• 한국기계가공학회지
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• 제3권2호
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• pp.53-59
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• 2004

In this paper, we propose a new multi-purpose Scanning Force Microscope (SFM) system. The system can be used for nano/micro-scratching, in-process profile measurement, and observation of potential surface defects which occur during the scratching in air or liquid. Experimental results of nano/micro-scratching show that the smallest scratching depth can be controlled to be 10nm, which corresponds to the stability of the SFM system. Profile measurements of nano/micro-scratching surfaces have also been performed by the method of on-machine measurement and in-process measurement. Two measurement results were in good agreement with each other. The maximum difference was approximately 10 nm, which was mainly caused by the sampling repeatability error that influences the measurement accuracy Also, micro-defects on the micro-scratching surface were successfully detected by the SFM system. It was confirmed that the number of micro-defects increases when the surface is subjected to a cyclic bending load. The maximum depth was less than 100nm.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1995년도 추계학술대회 논문집
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• pp.466-469
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• 1995

This paper presents a design and performance of the 6 D.O.F linear motion table with a magnetic bearing suspension. The linear positioning of the table with a 150mm stroke is driven by a brushless DC Linear motor and the other attitudes of the stage are controlled by the analog PD controller with magnetic bearing actuators. Each magnetic bearing unit which consists of 3 electromagnets, 3 capacitance probes and 3 backup bearings affords controlled forces by detecting the air gap between the probes and guideways. An integral type capacitance probe amplifier is equipped on the upper plate of the table so that the probe line to the probe amplifier can be shorter therefore the problems due to the stray capacitance and noise can be reduced. Form the pitch-yaw errormeasured by the autocollimator, the vertical and horizont straightness errors of the table are derived that they are maintained below 1.mu. m over 100mm stroke. The positioning accuracy of the linear motion is maintained below 2 .mu. m and the repeatability error is below 1 .mu. m

• 한국항행학회논문지
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• 제13권5호
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• pp.756-762
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• 2009

비선형 마찰인 유압 작동기의 스틱-슬립 마찰은 정확성과 응답성에 문제가 된다. 그러므로 마찰보상은 다양한 제어알고리즘을 통하여 연구되어 왔다. 적응이산시간 슬라이딩 추종제어기는 유압작동기 내의 비선형 마찰 특성을 보상하기 위하여 적용하였다. 다오판틴 방정식을 기초로 하여 새로운 이산시간 슬라이딩 함수는 마찰과 모델링 오차를 포함하여 제어법칙을 정의하였다. 비선형 파라미터의 추종성을 기초로 슬라이딩 함수와 프로젝션 항수를 이용하여 강인성을 높였다. 시뮬레이션과 실험결과는 좋은 추종성능을 얻었다.

• 대한의용생체공학회:의공학회지
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• 제38권5호
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• pp.256-263
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• 2017

By using the buildup characteristics of the radiophotoluminescence glass dosimeter(RPLGD), it is aimed to help the measurement of the accurate dose by measuring the radiation dose according to the time of the glass element. Five glass elements were arranged on the table and the source to image receptor distance(SID) was set to 100 cm for the build-up radiation dose measurement of the fluorescent glass dosimeter glass element(GD-352M). Radiation doses and saturation rates were measured over time according to irradiation time, with the tube voltage (30, 60, 90 kVp) and tube current (50, 100 mAs) Repeatability test was repeated ten times to measure the coefficient of variation. The radiation dose increased from 0.182 mGy to 12.902 mGy and the saturation rate increased from 58.3% with increasing exposure condition and time. The coefficient of variation of the glass elements of the fluorescent glass dosimeter was ranged from 0.2 to 0.77 according to the X - ray exposure conditions. X - ray exposure showed that the radiation dose and saturation rate were increased with buildup characteristics, and degeneration of glass elements was not observed. The reproducibility of the variation coefficient of the radiation generator was included within the error range and the reproducibility of the radiation dose was excellent.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.264-267
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• 2003

Pitch measurements of 150 nm pitch one-dimensional grating standards were carried out using an contact mode atomic force microscopy(C-AFM) with a high resolution three-axis laser interferometer. It was called as 'Nano-metrological AFM' In Nano-metrological AFM, Three laser interferometers were aligned well to the end of AFM tip. Laser sources of the three-axis laser interferometer in the nano-metrological AFM were calibrated with an I$_2$-stablilzed He-Ne laser at a wavelength of 633 nm. So, the Abbe error was minimized and the result of the pitch measurement using the nano-metrological AFM has a traceability to the length standard directly. The uncertainty in the pitch measurement was estimated in accordance with the Guide to the Expression of Uncertainty in Measurement(GUM). The Primary source of uncertainty in the pitch-measurements was derived from repeatability of pitch-measurement, and its value was approx 0.186 nm. Expanded uncertainty(k=2) of less than 5.23 nm was obtained. It is suggested that the metrological AFM is a useful tool for the nano-metrological standard calibration.

