• JSTS:Journal of Semiconductor Technology and Science
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• v.4 no.2
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• pp.100-105
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• 2004

The influencing factors on the OPC (optical proximity correction) results are quantitatively analyzed using OPCed L/S patterns. ${\sigma}$ values of proximity variations are measured to be 9.3 nm and 15.2 nm for PR-A and PR-B, respectively. The effect of post exposure bake condition is assessed. 16.2 nm and 13.8 nm of variations are observed. Proximity variations of 11.6 nm and 15.2 nm are measured by changing the illumination condition. In order not to seriously deteriorate the OPC, these factors should be fixed after the OPC rules are extracted. Proximity variations of 11.4, 13.9, and 15.2 nm are observed for the mask mean-to-targets of 0, 2 and 4 nm, respectively. The decrease the OPC grid size from 1 nm to 0.5 nm enhances the correction resolution and the OCV is reduced from 14.6 nm to 11.4 nm. The enhancement amount of proximity variations are 9.2 nm corresponding to 39% improvement. The critical dimension (CD) uniformity improvement for adopting the small grid size is confirmed by measuring the CD uniformity on real SRAM pattern. CD uniformities are measured 9.9 nm and 8.7 nm for grid size of 1 nm and 0.5 nm, respectively. 22% improvement of the CD uniformity is achieved. The decrease of OPC grid size is shown to improve not only the proximity correction, but also the uniformity.

• Journal of the Computational Structural Engineering Institute of Korea
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• v.32 no.4
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• pp.257-263
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• 2019

Multilayered structures include lamination by relatively thick plies and thin interlayers. For efficient peridynamic analysis of dynamic fracturing multilayered structures, the interlayer is modeled using ghost peridynamic particles while the ply is formulated via real peridynamics. With the nonlocal ghost interlayer, one may keep the discretization resolution low for the ply. In this study, the characteristics of dynamic wave propagation through the nonlocal ghost interlayer in peridynamic analysis are investigated. It is observed that the interlayer not only binds adjacent plies, but also significantly influences energy transfer between plies, and thereby their deformation and motion. In addition, near a surface or boundary, peridynamic particles do not have a full nonlocal neighborhoods. This causes the effective material properties near the surface to be different from those in the bulk. Surface correction based on neighborhood volumes is employed. The impact of surface correction on wave propagation in multilayered structures is investigated.

• Nuclear Medicine and Molecular Imaging
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• v.42 no.1
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• pp.52-60
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• 2008

Purpose: To establish the methods for sinogram formation and correction in order to appropriately apply the filtered backprojection (FBP) reconstruction algorithm to the data acquired using PET scanner with multiple scintillation crystal layers. Materials and Methods: Formation for raw PET data storage and conversion methods from listmode data to histogram and sinogram were optimized. To solve the various problems occurred while the raw histogram was converted into sinogram, optimal sampling strategy and sampling efficiency correction method were investigated. Gap compensation methods that is unique in this system were also investigated. All the sinogram data were reconstructed using 20 filtered backprojection algorithm and compared to estimate the improvements by the correction algorithms. Results: Optimal radial sampling interval and number of angular samples in terms of the sampling theorem and sampling efficiency correction algorithm were pitch/2 and 120, respectively. By applying the sampling efficiency correction and gap compensation, artifacts and background noise on the reconstructed image could be reduced. Conclusion: Conversion method from the histogram to sinogram was investigated for the FBP reconstruction of data acquired using multiple scintillation crystal layers. This method will be useful for the fast 20 reconstruction of multiple crystal layer PET data.

• Korean Journal of Remote Sensing
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• v.37 no.5_1
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• pp.1215-1227
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• 2021

Surface reflectance, as a product of the absolute atmospheric correction process of low-orbit satellite imagery, is the basic data required for accurate vegetation analysis. The Commission on Earth Observation Satellite (CEOS) has conducted research and guidance to produce analysis-ready data (ARD) on surface reflectance products for immediate use by users. However, this trend is still in the early stages of research dealing with ARD for high-resolution multispectral images such as KOMPSAT-3A and CAS-500, as it targets medium- to low-resolution satellite images. This study first summarizes the types of distribution of ARD data according to existing cases. The link between Open Data Cube (ODC), the cloud-based satellite image application platforms, and ARD data was also explained. As a result, we present practical ARD deployment steps for high-resolution satellite images and several types of application models in the conceptual level for high-resolution satellite images deployed in ODC and cloud environments. In addition, data pricing policies, accuracy quality issue, platform applicability, cloud environment issues, and international cooperation regarding the proposed implementation and application model were discussed. International organizations related to Earth observation satellites, such as Group on Earth Observations (GEO) and Committee on Earth Observation Satellites (CEOS), are continuing to develop system technologies and standards for the spread of ARD and ODC, and these achievements are expanding to the private sector. Therefore, a satellite-holder country looking for worldwide markets for satellite images must develop a strategy to respond to this international trend.

