• Proceedings of the KSME Conference
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• 대한기계학회 2007년도 춘계학술대회A
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• pp.1282-1287
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• 2007

The nature of the signal collected by an SEM(Scanning Electron Microscope) in order to form images are all dependent on the detector used to collect them, and the quality of an acquired images is strongly influenced by detector performance. Therefore, the development of detector with high performance is very important for improving on the resolution of SEM. This paper presents the manufacture of secondary electron detector and the optimal position of electron detector through numerical analysis in SEM.

• Rapid Communication in Photoscience
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• 제1권1호
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• pp.11-12
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• 2012

The naphthalic amide derivatives were synthesized by simple condensation and were crystallized by acetonitrile solution. The SEM images of products with methyl group and nitro group, respectively, showed rod shape while the SEM images of products with other groups ($N(CH_3)_2$, $OCH_3$, H, F, and Cl), respectively, showed plate shape. We were known from these results that the substituent of ending group played an important role in the crystallization of single molecule and the morphology of naphthalic derivatives could be controlled by only change of ending group in single molecule.

• The Journal of the Acoustical Society of Korea
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• 제24권1E호
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• pp.1-6
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• 2005

The inner hair cell stereocilia of the guinea pig cochlea was examined under a scanning electron microscope (SEM) after loud tone exposure onto the ear drum of the animal. Before and after guinea pigs were exposed to intensive and continuous tone such as 106 dB SPL in intensity, the functioning of the cochlea was monitored by N1-N2 audiograms. The structural damage of the stereocilia of inner hair cells (IHCs) and outer hair cells (OHCs) was examined using the SEM in x 1500 magnification. The comparison between the functional change of the cochlea and the structural damage of the IHC stereocilia is done by means of photographic observation. It can be shown that the functional change might be related to the structural damage of the IHC stereocilia after intensive acoustic trauma.

• JSTS:Journal of Semiconductor Technology and Science
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• 제17권1호
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• pp.86-93
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• 2017

In this paper, we propose a novel defect detection method using component tree representations of scanning electron microscopy (SEM) images. The component tree contains rich information about the topological structure of images such as the stiffness of intensity changes, area, and volume of the lobes. This information can be used effectively in detecting suspicious defect areas. A quasi-linear algorithm is available for constructing the component tree and computing these attributes. In this paper, we modify the original component tree algorithm to be suitable for our defect detection application. First, we exclude pixels that are near the ground level during the initial stage of component tree construction. Next, we detect significant lobes based on multiple attributes and edge information. Our experiments performed with actual SEM wafer images show promising results. For a $1000{\times}1000$ image, the proposed algorithm performed the whole process in 1.36 seconds.

• 한국생물공학회:학술대회논문집
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• 한국생물공학회 2000년도 추계학술발표대회 및 bio-venture fair
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• pp.532-535
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• 2000

Optical microscope, SEM and fluorescent microscope were used for qualitative and morphological studies of the attachment bacteria on PE substratum under anaerobic condition. The observation of optical microscopic has demonstrated that the initial attachment of bacteria began in crevices of surface. In SEM photographs, shape and structure of biofilm could be observed, but bacteria species and methanogens was not identified. A large number of methanogenic bacteria were showed on the surface of PE substratum by fluorescence under 480nm of radiation. It was estimated that methanogenic bacteria was related to initial attachment of bacteria under anaerobic condition.

• Proceedings of the Korean Geotechical Society Conference
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• 한국지반공학회 2006년도 춘계 학술발표회 논문집
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• pp.1142-1147
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• 2006

Cement-stabilized clay has widespread applications in Deep Mixing projects, whereby soft deep clay deposits are improved through the addition of cement. While much research on this subject has taken place over the past decade, the strength and deformation behaviour of cement-stabilized clay is still not well understood. An extensive laboratory program was conducted on kaolin stabilized with up to 10% cement. Water curing was employed for durations up to 112 days. To study the microstructure of raw and stabilized soil, use is made of SEM. Micrographs of selected raw and stabilized soil were obtained. These micrographs were closely analyzed for any change in the microstructure of the soil as a result of stabilization.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.604-607
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• 2003

This study investigates the micro-cutting of cemented carbides using PCD(polycrystalline diamond) and PCBN(polycrystalline cubic boron nitride) cutting tools are performed with SEM direct observation method. The purpose of this study is to make clear the cutting mechanism of cemented carbides and the fracture of WC particles at the plastic deformation zone in orthogonal micro-cutting. And also to achieve systematic understanding, the effect of machining parameter on chip formation and machined surface was investigated, including cutting speed. depth of cut and various tool rake angle.

• Transactions of the Korean Society of Machine Tool Engineers
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• 제16권5호
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• pp.122-128
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• 2007

The electric part of thermal SEM(Scanning Electron Microscopy) consists of high voltage generation, lens control, and image processing. Several methodologies for enhancing SEM image are addressed and those results are verified through analyses and experiments. The controller employes a DSP(Digital Signal Processing), making the system more flexible and convenient than the classical analogue based controller. In some parts based the analog circuit, there are inevitable sources of noise and image distortion. The experimental investigation is provided along with analytical proof to enhance the SEM image.

• Transactions of the Korean Society of Machine Tool Engineers
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• 제15권2호
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• pp.24-29
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• 2006

The use electron-beam(E-beam) manufacturing system provides a means to alleviate optic exposure equipment's problems. We are developing an E-beam manufacturing system with scanning electron microscope(SEM) function. The E-beam manufacturing system consist of high voltage generator, beam blanker, condenser lenses, object lenses, stigmator and stage. The development of E-beam manufacturing system is used on the method of remaking SEM's structure. The functions of SEM are developed. It is important for the test of E-beam performance. In E-beam manufacturing system and SEM, beam focus is important function. In this paper, we propose intelligent remote control function for beam focus in E-beam manufacturing system. The function extends the user's function and gives convenience.

• International Journal of Precision Engineering and Manufacturing
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• 제9권2호
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• pp.28-33
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• 2008

In a scanning electron microscope (SEM), outside acoustic noise causes image noise that distorts observations of the specimen being examined. A SEM that is less sensitive to acoustic noise is highly desirable. This paper investigates the image noise problem by addressing the mode shapes of the base plate and the transmission path of the acoustic noise and vibration. By arranging the position of the rib, a new SEM base plate was developed that had twisting as the 1st and 2nd modes. In those two twisting modes, vibration nodes existed near the center of the base plate where the specimen chamber is placed. Less vibration was transmitted to the chamber and to the specimen by the twisting modes compared to bending ones, which are the 2nd and 3rd modes for a rectangular plain base plate. An SEM with the developed base plate installed exhibited a significant reduction of image noise when exposed to acoustic noises below 250 Hz.