• Transactions on Electrical and Electronic Materials
• /
• v.13 no.3
• /
• pp.139-143
• /
• 2012

Optical emission spectroscopy (OES) is often used for real-time analysis of the plasma processes. OES has been suggested as a primary plasma process monitoring tool. It has the advantage of non-invasive in-situ monitoring capability but selecting the proper wavelengths for the analysis of OES data generally relies on empirically established methods. In this paper, we propose a practical method for the selection of OES wavelength peaks for the analysis of plasma etch process and this is done by investigating reactants and by-product gas species that reside in the plasma etch chamber. Wavelength selection criteria are based on the standard deviation and correlation coefficients. Moreover, chemical actinometry is employed for the normalization of the selected wavelengths. We also present the importance of chemical actinometry of OES data for quantitative analysis of plasma. Then, the suggested OES peak selection method is employed.. This method is used to find out the reason behind abnormal etching of PR erosion during a series of $SiO_2$ etch processes using the same recipe. From the experimental verification, we convinced that OES is not only capable for real-time detection of abnormal plasma process but it is also useful for the analysis of suspicious plasma behavior.

• Journal of Microbiology and Biotechnology
• /
• v.17 no.2
• /
• pp.320-324
• /
• 2007

The removal of hydrogen sulfide ($H_2S$) from aqueous media was investigated using Thiobacillus novellas cells immobilized on a $SiO_2$ carrier (biosand). The optimal growth conditions for the bacterial strain were $30^{\circ}C$ and initial pH of 7.0. The main product of hydrogen sulfide oxidation by T. novellus was identified as the sulfate ion. A removal efficiency of 98% was maintained in the three-phase fluidized-bed reactor, whereas the efficiency was reduced to 90% for the two-phase fluidized-bed reactor and 68% for the two-phase reactor without cells. The maximum gas removal capacity for the system was 254 g $H_2S/m^3/h$ when the inlet $H_2S$ loading was $300g/m^3/h(1,500ppm)$. Stable operation of the immobilized reactor was possible for 20 days with the inlet $H_2S$ concentration held to 1,100 ppm. The fluidized bed bioreactor appeared to be an effective means for controlling hydrogen sulfide emissions.

• Proceedings of the Korea Inteligent Information System Society Conference
• /
• 2005.11a
• /
• pp.516-525
• /
• 2005

Case-based reasoning (CBR) has been widely used in various areas due to its convenience and strength in complex problem solving. Generally, in order to obtain successful results from CBR, effective retrieval of useful prior cases for the given problem is essential. However, designing a good matching and retrieval mechanism for CBR systems is still a controversial research issue. Most prior studies have tried to optimize the weights of the features or selection process of appropriate instances. But, these approaches have been performed independently until now. Simultaneous optimization of these components may lead to better performance than in naive models. In particular, there have been few attempts to simultaneously optimize the weight of the features and selection of the instances for CBR. Here we suggest a simultaneous optimization model of these components using a genetic algorithm (GA). We apply it to a customer classification model which utilizes demographic characteristics of customers as inputs to predict their buying behavior for a specific product. Experimental results show that simultaneously optimized CBR may improve the classification accuracy and outperform various optimized models of CBR as well as other classification models including logistic regression, multiple discriminant analysis, artificial neural networks and support vector machines.

• Transactions on Electrical and Electronic Materials
• /
• v.14 no.2
• /
• pp.71-77
• /
• 2013

Advanced semiconductor manufacturing technology requires methods to maximize tool efficiency and improve product quality by reducing process variability. Real-time plasma process monitoring and diagnosis have become crucial for fault detection and classification (FDC) and advanced process control (APC). Additional sensors may increase the accuracy of detection of process anomalies, and optical monitoring methods are non-invasive. In this paper, we propose the use of a chromatic data acquisition system for real-time in-situ plasma process monitoring called the Plasma Eyes Chromatic System (PECS). The proposed system was initially tested in a six-inch research tool, and it was then further evaluated for its potential to detect process anomalies in an eight-inch production tool for etching blanket oxide films. Chromatic representation of the PECS output shows a clear correlation with small changes in process parameters, such as RF power, pressure, and gas flow. We also present how the PECS may be adapted as an in-situ plasma arc detector. The proposed system can provide useful indications of a faulty process in a timely and non-invasive manner for successful run-to-run (R2R) control and FDC.

