• 제목/요약/키워드: replication process

검색결과 220건 처리시간 0.033초

열방식 마이크로 임프린트 공정을 위한 고분자 재료의 수치적 모델링과 해석 (Numerical Investigation of Micro Thermal Imprint Process of Glassy Polymer near the Glass Transition Temperature)

  • 란 슈하이;이수훈;이혜진;송정한;성연욱;김무종;이문구
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2009년도 추계학술대회 논문집
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    • pp.45-52
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    • 2009
  • The research on miniature devices based on non-silicon materials, in particular polymeric materials has been attracting more and more attention in the research field of the micro/nano fabrication in recent years. Lost of applications and many literatures have been reported. However, the study on the micro thermal imprint process of glassy polymer is still not systematic and inadequate. The aim of this research I to obtain a numerical material model for an amorphous glassy polymer, polycarbonate (PC), which can be used in finite element analysis (FEA) of the micro thermal imprint process near the glass transition temperature (Tg). An understanding of the deformation behavior of the PC specimens was acquired by performing tensile stress relaxation tests. The viscoelastic material model based on generalized Maxwell model was introduced for the material near Tg to establish the FE model based on the commercial FEA code ABAQUS/Standard with a suitable set of parameters obtained for this material model form the test data. As a result, the feasibility of the established viscoelastic model for PC near Tg was confirmed and this material model can be used in FE analysis for the prediction and improvement of the micro thermal imprint process for pattern replication.

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실험 계획법을 이용한 점착방지막용 플라즈마 증착 공정변수의 최적화 연구 (Optimizing the Plasma Deposition Process Parameters of Antistiction Layers Using a DOE (Design of Experiment))

  • 차남구;박창화;조민수;박진구;정준호;이응숙
    • 한국재료학회지
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    • 제15권11호
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    • pp.705-710
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    • 2005
  • NIL (nanoimprint lithography) technique has demonstrated a high potential for wafer size definition of nanometer as well as micrometer size patterns. During the replication process by NIL, the stiction between the stamp and the polymer is one of major problems. This stiction problem is moi·e important in small sized patterns. An antistiction layer prevents this stiction ana insures a clean demolding process. In this paper, we were using a TCP (transfer coupled plasma) equipment and $C_4F_8$ as a precursor to make a Teflon-like antistiction layer. This antistiction layer was deposited on a 6 inch silicon wafer to have nanometer scale thicknesses. The thickness of deposited antistiction layer was measured by ellipsometry. To optimize the process factor such as table height (TH), substrate temperature (ST), working pressure (WP) and plasma power (PP), we were using a design of experimental (DOE) method. The table of full factorial arrays was set by the 4 factors and 2 levels. Using this table, experiments were organized to achieve 2 responses such as deposition rate and non-uniformity. It was investigated that the main effects and interaction effects between parameters. Deposition rate was in proportion to table height, working pressure and plasma power. Non-uniformity was in proportion to substrate temperature and working pressure. Using a response optimization, we were able to get the optimized deposition condition at desired deposition rate and an experimental deposition rate showed similar results.

암의 중심체 증폭 이해를 통한 표적 항암제 개발 (Understanding centrosome amplification in cancer: A pathway toward precision-targeted cancer drug development)

  • 김태경
    • 생명과학회지
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    • 제33권11호
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    • pp.950-955
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    • 2023
  • 세포 분열은 생명체의 생존과 발달에 필수적인 과정이며, 이 과정에서 복제된 염색체가 오류 없이 정확하게 두 개로 분리되는 것이 중요하다. 중심체(centrosome)는 미세소관 형성 센터(microtubule-organizing center, MTOC)를 구성하는 핵심 기관이며, MTOC는 세포 분열과정에서 방추체를 구성하는 미세소관을 형성한다. 또한 중심체는 세포에서의 신호 경로와 운동성에 관여한다. 정상적인 세포에서 중심체는 한개씩 존재하지만, S 기에서 2개로 복제되어 세포의 양쪽 끝으로 이동하며, MTOC로부터 생성된 방추사는 복제된 염색체와 결합하여 염색체를 양쪽 끝으로 이동시킨다. 이후 세포는 두 개로 나눠져 세포 분열을 종결한다. 하지만 중심체가 정상적인 숫자보다 많은 중심체 증폭(centrosome amplification) 현상은 암세포에서 흔하게 발생하며, 이것은 염색체 불안정성(chromosomal instability, CIN)을 일으키는 원인이 될 수 있다. 본 논문에서는 중심체 복제 과정에 대해 알아보고, 이 과정에서 PLK4의 역할에 대해 알아본다. 또한 중심체 증폭이 일으킬 수 있는 결과에 대해 알아보고, 중심체 증폭의 핵심 인산화효소인 PLK4를 저해하는 약물이 어떻게 특정 종류의 암세포를 치료하는 데 있어 기여할 수 있는지 고찰해 보고자 한다.

