• 제목/요약/키워드: selectivity ratio

검색결과 414건 처리시간 0.031초

Shape-Selective Catalysis over Zeolite. An Attempt in the Alkylation of Biphenyl

  • Sugi, Yoshihiro;Komura, Kenichi;Kim, Jong Ho
    • 공업화학
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    • 제17권3호
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    • pp.235-242
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    • 2006
  • Liquid phase alkylation of biphenyl (BP) was studied over large pore zeolites. Selective formation of the least bulky products, 4,4'-diisopropylbiphenyl (4,4'-DIPB) occurred only in the isopropylation of BP over some large pore molecular sieves. H-mordenites (MOR) gave the highest selectivity among them. The dealumination of MOR enhanced catalytic activity and the selectivity of 4,4'-DIPB because of the decrease of coke-deposition. Non-selective catalysis occurs on external acid sites over MOR with the low $SiO_2/Al_2O_3$ ratio because severe coke-deposition deactivates the acid sites inside the pores by blocking pore openings. The selectivity of DIPB isomers was changed with reaction temperature. Selective formation of 4,4'-DIPB was observed at moderate temperatures such as $250^{\circ}C$, whereas the decrease of the selectivity of 4,4'-DIPB occurred at higher temperatures as $300^{\circ}C$. However, 4,4'-DIPB was almost exclusive isomer in the encapsulated DIPB isomers inside the pores even at high temperatures. These decreases of the selectivity of 4,4'-DIPB are due to the isomerization of 4,4'-DIPB on the external acid sites. Some 12-membered molecular sieves, such as SSZ-24, MAPO-5 (M:Mg, Zn, Si), SSZ-31, and ZSM-12, which have straight channels, gave 4,4'-DIPB with moderate to high selectivity; however; SSZ-55, SSZ-42, and MAPO-36 (M: Mg, Zn) gave lower selectivity because of cages in 12-membered one dimensional channels. Three dimensional H-Y and Beta zeolites also yield 4,4'-DIPB in low yield because of their wide circumstances for the isopropylation of BP. The increasing the size of alkylating agent enhanced the shape-selective alkylaiton even for the zeolites, such as UTD-1. The ethylation of BP to ethylbiphenyls (EBPs) and diethylbiphenyls (DEBPs) over MOR was non-selective. The ethylation of BP to EBPs was controlled kinetically. However, there was difference in reactivity of EBPs and DEBPs for their further ethylation. 4-EBP was ethylated preferentially among the isomers, although the formation of 4,4'-DEBP was less selective. The least bulky 4-EBP and 4,4'-DEBP have the highest reactivity among EBPs and DEBPs for the ethylation to polyethylbiphenyls (PEBPs). These results show that the environments of MOR pores are too loose for shape selective formation of the least bulky isomers, 4-EBP and 4,4'-DEBP in the ethylation of BP, and that MOR pores have enough space for the further ethylation of 4,4'-DEBP.

Selective etching of SiO2 using embedded RF pulsing in a dual-frequency capacitively coupled plasma system

