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Methodologies and Verifications for Enhancing Resolution of a Scanning Electron Microscopy  

Kim, Dong-Hwan (서울산업대학교 기계설계자동화공학부)
Kim, Young-Dae (서울산업대 나노생산기술연구소)
Park, Man-Jin (서울대학교 기계항공공학부)
Jang, Dong-Young (서울산업대학교 산업정보시스템공학과)
Park, Keun (서울산업대학교 기계설계자동화공학부)
Publication Information
Transactions of the Korean Society of Machine Tool Engineers / v.16, no.5, 2007 , pp. 122-128 More about this Journal
Abstract
The electric part of thermal SEM(Scanning Electron Microscopy) consists of high voltage generation, lens control, and image processing. Several methodologies for enhancing SEM image are addressed and those results are verified through analyses and experiments. The controller employes a DSP(Digital Signal Processing), making the system more flexible and convenient than the classical analogue based controller. In some parts based the analog circuit, there are inevitable sources of noise and image distortion. The experimental investigation is provided along with analytical proof to enhance the SEM image.
Keywords
SEM; image distortion; noise elimination; image enhancement; lens control; experimental proof;
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