과냉각 액체 영역에서의 변형거동을 이용한 벌크 비정질 합금의 미세성형 기술 개발 (Micro Forming of Bulk Metallic Glass using the Deformation Behavior in the Supercooled Liquid Region)

  • 홍경태;옥명렬;서진유
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2003년도 추계학술대회논문집
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    • pp.93-96
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    • 2003
  • Recently, various bulk metallic glasses (BMG's) haying good mechanical and chemical properties were developed. BMG's can easily be deformed in the supercooled liquid region, via viscous flow mechanism. In our previous work, we evaluated the deformation behavior and some other basic properties of Z $r_{41.2}$ $Ti_{13.8}$C $u_{12.5}$N $i_{10}$B $e_{22.5}$ alloy. In this study, we investigated the micro forming of Z $r_{41.2}$ $Ti_{13.8}$C $u_{12.5}$N $i_{10}$B $e_{22.5}$ alloy. The process condition was chosen based on the viscosity data from TMA, and superalloy and Si wafer with micro patterns on the surface were used as forming die. The alloy showed good replication of the patterns. However, some stripe patterns, resembling scratches, appeared on the deformed alloy surface. These scratches can be reduced or eliminated by polishing before forming.ing.ore forming.ing.

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Altered Invertase expression induced by BCTV on Arabidopsis

  • Kim, Soyeon;Park, Eunsuk;Lee, Tack-Kyun;Lee, Sukchan
    • 한국식물병리학회:학술대회논문집
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    • 한국식물병리학회 2003년도 정기총회 및 추계학술발표회
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    • pp.74.2-74
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    • 2003
  • Arabidopsis infected with beet curly top virus (BCTV) has the systemic symptoms like stunting of Plant growth, curling of leaves and shoot tips, and callus induction. The regulation of sucrose metabolism by BCTV infection is essential for obtaining the energy source in the process of virus replication and symptom development. Sucrose metabolism-associated gene expression and biochemical enzyme activity were analyzed with the rossette leaves and inflorescencestems of BCTV infected Arabidopsis by the time course of 1, 7, 14, 21 day postinoculation. The expression of invertase and sucrose synthase genes ( encoding sucrose-cleaving enzymes )was increased and reversely the level of Atkin10a ( sucrose non-fermenting gene ) was decreased, resulting by semi-quantitative reverse transcription polymerase chain reaction. The biochemical analysis of invertase and sucrose synthase activity was performed. The activity of neutral invertase in the inflorescence stems was elevated remarkably. The photosynthetic response in the source of sucrose metabolism was consistent with the down-regulation of ribulose 1,5 bisphosphate carboxylase gene, and lower activity than mock-inoculated plants. The levels of genes pertaining to the cell cycle, hormone, and biotic stress-related pathway showed an increase or a decrease dependent on viral symptoms. Therefore, sucrose sensing by BCTV infection can regulate the expression of sucrose metabolism-related key enzymes such as invertase and Atkin10a, and these gene products might influence to symptom development.

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극미세 3 차원 형상복제를 위한 금속몰드 제작에 관한 연구 (Fabrication of 3D Metallic Molds for Multi-replication of Microstructures)

  • 배공명;고종수;박상후;임태우;양동열
    • 한국정밀공학회지
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    • 제26권8호
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    • pp.119-125
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    • 2009
  • Fabrication of a three-dimensional (3D) metallic mold for multi-production of a microstructure was studied to settle the problem of long processing time in 3D microfabrication. To date, complicated 3D microstructures including 3D photonic crystals, 3D microlens array, 3D filter for microfludics, and something else were created successfully using the two-photon polymerization (TPP) which was considered as paving the way to fabricate a real 3D shape in nano/microscale. However, for those fabrications, much processing time and efforts were inevitably required. To solve this issue, a simple and effective way was proposed in this paper; 3D master patterns were prepared using TPP, and then counter-shaped Ni molds were fabricated by electroforming process. By using these molds, 3D microstructures can be reproduced with short-processing time and low-effort comparing to the conventional approach, TPP We report some parameters to fabricate a metallic mold precisely.

