• Journal of Institute of Control, Robotics and Systems
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• v.19 no.10
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• pp.947-954
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• 2013

This article focuses on a hemispherical resonator gyro driven by the Coriolis effect. The operational principle of resonator gyros and mathematical models are introduced. These models are useful to explain the behavior of a resonator and to design controllers. Several control tests of a resonator have been done. A resonator has been excited by electromagnets controlled by a computer. Its amplitude has been adjusted by a PI control. The transient response is matched with a simulation result based on a mathematical model. A vibrating pattern may drift due to non-uniform factors of a resonator. The drift of the vibrating pattern is controlled and aligned to a reference direction by a PI control. These results are very useful to understand the behavior of resonator gyros and to design advanced control algorithm for better performance.

• Journal of Institute of Control, Robotics and Systems
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• v.20 no.5
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• pp.563-569
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• 2014

This article focuses on a hemispherical resonator gyro driven by the Coriolis effect. A hemispherical shell, called a resonator, is maintained in the resonance state by amplitude control and phase locking control. Parametric excitation has been used to control the amplitude. For rate measurement mode or FTR mode, nodal points have been kept to an amplitude of zero. Angular rate measurement has been demonstrated by rotating a resonator. Frequency mismatch between two stiffness principal axes is a major cause of low performance: vibrating pattern drift and reduced control effectiveness. This mismatch has been reduced significantly by the addition of small mass. A negative spring effect, which lowers resonance frequencies, has been verified experimentally.

• International Journal of Aeronautical and Space Sciences
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• v.14 no.4
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• pp.379-386
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• 2013

The hemispherical resonator gyroscope is a type of vibratory gyroscope, which can measure angle or angular rate, based on its operating mode. This paper deals with the case when the hemispherical resonator gyroscope is operated in angle measurement mode. In angle measurement mode, the resonator pattern angle precesses, with respect to the external rotation input, by the principle of the Coriolis effect, so that the external rotation can be estimated, by measuring the amount of precession angle. However, this pattern angle drifts, due to the manufacturing error of the resonator. Since the drift effect causes degradation of the angle estimation performance of the resonator, the corresponding drift compensation control should be performed, to enhance the estimation performance. In this paper, a mathematical model of the hemispherical resonator gyro is first introduced. By using the mathematical model, a nonlinear observer for imperfection parameter estimation, and the corresponding compensation controller are designed to operate hemispherical resonator gyros, as angle measurement sensors.

• Journal of Sensor Science and Technology
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• v.32 no.1
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• pp.62-65
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• 2023

The wave mode calculation of a large-scale optical system in comparison to the working wavelength is practically impossible because the computational cost increases exponentially. In this paper, we propose a method that can obtain the optical mode in a large-scale optical system. The method carries out simulations by dividing the calculation area into blocks and moving along the light axis along which the light propagates. By applying this method to the calculation of resonant modes in a ring-type optical resonator, which is mainly used for ring laser optical gyro sensors, the efficiency of the proposed method was verified.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2014.10a
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• pp.457-460
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• 2014

Precession coefficient is defined by the ratio of the angular rate or rotational angle of the standing wave formed in an elastic resonator with respect to that of the platform. In this paper the precession of a hemispherical resonator due to Coriolis' effect is studied through Rayleigh-Ritz's method and Lagrangian Mechanics when the resonator undergoes Rayleigh's mode deformation. The calculation result was compared with studies by other researchers.

• 제어로봇시스템학회:학술대회논문집
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• 2001.10a
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• pp.56.2-56
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• 2001

For the improvement of minimum sensing angular velocity of ring laser gyro, the influence of a low-scattering mirror application to laser resonator was investigated. Super polishing technique was employed for the fine mirror substrates of less than 1-${\AA}$-rms roughness. Mirror coating using ion-beam sputtering coating machine produced low-scattering mirror less than 30-ppm scattering. As a result of the mirror application to ring laser, the minimum sensing angular velocity of the gyro was improved down to about 0.1 deg/sec.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2013.04a
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• pp.835-841
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• 2013

