• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.429-429
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• 2010

TFT 제조 방법 중 LTPS (Low Temperature Polycrystalline Silicon)는 저온과 저비용 등의 이점으로 인하여 flat panel display 제작에 널리 사용된다. 이동도와 전류 점멸비 등에서 이점을 가지는 ELA(Excimer Laser Annealing)가 널리 사용되고 있지만, 이 방법은 uniformity 등의 문제점을 가지고 있다. 이를 극복하기 위한 방법으로 MICC(Metal Induced Capping Crystallization)이 사용되고 있다. 이 방법은 $SiN_x$, $SiO_2$, SiON등의 capping layer를 diffusion barrier로 위치시키고, Ni 등의 금속을 capping layer에 도핑 한 뒤, 다시 한번 열처리를 통하여 a-Si에 Ni을 확산시키킨다. a-Si 층에 도달한 Ni들이 seed로 작용하여 Grain size가 매우 큰 film을 제작할 수 있다. 채널의 grain size가 클 경우 grain boundary에 의한 캐리어 scattering을 줄일 수 있기 때문에 MIC 방법을 사용하였음에도 ELA에 버금가는 소자의 성능과 안정성을 얻을 수있었다. 본 연구에서는 large grain TFT의 Gate bias stress에 따른 소자의 안정성 측정 및 분석에 목표를 두었다.

• Current Optics and Photonics
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• v.1 no.1
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• pp.45-50
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• 2017

Optical instruments based on polymer-dispersed liquid crystal (PDLC) have been used to inspect transparent electrodes. Generally the operating voltage of an inspection instrument using PDLC is very high, over 300 V, reducing its lifetime and reliability. The operating-voltage issue becomes more serious in the inspection of touch-screen panel (TSP) electrodes, due to the bezel structure protruding over the electrodes. We have theoretically calculated the parameters affecting the operating voltage as a function of the distance between the TSP and the PDLC, the thickness, and the dielectric constant of the sublayers when the inspection module was away from the TSP electrodes. We have experimentally verified the results, and have proposed a way to reduce the operating voltage by substituting a plastic substrate film with a hard coating layer of smaller thickness and higher dielectric constant.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1998.06a
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• pp.45-48
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• 1998

We first report the GMR effect of new macroscopic ferrimagnet, Co-TbN. The Co-TbN system demonstrates typical macroscopic ferrimagnet properties which are a magnetic compensation Point and negative giant magnetoresistance (GMR) which is caused by the spin scattering contribution quite different from those of ordinary GMR materials. The Co-TbN system with 32 % TbN composition showed 0.72 % GMR in fields up to 8 kOe at room temperature and 9 % GMR at 250 K in 40 kOe. The GMR effect in the Co-TbN system increases with increasing temperature, which is due to the increase of ferromagnetic alignment of the Co and TbN in a field caused by the decrease of exchange coupling by temperature.

• Journal of the Korean Society of Radiology
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• v.9 no.7
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• pp.501-508
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• 2015

There are various Intercondyloid fossa X-ray taking methods. The methods carried out in clinics are Holmblad method, Camp-Conventry method, and Beclere method. Taking image of Intercondyloid fossa is carried a lot as basic examination for diagnosis related to simple fracture and cruciate ligament. Considering the condition and pains of patients, safe method is chosen but because Holmblad method can cause pains to knee part adhering to cassette, it is not easily used. In this study self-produced plane circular cone was attached to a cassette and in the posture for Holmblad method questionnaires of 100 applicants were analyzed to understand cognition on alleviation of pains, and the concentration of imge quality by scattering rays was measured with densitometer by taking human body phantom with X-ray. As a result, in the posture for Holmblad method, cognition on pains was alleviated by average 99%, and the change of concentration of X-ray film taken using phantom by scattering rays decreased statistically significantly compared to the cassette which did not use self-produced plane cone, therefor it is thought that the method can be valuably used in clinics.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.192-192
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• 2011

