• Title/Summary/Keyword: pulsed Nd:YAG laser

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고성능 투명박막트랜지스터 Source/Drain용 AZO박막 특성연구

  • Park, On-Jeon;No, Ji-Hyeong;Park, Jae-Ho;Sin, Ju-Hong;Jo, Seul-Gi;Yeo, In-Hyeong;Mun, Byeong-Mu
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.357-357
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    • 2012
  • 박막트랜지스터의 전극으로 Au, Ag, Mo, ITO와 같은 물질들이 이미 많이 연구되어 왔으며, 투명 Source/Drain 전극을 활용한 물질로는 ITO에 초점이 맞춰져 왔다. 하지만 ITO의 높은 가격과 Indium의 인체 유해한 독성 때문에 ITO를 대체하는 물질에 대해 많은 연구가 진행되고 있다. 그 중 Al이 도핑된 ZnO (AZO) 는 가시광 영역에서 85% 이상의 높은 투과율과 높은 전도성, 낮은 비저항으로 다양한 광전소자의 전극과 윈도우 물질로 많은 응용 가능성을 보여주고 있다. 본 실험에서는 고 품질의 박막성장이 가능하고, 박막의 두께를 세밀하게 조절할 수 있는 Pulsed Laser Deposition (PLD) 을 이용하여 온도변화에 따라 AZO 박막을 성장시키고 구조적, 전기적, 광학적 특성을 조사하였다. 또한 온도변화가 AZO 박막 특성에 미치는 영향을 분석하여 Source/Drain 전극으로 사용하기 위한 조건을 최적화하였고, 실제 투명박막트랜지스터 제작을 통해 소자의 I-V Curve 와 Transfer 특성을 확인하고, Transfer Length Method 방법을 이용하여 투명박막트랜지스터의 접촉저항, 채널 비저항 등을 확인해 보았다. 소결된 타겟으로는 99.99%의 순도를 갖는 ZnO-$Al_2O_3$ (98:2 wt%) 타겟을 이용하였으며, 장비조건으로는 355 nm의 파장대역을 갖는 Nd:YAG 레이저를 사용하였고, 실험변수로는 온도범위 RT, $200^{\circ}C$, $400^{\circ}C$, $600^{\circ}C$에서 실험을 진행하였다. AZO 박막의 구조적, 전기적 특성을 분석하기 위해 각각 X-Ray Diffraction (XRD), Hall measurement 장비를 사용하였으며, 광학적 특성을 분석하기 위한 투과도의 측정은 UV-Visible spectrophotometer 장비를 사용하였다.

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A Clinical Study on the Therapeutic Effects of the Pulsed Nd:YAG Laser on Dentinal Hypersensitivity (상아질지각과민증에 대한 펄스형 Nd: YAG 레이저의 치료효과에 관한 임상적 연구)

