• Title/Summary/Keyword: reaction rate function

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The Study of Etching Characteristic in $SrBi_2$$Ta_2$$O_9$ Thin Film by Optical Emission Spectroscopy (OES를 이용한 SBT 박막의 식각 특성 연구)

  • 신성욱;김창일;장의구
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.14 no.3
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    • pp.185-189
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    • 2001
  • In this paper, since the research on the etching of SrBi$_2$Ta$_2$$O_{9}$(SBT) thin film was few (specially Cl$_2$-base) we had studied the surface reaction of SBT thin films. We have used the OES(optical emission spectroscopy) in high density plasma etching as a function of RF power, dc bias voltage, and Cl$_2$/(Cl$_2$+Ar) gas mixing ratio. It had been found that the etch rate of SBT thin films appeared to be more affected by the physical sputtering between Ar ions and surface of the SBT compared to the chemical reaction. The change of Cl radical density that was measured by the OES as a function of gas combination showed the change of the etch rate of SBT thin films. Therefore, the chemical reactions between Cl radical in plasma and components of the SBT enhanced to increase the etch rates SBT thin films. These results were confirmed by XPS(x-ray photoelectron spectroscopy) analysis.s.

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The Study Of Etching Mechanism in $SrBi_{2}Ta_{2}O_{9}$ thin film by Optical Emission Spectroscopy (OES를 이용한 SBT 박막의 식각 메카니즘 연구)

  • 신성욱;김창일;장의구;이원재;유병곤;김태형
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.11a
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    • pp.40-44
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    • 2000
  • In this paper, since the research on the etching of SrBi$_2$Ta$_2$O$_{9}$ (SBT) thin film was few (specially Cl$_2$-base ), we had studied the surface reaction of SBT thin films using the OES in high density plasma etching as a function of rf power, dc bias voltage, and Cl$_2$(Cl$_2$+Ar) gas mixing ratio. It had been found that the etch rate of SBT thin films appeared to be more affected by the physical sputtering between Ar ions and surface of the SBT compared to the chemical reaction in our previous papers$^{1.2}$ . The change of Cl radical density that is measured by the OES as a function of gas combination showed the change of the etch rate of SBT thin films. Therefore, the chemical reactions between Cl radical in plasma and components of the SBT enhance to increase the etch rates of SBT thin films and these results were confirmed by XPS analysis.

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Kinetic Study on the Polycondensation Reaction of Bis-hydroxyethyl Naphthalate (Bis-hydroxyethyl Naphthalate의 축중합 반응에 관한 속도론적 연구)

  • 이성진;정성일
    • Polymer(Korea)
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    • v.26 no.4
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    • pp.422-430
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    • 2002
  • The kinetics of polycondensation of bishydroxyethyl naphthalate has been studied in the range of 241 -$260^{\circ}C$ using antimony trioxide catalyst. The reaction was performed in a batch reactor and the concentration of reaction mixture was measured with HPLC. The activation energy values of forward and reverse reaction determined from molecular species model were found to be 19.7 and 31.4 kcal/mole, respectively, and the equilibrium constants were in the range of 1.4-2.0, which were larger than that of polycondensation of PET and varied to some degree with temperature. It was confirmed by applying the Flory's distribution function that the reaction rate of the hyroxyethyl group does not depend on the molecular size. By applying functional group model, we observed that there was few difference between the activation energy of the forward reaction and that of reverse reaction, therefore the equilibrium constant has almost constant value of 1.4. The rate constants obtained from functional group model was about 3-4 times larger than that from molecular species model, which showed that both model explains the reaction system well. Although the molecular species model should predict the concentration of as many as ten molecules, it fits for the experimental results well.

Clinical study of blood flow and vascular reaction in Taeumin CVA patients using Transcranial Doppler (Transcranial Doppler를 이용(利用)한 태음인 중풍환자의 혈류속도(血流速度)와 혈관(血管) 반응성(反應性)에 대한 임상적(臨床的) 고찰(考察))

