Effect of Cerium Ammonium Nitrate and Alumina Abrasive Particles on Polishing Behavior in Ruthenium Chemical Mechanical Planarization |
Lee, Sang-Ho
(한양대학교 금속재료공학과)
Lee, Sung-Ho (한양대학교 금속재료공학과) Kang, Young-Jae (한양대학교 금속재료공학과) Kim, In-Kwon (한양대학교 금속재료공학과) Park, Jin-Goo (한양대학교 금속재료공학과) |
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