  • 염원균;전민환;김경남;염근영
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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    • pp.136.2-136.2
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    • 2015
  • 반도체 제조는 chip의 성능 향상 및 단가 하락을 위해 지속적으로 pattern size가 nano size로 감소해 왔고, capacitor 용량은 증가해 왔다. 이러한 현상은 contact hole의 aspect ratio를 지속적으로 증가시킨바, 그에 따라 최적의 HARC (high aspect ratio contact)을 확보하는 적합한 dry etch process가 필수적이다. 그러나 HARC dry etch process는 많은 critical plasma properties 에 의존하는 매우 복잡한 공정이다. 따라서, critical plasma properties를 적절히 조절하여 higher aspect ratio, higher etch selectivity, tighter critical dimension control, lower P2ID과 같은 plasma characteristics을 확보하는 것이 요구된다. 현재 critical plasma properties를 제어하기 위해 다양한 plasma etching 방법이 연구 되어왔다. 이 중 plasma를 낮은 kHz의 frequency에서 on/off 하는 pulsed plasma etching technique은 nanoscale semiconductor material의 etch 특성을 효과적으로 향상 시킬 수 있다. 따라서 본 실험에서는 dual-frequency capacitive coupled plasma (DF-CCP)을 사용하여 plasma operation 동안 duty ratio와 pulse frequency와 같은 pulse parameters를 적용하여 plasma의 특성을 각각 제어함으로써 etch selectivity와 uniformity를 향상 시키고자 하였다. Selective SiO2 contact etching을 위해 top electrode에는 60 MHz pulsed RF source power를, bottom electrode에는 2MHz pulse plasma를 인가하여 synchronously pulsed dual-frequency capacitive coupled plasma (DF-CCP)에서의 plasma 특성과 dual pulsed plasma의 sync. pulsing duty ratio의 영향에 따른 etching 특성 등을 연구 진행하였다. 또한 emissive probe를 통해 전자온도, OES를 통한 radical 분석으로 critical Plasma properties를 분석하였고 SEM을 통한 etch 특성분석과 XPS를 통한 표면분석도 함께 진행하였다. 그 결과 60%의 source duty percentage와 50%의 bias duty percentage에서 가장 향상된 etch 특성을 얻을 수 있었다.

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고지재생연구(제12보) -부상부유 처리의 미세분 분급 선택성과 효율 상승을 위한 처리조건- (Recycling of Wastepaper(12) -Froth-Flotation Conditions for Enhancement of Fines Fractionation Selectivity and Efficiency-)

  • 여성국;류정용;신종호;송봉근;서영범
    • 펄프종이기술
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    • 제33권1호
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    • pp.16-23
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    • 2001
  • Hydraulic transport of fines up to the surface of flotation cell was supposed to be a mechanism of fines fractionation through the froth-flotation. Efficient fractionation of fines means efficient skimming out of flotation rejects as much as possible with least long fiber loss. The selectivity of fines fractionation was found to be mainly affected by long fibers flocculation degree in this study. Lack of sufficient flocculation of long fibers could lead to extensive loss of long fibers. It was also found that higher flotation flux caused higher flotation reject as well as the increase of long fiber loss, but did not affect the fine content ratio in the flotation reject. We controlled the flotation flux and the stock consistency, and chose a cationic polymer to maximize the flocculation of long fibers and to increase the amount of flotation reject. The highest efficiency of fines fractionation was obtained at 1.3% of stock consistency and at 100L/min of flotation flux in our experimental set up. The cationaic polymer we chose was found to be very effective in fiber flocculation and flotation froth stabilization. New definitions of fractionation efficiency were introduced in this study to compare the results more clearly.

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확장 SELECT 방법에 의한 새우조망의 꽃새우(Trachysalambria curvirostris) 망목 선택성 (Size Selectivity of a Shrimp Beam Trawl for the Southern Rough Shrimp Trachysalambria curvirostris with the Extended SELECT Method)

  • 박창두;박해훈;김정년
    • 한국수산과학회지
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    • 제44권4호
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    • pp.390-396
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    • 2011
  • Southern rough shrimp Trachysalambria curvirostris is exploited mainly by small shrimp beam trawl in coastal regions of Korea. To determine the size selectivity of a shrimp beam trawl for this species, a series of comparative fishing experiments was conducted in the sea adjacent to Geoje Island off the southern cost of Korea in June and November, 2010, using codends with four different mesh sizes(14.2, 17.8, 25.5, and 35.3 mm). The extended Share Each Length's Catch Total(SELECT) analysis method, based on a multinomial distribution, was applied to the fishing data to obtain a master selection curve. The model with the estimated split parameters fit the catch data best. The master selection curve was estimated to be: s(R)=exp(15.183R-7.872)/[1+exp(15.183R-7.872)], where the relative carapace length, R, is the ratio of carapace length to mesh size. The relative carapace length for 50% retention was 0.518, and the selection range was 0.145. The results suggest that codends with a larger mesh size allow more small-sized shrimps to escape.

