-Derivative) controller. The main part of ADRC is ESO(Extended State Observer) which continuously estimates nonlinearities of the system, such as intrinsic nonlinearity, external disturbance and sensor noise. Then the estimated nonlinearity is used to compensate the real one, thus making controlled system linear. A number of experiments have been conducted in order to verify the performance of the original winding system to the modified one. Experiments have shown improved efficiency of the system with adopting active yarn tension control. Experimental results show that the ADRC achieves a better tension response than PD controller and is robust to parameters variation.

• Journal of Sensor Science and Technology
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• v.28 no.4
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• pp.240-245
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• 2019

Phase interpolation is widely adopted in frequency synthesizers and clock-and-data recovery systems to produce an intermediate phase from two existing phases. The intermediate phase is typically generated by combining two input phases with different weights. Unfortunately, this results in non-uniform phase steps. Alternatively, the intermediate phase can be generated by successive approximation, where the interpolated phase at each approximation stage is obtained using the same weight for the two intermediate phases. As a proof of concept, this study presents a 2-GHz 8-bit successive approximation digital-to-phase converter that is designed using 65-nm CMOS technology. The converter receives an 8-phase clock signal as input, and the most significant bit (MSB) section selects four phases to create two sinusoidal waveforms using a harmonic rejection filter. The remaining least significant bit (LSB) section applies the successive approximation to generate the required intermediate phase. Monte-Carlo simulations show that the proposed converter exhibits 0.46-LSB integral nonlinearity and 0.31-LSB differential nonlinearity with a power consumption of 3.12 mW from a 1.2-V supply voltage.

• Journal of the Semiconductor & Display Technology
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• v.12 no.4
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• pp.39-44
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• 2013

In the semiconductor heat-treatment process, the temperature uniformity determines the film quality of a wafer. This film quality effects on the overall yield rate. The heat transfer of the wafer surface in the heat-treatment process equipment is occurred by convection and radiation complexly. Because of this, there is the nonlinearity between the wafer temperature and reactor. Therefore, the accurate prediction of temperature on the wafer surface is difficult without the direct measurement. The thermal camera and the T/C wafer are general ways to confirm the temperature uniformity on the heat-treatment process. As above ways have limit to measure the temperature in the precise domain under the micro-scale. In this study, we developed the thin film type temperature sensor using the MEMS technology to establish the system which can measure the temperature under the micro-scale. We combined the experiment and numerical analysis to verify and calibrate the system. Finally, we measured the temperature on the wafer surface on the semiconductor process using the developed system, and confirmed the temperature variation by comparison with the commercial T/C wafer.

• Journal of Sensor Science and Technology
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• v.16 no.1
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• pp.17-23
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• 2007

This paper presents a miniaturized turn-counting sensor (TCS) where the geomagnetism and high-rpm rotation of ammunition are used to detect the turn number of ammunition for applications to small-caliber turn-counting fuzes. The TCS, composed of cores and a coil, has a robust structure with no moving part for increasing the shock survivability in the gunfire environments of ${\sim}30,000$ g's. The TCS is designed on the basis of the simulation results of an electromagnetic analysis tool, $Maxwell^{(R)}$3D. In experimental study, the static TCS test using a solenoid-coil apparatus and the dynamic TCS test (firing test) have been made. The presented TCS has shown that the induction voltage of $6.5{\;}mV_{P-P}$ is generated at the magnetic flux density of 0.05 mT and the rotational velocity of 30,000 rpm. From the measured signal, the TCS has shown the SNR of 44.0 dB, the nonlinearity of 0.59 % and the frequency-normalized sensitivity of $0.26{\pm}0.01{\;}V/T{\cdot}Hz$ in the temperature range of $-30{\sim}+43^{\circ}C$. Firing test has shown that the TCS can be used as a turn-counting sensor for small-caliber ammunition, verifying the shock survivability of TCS in high-g environments.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.21 no.11
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• pp.28-36
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• 2020

As many types of magnetic sensors are widely applied in various industries, the analysis and processing of magnetic sensor data need to be accurate. On the other hand, owing to the complexity of the magnetic field line caused by a moving magnet, the magnetic data generated by magnetic sensors are unpredictably nonlinear. Many industry systems using magnetic sensors have struggled with the nonlinear nature of magnetic sensor data. To reduce the effect of the nonlinearity, they have the target objects fixed firmly. Therefore, to collect accurate and reliable data, considerable efforts have been made to resolve the issues with the expensive tools and systems required. Through this paper, to tackle the issues, the data analysis and methodologies, including intelligent algorithms, are presented for the wrist rehabilitation system using magnetic sensors while being implemented without using expensive tools or systems. On processing magnetic sensor data, this paper adopted an intelligent algorithm, fuzzy logic, and compared the performance of other algorithms for comparison.

• Journal of Sensor Science and Technology
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• v.8 no.6
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• pp.427-433
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• 1999

In this paper, we have presented an one-axis fluxgate magnetic sensor with ferrite core, excitation, and pick-up coil. This magnetometer is consist of a sensing element, driving circuits for excitation coil and signal processing for detecting second harmonic frequency component which is proportional to the DC magnetic to be measured. The sensor core is excited by a square waveform of voltage through 82 turns of the excitation coil. The second harmonic output of pick-up coil(150 turns) is measured by a FFT spectrum analyzer. This result is compared to output of PSD(phase sensitive detector) unit for detecting a second harmonic component. The measured sensitivity is about 50 V/T at driving frequency of 2 kHz. The nonlinearity of fluxgate magnetic sensor is calculated about 2.0%.