  • Lim, Jong-Pil;Bae, Na-Young;Han, Kyung-Soo;Ahn, Taek-Won
    • Journal of Haehwa Medicine
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    • v.15 no.2
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    • pp.263-272
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    • 2006
  • Purpose Brain vessles have autoregulation function, so even when perfusion pressure drops, cerebral blood flow remain stable by vasodilation. Latest research on this reserve of cerebral vessels is being done using TCD, which measures the reserve of the vessels. We did a research comparing cerebral vessel and peripheral vessel reserve between Taeumin, who are more likely to suffer CVA, and the normal. We observed blood flow of Internal carotid artery siphon and radial indicis artery of the two group with TCD. Method We picked 20 people out of patients diagnosed as cerebral infarction at Cheon-An Oriental hospital of Daejeon University. They were diagnosed as Taeumin with QSCCII questionnaire and constitutional differentiation. Using TCD, we measured highest blood flow rate, mean blood flow and asymmetric counting blood flow of Internal carotid artery siphon and radial indicis artery at rest. And then we measured again after stimulating cerebral vessels, by triggering hypercapnia by self apnea and peripheral vessels by palm heating. Result At rest, mean blood flow rate of Internal carotid artery siphon showed significant decrease compared to control group. Blood flow rate of Internal carotid artery siphon after hypercapnia showed significant decline in highest blood flow rate and mean blood flow compared to control group. Cerebral vessel reaction after the hypercapnia induction showed great change in experiment group than the control group. Peripheral vessel reaction after palm heating showed significant decline in experiment group compared to control group. Conclusion In conclusion, measuring the alteration of blood flow used in diagnosing cerebral infarction, is more sensitive when vessel stimulation is done. Non-invasive TCD is effective especially in case of Taeumin who are more likely to suffer vascular disorder than others.

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Effect of Functionalized Binary Silane Coupling Agents by Hydrolysis Reaction Rate on the Adhesion Properties of 2-Layer Flexible Copper Clad Laminate (이성분계 실란 커플링제의 가수분해속도 조절에 의한 2-FCCL의 접착특성 변화 연구)

  • Park, U-Joo;Park, Jin-Young;Kim, Jin-Young;Kim, Yong-Seok;Ryu, Jong-Ho;Won, Jong-Chan
    • Polymer(Korea)
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    • v.35 no.4
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    • pp.302-307
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    • 2011
  • The parameters of silanol formation reaction of organosilane including solvent type, solution concentration, pH and hydrolysis time influence the adhesion property of 2 layer flexible copper clad laminate (FCCL). Especially, the hydrolysis reaction time of silane coupling agent affects the formation of the silanol groups and their self-condensation to generate oilgomeric structure to enhance the surface treatment as an adhesive promoter. In our study, we prepared the binary silane coupling agents to control hydrolysis reaction rate and surface energy after treatment of silane coupling agents for increasing the adhesive property between a copper layer and a polyimide layer. The surface morphology of rolled copper foil, as a function of the contents of the coated binary silane coupling agent, was fully characterized. As fabricated 2-layer FCCL, we observed that adhesive properties were changed by hydrolysis rate and surface energy.

Disinfection of Water by Ultrasonic Irradiation (초음파 검사에 의한 수중의 살균처리)

  • 손종렬;유병성
    • Journal of environmental and Sanitary engineering
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    • v.14 no.1
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    • pp.54-61
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    • 1999
  • The industrial techniques of ultrasound have been used in the various fields, such as cleaning, medical surgery, emulsification, cell disruption etc. Especially the application of cell disruption was interested in the field of disinfection process in water by ultrasonic irradiation. It has been recognized that the ultrasounds are irradiated in aqueous solution, cavitation bubbles are generated and shock waves of high temperature and pressure are emitted as the bubbles are developed and finally broken, which function as a energy source to promote reaction efficiencies of various kinds of chemical reactions such as disinfection reaction in water. Therefore, this study was performed to apply the ultrasound for the disinfection method of infected drinking raw water and to discuss the limiting factors such as pH, sample volume and reaction temperature influenced on the removal efficiency of E. coli from experimental analysis of the results obtained in bench-scale plant. For the experiments to measure the influence of reaction parameters in the ultrasonic disinfection process, escalated reactivity of aqueous solutions was excellent when pH in aqueous solution was low, and sample volume was small. On the contrary, the reactivity of disinfection became elevated when reaction temperature was high. It was found that the rate constant of disinfection reaction was applied by Chick's law, reaction kinetics of Chick's law was irreversible and pseudo-first order at all the tested conditions.As a conclusion it appeared that the technology using ultrasonic irradiation can be applied to the treatment of disinfection in infected water which are difficult to be treated by conventional methods.

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Global Fitting Functions for Kinetics of Fe-Selective Chlorination in Ilmenite and Successive Chlorination of Beneficiated TiO2 (일메나이트 중 철의 선택적 염화와 선광된 TiO2의 추가 염화반응에 대한 글로벌 피팅함수)