  • 최순정;신금백;김문현
    • Journal of Oral Medicine and Pain
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    • v.23 no.1
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    • pp.11-20
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    • 1998
  • 저자는 치과용 레이저를 이용한 상아질지각과민증 치료효과를 임상적으로 평가하고자 상아질지각과민증환자 24명을 대상으로 각 환자마다 상아질 지각과민 치아 중 레이저로 치료 할 치아1개(실험군)와 치료하지 않을 치아 1개(대조군)를 선정하여, 치과용 air-syringe에 의한 냉자극과 치과용 탐침자에 의한 기계적 자극을 가한 후 Visual Analogue Scale(VAS)을 통해 지각과민증 정도를 평가하였으며, 이후 실험군 치아의 치경부 마모면에 광섬유 레이저에너지 전달방식의 펄스형 Nd:YAG 레이저의 일종인 Sunlase Master(Sunrise Technologies Inc., U.S.A., 파장 1064nm, 펄스지속시간 120(sec, 광섬유직경 320(m)를 사용하여, 0.3-1.0W, 10Hz 조건으로 환자의 반응에 따라 1회2분을 초과하지 않는 범위 내에서 비접촉식과 접촉식을 병행하여 3회에 걸쳐(초진 당일, 1일후, 3일후) 레이저를 조사한 후 처음조사 직후, 그리고 초진 1일후, 3일후, 7일후, 14일후 VAS를 채득하여 조사전과 비교, 분석, 평가하였던 바, 상아질 지각과민증이 각각 약 50%, 약36%, 약45%, 약 53% 감소하였으나 (p(0.05) 경시적으로는 유의한 차이를 보이지 않았다. 그리고 24명중 9명에 대해서는 초진 30일 후 까지 레이저조사치료효과를 평가하였던 바, 상아질지각과민증이 처음조사 직후, 감소하였으며 (p(0.05)역시 경시적으로는 유의한 차이를 보이지 않았다. 초진 30일 후 상아질지각과민증이 초진 14일 후에 비해 약간 증가되는 경향을 보여, 레이저조사 치료효과가 약화되는 경향인지 여부에 대해 향후 추가적인 연구가 필요할 것으로 사료된다.안되었다.기란 현실적으로 불가능하므로, 본 연구에서는 이러한 제약점을 극복할 수 있는 근사적인 지체시간을 계산하는 방법을 제시한 점에서 의미를 갖을 수 있다.수들은 직업의 선택이나 소득을 예측하기 위한 요소들로 포함될 수 없었다. 따라서 후속연구에서는 이를 보완해야 할 것이며, 최근 들어 우리 나라에서도 재택근무에 대한 관심이 대두되고 있으나 아직 개념정의나 그 중요성과 가치, 그리고 실태 파악과 같은 연구가 활발히 이루어지지 못하고 있으므로 이에 대한 심층적인 연구가 행해져야 할 것이다.d similar flower proceeding dates in all branches. but "Daepung" showed similar flower proceeding dates in all branches.est in HB. Mean period of wetting duration was in the order of DS>HB>MB, while the dew point depression was greatest in DS.ANCOVA, Pearson correlation을 이용하여 분석하였으며, 그 결과는 다음과 같다. 캠프 프로그램은 소아 당뇨병 환자의 자기 효능을 증진시키고 환자 역할 행위 이행을 높여주는데 효과적 이었다. 소아 당뇨병 환자의 자기 효능은 환자 역할 행위 이행과 순 상관 관계가 있어, 자기 효능이 증진될수록 환자 역할 행위 이행 정도가 높아졌다. 무조건 사주지 않는다(8.0%), 무조건 사준다(3.1%)로 식품광고에 나오는 식품 요구시 부모의 70.3%가 거절하는 것으로 나타났다. 거절 이유는 건강에 나쁘다는 것이 가장 큰 이유였으며 강남과 강북 어린이간에 유의적인 차이가 있었다(p<0.001).

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Preparation of ZrVFe Nano Powders by Laser Ablation (Laser Ablation법에 의한 ZrVFe 합금 나노분말 제조)

  • Kil Daesup;Suh Yongjae;Jang Heedong;Lee Jaechen;Song Changbin;Kim Wonbaek
    • Korean Journal of Materials Research
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    • v.15 no.4
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    • pp.257-262
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    • 2005
  • Nano-sized ZrVFe alloy powders were prepared by the ablation of powder compact in alcobol using a Nd-YAG pulsed Laser. The $Zr_{57}V_{35.}8Fe_{7.2}$ alloy commercially designated as ST707 has long been known as the ideal solution for various vacuum applications. The target for the ablation was sintered pellets of $Zr_{57}V_{35.}8Fe_{7.2}$ alloy powder. The alloy was prepared by arc melting and Hydride-DeHydride method. The ablated powders were mostly circular having fairly large size distribution smaller than 200 nm in all cases. The X-ray diffraction study revealed that the ablated alloy retained the crystal structure of the target alloy. Nevertheless, Fe and V contents in the ablated powder were lower than those in the target alloy. This was believed to result from the high vapour pressures of Fe and V compared to that of Zr. The size of the powders ablated at high energy fluence tends to decrease due at least partly to the breakdown of previously made ones.

Characterization of BST films for high tunable thin film capacitor

  • No, Ji-Hyeong;Song, Sang-U;Kim, Ji-Hong;Go, Jung-Hyeok;Mun, Byeong-Mu
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.179-179
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    • 2009
  • This is for the electrical characterization by IDC pattern using BST$(Ba_{0.5}Sr_{0.5}TiO_3)$ thin film. BST materials had been chosen for high frequency applications due to it's high permitivity and tunability. The BST thin films have been deposited on $Al_2O_3$ Substrates by Nd-YAG pulsed laser deposition with a 355nm wavelength at $700\;^{\circ}C$. The post deposition annealing at $750^{\circ}C$ in flowing $O_2$ atmosphere for 1 hours. The capacitance of IDC patterns have been measured from 1 to 10 GHz as a function of electric field ($\pm40$ KV/cm) at room temperature using inter-digital Au electrodes deposited on top of BST. The IDC patterns have three type of fingers number. For the 10 pairs finger was the best capacitance onto $Al_2O_3$ substrate. The capacitance was 0.9pF. Also Dielectric constant was been 351 at 100 mTorr and annealing temperature $750^{\circ}C$ for 1 hour. The loss tangent was been 0.00531.