미세 광소자용 도파로 정밀 복제기술 연구 (Precise Replica Technology Study for Fine Optical Waveguide Device)

  • 오승훈;김창석;정명영;부정숙
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 춘계학술대회 논문집
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    • pp.1493-1496
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    • 2005
  • In this paper, we describe a simple, precise and low cost method of fabricating PDMS stamp for UV embossing. It is important to improve the replication quality of stamp because the accuracy of fabricated structure is related to that of the stamp in UV embossing. The PDMS stamp has been fabricated by the replica molding technology with ultrasonic vibration to eliminate micro-air bubbles during the fabrication process of PDMS stamp. Also, this fabrication to use ultrasonic vibration promotes PDMS solution to fill into micro channel and edge parts. We report the fabrication of an optical core using UV embossing with fabricated PDMS stamp. This fabricated core is $7\;\mu{m}\;at\;depth,\;6\;\mu{m}\;at\;width.\;This\;measured\;value\;has\;the\;difference\;below\;1\;\mu{m}$compared to the original stamp. The surface roughness of core is about 14 nm root mean square. This is satisfactory value to use low-loss optical waveguide. Our successful demonstration of precise replica technology presents an alternative approach for the stamp of UV embossing.

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미세 패턴을 가진 박판 사출 성형에서의 금형내 압력 온도 측정 및 분석 (Data Acquisition of Thin-wall Injection Molding Cavity with Micro Pattern)

  • 황은주;유영은;제태진;최두선
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 춘계학술대회 논문집
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    • pp.1601-1604
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    • 2005
  • The demand increasing of optical applications like as display devices derives interest for fabrication process. The product s development is apt to fabricate numerous thin and wide surfaces with micro pattern. Naturally that needs injection molding fabrication for the mass production. In existing manufacturing, the product quality is controlled by input fabrication condition from the outside. That can be called as a try and error method and not fundamentally solve the troubles; imperfect replication, war page, short shot, etc. To understand the cause and bring a solution, it is needed that check of changing in the cavity. This study can catch them. Data acquisition system about temperature and pressure distribution is settled and can get some data. From this research, other studies related with DAQ in cavity can start on the easier step.

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Fabrication of Silicon Nanotemplate for Polymer Nanolens Array

  • Cho, Si-Hyeong;Kim, Hyuk-Min;Lee, Jung-Hwan;Venkatesh, R. Prasanna;Rizwan, Muhammad;Park, Jin-Goo
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2011년도 춘계학술발표대회
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    • pp.37.1-37.1
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    • 2011
  • Miniaturization of lenses has been widely researched by various scientific and engineering techniques. As a result, micro scaled lens structure could be easily achieved from various fabrication techniques; nevertheless it is still challenging to make nano scaled lenses. This paper reports a novel fabrication method of silicon nanotemplate for nanolens array. The inverse structure of nanolens array was fabricated on silicon substrate by reactive ion etching (RIE) process. This technique has a flexibility to produce different tip shapes using different pattern masks. Once the silicon nano-tip array structure is well-defined using an optimized recipe, it is followed by polymer molding to duplicate nanolens array from the template. Finally, the nanostructures formed on silicon nanotemplate and polymer replica were investigated using FE-SEM and AFM measurements. The nano scaled lens can be manufactured from the same template, also using other replication techniques such as imprinting, injection molding and so on.

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Molecular Modeling of Small Molecules as BVDV RNA-Dependent RNA Polymerase Allosteric Inhibitors

  • Chai, Han-Ha;Lim, Dajeong;Chai, Hee-Yeoul;Jung, Eunkyoung
    • Bulletin of the Korean Chemical Society
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    • 제34권3호
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    • pp.837-850
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    • 2013
  • Bovine viral diarrhea virus (BVDV), a major pathogen of cattle, is a well-characterized pestivirus which has been used as a good model virus for HCV. The RNA-dependent RNA polymerase (RdRp) plays a key role in the RNA replication process, thus it has been targeted for antivirus drugs. We employed two-dimensional quantitative structure-activity relationship (2D-QSAR) and molecular field analysis (MFA) to identify the molecular substructure requirements, and the particular characteristics resulted in increased inhibitory activity for the known series of compounds to act as effective BVDV inhibitors. The 2D-QSAR study provided the rationale concept for changes in the structure to have more potent analogs focused on the class of arylazoenamines, benzimidazoles, and acridine derivatives with an optimal subset of descriptors, which have significantly contributed to overall anti-BVDV activity. MFA represented the molecular patterns responsible for the actions of antiviral compound at their receptors. We conclude that the polarity and the polarizability of a molecule play a main role in the inhibitory activity of BVDV inhibitors in the QSAR modeling.