• Title/Summary/Keyword: ruthenium oxide

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Ru-based Activated Carbon-MgO Mixed Catalyst for Depolymerization of Alginic Acid (루테늄 담지 활성탄-마그네시아 혼합 촉매 상에서 알긴산의 저분자화 연구)

  • Yang, Seungdo;Kim, Hyungjoo;Park, Jae Hyun;Kim, Do Heui
    • Clean Technology
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    • v.28 no.3
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    • pp.232-237
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    • 2022
  • Biorefineries, in which renewable resources are utilized, are an eco-friendly alternative based on biomass feedstocks. Alginic acid, a major component of brown algae, which is a type of marine biomass, is widely used in various industries and can be converted into value-added chemicals such as sugars, sugar alcohols, furans, and organic acids via catalytic hydrothermal decomposition under certain conditions. In this study, ruthenium-supported activated carbon and magnesium oxide were mixed and applied to the depolymerization of alginic acid in a batch reactor. The addition of magnesium oxide as a basic promoter had a strong influence on product distribution. In this heterogeneous catalytic system, the separation and purification processes are also simplified. After the reaction, low molecular weight alcohols and organic acids with 5 or fewer carbons were produced. Specifically, under the optimal reaction conditions of 30 mL of 1 wt% alginic acid aqueous solution, 100 mg of ruthenium-supported activated carbon, 100 mg of magnesium oxide, 210 ℃ of reaction temperature, and 1 h of reaction time, total carbon yields of 29.8% for alcohols and 43.8% for a liquid product were obtained. Hence, it is suggested that this catalytic system results in the enhanced hydrogenolysis of alginic acid to value-added chemicals.

New Ruthenium Complexes for Semiconductor Device Using Atomic Layer Deposition

  • Jung, Eun Ae;Han, Jeong Hwan;Park, Bo Keun;Jeon, Dong Ju;Kim, Chang Gyoun;Chung, Taek-Mo
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.363-363
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    • 2014
  • Ruthenium (Ru) has attractive material properties due to its promising characteristics such as a low resistivity ($7.1{\mu}{\Omega}{\cdot}cm$ in the bulk), a high work function of 4.7 eV, and feasibility for the dry etch process. These properties make Ru films appropriate for various applications in the state-of-art semiconductor device technologies. Thus, it has been widely investigated as an electrode for capacitor in the dynamic random access memory (DRAM), a metal gate for metal-oxide semiconductor field effect transistor (MOSFET), and a seed layer for Cu metallization. Due to the continuous shrinkage of microelectronic devices, better deposition processes for Ru thin films are critically required with excellent step coverages in high aspect ratio (AR) structures. In these respects, atomic layer deposition (ALD) is a viable solution for preparing Ru thin films because it enables atomic-scale control of the film thickness with excellent conformality. A recent investigation reported that the nucleation of ALD-Ru film was enhanced considerably by using a zero-valent metallorganic precursor, compared to the utilization of precursors with higher metal valences. In this study, we will present our research results on the synthesis and characterization of novel ruthenium complexes. The ruthenium compounds were easy synthesized by the reaction of ruthenium halide with appropriate organic ligands in protic solvent, and characterized by NMR, elemental analysis and thermogravimetric analysis. The molecular structures of the complexes were studied by single crystal diffraction. ALD of Ru film was demonstrated using the new Ru metallorganic precursor and O2 as the Ru source and reactant, respectively, at the deposition temperatures of $300-350^{\circ}C$. Self-limited reaction behavior was observed as increasing Ru precursor and O2 pulse time, suggesting that newly developed Ru precursor is applicable for ALD process. Detailed discussions on the chemical and structural properties of Ru thin films as well as its growth behavior using new Ru precursor will be also presented.

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Electrogenerated Chemiluminescence Sensor Based on Tris(2,2'-bipyridyl) ruthenium(II) Immobilized in the Composite Film of Multi-walled Carbon Nanotube/Sol-gel Zinc oxide/Nafion

  • Choi, Eun-Jung;Kang, Chang-Hoon;Choi, Han-Nim;Lee, Won-Yong
    • Bulletin of the Korean Chemical Society
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    • v.30 no.10
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    • pp.2387-2392
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    • 2009
  • A composite film of multi-walled carbon nanotube (MWCNT)/sol-gel-derived zinc oxide(ZnO)/Nafion has been utilized as an efficient immobilization matrix for the construction of a highly sensitive and stable tris(2,2'-bipyridyl) ruthenium(II) (Ru(${bpy)_3}^{2+})$ electrogenerated chemiluminescence (ECL) sensor. The electrochemical and ECL behaviors of Ru(${bpy)_3}^{2+})$ ion-exchanged into the composite film were strongly dependent upon the sol-gel preparation condition, the amount of MWCNT incorporated into the ZnO/Nafion composite film, and the buffer solution pH. The synergistic effect of MWCNTs and ZnO in the composite films increased not only the sensitivity but also the long-term stability of the ECL sensor. The present ECL sensor based on the MWCNT/ZnO/Nafion gave a linear response ($R^2$ = 0.999) for tripropylamine concentration from 500 nM to 1.0 mM with a remarkable detection limit (S/N = 3) of 15 nM. The present ECL sensor showed outstanding long-term stability (94% initial signal retained for 5 weeks). Since the present ECL sensor exhibits large response towards NADH, it could be applied as a transduction platform for the ECL biosensor in which the NADH is produced from the dehydrogenase-based enzymatic reaction in the presence of NA$D^+$ cofactor.