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A Study on $TiO_2$ Thin Film by PLD for Buffer Layer between Front Electrode and FTO of Dye-sensitized Solar Cell (염료감응 태양전지에서 전면전극/FTO 사이에 완충층으로서의 PLD로 증착한 $TiO_2$ 박막에 관한 연구)

  • Song, Sang-Woo;Roh, Ji-Hyoung;Lee, Kyung-Ju;Ji, Min-Woo;Moon, Byung-Moo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.465-466
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    • 2009
  • Dye-sensitized Solar Cell (DSC) is a new type of solar cell by using photocatalytic properties of $TiO_2$. The electric potential distribution in DSCs has played a major role in the operation of such cells. $TiO_2$ thin films were deposited on the ITO substrate by Nd:YAG Pulsed Laser Deposition(PLD) at room temperature and post-deposition annealing at $500^{\circ}C$ in flowing $O_2$ atmosphere for 1hour. The structural properties of $TiO_2$ thin films have investigated by X-ray diffraction(XRD). We manufactured DSC unit cells then I-V and efficiency were tested by solar simulator.

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Electrical Characterization of BST Thin Film by IDC pattern (IDC 패턴에 따른 BST 전기적 특성)

  • Roh, Ji-Hyoung;Kim, Sung-Su;Song, Sang-Woo;Kim, Ji-Hong;Koh, Jung-Hyuk;Moon, Byung-Moo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.11a
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    • pp.200-200
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    • 2008
  • This paper reports on electrical characterization by IDC pattern using BST$(Ba_{0.5}Sr_{0.5}TiO_3)$ thin film. BST thin films have been deposited on $Al_2O_3$ Substrates by Nd-YAG pulsed laser deposition with a 355nm wavelength at $700^{\circ}C$. The post deposition annealing at $750^{\circ}C$ in flowing $O_2$ atmosphere for I hours. The capacitance of IDC patterns have been measured from 1 to 10 GHz as a function fo electric field (${\pm}40$ KV/cm) at room temperature using interdiigitated Au electrodes deposited on top of BST. The IDC patterns have three type of fingers number. For the finger paris was increased onto $Al_2O_3$, the capacitance increased. The capacitance of 5 pairs finger was 0.3pF and 10 pairs finger was 0.9pF.

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MEASUREMENT OF FLOW DISTRIBUTION IN A STRAIGHT DUCT OF RAILWAY TUNNEL MOCK-UP USING PIV AND COMPARISON WITH NUMERICAL SIMULATION (PIV 기법을 이용한 모형철도터널 직관덕트에서 유동 분포 계측 및 수치해석 결과와의 비교분석)

  • Jang, Y.J.;Jung, W.S.;Park, I.S.
    • Journal of computational fluids engineering
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    • v.15 no.3
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    • pp.39-45
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    • 2010
  • The turbulent flows in a tunnel mock-up($10L{\times}0.5W{\times}0.25H$ m3 : scale reduction 1/20) with rectangular cross section were investigated. The instantaneous velocity fields of Re = 49,029, 89,571 were measured by the 2-D PIV system which is consisted of double pulsed Nd:Yag laser and the tracer particles in the straight-duct mock-up where the flows were fully developed. The mean velocity profiles were taken from the ensemble averages of 1,000 instantaneous velocity fields. Simultaneously, numerical simulations(RANS) were performed to compare with experimental data using STREAM code. Non-linear eddy viscosity model (NLEVM : Abe-Jang-Leschziner Eddy Viscosity Model) was employed to resolve the turbulent flows in the duct. The calculated mean velocity profiles were well compared with PIV results. In the log-law profiles, the experimental data were in good agreement with numerical simulations all the way to the wake region except the viscous sub-layer (near wall region).

Internal Structure and Velocity Field of the Impinging Diesel Spray on the Wall (디젤 충돌 분무의 발달 과정 및 내부 유동 특성)

  • Chon, M.S.;Suh, S.K.;Park, S.W.;Lee, C.S.
    • Journal of ILASS-Korea
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    • v.10 no.3
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    • pp.1-8
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    • 2005
  • The purpose of this study is to investigate the internal structure of the impinged diesel spray at various experimental conditions. To examine the effect of various factors on the development of a diesel spray impinging on the wall, experiments were conducted at the various Injection pressures, wall distances from the nozzle tip and angles of wall inclination. The PIV system consists of a double pulsed Nd:YAG laser was utilized to analyze the internal flow structure of impinged diesel sprays. The velocity fields from the PIV system were compared with the results measured by the phase Doppler particle analyzer(PDPA)system. The results show that internal flow pattern of the impinged spray was similar with the results from the PDPA system. The radial velocity of the impinged spray was increased with the increase in the injection pressure and near the nozzle-wall distance. The generation of vortex was also promoted with the Increase in angles of wall inclination.