  • Chung, Dong-Kyu;Won, Yong Sun;Kim, Yong-Ha;Jung, Eun-Jin;Song, Duk-Yong
    • Korean Journal of Materials Research
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    • v.29 no.7
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    • pp.412-424
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    • 2019
  • Global fitting functions for Fe-selective chlorination in ilmenite($FeTiO_2$) and successive chlorination of beneficiated $TiO_2$ are proposed and validated based on a comparison with experimental data collected from the literature. The Fe-selective chlorination reaction is expressed by the unreacted shrinking core model, which covers the diffusion-controlling step of chlorinated Fe gas that escapes through porous materials of beneficiated $TiO_2$ formed by Fe-selective chlorination, and the chemical reaction-controlling step of the surface reaction of unreacted solid ilmenite. The fitting function is applied for both chemical controlling steps of the unreacted shrinking core model. The validation shows that our fitting function is quite effective to fit with experimental data by minimum and maximum values of determination coefficients of $R^2$ as low as 0.9698 and 0.9988, respectively, for operating parameters such as temperature, $Cl_2$ pressure, carbon ratio and particle size that change comprehensively. The global fitting functions proposed in this study are expressed simply as exponential functions of chlorination rate(X) vs. time(t), and each of them are validated by a single equation for various reaction conditions. There is therefore a certain practical merit for the optimal process design and performance analysis for field engineers of chlorination reactions of ilmenite and $TiO_2$.

The Use of Inductively Coupled CF4/Ar Plasma to Improve the Etch Rate of ZrO2 Thin Films

  • Kim, Han-Soo;Woo, Jong-Chang;Joo, Young-Hee;Kim, Chang-Il
    • Transactions on Electrical and Electronic Materials
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    • v.14 no.1
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    • pp.12-15
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    • 2013
  • In this study, we carried out an investigation of the etching characteristics (etch rate, and selectivity to $SiO_2$) of $ZrO_2$ thin films in a $CF_4$/Ar inductively coupled plasma (ICP) system. The maximum etch rate of 60.8 nm/min for $ZrO_2$ thin films was obtained at a 20 % $CF_4/(CF_4+Ar)$ gas mixing ratio. At the same time, the etch rate was measured as a function of the etching parameter, namely ICP chamber pressure. X-ray photoelectron spectroscopy (XPS) analysis showed efficient destruction of the oxide bonds by the ion bombardment, as well as an accumulation of low volatile reaction products on the etched surface. Based on these data, the ion-assisted chemical reaction was proposed as the main etch characteristics for the $CF_4$-containing plasmas.

The Effect of Electrolytes on Polshing Behavior in Cu ECMP (Cu ECMP 공정에서 전해액이 연마거동에 미치는 영향)

  • Kwon, Tae-Young;Kim, In-Kwon;Kim, Tae-Gon;Cho, Byung-Gwun;Park, Jin-Goo
    • Korean Journal of Materials Research
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    • v.18 no.6
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    • pp.334-338
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    • 2008
  • The purpose of this study is to characterize various electrolytes on electrochemical mechanical planarization (ECMP). The ECMP system was modified from conventional CMP system to measure the potentiodynamic curve and removal rate of Cu. The potentiodynamic curves were measured in static and dynamic states in investigated electrolytes using a potentiostat for the evaluation of the polishing behavior on ECMP. KOH (alkaline) and $NaNO_3$ (salt) were selected as electrolytes which have high conductivity. In static and dynamic states, the corrosion potential decreased and the corrosion current increased as a function of the electrolyte concentration. But, the electrochemical reaction was prevented by mechanical polishing effect in the dynamic state. The static etch and removal rate were measured as functions of concentration and applied voltage. When $NaNO_3$ was used, the dissolution was much faster than that of KOH. It was concluded that the removal rate was strongly depended on electrochemical dissolution. The removal rate increased up to 350 nm/min in $NaNO_3$ based electrolyte.

Respiration Characteristics of Rough Rice (벼의 호흡 특성)

  • 김동철;김의웅;금동혁
    • Journal of Biosystems Engineering
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    • v.23 no.4
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    • pp.335-342
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    • 1998
  • The objectives of this study were to evaluate respiration characteristics and develop empirical respiratory rate equations for short gain rough rice. The carbon dioxide concentrations generated from mush rice at four level temperatures(10, 20, 30, 4$0^{\circ}C$) and 4 level moisture contents(17.2, 21.5, 25.9, 31.6%, d.b.) were measured by gas chromatography. The respiratory rates' increased exponentially with gain temperature and also with moisture content The relationship between respiratory rate and gain temperature fitted the Arrehenius' and Core's equations very well. Two empirical respiratory rate equations were presented as a function of gain temperature and moisture content. The values of determination coefficient for the developed respiratory rate equations were 0.999, and the result of t-test showed that there were no significant differences between predicted and measured respiratory rates on significance level of 1%. Therefore, it appeared that respiratory rates predicted by the respiratory rate equations agreed well with measured values. An equation for predicting dry matter losses of rough rice during storage was presented by modifying the respiratory rate equations based on chemical reaction of decomposition of carbohydrate.

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