• Korean Journal of Optics and Photonics
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• v.22 no.1
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• pp.46-52
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• 2011

A confocal microscope was developed utilizing a scanning sample stage based on a home-built double-compound flexure guide. A scanning sample stage with nano-scale resolution consisted of a double leaf spring based flexure, a displacement amplifying lever, a Piezo-electric Transducer(PZT) actuator and capacitance sensors. The performance of the two-axis stage was analyzed using a commercial finite element method program prior to the implementation. A single line laser was employed as the light source along with the Photo Multiplier Tube(PMT) that served as the detector. The performance of the developed confocal microscope was evaluated with a mouse ear skin imaging test. The designed scanning stage enabled us to build the confocal microscope without the two optical scanning mirror modules that are essential in the conventional laser scanning confocal microscope. The elimination of the scanning mirror modules makes the optical design of the confocal microscope simpler and more compact than the conventional system.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.7 no.3
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• pp.81-86
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• 2008

I present a 3-D profiler specially devised for the profile measurement of specular surfaces that requires precision shape accuracy up to a few nanometer. A profile is reconstructed from the curvature of a test part of the surface at several locations along a line. The local curvature data are acquired with White-light Scanning Interferometry. Test measurement proves that the proposed profiler is well suited for the specular surface inspection like precision mirror.

• 제어로봇시스템학회:학술대회논문집
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• 1986.10a
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• pp.145-148
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• 1986

To perform the marking on metal with high speed and non-contact using the laser beam of high energy, laser marking system is designed and fabricated applying the galvanometer scanner capable of high speed-precise beam positioning controlled by microprocessor. Laser is a Q-switched Nd:YAG producing multi-mode, wavelength, 1060nm. Optical system is composed of beam expander, scanning mirror and flat field lens. Consequently, the laser marking is satisfactorily achieved regardless of kinds of metal.

• 한국정보디스플레이학회:학술대회논문집
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• 2009.10a
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• pp.400-401
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• 2009

In this paper we report a micro projector including of RGB sources, a $3{\times}1$ Fiber Optic Color Synthesizer (FOCS), and a two dimensional micro mechanical scanning mirror. We further report a modifier micro collimator which can enhance the resolution of the screened image.

• Journal of the Korean Institute of Telematics and Electronics
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• v.25 no.5
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• pp.566-571
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• 1988

Laser scanning system using a hologram is simpler in optical system, lower in cost than using a polygon. In this paper, a thick hologram is fabricated for the underfilled transmission disk type with a merit of wabble insensitivity to vibration. High diffraction efficiency over 50% is obtained using silver halide recording material. The two-dimensional scan pattern with 13 scan-line is made by 7-facet hologon and mirror system. This system can be practically applied to POS(Point of Sale) bar-code symbol reader.

• Proceedings of the KIEE Conference
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• 2009.07a
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• pp.1499_1500
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• 2009

In this paper, we present a simple fabrication process for sloped electrodes in 2-degree of fredom(DOF) scanning micromirror employing pholydimethylsiloxane(PDMS). Using this process, quasi-conic figure electrode is successfully fabricated on the substrate. Simulation results show sloped electrodes decrease actuation voltage down to 22% compared with parallel plate type of electrodes having the same electrode area.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2001.05a
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• pp.189-193
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• 2001

The performance of printer can be determined by the printing speed, noise level, printing quality which includes the resolution, regularity of printed matter and etc. Among them, printing quality mostly depends on the irregularity of the line spacing and dot size. The irregular line spacing and dot size in laser beam printer are mainly from the jitter which comes from the vibration of Organic Photo Conductive(OPC) drum and the Laser Scanning Unit(LSU). Jitter due to the vibration of LSU appears as high-frequency component which occurs 100-300$\mu\textrm{m}$ interval in printed matter and the causes of it can be estimated as the vibration of polygon motor, case, reflecting mirror and etc. In this paper, vibration characteristics of the LSU under development are investigated and the strategy for improvement of the dynamic characteristics is established and its validity is demonstrated.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.5 no.4
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• pp.18-25
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• 1996

In this study, we have developed the stereolithography system that supports the development of a products. This paper presents the development of the stereolithography system. The system is composed of hardware, software and control part. The software converts a STL file to NC data and displays the monitoring figure in control part. The hardware part deals with structure of machine. The most important theme in this paper is LG-SLCAM software. This software can generate NC data and scanning condition data from a STL file semiautimatically. On the basis of three diensional shapes, it makes data for support structure from STL file. The effectiveness of using out stereolithography system is confirmed by processes of good development.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.5 s.170
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• pp.103-112
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• 2005

This paper presents one-axis high precision scanning system and illustrates the design of modified $X-Y-{\theta}$ stage as a tracker using VCM and commercialized air bearings for it. The scanning system for 100nm resolution is composed of the 3-axis stage and one axis long stroke linear motor stage as a follower. In this study a previous proposed and presented structure of VCM for the fine stage is modified. The tracker has 3 DOF($X-Y-{\theta}$ motions by four VCM actuators which are located on the same plane. So 4 actuating forces are suggested and designed to create least pitch and roll motions. This article will show about the design especially about optimal design. The design focus of this fine stage is to have high acceleration to accomplish high throughput. The optimal design of maximizing acceleration is performed in restrained size. The most sensitive constraint of this optimal design is heat dissipation of coil. There are 5 design variables. Because the relationship between design variables and system parameters are quite complicated, it is very difficult to set design variables manually. Due to it, computer based optimal design procedure using MATLAB is used. Then, this paper also describes the procedures of selecting design variables for the optimal design and a mathematical formulation of the optimization problem. Based on the solution of the optimization problem, the final design of the stage is also presented. The results can be verified by MAXWELL. The designed stage has the acceleration of about 5 $m/s^{2}$ with 40kg total mass including wafer chuck and interferometer mirror. And the temperature of coil is increased $50^{\circ}C$. In addition, the tracker is controlled by high precision controller system with HP interferometer for it and linear scaler for the follower. At that time, the scanning system has high precision resolution about 5nm and scanning resolution about 40nm in 25mm/s constant speed

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1501-1506
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• 2005

This paper presents the design of a multiple beam optical tweezers instrument used for manipulating micro/nano-sized components. The basic equations used in designing the optical tweezers are derived and the stable and time-sharing multiple beam optical tweezers are constructed with scanning mirrors. The laser beam passes through a series of optical components such as lenses, mirrors, and scanning mirrors, and overfills the entrance aperture of microscope objective, which gives a stable trap. By rotating the laser beam with the scanning mirror, the focal positions are translated in the specimen plane and multiple micro/nano-sized objects can be moved. The constructed optical tweezers is used to manipulate cells and liposomes simultaneously and to trap multiple nano-wires. The experiments prove that the developed optical tweezers can be a very versatile manipulation tool for studying gene therapy and nano device fabrication.