• Title/Summary/Keyword: selective deposition

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Selective Growth of the Carbon Nanofibers at the Groove Area of the MgO Substrate by the Iridium Catalyst

  • Kim, Sung-Hoon
    • Journal of the Korean Ceramic Society
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    • v.41 no.12 s.271
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    • pp.880-883
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    • 2004
  • Carbon nanofibers could be selectively formed at the groove area of the MgO substrate using microwave plasma-enhanced chemical vapor deposition system. Iridium metal was used as a catalyst layer for the formation of the carbon nanofibers. The growth direction of the carbon nanofibers was vertical to the substrate surface. The selectively grown iridium-catalyzed carbon nanofibers show around $1.8V/{\mu}m$ turn-on voltage and $1.0\;mA/cm^2$ field emission current density at $2.65\;V/{\mu}m$ in the field emission measurement.

Fabrication of Nanogap-Based PNA Chips for the Electrical Detection of Single Nucleotide Polymorphism

  • Park, Dae-Keun;Park, Hyung-Ju;Lee, Cho-Yeon;Hong, Dae-Wha;Lee, Young;Choi, In-Sung S.;Yun, Wan-Soo
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.540-540
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    • 2012
  • Selective detection of single nucleotide polymorphism (SNP) of Cytochrome P450 2C19 (CYP2C19) was carried out by the PNA chips which were electrically-interfaced with interdigitated nanogap electrodes (INEs). The INEs whose average gap distance and effective gap length were about ~70 nm and ${\sim}140{\mu}m$, respectively, were prepared by the combination of the photo lithography and the surface-catalyzed chemical deposition, without using the e-beam lithography which is almost inevitable in the conventional lab-scale fabrication of the INEs. Four different types of target DNAs were successfully detected and discriminated by the INE-based PNA chips.

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Inhibitory Effects of of Tacrine Derivatives on Activity of Prostanoids Biosynthesis Prostaglandin Biosynthesis: A Potential Use for Degenerative Brain Disease Treatment (퇴행성 뇌질환 치료제 Tacrine 유도체의 프로스타글란딘 생합성 억제효과)

  • Shin Hea Soon
    • YAKHAK HOEJI
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    • v.49 no.1
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    • pp.103-108
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    • 2005
  • Tacrine analogues for degenerative brain disease treatments have been designed. A series of diazaanthrine derivatives as novel analogues of tacrine has been prepared through the alkyl substitution and the ring expansion. They were expected to retain anti-inflammatory activity by inhibition of prostaglandin production with reduction of side effect as the selective prostaglandin synthase inhibitor. Prostaglandin synthase expression is associated with the deposition of beta-amyloid protein in neuritic plaques in brain inflammation. Therefore selective prostaglandin synthase blockade is important for the prevention and treatment of alzheimer's disease. To evaluate inhibitory effect of prostaglandin synthase, synthetic tacrine derivatives were screened with accumulation of prostaglandin biosynthesis by lipopolysaccharide in aspirin-treated murine macrophage cell. Most of synthetic compounds have shown significant prostaglandin synthase activities in vitro screening with $84.3{\sim}33.6\%$ inhibition of the prostaglandin $E_2$ production at $10\;{\mu}g/ml$.

Immobilization of Proteins on Silicon Surfaces Using Chemical and Electrochemical Reactions of Nitrobenzenediazonium Cations (나이트로벤젠다이아조늄 양이온의 화학 및 전기화학 반응을 이용한 실리콘 표면상으로의 단백질 고정)

  • Kim, Kyu-Won;Haque, Al-Monsur Jiaul;Kang, Hyeon-Ju
    • Journal of the Korean Electrochemical Society
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    • v.13 no.1
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    • pp.70-74
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    • 2010
  • The immobilization of proteins on silicon surfaces using electrochemical reaction has been studied. Chemical deposition of nitrobenzendiazonium (NiBD) cations is employed to modify silicon surfaces. Electrochemical reduction of nitro-group to primary amine-group have been conducted on the modified surfaces to activate silicon surfaces for the protein immobilization. Attachment of gold nanoparticles was used to prove the reduction. The current method was applied to selective activation of a silicon nanowire and immobilize proteins on the selected nanowire. It has been demonstrated that the use of chemical and electrochemical reaction NiBD is efficient for the selective immobilization of proteins on silicon nanowire surfaces.

열처리 온도에 따른 액상 증착 실리콘 산화막의 특성 변화

  • Park, Seong-Jong;No, Yong-Han
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.11a
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    • pp.119-119
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    • 2009
  • 선택적 액상증착(Selective Liquid Phase Deposition)을 이용하면, 기존의 열에 의한 손상 없이 섭씨 50도 이하의 낮은 온도로 실리콘 산화물을 증착시킬 수 있다. 형성된 액상증착 실리콘 산화물은 조직이 매우 치밀하며 표면이 매우 고르게 형성됨을 확인하였다. 뿐만 아니라, 액상증착 실리콘 산화물의 누설 전류 또한 매우 낮음을 확인하였다. 또한 형성된 박막에 다양한 온도 하에서 열처리하여 산화막의 특성 변화를 관찰하였으며, 열처리 후에도 박막의 표면 거칠기나 누설전류의 변화가 미미한 것을 확인하였다. 이것은 액상증착 실리콘 산화물이 열처리 유무와 관계없이 집적회로에서 좋은 절연소재로 사용될 수 있는 가능성을 내포한다.

