Crystallization Behavior and Electrical Properties of IZTO Thin Films Fabricated by Ion-Beam Sputtering (이온빔 스퍼터링으로 증착한 IZTO 박막의 결정화 거동과 전기적 특성 분석)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.34 no.2
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- pp.99-104
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- 2021