• Korean Journal of Remote Sensing
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• v.38 no.6_1
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• pp.1445-1462
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• 2022

Compact Advanced Satellite 500-4 (CAS500-4), which is scheduled to be launched in 2025, is a mid-resolution satellite with a 5 m resolution developed for wide-area agriculture and forest observation. To utilize satellite images, it is important to establish a precision sensor model and establish accurate geometric information. Previous research reported that a precision sensor model could be automatically established through the process of matching ground control point (GCP) chips and satellite images. Therefore, to improve the geometric accuracy of satellite images, it is necessary to improve the GCP chip matching performance. This paper proposes an improved GCP chip matching scheme for improved precision sensor modeling of mid-resolution satellite images. When using high-resolution GCP chips for matching against mid-resolution satellite images, there are two major issues: handling the resolution difference between GCP chips and satellite images and finding the optimal quantity of GCP chips. To solve these issues, this study compared and analyzed chip matching performances according to various satellite image upsampling factors and various number of chips. RapidEye images with a resolution of 5m were used as mid-resolution satellite images. GCP chips were prepared from aerial orthographic images with a resolution of 0.25 m and satellite orthogonal images with a resolution of 0.5 m. Accuracy analysis was performed using manually extracted reference points. Experiment results show that upsampling factor of two and three significantly improved sensor model accuracy. They also show that the accuracy was maintained with reduced number of GCP chips of around 100. The results of the study confirmed the possibility of applying high-resolution GCP chips for automated precision sensor modeling of mid-resolution satellite images with improved accuracy. It is expected that the results of this study can be used to establish a precise sensor model for CAS500-4.

• The Korean Journal of Nuclear Medicine Technology
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• v.13 no.1
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• pp.77-81
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• 2009

Purpose: The PET of the PET/CT (Positron Emission Tomography/Computed Tomography) quantitatively shows the biological and chemical information of the body, but has limitation of presenting the clear anatomic structure. Thus combining the PET with CT, it is not only possible to offer the higher resolution but also effectively shorten the scanning time and reduce the noises by using CT data in attenuation correction. And because, at the CT scanning, the contrast media makes it easy to determine a exact range of the lesion and distinguish the normal organs, there is a certain increase in the use of it. However, in the case of using the contrast media, it affects semi-quantitative measures of the PET/CT images. In this study, therefore, we will be to establish the reliability of the SUV (Standardized Uptake Value) with CT data correction so that it can help more accurate diagnosis. Materials and Methods: In this experiment, a total of 30 people are targeted - age range: from 27 to 72, average age : 49.6 - and DSTe (General Electric Healthcare, Milwaukee, MI, USA) is used for equipment. $^{18}F$- FDG 370~555 MBq is injected into the subjects depending on their weight and, after about 60 minutes of their stable position, a whole-body scan is taken. The CT scan is set to 140 kV and 210 mA, and the injected amount of the contrast media is 2 cc per 1 kg of the patients' weight. With the raw data from the scan, we obtain a image showing the effect of the contrast media through the attenuation correction by both of the corrected and uncorrected CT data. Then we mark out ROI (Region of Interest) in each area to measure SUV and analyze the difference. Results: According to the analysis, the SUV is decreased in the liver and heart which have more bloodstream than the others, because of the contrast media correction. On the other hand, there is no difference in the lungs. Conclusions: Whereas the CT scan images with the contrast media from the PET/CT increase the contrast of the targeted region for the test so that it can improve efficiency of diagnosis, there occurred an increase of SUV, a semi-quantitative analytical method. In this research, we measure the variation of SUV through the correction of the influence of contrast media and compare the differences. As we revise the SUV which is increasing in the image with attenuation correction by using contrast media, we can expect anatomical images of high-resolution. Furthermore, it is considered that through this trusted semi-quantitative method, it will definitely enhance the diagnostic value.

