• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2002.11a
• /
• pp.151-154
• /
• 2002

AP/RPCVD를 이용하여 $650^{\circ}C$의 저온에서 실리콘-게르마늄의 선택적 단결정 성장 (Selective Epitaxy Growth: SEG) 을 수행하였다. 본 실험에서는 $SiH_4$, $GeH_4$ 그리고 HCl 가스를 사용하여 잠입시간 동안 실리콘-게르마늄막을 성장시키고 연속해서 HCI 가스만을 주입하여 산화막 위에 형성되어진 작은 결정입자들을 식각하는 공정을 반복적으로 수행하였다. HCl 의 식각에 의해 한 주기의 잠입기 후에도 다시 잠입기가 존재함을 확인하였고, 이 성장법을 통하여 한 주기의 잠업시간 동안 증착할 수 있는 두께 이상으로 실리콘-게르마늄막의 선택적 성장이 가능하였다. 이는 저온 선택적 실리콘-게르마늄 성장 시 RPCVD에서 보이는 낮은 선택성과 $SiH_4$의 짧은 장입시간으로 인해 원하는 두께까지 확보하기 힘든 단점을 극복한 것이다. 선택성을 향상시키기 위해 실리콘-게르마늄 증착중 주입된 HCI의 유량에 따라 잠입시간과 증착속도에 영향을 주었으며, 연속공정을 위한 식각공정은 20sccm의 HCI을 20초간 주입하여 선택성을 유지하였다. 또한 보론 불순물의 첨가가 선택적으로 성장되는 박막의 결정성에 미치는 영향도 분석되었다.

• 한국태양에너지학회:학술대회논문집
• /
• 2011.04a
• /
• pp.101-104
• /
• 2011

Many studies in crystalline silicon solar cell fabrication have been focused on high efficiency and low cost. In this paper, we carried out the doping procedure by varying the silicon wafer thicknesses and sheet resistance. The silicon wafers with various thicknesses were obtained by shiny etching and texturing. The thicknesses of wafers were 100, 120, 150, and $180{\mu}m$. The emitter layer formed by $POCl_3$ doping process had sheet resistance with 40 and $80{\Omega}/sq$ for selective emitter application. This experiment indicated wafer thickness did not influence sheet resistance but lifetime was strongly effected.

• Bulletin of the Korean Chemical Society
• /
• v.31 no.10
• /
• pp.2918-2922
• /
• 2010

We demonstrate a facile route to synthesize silver chloride nanocubes and derivative nanomaterials. For the synthesis of silver chloride nanocubes, silver nitrate and hydrochloric acid were used as precursors in ethylene glycol, and poly (vinyl pyrrolidone) as a surfactant. Molar ratio of the two precursors greatly influenced the morphology and composition of the final products. As-synthesized silver chloride nanocubes showed size-dependent optical properties in the visible region of light, which is likely due to a small amount of silver clusters formed on the surface of silver chloride nanocubes. Moreover, we show for the first time that simple reduction of silver chloride nanocubes with different reducing reagents leads to the formation of delicate nanostructures such as cube-shaped silver-nanoparticle aggregates, and silver chloride nanocubes with truncated corners and with silver-nanograin decorated corners. Additionally, we quantitatively investigated for the first time the evolution of silver chloride nanocubes to silver chloride nanocubes decorated with silver nanoparticles upon exposure to e-beam. Our novel and facile synthesis of silver chloride related nanoparticles with delicately controlled morphologies could be an important basis for fabricating efficient photocatalysts and antibacterial materials.

• Korean Journal of Metals and Materials
• /
• v.49 no.5
• /
• pp.400-405
• /
• 2011

ZnO nanotube arrays were synthesized by a two-step process: electrodeposition and selective dissolution. In the first step, ZnO nanorod arrays were grown on an Au/Si substrate by using a homemade electrodeposition system. ZnO nanorod arrays were then selectively dissolved in an etching solution composed of 0.125 M NaOH, resulting in hollow ZnO nanotube arrays. It is suggested that the formation mechanism of the ZnO nanotube arrays might be attributed to the preferred surface adsorption of hydroxide ion ($OH^{-1}$) on a positive polar surface followed by selective dissolution of the metastable Zn-terminated ZnO (0001) polar surface caused by the difference in the surface energy per unit area between the ZnO nanorod and nanotube.

