The Study of Etching Characteristic in $SrBi_2$ $Ta_2$ $O_9$ Thin Film by Optical Emission Spectroscopy
(OES를 이용한 SBT 박막의 식각 특성 연구)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.14 no.3
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- pp.185-189
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- 2001