• 한국전기전자재료학회논문지
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• 제13권9호
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• pp.725-728
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• 2000

Ferroelectric thin film capacitors with high dielectric constant are important for the application of memory devices. In this work, We have systematically investigated the variation of grain sizes depending on the process condition of two-step process. Both in-situ annealing and ex-annealing have been compared depending on the annealing time. C-V measurement, ferroelectric properties, leakage current, XRD and SEM were performed to investigate the electircal properties and microstructural properties of Pb(La, Ti)O$_3$ films.

• 한국전기전자재료학회논문지
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• 제17권10호
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• pp.1061-1067
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• 2004

In this study, ferroelectric (Ba,Sr)TiO$_3$ and high temperature superconductor YBCO thin films were fabricated by PLD (Pulsed Laser Deposition) method and tuneable bandstop filters were implemented with two different IDC(Interdigital Capacitance) gap patterns, 20${\mu}{\textrm}{m}$ and 30${\mu}{\textrm}{m}$ using these two thin film layers. The resonant frequency was changed by DC bias voltage. By comparing measured results with simulation, the dielectric properties of ferroelectric thin film have been extracted. The permittivity was 820 ～ 900 at 30 K and had an acceptable error range but the loss tangent had a great difference, 0.018 in 30${\mu}{\textrm}{m}$ IDC gap pattern and 0.037 in 20 ${\mu}{\textrm}{m}$.

• Progress in Superconductivity
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• 제1권2호
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• pp.95-98
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• 2000

We have studied critical currents of $YBa_2Cu_3O_7$ step-edge junctions with different step orientations with respect to the major axes of $SrTiO_3$ (100) substrates. The junctions were prepared by pulsed laser deposition and argon ion milling with photoresist mask. We investigated current-voltage characteristics and critical current of the junctions as a function of the angle. The junction critical current showed an angle dependent modulation with maxima near 0 or 90 degree and minima near 45 and 135 degrees. The experimental results were analyzed based on the microstructure of the junction along the step and the d-wave symmetry of $YBa_2Cu_3O_7$ superconductor.

• Progress in Superconductivity
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• 제3권1호
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• pp.60-64
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• 2001

We have studied properties of step-edge Junction prepared with crystal orientation of sapphire substrate. The Step on sapphire substrates fabricated by conventional photolithography method and Ar ion milling method. $CeO_2$ buffer layer and in-situ YBCO thin film were deposited on the stepped sapphire substrates by a pulsed laser deposition method with the predetermined optimized condition. The step angle was centre fled low angle of about $25^{\circ}$. The YBCO film thickness was varied to obtain various thickness ratios of the film to the step height in a range from 0.7 to 1.2. I-V curves of junction were showed RSJ-behavior, double junction structure, and hysteresis due to the crystal orientation of substrate.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.183-183
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• 2011

리튬 이온 배터리의 cathode 및 electrolyte 재료로 사용되는 LiCoO2을 sputtering이나 pulsed laser deposition을 이용하여 박막으로 증착하기 위해서는 target이 필요하다. Target은 원료 분말을 가압 성형한 후 고온에서 소결하여 제조된다. LiCoO2 target 제조과정에서 고밀도를 얻기 힘들고 Li 성분의 증발이 일어난다. 또한 Li2O 분말은 흡습성이 매우 크다. 본 연구에서는 시간과 온도를 조절하여 최적화된 소결 과정을 통해 target의 밀도가 이론밀도와 근사한 값을 갖도록 하고, LiCoO2 또는 Co3O4 분말에 각각 흡습성이 낮은 Li2CO3 분말을 첨가하여 Li 성분을 조절하였다. Li과 Co의 조성비가 1:1-2:1인 고밀도의 LiCoO2 target을 제조하여 박막 증착 후 Li과 Co의 조성비가 1:1이 되도록 하였다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2000년도 추계학술대회 논문집 학회본부 C
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• pp.416-418
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• 2000