• Journal of Korean Society for Geospatial Information Science
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• v.18 no.2
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• pp.35-45
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• 2010

The objective of this study is to verify the positional accuracy by performing the orthometric corrections on the high resolution satellite images and to analyze the band correlation between the high resolution images corrected with orthometric correction. The objectives also included an analysis on the correlation of NDVI. For the orthometric correction of images from KOMPSAT2 and IKONOS, systematic errors were removed in use of RPC data, and non-planar distortions were corrected with GPS surveying data. Also, by preempting the image points at the same positions within ortho images, a comparison was performed on positional accuracies between image points of each image and GPS surveying points. The comparison was also made on the positional accuracies of image points. between the images. For correlation of band and correlation of NDVI, the descriptive statistics of DN values were acquired for respective bands by adding the Quickbird images and Aerial Photographs undergone through orthometric correction at the time of purchase. As result, from a comparison on positional accuracies of Orthoimages from KOMPSAT2 and Ortho Images of IKONOS was made. From the comparison the distance between the image points within each image and GPS surveying points was identified as 3.41m for KOMPSAT2 and as 1.45m for IKONOS, presenting a difference of 1.96m. Whereas, RMSE between image points was identified as 1.88m. The level of correlation was measured by using Quickbird, KOMPSAT2, IKONOS and Aerial Photographs between inter-image bands and NDVI, showing that there were high levels of correlation between Quickbird and IKONOS identified from all bands as well as from NDVI, except a high level of correlation that was identified between the Aerial Photographs and KOMPSAT2 from Band 2. Low levels of correlation were also identified between Quickbird and Aerial Photographs from Band 1. and between KOMPSAT2 and IKONOS from Band 2 and Band 4, whereas, KOMPSAT2 showed low correlations with Aerial Photographs from Band 3. For NDVI, KOMPSAT2 showed low level of correlations with both of QuickBird and IKONOS.

• Korean Journal of Optics and Photonics
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• v.12 no.3
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• pp.190-199
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• 2001

In this paper, we have researched the depth of focus (DOF) and cutoff intensity of the $0.1{\mu}m$rule dense line'||'&'||'space pattern according to the various off-axis illumination (OAl) conditions in the optical system of 0.65 NA using ArF excimer laser (193 nm). We have also studied the variation of the DOF and cutoff intensity according to the sub-resolution pattern (hammer head type) size for optical proximity correction (OPC) applied to the capacitor pattern and the various OAl conditions in the same optical system. As a result, it is revealed that the cross type quadrupole or annular illumination is preferred to the conventional X type quadrupole for printing the $0.1{\mu}m$ rule dense pattern. Also, we can investigate the optimal illumination condition and the size of ope sub-resolution pattern to keep a consistent DGF and cutoff intensity trends.

• Journal of Advanced Navigation Technology
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• v.21 no.3
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• pp.279-286
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• 2017

The international maritime organization(IMO) has defined performance requirements for future maritime navigation through IMO resolution A.915(22) in 2001. Many DGPS systems currently providing DGPS services do not meet the performance requirements specified in IMO resolution A.915(22). The use of SBAS is considered as one of the DGPS replacement and supplementary system for coping with the increase in demand performance and providing safe positioning service. In particular, since a large amount of budget is required to rearrange the existing DGPS reference stations, a method which transmits differential corrections generated by using SBAS message has been proposed. In this paper, we compare and analyze the performance of NDGPS which is operated by the National Maritime PNT Office of the ministry of oceans and fisheries(MOF) in Korea and MSAS in Japan. Also, we verify that SBAS, as alternative and complementary system, meets the performance requirement specified in IMO resolution A.915(22).

• Journal of The Korean Astronomical Society
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• v.47 no.2
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• pp.43-47
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• 2014

Many advanced ground-based solar telescopes improve the spatial resolution of observation images using an adaptive optics (AO) system. As any AO correction remains only partial, it is necessary to use post-processing image reconstruction techniques such as speckle masking or shift-and-add (SAA) to reconstruct a high-spatial-resolution image from atmospherically degraded solar images. In the New Vacuum Solar Telescope (NVST), the spatial resolution in solar images is improved by frame selection and SAA. In order to overcome the burden of massive speckle data processing, we investigate the possibility of using the speckle reconstruction program in a real-time application at the telescope site. The code has been written in the C programming language and optimized for parallel processing in a multi-processor environment. We analyze the scalability of the code to identify possible bottlenecks, and we conclude that the presented code is capable of being run in real-time reconstruction applications at NVST and future large aperture solar telescopes if care is taken that the multi-processor environment has low latencies between the computation nodes.