Hyperthermal ion scattering experiments were conducted with low kinetic energy (<35 eV) cesium ion beams to analyze the UV-photolyzed water-ice films. Neutral molecules (X) on the surface were detected as cesium-molecule ion clusters ($CsX^+$) which were formed through a Reactive Ion Scattering (RIS) process. Ionic species on the surface were desorbed from the surface via a low energy sputtering (LES) process, and were analyzed [1]. Using these methods, the thermal stability of hydronium ion ($H_3O^+$) that was produced by UV light was examined. As the thermal stability of $H_3O^+$ is related with the reaction, $H_3O^+$ + OH + $e^-$ (or $OH^-$) ${\rightarrow}$ $2H_2O$, which is similar or same with the reverse reaction of the auto-ionization of water, the result from this work would be helpful to understand the auto-ionization of $H_2O$ in water-ice that has not been well-understood yet. However, as $H_3O^+$ was not detected through a LES method, the titration experiment of $H_3O^+$ with methylamine ($CH_3NH_2$, MA), MA + $H_3O^+\;{\rightarrow}\;MAH^+$ + $H_2O$, was conducted. In this case, the presence of $MAH^+$ indicates that of $H_3O^+$ in the ice. Thus the pristine ice was photolyzed with UV light for a few minutes and this photolyzed ice was remained at the certain temperature for minutes without UV light. Then MA was adsorbed on that surface so that the population of $H_3O^+$ was found. From the calibration experiments, the relation of $MAH^+$ and $H_3O^+$ was found, so that the thermal stability of $H_3O^+$ can be investigated [2].

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.636-636
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• 2013

Since first discovery of strong Raman spectrum of molecules adsorbed on rough noble metal, surface enhanced Raman scattering (SERS) has been widely used for detection of molecules with low concentration. Surface plasmons at noble metal can enhance Raman spectrum and using Au nanostructures as substrates of SERS has advantages due to it has chemical stability and biocompatibility. However, the photoluminescence (PL) background from Au remains a problem because of obtaining molecular vibration information. Recently, graphene, two-dimensional atomic layer of carbon atoms, is also well known as PL quenchers for electronic and vibrational excitation. In this study, we observed SERS of single layer graphene on or under monolayer of Au nanoparticles (NPs). Single layer graphene is grown by chemical vapor deposition and transferred onto or under the monolayer of Au NPs by using PMMA transfer method. Monolayer of Au NPs prepared using Langmuir-Blodgett method on or under graphene surface provides closed and well-packed monolayer of Au NPs. Scanning electron microscopy (SEM) and Raman spectroscopy (WItec, 532 nm) were performed in order to confirm effects of Au NPs on enhanced Raman spectrum. Highly enhanced Raman signal of graphene by Au NPs were observed due to many hot-spots at gap of closed well-packed Au NPs. The results showed that single layer graphene provides larger SERS effects compared to multilayer graphene and the enhancement of the G band was larger than that of 2D band. Moreover, we confirm the appearance of D band in this study that is not clear in normal Raman spectrum. In our study, D band appearance is ascribed to the SERS effect resulted from defects induced graphene on Au NPs. Monolayer film of Au NPs under the graphene provided more highly enhanced graphene Raman signal compared to that on the graphene. The Au NPs-graphene SERS substrate can be possibly applied to biochemical sensing applications requiring highly sensitive and selective assays.

• Journal of Magnetics
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• v.12 no.3
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• pp.118-123
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• 2007

We have studied the effect of Au-Cu back layer system ${\sim}10{\AA}$ thick on the properties of a spin valve. The back layers were Cu, Au, co-sputtered $Cu_xAu_{1-x}$, laminated $[Au/Cu]_n$. and bi-layer [Au/Cu]. When Au was added to the Cu, the resistance of the spin valve abruptly increased most likely due to impurity scattering. The GMR values were not increased significantly for all the structures. In the case of co-sputtered $Cu_xAu_{1-x}$, the changes in the resistance, ${\Delta}R$, was increased at a composition of ${\sim}Au_{0.5}Cu_{0.5}$. This increase in ${\Delta}R$ is due to increase in the resistance and not from the enhanced spin-dependent scattering. The structural analyses showed that the orthorhombic $Au_{0.5}Cu_{0.5}$ was formed in the back layer instead of the face-centered tetragonal $Au_{0.5}Cu_{0.5}$ as we expected. Thermal annealing over $400^{\circ}C$ may be required to have face-centered tetragonal in the $10{\AA}$ thick ultra-thin film. In the case of a laminated or bi-layered back layer, the properties of the spin valve were improved, which may be attributed to the increase in the mean free path of conduction electrons.

• Korean Journal of Crystallography
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• v.8 no.1
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• pp.33-37
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• 1997

The optical properties of (1210) GaN epitaxy films grown on the (1012) $\alpha-A1_2O_3$ substrates have been studied. The hetero-epitaxy films were grown by the halide vapor phase epitaxy (HVPE) method using $Ga/HC1/NH_3/He$ system at $990^{\circ}C$. XRD, RHEED and SEM are used for the identification of the hetero-epitaxy films structure and surface morphology. The confirmed (1210) GaN epitaxy films were characterized by PL and Raman. By the Raman scattering, the active phonon modes of single-phase GaN films are varied with the arrangement of both polarization and propagation directions of laser beam with reference to the axis in single-phase crystal films. The Y(Z, Y & Z) X geometry allows scattering pat-terns of $A_1(TO)=533\;cm^{-1},\;E_1(TO)=559\;cm^{-1}\;and\;E_2=568 cm^{-1}$ modes, whereas in the Z(Y, Y & Z) X geometry the only $E_2$ mode are observed.