Thin films of phase-pure perovskite $(Pb_{0.72}La_{0.28})Ti_{0.93}O_3$ (PLT) were deposited in-situ onto Pt/Ti/$SiO_2$/Si substrates by pulsed laser deposition. We have systematically investigated the variation of grain sizes depending on the process condition. Both in-situ annealing and ex-situ annealing treatments have been compared depending on the annealing time. The grain sizes of PLT thin films were successfully controlled 260 to 350 nm by changing process parameters. Microstructural and electrical properties of the film were investigated by C-V measurement, leakage current measurement and SEM. Two-step process to grow $(Pb_{0.72}La_{0.28})Ti_{0.93}O_3$ (PLT) films was adopted and verified to be useful to enlarge the grain size of the film and to enhance the leakage current characteristics.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1997년도 하계학술대회 논문집 C
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• pp.1236-1238
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• 1997

유전체 PLT(28) ($Pb_{0.72}La_{0.28}Ti_{0.93}O_3$) 박막을 레이저 어블레이션 기법으로 Pt/Ti/$SiO_3$/Si기판을 $500^{\circ}C{\sim}700^{\circ}C$까지 가열한 상태에서 $O_2$분위기에서 증착시켰다. 증착된 박막은 SEM, XRD 등의 구조적 분석을 통하여 $600^{\circ}C$이상에서 증착된 경우, (111)방향으로 우세하게 성장한, 결정성이 양호한 박막임을 확인하였다. 박막의 전기적 특성은, 증착 온도가 $650^{\circ}C$일 때 약 1400정도의 높은 비유전율을 얻었으며, 전하저장밀도는 100[KV/cm]에서 약 9[${\mu}C/cm^2$]이었다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1997년도 하계학술대회 논문집 C
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• pp.1298-1300
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• 1997

금속기판상 초전도 $YBa_2CU_3O_{7-{\delta}}$ (YBCO) 박막을 yttria-stabilized zirconia (YSZ) 완충막을 이용하여 in situ 펄스 레이저 증착법에 의해 증착하였다. YBCO 박막을 직접 금속기판에 증착하게 되면 YBCO 박막과 금속기판 사이의 계면에서 상호확산현상이 발생하기 때문에 이를 방지하기 위해 YSZ 완충막이 사용되었다. YSZ 완충막의 증착온도가 박막의 결정성과 전기적 특성에 미치는 영향을 알아보기 위해 YSZ 완충막은 여러 가지 온도로 증착되었다. YBCO 박막의 증착온도와 같은 온도로 YSZ 완충막을 증착했을 때보다 YBCO 박막의 증착온도보다 높은 온도로 YSZ 완충막을 증착했을 경우, 증착된 YBCO 박막은 x선 회절에 의해 c 축 방향으로 성장하였음을 알 수 있었고, 저항이 0이 되는 임계온도가 83K가 되는 실험 결과를 얻었다.

• Journal of Magnetics
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• 제12권4호
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• pp.141-143
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• 2007

We have fabricated (0001) oriented hexagonal $HoMnO_3$ thin films with thickness of 300 nm using Pulsed Laser Deposition (PLD) technique on $Pt(111)/Ti/SiO_2/Si$ substrates. The XRD $\theta-2\theta$ pattern shows only (0002), (0004), and (0008) reflection of a hexagonal phase, and the full width at half maximum (FWHM) of (0004) peak is under $1.6^{\circ}$. The chemical state of Mn from XPS spectra of the films reveals the presence of $Mn^{3+}$ only. The temperature dependence of dielectric constant shows a weak anomaly at magnetic $N\acute{e}el$ temperature $(T_N)$, which is about 70 K.

• 한국표면공학회지
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• 제37권4호
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• pp.191-195
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• 2004

Gallium or sulphur additions in $CuInSe_2$ were prepared using RF magnetron sputtering and pulsed laser deposition respectively. All of the observed thin films shows a chalcopyrite structure with the S and Ga addition increases the favourable (112) peak. The optical absorption coefficients were slightly decreased. The energy band gap of films could be shifted from 1.04 to 1.68 eV by adjusting the mole ratio of S/(S+Se) and Ga/(In+Ga). It is possible to obtain the optimum energy band gap by adding S or Ga solute at a certain ratio in favour of Se and In respectively. It is also necessary to control the ratio of Ga and S additions and to retain a certain portion of In and Se to provide better properties of thin films.