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DIAGNOSTICS OF PLASMA INDUCED IN Nd:YAG LASER WELDING OF ALUMINUM ALLOY

  • Kim, Jong-Do;Lee, Myeong-Hoon;Kim, Young-Sik;Seiji Katayama;Akira Matsunawa
    • Proceedings of the KWS Conference
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    • 2002.10a
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    • pp.612-619
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    • 2002
  • The dynamic behavior of Al-Mg alloys plasma was very unstable and this instability was closely related to the unstable motion of keyhole during laser irradiation. The keyhole fluctuated both in size and shape and its fluctuation period was about 440 ${\mu}{\textrm}{m}$. This instability has been estimated to be caused by the evaporation phenomena of metals with different boiling point and latent heats of vaporization. Therefore, the authors have conducted the spectroscopic diagnostics of plasma induced in the pulsed YAG laser welding of Al-Mg alloys in air and argon atmospheres. In the air environment, the identified spectra were atomic lines of Al, Mg, Cr, Mn, Cu, Fe and Zn, and singly ionized Mg line, as well as strong molecular spectrum of AlO, MgO and AIH. It was confirmed that the resonant lines of Al and Mg were strongly self-absorbed, in particular in the vicinity of pool surface. The self-absorption of atomic Mg line was more eminent in alloys containing higher Mg. These facts showed that the laser-induced plasma was relatively a low temperature and high density metallic vapor. The intensities of molecular spectra of AlO and MgO were different each other depending on the power density of laser beam. Under the low power density irradiation condition, the MgO band spectra were predominant in intensity, while the AlO spectra became much stronger in higher power density. In argon atmosphere the band spectra of MgO and AlO completely vanished, but AlH molecular spectra was detected clearly. The hydrogen source was presumably the hydrogen solved in the base Metal, absorbed water on the surface oxide layer or H$_2$ and $H_2O$ in the shielding gas. The temporal change in spectral line intensities was quite similar to the fluctuation of keyhole. The time average plasma temperature at 1 mm high above the surface of A5083 alloy was determined by the Boltzmann plot method of atomic Cr lines of different excitation energy. The obtained electron temperature was 3, 280$\pm$150 K which was about 500 K higher than the boiling point of pure aluminum. The electron number density was determined by measuring the relative intensities of the spectra1lines of atomic and singly ionized Magnesium, and the obtained value was 1.85 x 1019 1/㎥.

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An Experimental Analysis on the Spray Structure of Multi-component Fuels Using Magnification Photograph and Mie Scattering Images (확대촬영법 및 Mie 산란광법을 이용한 다성분연료의 분무구조에 관한 실험적 해명)

  • Myong, Kwang-Jae;Yoon, Jun-Kyu
    • Journal of Advanced Marine Engineering and Technology
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    • v.32 no.5
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    • pp.707-716
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    • 2008
  • The objective of this study was to analyze the effect of mixed fuel composition and mass fraction on spray inner structure in evaporating transient spray under the variant ambient conditions. Spray structure and spatial distribution of liquid phase concentration were investigated using a thin laser sheet illumination technique on the three component mixed fuels. A pulsed Nd:YAG laser was used as a light source. The experiments were conducted in a constant volume vessel with optical access. Fuel was injected into the vessel with electronically controlled common rail injector. Used fuel contains i-octane($C_8H_{18}$), n-dodecane($C_{12}H_{26}$) and n-hexadecane($C_{16}H_{34}$) that were selected as low-, middle- and high-boiling point fuel, respectively. Experimental conditions are 42 MPa, 72 MPa and 112 MPa in injection pressure, $5\;kg/m^3$, $15kg/m^3$ and $30kg/m^3$ in ambient gas density, 300 K, 500 K, 600 K and 700 K in ambient gas temperature, 300 K and 368 K in fuel temperature and different fuel mass fraction. Experimental results indicated that the multi-component fuels made two phase region mixed vapor and liquid so that it would are helpful to improve combustion, for the fuels of high boiling point component could accelerate evaporation very much according as low boiling point fuel was added to high boiling point fuel.