1 |
Kovacs, G. T., 1998, Micromachined Transducers Sourcebook, McGraw-Hill, New York, p. 179.
|
2 |
Berns, A., Buder, U., Obermeier, E., Wolter, A. and Leder, A., 2006, "AeroMEMS Sensor Array for High- Resolution Wall Pressure Measurements," Sensors and Actuators A, Vol. 132, pp. 104-111.
DOI
ScienceOn
|
3 |
Le Berre, M., Kleimann, P. and Semmache, B., 1996, "Electrical and Piezoresistive Characterization of Boron-Doped LPCVD Polycrystalline Silicon Under Rapid Thermal Annealing," Sensors and Actuators A, Vol. 54, pp. 700-703.
DOI
ScienceOn
|
4 |
Leasure, W. A., Woodruff, N. and Gravel, C., 1970, "Glass-Bonding Techniques for Semiconductor Strain Gauge," SESA Spring Meeting, pp. 235-240.
|
5 |
Lu, N.C., Gerzberg, L. and Lu, C. Y., 1981, "Modeling and Optimization of Monolithic Polycrystalline Silicon Resistor," " IEEE transactions on electron devices, Vol. 28, No. 7, pp. 818-830.
DOI
ScienceOn
|
6 |
Khan, A. S., Wang, X., 2001, Strain Measurements and Stress Analysis, Prentice Hall, Upper Saddle River, pp. 30-55.
|
7 |
Ho, J. J., 2002, "The Design and Fabrication of a Micro-Thermal/Pressure-Sensor for Medical Electro- Skin Application," Solid-State Electronics , Vol. 46, No. 8, pp.1205-1209.
DOI
ScienceOn
|
8 |
Kim, S. C. and Wise, K. D., 1983, "Temperature Sensitivity in Silicon Piezoresistive Pressure Transducer," IEEE Transactions on Electron Devices, Vol. 30, No. 7, pp. 802-810.
DOI
ScienceOn
|
9 |
Yun, E. J., Kim, J. Y. and Lee, S. T., 2005, "Optimization on the Fabrication Process of Si Pressure Sensors Utilizing Piezoresistive Effect," Journal of IEEK, Vol. 42, No. 1, pp. 19-24.
과학기술학회마을
|
10 |
Malhaire, C. and Barbier, D., "Design of a Polysilicon-on-Insulator Pressure Sensor with Original Polysilicon Layout for Harsh Environment," Thin Solid Films, Vol. 427, pp. 362-366.
|
11 |
Schafer, H., Graeger, V. and Kobs, R., 1989, "Temperature-independent Pressure Sensors Using Polycrystalline Silicon Strain Gauges," Sensors and Actuators, Vol. 17, pp. 521-527.
DOI
ScienceOn
|
12 |
Suski, J., Mosser, V. and Goss, J., 1989, "Polysilicon SOI Pressure Sensor," Sensors and Actuators, Vol. 17, pp. 405-414.
DOI
ScienceOn
|
13 |
Beeby, S., Ensell, G., Kraft, M. and White, N., 2004, MEMS Mechanical Sensor, Artech House, Norwood, USA, pp. 85-89.
|
14 |
Min, N. K., Chun, J. H. and Park, C. W., 1997, "Diaphragm-Type Pressure Sensor with Cu-Ni Thin Film Strain Gauges- : Design, II Fabrication, and Characteristics of a Pressure Sensor,The Journal of the Korea Institute of Electrical and Electronic Material Engineering, Vol. 10, No. 10, pp. 1022-1028.
과학기술학회마을
|
15 |
Kovacs, G. T., 1998, Micromachined Transducers Sourcebook, McGraw-Hill, New York, pp. 213-215.
|
16 |
Suzuki, K., Ishihara, T. and Hirata, M., 1985, "Nonlinear Analysis on CMOS Integrated Silicon Pressure Sensor," Electron Devices Meeting, pp.137-140.
|