아크제트 플라즈마를 이용한 메탄건식개질 반응에서 $CO_2$$O_2$ 첨가의 영향 (Effects of $CO_2$ and $O_2$ Addition on Methane Dry Reforming Using Arc-Jet Plasma Reactor)

  • 황나경;차민석;송영훈
    • 한국연소학회지
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    • 제13권4호
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    • pp.47-53
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    • 2008
  • The reaction mechanism of methane dry reforming has been investigated using an arc-jet reactor. The effects of input power, $CO_2/CH_4$ and added $O_2$ were investigated by product analysis, including CO, $H_2$, $C_{2}H_{Y}$ and $C_{3}H_{Y}$ as well as $CH_4$ and $CO_2$. In the process, input electrical power activated the reactions between $CH_4$ and $CO_2$ significantly. The increased feed ratio of the $CO_2$ to $CH_4$ in the dry reforming does not affect to the $CH_4$ conversion. but we could observe increase in CO selectivity together with decreasing $H_2$ generation. Added oxygen can also increase not only CO selectivity but also $CH_4$ conversion. However, hydrogen selectivity was decreased significantly due to a increased $H_{2}O$ formation.

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ECR 플라즈마에서 $BCI_3/SF_6$ 혼합 가스를 이용한 $Al_{0.25}Ga_{0.75}As$에 대한 GaAs의 선택적 식각에 대한 연구 (An Investigation of Selective Etching of GaAs to Al\ulcornerGa\ulcornerAs Using BCI$_3$SF\ulcorner Gas Mixture in ECR Plasma)

  • 이철욱;이동율;손정식;배인호;박성배
    • 한국전기전자재료학회논문지
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    • 제11권6호
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    • pp.447-452
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    • 1998
  • The selective dry etching of GaAs to Al\ulcornerGa\ulcornerAs using $BCI_3/SF_6$ gas mixture in electron cyclotron resonance(ECR) plasma is investigated. A selectivity of GaAs to AlGaAs of more than 100 and maximum etch rate of GaAs are obtained at a gas ratio $SF_6/BCI_3+SF_6$ of 25%. We verified the formation of $AlF_3$ on $Al_{0.25}Ga_{0.75}As$from the Auger spectra which enhanced the etch selectivity. In order to investigate surface damage of AlGaAs caused by ECR plasma, we performed a low temperature photoluminescence(PL) measurement as a function of RF power. As the RF power. As the RF power increases, the PL intensity decreases monotonically from 50 to 100 Wand then repidly decreases until 250 W. This behavior is due to surface damage by plasma treatment. This dry etching technique using $BCI_3/SF_6$ gas mixture in ECR plasma is suitable for gate recess formation on the GaAs based pseudomorphic high electron mobility transistor(PHEMT)

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통발에 대한 물렁가시붉은새우 (Pandalopsis japonica)의 망목 선택성 (Size selectivity of a dome-shaped pot for Morotoge shrimp Pandalopsis japonica in the eastern coastal waters of Korea)

  • 박창두;조삼광;배재현;김현영;차봉진
    • 수산해양기술연구
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    • 제51권3호
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    • pp.396-404
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    • 2015
  • Morotoge shrimp Pandalopsis japonica is caught by pot and others in the eastern coastal waters of Korea. Comparative fishing experiments were carried out in the eastern coast of Korea, using the dome-shaped pots with different five mesh sizes (17.1, 24.8, 35.3, 39.8, and 48.3 mm) in order to estimate the mesh selectivity of the pot for the morotoge shrimp, Pandalopsis japonica. The SELECT (Share Each Length's Catch Total) analysis method was applied to the catch data. The master selection curve of the pot for the shrimp was estimated to be s(R) = exp(15.770R-10.573)/[1+exp(15.770R-10.753)], where R is the ratio of carapace length to mesh size. From the selection curves, the carapace lengths of 50% retention were 11.6, 17.0, 23.9, and 34.1 mm for 17, 25, 35, and 50 mm mesh-size pot, respectively. It means that the pots of larger mesh size allow more shrimp of small size to escape.