• Polymer(Korea)
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• v.35 no.6
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• pp.531-536
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• 2011

Homopolymer distribution in block copolymer/homopolymer blends was investigated as a function of homopolymer concentration and homopolymer molecular weight. The deuterated poly(methyl methacrylate) or polystyrene was blended with a deuterated polystyrene-poly(methyl methacrylate) diblock copolymer up to a concentration of 20 wt%. Samples were characterized by small-angle X-ray scattering (SAXS), neutron reflectivity and transmission electron microscopy. The block copolymer with a thin-film geometry formed alternating lamellar microdomains oriented parallel to the substrate surface. By adding the homopolymer, the microdomain structure was significantly disturbed. As a consequence, a poorly ordered morphology appeared when the homopolymer concentration exceeded 15 wt%. Increasing the homopolymer concentration and/or the homopolymer molecular weight caused the microdomains to swell less uniformly, resulting in segregation of the homopolymer toward the middle of the microdomains.

• 한국신재생에너지학회:학술대회논문집
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• 2010.06a
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• pp.97.1-97.1
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• 2010

유연금속기판위에 DC 마그네트론 스퍼터링을 이용하여 Ag/ZnO 이중구조의 후면반사막을 증착하고 Ag 표면조도 변화에 따른 후면반사막의 반사특성 변화와 플렉서블 비정질 실리콘 박막 태양전지의 셀 특성에 미치는 영향을 조사하였다. Substrate구조를 갖는 플렉서블 실리콘 박막 태양전지에서는 실리콘 박막 광흡수층의 상대적으로 낮은 광 흡수율로 인하여 입사광에 대한 태양전지 내에서의 광 산란 및 포획이 태양전지 효율을 증대시키는데 매우 중요한 역할을 하는 것으로 알려져 있다. 플렉서블 실리콘 박막 태양전지에서의 후면반사막은 광 흡수층에서 흡수되지 않는 입사광을 다시 반사시켜 광 흡수를 증대시키며 이때 후면반사막 표면에서 반사 빛을 효율적으로 산란시켜 이동경로를 증대시킴으로써 광 흡수율을 더욱 향상시킬 수 있다. 본 연구에서는 유연금속 기판위에 Ag와 ZnO:Al($Al_2O_3$ 2.5wt%) 타겟을 사용한 DC 마그네트론 스퍼터링법으로 Ag/AZO 이중구조의 후면반사막을 제조하고, Ag 박막의 표면형상 변화와 이에 따른 후면반사막의 반사도 변화를 비교, 분석하였다. 증착 조건 변화에 따른 표면 형상 및 반사 특성은 Atomic Force Mircroscope(AFM), Scanning electron miroscopy(SEM), UV-visible-nIR spectrometry를 통하여 분석하였다. 서로 다른 표면 거칠기를 갖는 후면반사막 위에 n-i-p구조의 a-Si:H 실리콘 박막 태양전지를 제조한 후 태양전지 동작 특성에 미치는 영향을 조사하였다. n,p층은 13.56MHz PECVD, i층은 60MHz VHF CVD를 사용하여 각각 제조 하였으며, Photo I-V, External Quantum Efficiency(EQE) 분석을 통하여 태양전지 특성을 조사 하였다. SEM 분석결과 공정 온도가 증가 할수록 Ag 박막의 표면 결정립 크기도 증가하였으며, AFM분석을 통한 Root-mean-square(Rms)값은 상온에서 $500^{\circ}C$로 증착온도가 증가함에 따라 6.62nm에서 46.64nm까지 증가하였다. Ag 박막의 표면 거칠기 증가에 따라 후면반 사막의 확산 반사도도 함께 증가하였다. 공정온도 $500^{\circ}C$에서 증착된 후면반사막을 사용하여 a-Si:H 태양전지를 제조하였을 때 상온에서 제조한 후면반사막에 비하여 단락전류밀도 (Jsc)값은 9.94mA/$cm^2$에서 13.36mA/$cm^2$로 증가하였으며, 7.6%의 가장 높은 태양전지 효율을 나타내었다.