• Title/Summary/Keyword: roughness of interface

Search Result 325, Processing Time 0.03 seconds

Effect of N2/Ar flow rates on Si wafer surface roughness during high speed chemical dry thinning

  • Heo, W.;Lee, N.E.
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2010.08a
    • /
    • pp.128-128
    • /
    • 2010
  • In this study, we investigated the evolution and reduction of the surface roughness during the high-speed chemical dry thinning process of Si wafers. The direct injection of NO gas into the reactor during the supply of F radicals from NF3 remote plasmas was very effective in increasing the Si thinning rate, due to the NO-induced enhancement of the surface reaction, but resulted in the significant roughening of the thinned Si surface. However, the direct addition of Ar and N2 gas, together with NO gas, decreased the root mean square (RMS) surface roughness of the thinned Si wafer significantly. The process regime for the increasing of the thinning rate and concomitant reduction of the surface roughness was extended at higher Ar gas flow rates. In this way, Si wafer thinning rate as high as $20\;{\mu}m/min$ and very smooth surface roughness was obtained and the mechanical damage of silicon wafer was effectively removed. We also measured die fracture strength of thinned Si wafer in order to understand the effect of chemical dry thinning on removal of mechanical damage generated during mechanical grinding. The die fracture strength of the thinned Si wafers was measured using 3-point bending test and compared. The results indicated that chemical dry thinning with reduced surface roughness and removal of mechanical damage increased the die fracture strength of the thinned Si wafer.

  • PDF

Quantification of Surface Topography Using Digital Image Analysis

  • Lee, Seok-Won
    • Journal of the Korean Geotechnical Society
    • /
    • v.15 no.3
    • /
    • pp.131-149
    • /
    • 1999
  • It was found that surface roughness has a first-order effect on the interface shear strength and accordingly it should be accurately quantified if its role is to be properly understood. To quantify the surface topography, first of all, a variety of commonly used surface roughness parameters and profiling methods were reviewed in this study. Based on this review, the normalized roughness parameter. $R_n$(Uesugi and Kishida, 1986), the profile roughness parameter, $R_L$, and the surface roughness parameter, $R_n$(Dove and Frost, 1996), were selected to be appropriate candidates of roughness parameters and the digital image analysis based Optical Profile Microscopy(OPM) method(Dove and Frost, 1996) to be an appropriate profiling method for this study. Using a smooth and three textured HDPE geomembranes which encompass the range of textures and texture patterns commonly used, a series of roughness measurements on virgin and previously used geomembranes were performed. The results showed that both $R_L\; and\; R_S$ values appropriately reflect the degree of texturing for the geomembranes used in this study, however, $R_n$ value showed limited ranges of variation which may not be sufficient to permit distinction between roughness values for certain conditions. The results of this study will be extended to the investigation of the influence of surface roughness on interface strength in future study.

  • PDF

Proposed surface modeling for slip resistance of the shoe-floor interface

  • Kim, In-Ju
    • Proceedings of the Korean Operations and Management Science Society Conference
    • /
    • 1995.04a
    • /
    • pp.515-528
    • /
    • 1995
  • Slips and falls are the major causes of the pedestrian injuries in the industry and the general community throughout the world. With the awareness of these problems, the friction coefficients of the interface between floorings and footwear have been measured for the evaluation of slip resistant properties. During this measurement process, the surface texture has been shown to be substantially effective to the friction mechanism between shoe heels and floor surfaces under various types of walking environment. Roughness, either of the floor surface or shoe heels, provides the necessary drainage spaces. This roughness can be designed into the shoe heel but this is inadequate in some cases, especially a wear. Therefore, it is essential that the proper roughness for the floor surface coverings should be provided. The phenomena that observed at the interface between a sliding elastomer and a rigid contaminated floor surface are very diverse and combined mechanisms. Besides, the real surface geometry is quite complicate and the characteristics of both mating surfaces are continuously changing in the process of running-in so that a finite number of surface parameters can not provide a proper description of the complex and peculiar shoe - floor contact sliding mechanism. It is hypothesised that the interface topography changes are mainly occurred in the shoe heel surfaces, because the general property of the shoe is soft in the face of hardness compared with the floor materials This point can be idealized as sliding of a soft shoe heel over an array of wedge-shaped hard asperities of floor surface. Therefore, it is considered that a modelling for shoe - floor contact sliding mechanism is mainly depended upon the surface topography of the floor counterforce. With the model development, several surface parameters were measured and tested to choose the best describing surface parameters. As the result, the asperity peak density (APD) of the floor surface was developed as one of the best describing parameters to explain the ambiguous shoe - floor interface friction mechanism. It is concluded that the floor surface should be continuously monitored with the suitable surface parameters and kept the proper level of roughness to maintain the footwear slip resistance. This result can be applied to the initial stage of design for the floor coverings.