저층 삼중자망에 대한 동해안산 고무꺽정이 (Dasycottus setiger)의 망목 선택성 (Mesh selectivity of the bottom trammel net for spinyhead sculpin Dasycottus setiger in the eastern coastal sea of Korea)

  • 박창두;배재현
    • 수산해양기술연구
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    • 제53권4호
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    • pp.317-326
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    • 2017
  • Comparative fishing experiments were conducted in the eastern coastal waters near Uljin, Korea from 2002 to 2004, using the experimental trammel nets to estimate the selectivity for spinyhead sculpin Dasycottus setiger. The inner panels of the nets were made of nylon monofilament with four mesh sizes (82.2, 89.4, 104.8, and 120.2 mm) while its two outer panels were made of twisted nylon multifilament with a mesh size of 510 mm. The SELECT (Share Each Length's Catch Total) procedure with maximum likelihood method was applied to obtain a master selection curve. The different functional models (normal, lognormal, bi-normal, and logistic model) were fitted to the catch data. The lognormal model with the fixed relative fishing intensity was chosen as the best-fitted selection curve through comparison of model deviance and AIC (Akaike's Information Criterion). The optimum relative length (the ratio of fish total length to mesh size) with the maximum relative efficiency was obtained as 2.492.

반구형 통발에 대한 물레고둥 (Buccinum striatissimum)의 망목 선택성 (Mesh selectivity of a dome-shaped pot for finely-striate buccinum Buccinum striatissimum in the eastern coastal waters of Korea)

  • 박창두;배재현;조삼광;김인옥
    • 수산해양기술연구
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    • 제50권3호
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    • pp.284-291
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    • 2014
  • Finely-striate buccinum Buccinum striatissimum, a species of whelks, is caught mainly by pot in the eastern coastal waters of Korea. In order to determine the size selectivity of pot for the species, comparative fishing experiments were conducted near Yeongil Bay from June to September in 2003 using the dome-shaped pots with different five mesh sizes (17.1, 24.8, 35.3, 39.8, and 48.3 mm). The parameters of logistic equation were estimated by the SELECT (Share Each Length's Catch Total) method based on a multinomial distribution. The model with the estimated split parameter was found to fit the catch data best. The master selection curve was estimated to be s (R)=exp (13.044R-16.438)/[1 + exp (13.044R-16.438)], where R is the ratio of shell height to mesh size. The relative shell height of 50% retention was 1.260, and the selection range was 0.168. Enlargement in mesh size of the pot allows more small-sized whelks to escape.

메탄의 산화성 짝지음 반응에 관한 연구 (Oxidative Coupling Reaction of Methane)

  • 김상범;함현식
    • 한국응용과학기술학회지
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    • 제13권1호
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    • pp.67-74
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    • 1996
  • This study was conducted to find a catalyst system which has high conversion and selectivity for the oxidative coupling of methane to produce ethane and ethylene. Various catalysts were tested in a fixed bed reactor ar $750^{\circ}C$, 1 atm, and the feed ratio($CH_4/O_2$) of 2/1. Under the reaction condition, 10wt%$PbSO_4/MgO$ catalyst showed the highest catalytic activity : methane conversion, $C_2$ selectivity and yield were 50, 40 and 20%, respectively. Catalysts containing sulfate compounds, 10wt%$PbSO_4/MgO$, 10wt%$MgSO_4/MgO$ and $Na_2SO_4/MgO$ revealed a moderate methane conversions such as 38, 50 and 50%, respectively and low $C_2$ selectivities such as 18, 5 and 9%, respectively. Catalysts containing carbonate compounds, 10wt%$PbCO_3/MgO$, 10wt%$Li_2CO_3/MgO$ and $NaCO_3/MgO$, also showed a moderate methane conversions such as 64, 44 and 51%, respectively and low $C_2$ selectivities such as 5, 6 and 2%, respectively. With the existence of chlorine and mercury, $C_2$ selectivity was decreased.