• 한국세라믹학회지
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• 제32권6호
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• pp.659-668
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• 1995

Zirconium carbide was prepared from the mixture of metal zirconium and carbon powders in argon atmosphere by Self-propagating High-temperature Synthesis (SHS) in order to obtain the best carbon source and dilution contents. The most exellent result was obtained in the case that active carbon was added as a starting material, 20~30 wt% dilution content. From thermal profile analysis an apparent activation energy of 118 KJ/mol was calculated. The maximum heating rate achieved during 15 wt% ZrC reaction by product dilution method was approximately 1.54$\times$105 K/s. Coupling this value with the measured wave velocity of 1.026cm/s yielded a maximum thermal gradient fo $1.5\times$105 K/cm. Using the definition of t* and the measured wave velocity, the effective thermal diffusivity, $\alpha$, was calculated to be 0.62$\times$102 $\textrm{cm}^2$/s.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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• pp.163-163
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• 2008

반도체 소자가 고집적화 되고 고속화를 필요로 하게 됨에 따라, 기존에 사용되었던 알루미늄이나 텅스텐보다 낮은 전기저항, 높은 electro-migration resistance으로 미세한 금속배선 처리가 가능한 Cu가 주목받게 되었다. 하지만 과잉 디싱 현상과 에로젼을 유도하여 메탈라인 브리징과 단락을 초래할 있고 Cu의 단락인 islands를 남김으로서 표면 결함을 제거하는데 효과적이지 못다는 단점을 가지고 있었다. 특히 평탄화 공정시 높은 압력으로 인하여 Cu막의 하부인 ILD막의 다공성의 low-k 물질의 손상을 초래 할 수 있는 문제점을 해결하기 위하여 기존의 CMP에 전기화학을 결합시킴으로서 낮은 하력에서의 Cu 평탄화를 달성 할 수 있는 기존의 CMP 기술에 전기화학을 접목한 새로운 개념의 ECMP (electrochemical-mechanical polishing) 기술이 생겨나게 되었다. 따라서 본 논문에서는 최적화된 ECMP 공정을 위하여 I-V곡선과 CV법을 이용하여 active. passive. trans-passive 영역의 전기화학적 특징을 알아보았고. Cu막의 표면 형상을 알아보기 위해 Scanning Electron Microscopy (SEM) 측정과 Energy Dispersive Spectroscopy (EDS) 분석을 통해 금속 화학적 조성을 조사하였다.

• Journal of Electrochemical Science and Technology
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• 제11권4호
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• pp.346-351
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• 2020

The removal characteristics of copper (Cu) from electrochemical surface by voltage-activated reaction were reviewed to assess the applicability of electrochemical-mechanical polishing (ECMP) process in three types of electrolytes, such as HNO₃, KNO₃ and NaNO₃. Electrochemical surface conditions such as active, passive, transient and trans-passive states were monitored from its current-voltage (I-V) characteristic curves obtained by linear sweep voltammetry (LSV) method. In addition, the oxidation and reduction process of the Cu surface by repetitive input of positive and negative voltages were evaluated from the I-V curve obtained using the cyclic voltammetry (CV) method. Finally, the X-ray diffraction (XRD) patterns and energy dispersive spectroscopy (EDS) analyses were used to observe the structural surface states of a Cu electrode. The electrochemical analyses proposed in this study will help to accurately control the material removal rate (MRR) from the actual ECMP process because they are a good methodology for predicting optimal electrochemical process parameters such as current density, operating voltage, and operating time before performing the ECMP process.

• Journal of Mechanical Science and Technology
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• 제17권9호
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• pp.1358-1370
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• 2003

The effects of anode, cathode, and cooling channels for a Proton Exchange Membrane Fuel Cell (PEMFC) on flow fields have been investigated numerically. Continuous open-faced fluid flow channels formed in the surface of the bipolar plates traverse the central area of the plate surface in a plurality of passes such as a serpentine manner. The pressure distributions and velocity profiles of the hydrogen, air and water channels on bipolar plates of the PEMFC are analyzed using a two-dimensional simulation. The conservation equations of mass, momentum, and energy in the three-dimensional flow solver are modified to include electro-chemical characteristics of the fuel cell. In our three-dimensional numerical simulations, the operation of electro-chemical in Membrane Electrolyte Assembly (MEA) is assumed to be steady-state, involving multi-species. Supplied gases are consumed by chemical reaction. The distributions of oxygen and hydrogen concentration with constant humidity are calculated. The concentration of hydrogen is the highest at the center region of the active area, while the concentration of oxygen is the highest at the inlet region. The flow and thermal profiles are evaluated to determine the flow patterns of gas supplied and cooling plates for an optimal fuel cell stack design.

• 대한기계학회논문집
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• 제13권2호
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• pp.265-270
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• 1989

본 연구에서는 복사강도를 반구에 대하여 적분하여 비정상 미분방정식의 형태로 로 얻어지는 2-유속 회매질복사모델을 사용하여 복사전달방정식을 구성하고, 전술한 Yoshizawa 등의 가정을 배제하면서, 다공매질의 물리적 길이, 흡수계수 및 혼합기체의 당량비(equivalenceratio) 등을 변화시킴으로써 매질 내의 열적 구조를 분석하여 그들의 의 연구를 확장, 해석한다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.91-91
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• 2012