Fabrication and Characterization of Dye-sensitized Solar Cells based on Anodic Titanium Oxide Nanotube Arrays Sensitized with Heteroleptic Ruthenium Dyes

  • Shen, Chien-Hung;Chang, Yu-Cheng;Wu, Po-Ting;Diau, Eric Wei-Guang
    • Rapid Communication in Photoscience
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    • v.3 no.1
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    • pp.16-19
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    • 2014
  • Anodic self-organized titania nanotube (TNT) arrays have a great potential as efficient electron-transport materials for dye-sensitized solar cells (DSSC). Herewith we report the photovoltaic and kinetic investigations for a series of heteroleptic ruthenium complexes (RD16-RD18) sensitized on TNT films for DSSC applications. We found that the RD16 device had an enhanced short-circuit current density ($J_{SC}/mAcm^{-2}=15.0$) and an efficiency of power conversion (${\eta}=7.2%$) greater than that of a N719 device (${\eta}=7.1%$) due to the increasing light-harvesting and the broadened spectral features with thiophene-based ligands. However, the device made of RD17 (adding one more hexyl chain) showed smaller $J_{SC}(14.1mAcm^{-2})$ and poorer ${\eta}(6.8%)$ compare to those of RD16 due to smaller amount of dye-loading and less efficient electron injection for the RD17 device than for the RD16 device. For the RD18 dye (adding one more thiophene unit and one more hexyl chain), we found that the device showed even lower $J_{SC}(13.2mAcm^{-2}) $ that led to a poorest device performance (${\eta}=6.2%$) for the RD18 device. These results are against to those obtained from the same dyes sensitized on $TiO_2$ nanoparticle films and they can be rationalized according to the electron transport kinetics measured using the methods of charge extraction and transient photovoltage decays.

Properties of PZI Thin film on the Ru/RuO2 Electrode (Ru/RuO2전극에 성장한 PZT 박막의 특성에 관한 연구)

  • Kang, Hyun-Il;Choi, Jang-Hyun;Park, Young;Song, Joon-Tae
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.15 no.10
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    • pp.865-869
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    • 2002
  • The structural and electrical properties of PZT (lead zirconate titante) thin films grown on Pt (platinum) and Ru/Ru $O_2$(ruthenium/ruthenium oxide) electrodes were investigated. Thin films of PZT were deposited on a variety of electrodes using the rf-magnetron sputtering process. PZT films exhibited polycrystalline structure with strong PZT (100) plane and weak (211) plane for an optimizied Pt electrode and (100), (101), (111), (200), (210), (211) planes for Ru/Ru $O_2$. Switching polarization versus fatigue characteristic of Pt/Ti electrodes showed 20% degradation up to 1 $\times$ 10$_{9}$ cycles. No significant fatigue was observed in the films on Ru/Ru $O_2$ electrodes up to Ix109 test cycles. The results show that the new Ru/Ru $O_2$ bottom electrodes are expected to reduce the degradation of ferroelectric fatigue.

Formation and stability of a ruthenium-oxide thin film made of the $O_2$/Ar gas-mixture sputtering

  • Moonsup Han;Jung, Min-Cherl;Kim, H.-D.;William Jo
    • Journal of Korean Vacuum Science & Technology
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    • v.5 no.2
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    • pp.47-51
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    • 2001
  • To obtain high remnant polarization and good crystalinity of ferroelectric thin films in non-volatile memory devices, the high temperature treatment in oxygen ambient is inevitable. Severe problems that occur in this process are oxygen diffusion into substrate, oxidation of electrode and buffer layer, degradation of microstructure and so on. We made ruthenium dioxide thin film by reactive sputtering with oxygen and argon mixture atmosphere. Comparing quantitatively the core-level spectra of Ru and RuO$_2$ obtained by x-ray photoelectron spectroscopy(XPS), we found that chemical state of RuO$_2$ is very stable and of good resistance to oxygen diffusion and oxidation of adjacent layers. It opens the use of RuO$_2$ thin film as a multifunctional layer of good conducting electrode and resistive barrier for the diffusion and the oxidation. We also suggest a correct understanding of Ru 3d core-level spectrum for RuO$_2$ based on the scheme of final state screening and charge transfer satellites.

