Analysis of Process Parameters to Improve On-Chip Linewidth Variation |
Jang, Yun-Kyeong
(Process Development Team, Semiconductor R&D Center, Samsung Electronics)
Lee, Doo-Youl (Process Development Team, Semiconductor R&D Center, Samsung Electronics) Lee, Sung-Woo (Process Development Team, Semiconductor R&D Center, Samsung Electronics) Lee, Eun-Mi (Process Development Team, Semiconductor R&D Center, Samsung Electronics) Choi, Soo-Han (Process Development Team, Semiconductor R&D Center, Samsung Electronics) Kang, Yool (Process Development Team, Semiconductor R&D Center, Samsung Electronics) Yeo, Gi-Sung (Process Development Team, Semiconductor R&D Center, Samsung Electronics) Woo, Sang-Gyun (Process Development Team, Semiconductor R&D Center, Samsung Electronics) Cho, Han-Ku (Process Development Team, Semiconductor R&D Center, Samsung Electronics) Park, Jong-Rak (Department of Photonic Engineering, College of Engineering, Chosun University) |
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