• 제어로봇시스템학회논문지
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• 제19권10호
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• pp.947-954
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• 2013

This article focuses on a hemispherical resonator gyro driven by the Coriolis effect. The operational principle of resonator gyros and mathematical models are introduced. These models are useful to explain the behavior of a resonator and to design controllers. Several control tests of a resonator have been done. A resonator has been excited by electromagnets controlled by a computer. Its amplitude has been adjusted by a PI control. The transient response is matched with a simulation result based on a mathematical model. A vibrating pattern may drift due to non-uniform factors of a resonator. The drift of the vibrating pattern is controlled and aligned to a reference direction by a PI control. These results are very useful to understand the behavior of resonator gyros and to design advanced control algorithm for better performance.

• 제어로봇시스템학회논문지
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• 제20권5호
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• pp.563-569
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• 2014

This article focuses on a hemispherical resonator gyro driven by the Coriolis effect. A hemispherical shell, called a resonator, is maintained in the resonance state by amplitude control and phase locking control. Parametric excitation has been used to control the amplitude. For rate measurement mode or FTR mode, nodal points have been kept to an amplitude of zero. Angular rate measurement has been demonstrated by rotating a resonator. Frequency mismatch between two stiffness principal axes is a major cause of low performance: vibrating pattern drift and reduced control effectiveness. This mismatch has been reduced significantly by the addition of small mass. A negative spring effect, which lowers resonance frequencies, has been verified experimentally.

• International Journal of Aeronautical and Space Sciences
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• 제14권4호
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• pp.379-386
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• 2013

The hemispherical resonator gyroscope is a type of vibratory gyroscope, which can measure angle or angular rate, based on its operating mode. This paper deals with the case when the hemispherical resonator gyroscope is operated in angle measurement mode. In angle measurement mode, the resonator pattern angle precesses, with respect to the external rotation input, by the principle of the Coriolis effect, so that the external rotation can be estimated, by measuring the amount of precession angle. However, this pattern angle drifts, due to the manufacturing error of the resonator. Since the drift effect causes degradation of the angle estimation performance of the resonator, the corresponding drift compensation control should be performed, to enhance the estimation performance. In this paper, a mathematical model of the hemispherical resonator gyro is first introduced. By using the mathematical model, a nonlinear observer for imperfection parameter estimation, and the corresponding compensation controller are designed to operate hemispherical resonator gyros, as angle measurement sensors.

• 센서학회지
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• 제32권1호
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• pp.62-65
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• 2023

The wave mode calculation of a large-scale optical system in comparison to the working wavelength is practically impossible because the computational cost increases exponentially. In this paper, we propose a method that can obtain the optical mode in a large-scale optical system. The method carries out simulations by dividing the calculation area into blocks and moving along the light axis along which the light propagates. By applying this method to the calculation of resonant modes in a ring-type optical resonator, which is mainly used for ring laser optical gyro sensors, the efficiency of the proposed method was verified.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2014년도 추계학술대회 논문집
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• pp.457-460
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• 2014

세차계수는 플랫폼의 각속도 혹은 회전각에 대한 공진기에 형성되는 탄성 정상파의 각속도 혹은 회전각의 비율로 정의된다. 본 논문에서는 코리올리 효과에 의한 반구형 공진기의 세차계수에 대한 연구를 레일리-리츠법과 라그랑지안 역학을 이용하여 수행하였으며 쉘의 중립면이 레일리 모드 변형을 한다는 조건을 적용하였고 계산 결과를 이전 연구자들의 결과들과 비교하였다.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2001년도 ICCAS
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• pp.56.2-56
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• 2001

For the improvement of minimum sensing angular velocity of ring laser gyro, the influence of a low-scattering mirror application to laser resonator was investigated. Super polishing technique was employed for the fine mirror substrates of less than 1-${\AA}$-rms roughness. Mirror coating using ion-beam sputtering coating machine produced low-scattering mirror less than 30-ppm scattering. As a result of the mirror application to ring laser, the minimum sensing angular velocity of the gyro was improved down to about 0.1 deg/sec.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2013년도 춘계학술대회 논문집
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• pp.835-841
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• 2013