  • PDF

Effect of the Surface Roughness of Electrode on the Charge Injection at the Pentacene/Electrode Interface (전극 표면의 거칠기가 펜터신/전극 경계면의 전류-전압 특성에 주는 영향)

  • Kim, Woo-Young;Jeon, D.
    • Journal of the Korean Vacuum Society
    • /
    • v.20 no.2
    • /
    • pp.93-99
    • /
    • 2011
  • We investigated how the surface roughness of electrode affects the charge injection at the pentacene/Au interface. After depositing Au film on the Si substrate by sputtering, we annealed the sample to control the Au surface roughness. Pentacene and Au top electrode were subsequently deposited to complete the sample. The nucleation density of pentacene was slightly higher on the rougher Au electrode, but surface morphologies of thick pentacene films were similar on both the as-prepared and the roughened Au electrodes. The current-voltage curves obtained from the Au/pentacene/Au structure measured as a function of temperature indicated that the interface barrier was higher for the rougher Au bottom-electrode. We propose that the higher barrier was caused by the lower work function of rougher electrode surface and the higher trap density at the interface.

Evaluation of Adhesion Property of Epoxy Adhesive with Different Surface Roughness of GFRC (유리섬유강화 복합재료의 표면거칠기에 따른 에폭시 접착제의 접착강도 평가)

  • Kim, Jong-Hyun;Shin, Pyeong-Su;Lee, Sang-Il;Park, Joung-Man
    • Journal of Adhesion and Interface
    • /
    • v.21 no.1
    • /
    • pp.27-33
    • /
    • 2020
  • Adhesion property of epoxy adhesive was evaluated with different surface roughness of glass fiber reinforced composite (GFRC) and optimized condition of surface roughness was confirmed. Different sizes of alumina (Al2O3) particles were blasted to GFRC to control surface roughness of GFRC using sand blasting method. The surface roughness was measured and quantified via surface roughness tester. Contact angle was measured using four types of different solvents. Surface energies and work of adhesion between epoxy adhesive and GFRCs were calculated with different surface roughness of GFRC. Adhesion property between epoxy adhesive and GFRCs was evaluated using single lap shear test and adhesion property increased with surface roughness of GFRC. The fracture surface of GFRCs was observed to evaluate adhesion property. Finally, the optimized roughness condition of GFRCs was confirmed.

Beam Tests for Static and Fatigue Interface Shear Strength between Old and Njew Concretes (신구콘크리트 계면의 전단강도 측정을 위한 정하중 및 피로하중 보실험)

  • 최동욱
    • Magazine of the Korea Concrete Institute
    • /
    • v.9 no.3
    • /
    • pp.137-147
    • /
    • 1997
  • Interface shear strength of' concrete under static loading and deterioratiion of interface strength by fatigue loading in shear were experimentally investigated using composite beam test specimens. Thirteen beams were constructed. Five composite beams were tested statically until interface delaminations were observed in the static tests. Seven composite beam and one monolithically cast beam were subjected to two to three million cycles of fatigue load. Test variables were interface roughness, interface shear reinforcement, and presence of interface bond. The average interface shear strength of the composite beams with bonded-rough interface was 6, 060 kPa. No interface delamination was observed after cycling for the composite beams with bonded - rough interface and interface bond was not influenced by repeated application of the shear stress of 2.000 kPa(about 1/3 of the static interface shear strength). Smooth interface and unbonded-rough interface with shear reinforcement deteriorated under repeated shear loading.