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Selective Growth of Multi-walled Carbon Nanotubes by Thermal Chemical Vapor Deposition and Their Field Emission Characteristics

  • Jeong, Se-Jeong;Lee, Seung-Hwan;Lee, Nae-Sung;Han, In-Taek;Kim, Ha-Jin;Kim, Jong-Min
    • 한국정보디스플레이학회:학술대회논문집
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    • 2005.07b
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    • pp.1096-1099
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    • 2005
  • Multi-walled carbon nanotubes (CNTs) grown on catalyst dots by thermal chemical vapor deposition were vertically aligned with a high population density. Such densely populated CNTs showed poor field emission characteristics due to the electrical screening effect. We reduced the number density of CNTs using an adhesive tape treatment. For dotpatterned CNTs, the tape treatment decreased the CNT density by three orders of magnitude, drastically improved the turn-on electric field from 4.8 to $1.8V/{\mu}m$, and changed the emission image from spotty to uniform luminescence. We also report long-term emission stability of dot-patterned CNTs by measuring the emission currents with time at different duty ratios.

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Array of 2-dimensions and Vertical Alignment of Zinc Oxide Micro Rod by the CBD Method (CBD법에 위한 ZnO 마이크로 막대 구조체의 2차원 배열 및 수직정렬)

  • Lee, Yeok-Kyoo;Nam, Hyo-Duk;Lee, Sang-Hwan;Jeon, Chan-Wook
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.22 no.8
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    • pp.682-688
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    • 2009
  • A periodic away of zinc oxide(ZnO) micro-rods as fabricated by using chemical bath deposition and photo-lithography. Vertically aligned ZnO micro-rods array was successfully grown by chemical bath deposition method on ZnO seed layer. The ZnO seed layer was deposited on glass and the patterning was made by standard photo-lithography technique. The selective growth of ZnO micro-rods as achieved with the masked ZnO seed layer. The fabricated ZnO micro rods were found to be single crystalline and have grown along hexagonal c-axis direction of (0002) which is same as the preferred growth orientation of ZnO seed layer.

Vertical Alignment of Zinc Oxide Micro Rod with Array of 2-Dimensions (2차원 배열구조를 갖는 ZnO 마이크로 막대 구조체의 수직정렬)

  • Lee, Yuk-Kyoo;Jeon, Chan-Wook;Nam, Hyo-Duk
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.06a
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    • pp.459-460
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    • 2008
  • Zinc oxide micro rods were fabricated using as chemical bath deposition ok photolithography. Vertically aligned Zinc Oxide rod array as grown by chemical bath deposition method on Zinc Oxide template layer. The ZnO template layer was deposited on glass and the pattering was made by standard photolithography technique. The selective growth of ZnO micro rods were achieved with the masked ZnO template layer substrate. The fabricated ZnO micro rods were found to be single crystalline and have grown along hexagonal c-axis direction of (0002) which is same as the preferred growth orientation of ZnO template layer. The ZnO micro-rod array structure was implemented as a window layer in Cu(InGa)Se2 solar cell and its effect on photovoltaic efficiency was examined.

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A Study on Selective Epitaxial Growth using Disilane and Hydrogen gas in Low Pressure chemical vapor deposition ($Si_{2}H_{6}$$H_2$ Gas를 이용한 LPCVD 내에서의 선택적 Epitaxy 성장에 관한 연구)

  • 손용훈;김상훈;박성계;남승의;김형준
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.11a
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    • pp.471-475
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    • 2000
  • P-type (100) Si wafer patterned with 1000$\AA$ SiO$_2$island was used as substrate and the Si films were deposited under low pressure using Si$_2$H$_{6}$-H$_2$gas mixture where the total gas flow rate and deposition pressure were 16.6sccm and 3.5mtorr, respectively. In this condition, we selectively obtained high-quality epitaxial Si layer of the 350~1050$\AA$ thickness. In order to extend the incubation period, we kept high pressure H$_2$ environment without Si$_2$H$_{6}$ gas for few minutes after first incubation period and then we conformed the existence of second incubation period.iod.

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The Characteristics of Electrolyte Temperature and Current Density on Selective Jet Electrodeposition (선택적 금속 전착에 대한 전해질 온도 및 전류밀도 영향분석)

  • Park, Chan-Kyu;Kim, Sung-Bin;Kim, Young-Kuk;Yoo, Bongyoung
    • Journal of the Korean institute of surface engineering
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    • v.51 no.6
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    • pp.400-404
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    • 2018
  • A metal 3D printer has been developed on its own to electrodeposit the localized area. Nozzles were used to selectively laminate the electrolytic plating method. To analyze the factors affecting the deposition, the stack height, thickness and surface roughness were experimentally analyzed according to the current density and the temperature of the electrolyte. Electrolytic temperature and current are electrodeposited when the deposition conditions are dominant over the etching conditions, but the thickness is kept constant. On the contrary, when the etching conditions are dominant, the electrodeposited shape is rather the etched. As a result, the uniformity of surface quality and electrodeposition rate could be improved by conducting experiments under constant conditions of electrolyte temperature and current density.