Modern solid-state gyroscopes (HRG) with hemispherical resonators from high-purity quartz glass and special surface superfinishing and ultrathin gold coating become the best instruments for precise-grade inertial reference units (IRU) targeting long-term space missions. Designing of these sensors could be a notable contribution into development of Korea as a space nation. In participial, 40mm diameter thin-shell resonator from high-purity fused quartz, fabricated as a single-piece with its supporting stem has been designed, machined, etched, tuned, tested, and delivered by STM Co. (ATS of Ukraine) several years ago; an extremely-high Q-factor (upto 10~20 millions) has been shown. Understanding of the best way how to match such a unique sensor with inner glass assembly of the gyro means how to use the high potential in a maximal extent; and this has become the urgent task. Inner quartz glass assembly has a very thin indium (In) layer soldered the resonator and its silica base (case), but effects of internal resonances between operational modal pair of the shell-cup and its side (parasitic) modes can notable degrade the potential of the sensor as a whole, instead of so low level of resonator's intrinsic losses. Unfortunately, there are special combinations of dimensions of the parts (so-called, "resonant sizes"), when intensive losses of energy occurs. The authors proposed to use the length of stem's fixture as an additional design parameter to avoid such cases. So-called, a cyclic scheme of finite element method (FEM) and ANSYS software were employed to estimate different combinations of gyro assembly parameters. This variant has no mismatches of numerical origin due to FEM's discrete mesh. The optimum length and dangerous "resonant lengths" have been found. The special attention has been paid to analyses of 3D effects in a cup-stem transient zone, including determination of a difference between the positions of geometrical Pole of the resonant hemisphere and of its "dynamical Pole", i.e., its real zone of oscillation node. Boundary effects between the shell (cup) and 3D short "beams" (inner and outer stems) have been ranged. The results of the numerical experiments have been compared with the classic model of a quasi-hemispherical shell band with inextensional midsurface, and the solution using Rayleigh's functions of the $1^{st}$ and $2^{nd}$ kinds. To guarantee the truth of the recommended sizes to a designer of the real device, the analytical and FEM results have been compared with experimental data for a party of real resonators. The consistency of the results obtained by different means has been shown with errors less than 5%. The results notably differ from the data published earlier by different researchers.

• 센서학회지
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• 제29권5호
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• pp.354-359
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• 2020

The high vacuum hermetic sealing technique ensures excellent performance of MEMS resonators. For the high vacuum hermetic sealing, the customization of anodic bonding equipment was conducted for the glass/Si/glass triple-stack anodic bonding process. Figure 1 presents the schematic of the MEMS resonator with triple-stack high-vacuum anodic bonding. The anodic bonding process for vacuum sealing was performed with the chamber pressure lower than 5 × 10^-6 mbar, the piston pressure of 5 kN, and the applied voltage was 1 kV. The process temperature during anodic bonding was 400 ℃. To maintain the vacuum condition of the glass cavity, a getter material, such as a titanium thin film, was deposited. The getter materials was active at the 400 ℃ during the anodic bonding process. To read out the electrical signals from the Si resonator, a vertical feed-through was applied by using through glass via (TGV) which is formed by sandblasting technique of cap glass wafer. The aluminum electrodes was conformally deposited on the via-hole structure of cap glass. The TGV process provides reliable electrical interconnection between Si resonator and aluminum electrodes on the cap glass without leakage or electrical disconnection through the TGV. The fabricated MEMS resonator with proposed vacuum packaging using three-layer anodic bonding process has resonance frequency and quality factor of about 16 kHz and more than 40,000, respectively.

• 한국광학회지
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• 제13권4호
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• pp.336-339
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• 2002

링레이저 자이로의 주파수 잠김을 개선하기 위하여, 링레이저 공진기에 저산란 반사경을 적용하는 연구가 수행되었다. 초정밀 연마기술을 통해 표면 거칠기 1Å rms 이하의 반사경 기판을 가공하였으며, 가공된 기판에 이온빔 스퍼터링 코팅방식을 이용하여 산란율 300ppm 이하의 반사경을 제작하였다. 제작된 저산란 반사경을 링레이저 자이로에 적용한 결과, 자이로의 잠김 주파수를 약 0.1 deg/sec 이하로 개선할 수 있었다.