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Electrochemical Characteristics of Ruthenium Oxide Electrode-Organic Electrolyte System (유기전해액에서 루테늄산화물 전극의 전기화학적 특성)

  • Doh, Chil-Hoon;Choi, Sang-Jin;Moon, Seong-In;Yun, Mun-Soo;Yug, Gyeong-Chang;Kim, Sang-Gil
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.07b
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    • pp.1125-1128
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    • 2002
  • Electrochemical capacitor made with metal oxide electrode uses rapid and reversible protonation/deprotonation of metal oxide material under the aqueous acidic solution, generally. Electrochemical stability window of aqueous electrolyte-type capacitor is narrow compared to that of organic electrolyte-type capacitor. Electrochemical characteristics of electrochemical capacitor made with metal oxide electrode and lithium cation based organic electrolyte were evaluated. Electrochemical capacitor based on $RuO_2$ electrode material and 1M $LiPF_6$ in mixed solvents of EC, DEC, and EMC has anodic and cathodic specific capacitance of 145 and 142 F/g-$RuO_2{\cdot}nH_2O$, respectively, by using cyclic voltammetry with scan rate of 2 mV/sec g-$RuO_2$ in potential range of 2.0~4.2V(Li|$Li^+$).

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Effect of Cerium Ammonium Nitrate and Alumina Abrasive Particles on Polishing Behavior in Ruthenium Chemical Mechanical Planarization (Ruthenium CMP에서 Cerium Ammonium Nitrate와 알루미나 연마 입자가 연마 거동에 미치는 영향)

  • Lee, Sang-Ho;Lee, Sung-Ho;Kang, Young-Jae;Kim, In-Kwon;Park, Jin-Goo
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.18 no.9
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    • pp.803-809
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    • 2005
  • Cerium ammonium nitrate (CAN) and nitric acid was used an etchant and an additive for Ru etching and polishing. pH and Eh values of the CAN and nitric acid added chemical solution satisfied the Ru etching condition. The etch rate increased linearly as the concentration of CAN increased. Nitric acid added solution had the high etch rate. But micro roughness of etched surfaces was not changed before and after etching, The removal rate of Ru film was the highest in $1wt\%$ abrasive added slurry, and not increased despite the concentration of alumina abrasive increased to $5wt\%$. Even Ru film was polished by only CAN solution due to the friction. The highest removal rate of 120nm/min was obtained in 1 M nitric acid and $1wt\%$ alumina abrasive particles added slurry. The lowest micro roughness value was observed in this slurry after polishing. From the XPS analysis of etched Ru surface, oxide layer was founded on the etched Ru surface. Therefore, Ru was polished by chemical etching of CAN solution and oxide layer abrasion by abrasive particles. From the result of removal rate without abrasive particle, the etching of CAN solution is more dominant to the Ru CMP.

Vitrification of Highly Active Liquid Waste(I) (Thermal Decomposition of Nitrates and Additives for Glass-making)

  • Chun, Kwan-Sik;Lee, Sang-Hoon
    • Nuclear Engineering and Technology
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    • v.9 no.4
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    • pp.211-222
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    • 1977
  • The decomposition of all the individual chemicals used in the Harwell inactive vitrification pilot plant has been studied by means of a thermal balance. Weight loss curves to 110$0^{\circ}C$ have been obtained. The four materials (sodium nitrate, cesium nitrate, lithium nitrate and ruthenium nitroso-nitrate solution) showed a greater weight loss than that based on an oxide yield, and hence these compounds of their products of decomposition are volatile below 110$0^{\circ}C$. The remaining materials suffered a weight loss no more than that corresponding to a full yield of the oxide, and hence they were not volatile below 110$0^{\circ}C$. Most of chemicals begin to decompose at less than 75$^{\circ}C$ but the nitrates of cesium, strontium, barium and sodium not until 295$^{\circ}C$ to 59$0^{\circ}C$. The results obtained can be used in the analysis of process conditions in the vitrification and calcination of highly radioactive wastes and also of the thermal decomposition behaviour of mixtures containing those materials.

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Electrochemical Oxidation of Ethanol at $RuO_2-Modified$ Nickel Electrode in Alkaline Media Studied by Electrochemical Impedance Spectroscopy

  • Kim Jae-Woo;Park Su-Moon
    • Journal of the Korean Electrochemical Society
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    • v.3 no.2
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    • pp.76-80
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    • 2000
  • Electrochemical oxidation of ethanol has been studied at nickel and $RuO_2-modified$ nickel electrodes in 1 M KOH using electrochemical impedance spectroscopy. Equivalent circuits have been worked out from simulation of impedance data to model oxidation of ethanol as well as the passivation of the electrode. The charge-transfer resistances for oxidation of these electrodes became smaller in the presence of ethanol than in its absence. The nickel substrate facilitated ethanol oxidation at $RuO_2-modified$ nickel electrodes. We also describe the Performance of nanosized electrocatalysts of the same composition in comparison to those of the bulk electrodes. The nanosized electrodes were obtained by electrode-positing the alloy from complexed form of these metal ions with fourth and fifth generation polyamidoamine dendrimers.