• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.83-83
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• 2012

본 강연에서는 방사광 연X-선 분광현미경학(spectro-microscopy) 중에서, 표면에서 방출되는 광전자를 이용하는 SPEM (Scanning Photoelectron Microscopy)과 PEEM (Photoemission Electron Microscopy)을 소개하고자 한다. SPEM은 입사하는 X-선을 작은 크기로 집속하여 특정의 작은 공간에서 광전자분광학(XPS) 데이터를 얻거나 특정 광전자에너지의 공간분포를 얻게 해주며, PEEM은 입사한 X-선에 의해 발생한 광전자를 전자렌즈 원리로 영상을 맺히게 하여 광전자의 발생 분포를 구하게 한다. 이들은 균일하지 아니한 이종의 표면 연구에 매우 유용한 측정기법들이지만, 그 원리 및 구성은 많은 차이점들을 가지고 있다. 예를 들어, SPEM은 시료를 scanning하면서 XPS에 보다 충실한 타입이고 PEEM은 full field imaging 타입으로 표면변화의 동역학 연구에 강점이 있다. 본 강의에서는 이들 각각의 원리, 장점들에 대해서 설명하고, 활용 예를 제시하고자 한다. 활용 분야에 있어서, SPEM의 경우는 포항가속기연구소의 SPEM으로 수행되었던 DMS, graphene, nano-lithography, OLED, 등 반도체 및 나노 소재, 소자에의 활용에 대한 예를 제시할 것이다. PEEM의 경우는 포항가속기연구소의 응용 예와 박막 형태의 magnetic material에 대한 예들을 제시할 것이다.

• 한국소음진동공학회논문집
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• 제14권6호
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• pp.495-502
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• 2004

This paper presents the vibration analysis and the performance evaluation of cantilevers with probing tips for non-contact scanning probe microscopy. One of the current issues of the scanning probe microscopy technology is to increase the measurement speed, which is closely tied with the dynamic characteristics of cantilevers. The primary concern in this research is to investigate the relation between the maximum possible speed of non-contact scanning probe microscopy and the dynamic characteristics of cantilevers. First, the finite element analysis is made for the vibration characteristics of various cantilevers in use. The computed natural frequencies of the cantilevers are in good agreement with measured ones. Then, each cantilever is tested with topographic measurement for a standard sample with the scanning speed changed. The performances of cantilevers are analyzed along with the natural frequencies of cantilevers. Experiments are also performed to test the effects of how to attach cantilevers in the piezo-electric actuator. Finally, measurement sensitivity has been analyzed to enhance the performance of scanning probe microscopy.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2003년도 춘계학술대회논문집
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• pp.263-268
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• 2003

This paper presents a result of performance evaluation fur non-contact scanning probe microscopy with respect to the vibration characteristics of cantilevers with tips. One of the current issues of the scanning probe microscopy technology is to increase the measurement speed, which is closely tied with the dynamic characteristics of cantilevers. The primary concern in this research is to investigate the relation between the maximum possible speed of non-contact scanning probe microscopy and the dynamic characteristics of cantilevers. First, the finite element analysis is made fur the vibration characteristics of various cantilevers in use. The computed natural frequencies of the cantilevers are in good agreement with measured ones. Then, each cantilever is tested with topographic measurement for a standard sample with the scanning speed changed. The performances of cantilevers are analyzed along with the natural frequencies of cantilevers. Experiments are also performed to test the effects of how to attach cantilevers in the piezo-electric actuator. Finally, measurement sensitivity has been analyzed to enhance the performance of scanning probe microscopy.

• Asian-Australasian Journal of Animal Sciences
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• 제14권1호
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• pp.101-103
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• 2001

Scanning Electron Microscopy of twelve lactating buffalo mammary gland was done. The lactating mammary gland showed alveolus, arrangement of blood vessels and myoepithelial cells on the alveolus, the formation of lobules and interlobular connective tissue. From the exposed alveolar lumen fat globule formation can be seen which is still attached to the alveolar surface by microvilli. This technique should further be extended to study the alveolar structure in detail during different stages of mammary gland development in buffaloes.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1998년도 추계학술대회 논문집
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• pp.133-136
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• 1998

The scanning Maxwell-stress microscopy (SMM) is a dynamic noncontact electric force microscopy that allows simultaneous access to the electrical properties of molecular system such as surface potential, surface charge, dielectric constant and conductivity along with the topography. Here we report our recent results of its application to nanoscopic study of domain structures and electrical functionality in organic thin films prepared by the Langmuir-Blodgett technique.

• 한국광학회:학술대회논문집
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• 한국광학회 2008년도 하계학술발표회 논문집
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• pp.185-186
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• 2008

In this paper, the nano-grating was measured by Scanning Probe Microscopy (SPM) system using digital Proportion, Integration and Derivative (PID) control. Through this measurement, we could confirm the improvement of the vertical resolution compared with analog Proportion and Integration (PI) control method.

• 대한기계학회논문집
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• 제18권9호
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• pp.2272-2283
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• 1994

In scanning tunneling microscopy, the piezoelectric actuator is popuilarly used in stacked type as it can provide remarkable positioning resolution and stiffness. The actuator, however, exhibits a considerable amount of hystereic nonlinearity, resulting in losses of overall measuring accuracy when a linear model is used for its control and calibration, In this study, a nonlinear model is proposed for predicting the precise relationship between the input connand voltage and the output displacement of the actuator itself, cross-coupled electrical behaviours of the driving circuit with the actuator, and mechanical characteristics of the driven components of the actuator. Finally experimental results prove that the nonlinear model enhances the measuring of scanning tunneling microscopy by an order ten in comparison with a conventional linear model.

• Applied Microscopy
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• 제28권3호
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• pp.299-306
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• 1998

T-butyl alcohol (TBA) freeze-drying method originally designed by Inoue and Osadake (1989) was adopted to dry specimens for scanning electron microscopy and the results were compared with those dried using critical point dryer (CPD). Small pieces $(1\times1\times3mm)$ of liver of Sprague-Dawley rats were cut and fixed in 2% glutaraldehyde in 0.1 M sodium cacodylate buffer after anesthesia, and processed for scanning electron microscopy by several modifications of TBA freeze-drying methods and by the standard preparation method using CPD. The bile canaliculi and sinusoidal endothelial surface were observed. Tissue dehydrated with TBA before TBA freeze-drying preserved the structures best comparable to those prepared with CPD. This result suggests that combination of dehydration with TBA and TBA freeze-drying is a superior method to the original TBA freeze-drying method dehydrated with ethanol.

• 한국고분자학회지:고분자과학과기술
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• 제7권1호
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• pp.75-85
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• 1996

• Applied Microscopy
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• 제42권3호
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• pp.158-163
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• 2012

Detailed comparison of low-voltage scanning electron microscopy and electron holography techniques for two-dimensional (2D) dopant profiling was carried out with using the same multilayered p-n junction specimen. The dopant profiles obtained from two methods are in good agreement with each other. It demonstrates that reliability of dopant profile measurement can be increased through precise comparison of 2D profiles obtained from various microscopic techniques.