We aim in synthesizing various functional thin films thinner than ~ 10 nm for environmental applications and photovoltaic devices. Atomic layer deposition is used for synthesizing inorganic thin films with a precise control of the film thickness. Several examples about application of our thin films for removing volatile organic compounds (VOC) will be highlighted, which are summarized in the below. 1) $TiO_2$ thin films prepared by ALD at low temperature ($<100^{\circ}C$) show high adsorption capacity for toluene. In combination with nanostructured templates, $TiO_2$ thin films can be used as building-block of high-performing VOC filter. 2) $TiO_2$ thin films on carbon fibers and nanodiamonds annealed at high temperatures are active for photocatalytic oxidation of VOCs, i.e. photocatalytic filter can be created by atomic layer deposition. 3) NiO can catalyze oxidation of toluene to $CO_2$ and $H_2O$ at $<300^{\circ}C$. $TiO_2$ thin films on NiO can reduce poisoning of NiO surfaces by reaction intermediates below $200^{\circ}C$. We also fabricated inverted organic solar cell based on ZnO electron collecting layers on ITO. $TiO_2$ thin films with a mean diameter less than 3 nm on ZnO can enhance photovoltaic performance by reducing electron-hole recombination on ZnO surfaces.

• 한국태양에너지학회:학술대회논문집
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• 한국태양에너지학회 2011년도 춘계학술발표대회 논문집
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• pp.275-281
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• 2011

Solar reforming of methane with $CO_2$ was successfully tested with a direct irradiated absorber on a parabolic dish capable of $5kW_{th}$ solar power. The new type of catalytically activated metallic foam absorber was prepared, and its activity was tested. Ni was applied as the active metal on the gamma - alumina coated Ni metal foam for the preparation of the catalytically-activated metal foam layer. Compared to conventional direct irradiation of the catalytically-activated ceramic foam absorber, this new metallic foam absorber is found to exhibit a superior reaction performance at the relatively low insolation or at low temperatures. In addition, unlike direct irradiation of the catalytically-activated ceramic foam absorber, metallic foam absorber has better thermal resistance, which prevents the emergence of cracks caused by mechanical or thermal shock. The total solar power absorbed reached up to 2.1kW and the maximum $CH_4$ conversion was almost 40%.

• Journal of Electrochemical Science and Technology
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• 제4권1호
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• pp.41-45
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• 2013

Platinum is a well known element which shows a significant electrocatalytic activity in many important applications. In glucose sensor, because of the poisoning effect of reaction intermediates and the low surface area, the electrocatalytic activity towards the glucose oxidation is low which cause the low sensitivity. So, we fabricate a nanoporous PtZn alloy electrode by deposition-dissolution method. It provides a high active surface and a large enzyme encapsulating space per unit area when it used for an enzymatic glucose sensor. Glucose oxidase was immobilized on the electrode surface by capping with PEDOT composite and PPDA. The composite and PPDA also can exclude the interference ion such as ascorbic acid and uric acid to improve the selectivity. The surface area was determined by cyclic voltametry method and the surface structure and the element were analyzed by Scanning Electron Microscope (SEM) and Energy Dispersive X-ray spectroscopy (EDX), respectively. The sensitivity is $13.5{\mu}A/mM\;cm^2$. It is a remarkable value with such simply prepared senor has high selectivity.

• 방사성폐기물학회지
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• 제18권4호
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• pp.421-437
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• 2020

This study provides an assessment on a proposed method for separation of cesium, strontium, and barium using electrochemical reduction at a liquid bismuth cathode in LiCl-KCl eutectic salt, investigated via cyclic voltammetry (CV), electrochemical impedance spectroscopy (EIS), and scanning electron microscopy with energy dispersive X-ray spectrometry (SEM-EDS). CV studies were performed at temperatures of 723-823 K and concentrations of the target species up to 4.0wt%. Redox reactions occurring during potential sweeps were observed. Concentration of BaCl2 in the salt did not seem to influence the diffusivity in the studied concentration range up to 4.0wt%. The presence of strontium in the system affected the redox reaction of lithium; however, there were no distinguishable redox peaks that could be measured. Impedance spectra obtained from EIS methods were used to calculate the exchange current densities of the electroactive active redox couple at the bismuth cathode. Results show the rate-controlling step in deposition to be the mass transport of Cs+ ions from the bulk salt to the cathode surface layer. Results from SEM-EDS suggest that Cs-Bi and Sr-Bi intermetallics from LiCl-KCl salt are not thermodynamically favorable.

• 청정기술
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• 제20권4호
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• pp.415-424
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• 2014

본 연구는 전자주개 물질인 phenothiazine 유도체와 전자받개 물질로 quinoxaline 유도체를 Suzuki coupling reaction으로 push-pull 구조의 고분자(PPQX-2hdPTZ (P1), POPQX-2hdPTZ (P2))를 합성하였다. 용해도 향상을 위해 기본 골격에 alkoxy 사슬을 도입하였고, 반응시간을 단축시키고 중합도를 높이기 위해 마이크로웨이브 합성 반응기를 이용하여 중합시켰다. 합성된 고분자는 물리적, 열적, 광학적 및 전기화학적 특성을 확인하였다. 두 고분자의 초기분해온도는 $323-328^{\circ}C$로서 열 안정성이 우수함을 확인하였고, 추가로 alkoxy 사슬을 도입한 P2의 중합도가 더 높았다. 전기화학적 특성을 분석한 결과 두 고분자의 HOMO에너지 레벨은 유사하였다. 합성된 고분자는 ITO/PEDOT:PSS/active layer/$BaF_2$/Al 구조로 소자를 제작하여 유기박막태양전지로의 특성을 확인하였다. 각 소자는 박막의 두께를 다르게 하여 이에 따른 효율의 변화를 확인하였고, 박막의 두께가 얇아질수록 높은 효율을 나타내었다($PCE_{max}:P1=1.0%$, P2 = 1.1%).