• 한국생산제조학회지
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• 제23권2호
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• pp.199-205
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• 2014

This research focuses on the development of an interrogator that operates and measures fiber Bragg grating(FBG) multiplexing sensor probes for accurate-measurement of the blade deflection in a wind power generator. We designed and fabricated an optical source and spectrum module for the interrogator. Additionally, we verified the wavelength repeatability within 0.001 nm and the wavelength stability within 1 pm of the optical source, and we experimentally determined that the wavelength scanning range was about 44.4 nm. The FBG sensor with 2 nm resolution can be extended to a performance-efficient system that measures more than 20 sensors. The implemented interrogator has 0.141 nm wavelength variations corresponding to an ambient temperature range of $0^{\circ}C$ to $70^{\circ}C$. The measurement error can be easily reduced by employing a temperature compensation algorithm. In this study, we quantitatively confirmed the accuracy and operating stability of the interrogator.

• International Journal of Precision Engineering and Manufacturing
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• 제5권3호
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• pp.19-25
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• 2004

Pitch measurements of 150 nm one-dimensional grating standards were carried out using a contact mode atomic force microscopy with a high resolution three-axis laser interferometer. This measurement technique was named as the 'nano-metrological AFM'. In the nano-metrological AFM, three laser interferometers were aligned precisely to the end of an AFM tip. Laser sources of the three-axis laser interferometer in the nano-metrological AFM were calibrated with an I$_2$ stabilized He-Ne laser at a wavelength of 633 nm. Therefore, the Abbe error was minimized and the result of the pitch measurement using the nano-metrological AFM could be used to directly measure the length standard. The uncertainty in the pitch measurement was estimated in accordance with the Guide to the Expression of Uncertainty in Measurement (GUM). The primary source of uncertainty in the pitch-measurements was derived from the repeatability of the pitch-measurements, and its value was about 0.186 nm. The average pitch value was 146.65 nm and the combined standard uncertainty was less than 0.262 nm. It is suggested that the metrological AFM is a useful tool for the nano-metrological standard calibration.

• 한국항해학회지
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• 제20권3호
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• pp.1-11
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• 1996

The accuracy for determining fishing ground and for setting fishing gear location, and the repeatability of ship position vary depending on fishing methods. Especially, Loran-C has been served to give fisherman highly accurate ship's position, and a number of fishing vessel are equipped with it's receivers. In this paper, in order to evaluate the accuracy of Loran-C fix of Korean chain in Korean southeast coast, the authors examined and analyzed the data of the receiver of Loran-C(LC 90, Furuno) and GPS(AccNav $Sport^{TM}$, Eagle) measured automatically and continuously for 2 seconds at interval of 5minutes during 2hours from $11^{th}$ to $21^{st}$, July, 1996 at six observed points, that is, Pusan, Wolnae, Pangojin, Chongja, Kampo and Kuryongpo in Korean southeast coast. As the result obtained, Loran-C signals showed little fluctuation with good reprodutibility. Good stability of Loran-C signals was indicated by the small value of the standard deviation 0.064~0.094$\mu\textrm{s}$. Although determination of the observed position could not be completely accurate, the extent of the error was estimated smaller than 0.35 nautical mile.

• 대한기계학회논문집A
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• 제21권2호
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• pp.261-271
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• 1997

This paper presents the design process and characteristic test results of tension sensors for measuring the ultimate tension forces of surgical wires. Three types of sensor were designed and tested for calibration. The first two types which transfer the wire tension to the sensing element by direct contact have too much hysterisis errors due to the firctional effect. This error can be considerably reduced in the modified structure, where a cover and a loading button is used to transfer force and moment to the sensing element. The strains predicted by theoretical equations agree well with those by finite element calculations neglecting friction and the strains by finite element analysis considering friction are in good agreement with those measured by four strain gages. The modified ring type tension sensor developed in this paper is expected to be useful for measuring the tension of surgical wires with nonlinearity of 1.31%FS, hysterisis of 5.74%FS and repeatability of 0.19%FS.

• Journal of the Optical Society of Korea
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• 제18권5호
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• pp.531-537
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• 2014

Through-silicon vias (TSVs) are fine, deep holes fabricated for connecting vertically stacked wafers during three-dimensional packaging of semiconductors. Measurement of the TSV geometry is very important because TSVs that are not manufactured as designed can cause many problems, and measuring the critical dimension (CD) of TSVs becomes more and more important, along with depth measurement. Applying white-light scanning interferometry to TSV measurement, especially the bottom CD measurement, is difficult due to the attenuation of light around the edge of the bottom of the hole when using a low numerical aperture. In this paper we propose and demonstrate four bottom CD measurement methods for TSVs: the cross section method, profile analysis method, tomographic image analysis method, and the two-dimensional Gaussian fitting method. To verify and demonstrate these methods, a practical TSV sample with a high aspect ratio of 11.2 is prepared and tested. The results from the proposed measurement methods using white-light scanning interferometry are compared to results from scanning electron microscope (SEM) measurements. The accuracy is highest for the cross section method, with an error of 3.5%, while a relative repeatability of 3.2% is achieved by the two-dimensional Gaussian fitting method.