• Journal of the Korean Crystal Growth and Crystal Technology
• /
• v.15 no.6
• /
• pp.229-233
• /
• 2005

Novel process was tried to obtain micro-porous ceramic body containing continuous pore channel. $MgAl_2O_4/MgO$ eutectic fibers and rods have been grown successfully by the micro-pulling-down method, and the microstructures and optical characterizations of grown crystals were performed. $MgAl_2O_4/MgO$ eutectic fibers of $0.3{\sim}1mm$ in diameter and about 500 mm in length, and the rods having 5 mm in diameter with approximately 60 mm in length have been grown with the $6{\sim}120mm/hr$ of growth speed. The eutectic fibers showed homogeneous microstructure in which MgO fiber aligned to the growth direction in the $MgAl_2O_4$ (spinel) matrix. The grown crystals looked semitransparency under naked eyes. Optical and orientational characterizations were performed. The second phase of MgO (periclase) was easily removed by selective etching with hydrochloric acid, and then porous bodies were obtained.

• Proceedings of the Materials Research Society of Korea Conference
• /
• 1999.11a
• /
• pp.69-69
• /
• 1999

• Transactions of the Korean Society of Automotive Engineers
• /
• v.4 no.5
• /
• pp.9-15
• /
• 1996

A silicon microaccelerometer is designed and fabricated using silicon epitaxial layers for automotive electronic airbag applications. A cantilever structure is chosen for high sensitivity and piezoresistive detection method is adopted for circuit simplicity and low cost. An optimum design is used to find optimum microstructure sizes for maximum sensitivity subject to performance requirements and design constraints on natural frequency, damping ratio, maximum allowable stress and microfabrication limitations. The microaccelerometer is fabricated by micromachining processing steps, composed of material-selective and orientation-dependent chemical etching techniques. Fabricated prototype shows a sensitivity of 88.6$\mu\textrm{V}$/g within a resonant frequency of 1.75KHz. Estimated performance of the microaccelerometer is compared with measured one. Discrepancy between the theoretical values and the experimental values is discussed together with possible sources of the errors.

• Textile Coloration and Finishing
• /
• v.1 no.1
• /
• pp.26-34
• /
• 1989

The selective chemical degradation or etching of PET based on an organic amine attack on the ester group. The techniques involves the chemical removal of loss ordered amorphous regions or crystalline regions, which are essentially unaffected by the degradative etchant. Thus, most of previous studies have limited to consideration which has been given to structural changes taking place. Therefore, this study was carried out to investigate surface characterization, dyeing properties of PET film hydrazinolyzed with hydrazine hydrate in methanol. PET film was treated with 30% hydrazine hydrate in methanol at $30^\circ{C}$ for various time intervals. The total surface tension of treated PET increased, the dispersion force decreased and the hydrogen bonding force increased. The equilibrium dye adsorption, dyeing rate and apparent diffusion coefficient of acid dyes increased, and the apparent activation energies of diffusion decreased.

• Journal of the Korean Institute of Telematics and Electronics A
• /
• v.30A no.10
• /
• pp.12-19
• /
• 1993

Because of their high sensitivity and moderate bandwidth, superconducting receivers with SIS (Superconductor Insulator Superconductor) tunnel junction mixer are now widely used for millimeter wave radio astronomy. In this paper we have introduced how to determine the parameters of SIS tunnel junction which have to be optimized to achieve a good mixer performance. From these results of optimized junction parameters determined by this methods, SIS junctions which consist of a series array of four Nb/Al-AlOx/Nb junctions with each area 3.4${\mu}m^{2}$ have been fabricated by SNEP (Selective Niobium Etching Process) and RIE (Reactive Ion Eching). Also we have tested their DC current-voltage characteristics. These SIS junctions will be used as a mixer for 100GHz band cosmic waves receiver.

• Journal of the Korean Institute of Telematics and Electronics A
• /
• v.33A no.7
• /
• pp.149-155
• /
• 1996

A new technique wasdeveloped which obtains selectively the htick fully recessed oxidized porous silicon layer (OPSL) with good dielectric property. The porous silicon layer was ocnverted to thick fully recessed oxide (FRO) with 3-step (1${\mu}$m, 1.5${\mu}$m, 1.8${\mu}$m) by multi-step thermal oxidation (after 400$^{\circ}$C, 1 hour by dry oxidation, 700$^{\circ}$C, 1 hour and then 1100$^{\circ}$C, 1 hour by wet oxidation). The breakdwon field of the FRO was about 2.5MV/cm and the leakage current was several pA ~ 100 pA in the range of 0 of 90 pF. The progress of oxidation of a porous silicon layer was studied by examining the infrared abosrption spectra. The refractive index (1.51) of the fRO, which was measured by ellipsometer, was comparable to that of the thermally grown silicon dioxide (1.46). The etching rate (1600${\AA}$/min) of the FRO was also almost equal to that of the thermal oxide.