Surface Characteristics of Polymer Coated NiTi Alloy Wire for Orthodontics (폴리머 코팅된 NiTi합금 교정선의 표면특성)

  • Cho, Joo-Young;Kim, Won-Gi;Choi, Hwan-Suk;Lee, Ho-Jong;Choe, Han-Cheol
    • Journal of Surface Science and Engineering
    • /
    • v.43 no.3
    • /
    • pp.132-141
    • /
    • 2010
  • NiTi alloy has been used for orthodontic wire due to good mechanical properties, such as elastic strength and frictional resistance, combined with a high resistance to corrosion. Recently, these wire were coated by polymer and ceramic materials for aesthetics. The purpose of this study was to investigate surface characteristics of polymer coated NiTi alloy wire for orthodontics using various instruments. Wires (round type and rectangular type) were used, respectively, for experiment. Polymer coating was carried out for wire. Specimen was investigated with field emission scanning electron microscopy(FE-SEM), energy dispersive x-ray spectroscopy(EDS) and atomic force microscopy(AFM). The phase transformation of non-coated NiTi wire from martensite to austenite occurred at the range of $14{\sim}15^{\circ}C$, in the case of coated wire, it occurred at the range of $16{\sim}18^{\circ}C$. Polymer coating on NiTi wire surface decreased the surface defects such as scratch which was formed at severe machined surface. From the AFM results, the average surface roughness of non-coated and coated NiTi wire was 13.1 nm, and 224.5 nm, respectively. From convetional surface roughness test, the average surface roughness of non-coated and coated NiTi wire was $0.046{\mu}m$, and $0.718{\mu}m$, respectively.

A Study on the Shear Behavior of Sands on the Geomembranes (지오멤브레인 상의 모래의 전단거동에 관한 연구)

  • 이석원
    • Journal of the Korean Geotechnical Society
    • /
    • v.16 no.3
    • /
    • pp.89-89
    • /
    • 2000
  • The shear behavior of any interface is a function of the fundamental properties of both materials at the interface. This study aimed at investigating the effect of planar surface roughness on the stress-horizontal displacement curve at theinterfaces composed of various geomembrane textures and granular materials. In addition, the extent of surfacialscarring on smooth geomembranes against granular materials during shearing induced by plowing effect was studied. It wasobserved that the displacements required to achieve peak and residual interface resistance, and the stress-displacementcurve at the interface vary greatly with the surface roughness of geomembrane. Quantification of surface roughnessvariations on smooth geomembrane due to plowing effect showed that the surfacial scarring during shearing by the soilparticles is directly related to both the normal stress and the angularity of the soil particles at the interface. The findingsof this study can be used to provide the useful information for the design and selection of counterface materials.

Surface Characteristics of HA Coated Dental Implant Alloy by Sol-Gel Method (Sol-Gel법으로 HA코팅된 치과용 임플란트 합금의 표면특성)

  • Choe Han-Cheol;Ko Yeong-Mu
    • Journal of Surface Science and Engineering
    • /
    • v.38 no.4
    • /
    • pp.167-173
    • /
    • 2005
  • Surface characteristics of HA(hydroxyapatite) coated dental implant alloy by Sol-Gel method were investigated using potentiostat, ICP, SEM, EDX, EPMA and surface roughness tester. Surface roughness of HA coated specimen by Sol-Gel showed higher than that of PVD coated specimen. Corrosion resistance increased in the order of $1\%$ lactic acid, artificial saliva, $0.5\%$ HCI and $0.9\%$ NaCl solution. Amount of Ca element release was higher than that of V and P in the $0.5\%$ HCI and $0.9\%$ NaCl solution.

Effect of Laser Surface Modification of Cemented Carbide Substrates on the Adhesion of Diamond Films (Cemented Carbide기판의 레이저 표면 개질이 다이아몬드 박막의 접합력에 미치는 영향)

  • Lee, Dong-Gu
    • Journal of the Korean Society for Heat Treatment
    • /
    • v.13 no.3
    • /
    • pp.170-176
    • /
    • 2000
  • A novel method for improving the adhesion of diamond films on cemented carbide tool inserts has been investigated. This method is based on the formation of a compositionally graded interface by developing a microrough surface structure using a pulsed laser process. Residual stresses of diamond films deposited on laser modified cemented carbides were measured as a function of substrate roughness using micro-Raman spectroscopy. The surface morphology and roughness of diamond films and cemented carbides were also investigated at different laser modification conditions. It was found that the increasing interface roughness reduced the average residual stress of diamond films, resulting in improved adhesion of diamond films on cemented carbides.

  • PDF