Modern solid-state gyroscopes (HRG) with hemispherical resonators from high-purity quartz glass and special surface superfinishing and ultrathin gold coating become the best instruments for precise-grade inertial reference units (IRU) targeting long-term space missions. Designing of these sensors could be a notable contribution into development of Korea as a space nation. In participial, 40mm diameter thin-shell resonator from high-purity fused quartz, fabricated as a single-piece with its supporting stem has been designed, machined, etched, tuned, tested, and delivered by STM Co. (ATS of Ukraine) several years ago; an extremely-high Q-factor (upto 10~20 millions) has been shown. Understanding of the best way how to match such a unique sensor with inner glass assembly of the gyro means how to use the high potential in a maximal extent; and this has become the urgent task. Inner quartz glass assembly has a very thin indium (In) layer soldered the resonator and its silica base (case), but effects of internal resonances between operational modal pair of the shell-cup and its side (parasitic) modes can notable degrade the potential of the sensor as a whole, instead of so low level of resonator's intrinsic losses. Unfortunately, there are special combinations of dimensions of the parts (so-called, "resonant sizes"), when intensive losses of energy occurs. The authors proposed to use the length of stem's fixture as an additional design parameter to avoid such cases. So-called, a cyclic scheme of finite element method (FEM) and ANSYS software were employed to estimate different combinations of gyro assembly parameters. This variant has no mismatches of numerical origin due to FEM's discrete mesh. The optimum length and dangerous "resonant lengths" have been found. The special attention has been paid to analyses of 3D effects in a cup-stem transient zone, including determination of a difference between the positions of geometrical Pole of the resonant hemisphere and of its "dynamical Pole", i.e., its real zone of oscillation node. Boundary effects between the shell (cup) and 3D short "beams" (inner and outer stems) have been ranged. The results of the numerical experiments have been compared with the classic model of a quasi-hemispherical shell band with inextensional midsurface, and the solution using Rayleigh's functions of the $1^{st}$ and $2^{nd}$ kinds. To guarantee the truth of the recommended sizes to a designer of the real device, the analytical and FEM results have been compared with experimental data for a party of real resonators. The consistency of the results obtained by different means has been shown with errors less than 5%. The results notably differ from the data published earlier by different researchers.

• Journal of Sensor Science and Technology
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• v.29 no.5
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• pp.354-359
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• 2020

The high vacuum hermetic sealing technique ensures excellent performance of MEMS resonators. For the high vacuum hermetic sealing, the customization of anodic bonding equipment was conducted for the glass/Si/glass triple-stack anodic bonding process. Figure 1 presents the schematic of the MEMS resonator with triple-stack high-vacuum anodic bonding. The anodic bonding process for vacuum sealing was performed with the chamber pressure lower than 5 × 10^-6 mbar, the piston pressure of 5 kN, and the applied voltage was 1 kV. The process temperature during anodic bonding was 400 ℃. To maintain the vacuum condition of the glass cavity, a getter material, such as a titanium thin film, was deposited. The getter materials was active at the 400 ℃ during the anodic bonding process. To read out the electrical signals from the Si resonator, a vertical feed-through was applied by using through glass via (TGV) which is formed by sandblasting technique of cap glass wafer. The aluminum electrodes was conformally deposited on the via-hole structure of cap glass. The TGV process provides reliable electrical interconnection between Si resonator and aluminum electrodes on the cap glass without leakage or electrical disconnection through the TGV. The fabricated MEMS resonator with proposed vacuum packaging using three-layer anodic bonding process has resonance frequency and quality factor of about 16 kHz and more than 40,000, respectively.

• Korean Journal of Optics and Photonics
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• v.13 no.4
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• pp.336-339
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• 2002

For the improvement of the lock-in frequency of a ring laser gyro, a low-scattering mirror was employed in the laser resonator. A super-polishing technique produced fine mirror substrates of less than 1-A-rms-roughness. The mirror coating using an ionbeam sputtering technique reduced the scattering loss to less than 30 ppm. As a result of the mirror scattering enhancement of the ring laser, the lock-in frequency of the gyro was improved up to about 0.1 deg/sec.