• Nuclear Engineering and Technology
• /
• v.50 no.5
• /
• pp.724-730
• /
• 2018

Chromium and chromium nitride were selected as potential barriers to prevent fuel-clad chemical interaction (FCCI) between the cladding and the fuel material. In this study, ferritic/martensitic HT-9 steel and misch metal were used to simulate the reaction between the cladding and fuel fission product, respectively. Radio frequency magnetron sputtering was used to deposit Cr and CrN films onto the cladding, and the gas flow rates of argon and nitrogen were fixed at certain values for each sample to control the deposition rate and the crystal structure of the films. The samples were heated for 24 h at 933 K through the diffusion couple test, and considerable amount of interdiffusion (max. thickness: $550{\mu}m$) occurred at the interface between HT-9 and misch metal when the argon and nitrogen were used individually. The elemental contents of misch metal were detected at the HT-9 through energy dispersive X-ray spectroscopy due to the interdiffusion. However, the specimens that were sputtered by mixed gases (Ar and $N_2$) exhibited excellent resistance to FCCI. The thickness of these CrN films were only $4{\mu}m$, but these films effectively prevented the FCCI due to their high adhesion strength (frictional force ${\geq}1,200{\mu}m$) and dense columnar microstructures.

• Journal of the Korean Society of Mechanical Technology
• /
• v.13 no.2
• /
• pp.123-128
• /
• 2011

It has been stand high in estimation to converse from Carbon dioxide to Dimethyl Ether in new alternative fuel energy division in 21C, especially Using of DME in point of view of transportation fuel has been discussed of a new clean energy which is very lower of exhaust gas than gasoline and diesel energy. In this paper it is used ZSM-5 and I developed new catalyst by addition of cerium to control acidity. The new catalyst was proved high conversion rate, when it was conversed from methanol to DME, there wasn't any additional material except DME and water, and I overlooked reaction temperature, reaction time, amount of catalyst, amount of added cerium, effect of water content in methanol, reaction temperature by making change of reaction time. I have conclude that conversion rate to DME was increased as increased of catalyst amounts. The best catalyst condition of without additional product was treated poisoning from ZSM-5 to 5% cerium and new catalyst was not effected in purity of fuel methanol.

• Bulletin of the Korean Chemical Society
• /
• v.22 no.7
• /
• pp.703-708
• /
• 2001

K2NiF4-type organic-based perovskites of the (C4H9NH3)2FexPb1-xCl4 (x=0.00, 0.25, 0.50, and 0.75) system have been synthesized using a low-temperatu re solution method under a flowing argon gas. When stoichiometric butylamine, iron chloride, and lead chloride are mixed, a yellow solution are obtained from slow cooling of 90 to -10 $^{\circ}C.$ The final product is a plate-like yellow crystal. The X-ray crystallographic analysis has been carried out using XRD in the range of $5^{\circ}{\leq}$ 2${\theta}$ ${\leq}80^{\circ}.$ The local symmetry around the absorbing Pb atom of the samples has been determined by the EXAFS spectroscopic study. The crystals assign to orthorhombic system by the XRD analysis. The FT-IR spectra are analyzed in the range of 600 to 3300 cm-1 . DSC and TGA are measured to detect thermal stability between 30 and 300 $^{\circ}C.$ Two endothermic peaks are detected in all samples. The electrical conductivity has been measured using the four-probes technique for the (C4H9NH3)2FexPb1-xCl4 system in 300-460 K. Photoluminescence phenomenon was also investigated at room-temperature.

• Proceedings of the Korean Society of Propulsion Engineers Conference
• /
• 2008.03a
• /
• pp.419-426
• /
• 2008

As pulse detonation engine(PDE) does not need compression mechanisms such as compressors because self-sustained detonation waves are able to compress propellant gases by their incident shock waves, the PDE can have a simple straight-tube structure. In this study, we propose an autonomous driving valve system of the PDE, which fill premixed gases into the PDE tubes at high frequency with high mass flow rate. The proposed valve is composed of only three parts: a piston, a cylinder, and a spring. This valve system can produce intermittent flow at high mass flow rate, and also can keep stable reciprocal motion by using the propellant-gas enthalpy. When the cylinder content product is assumed to be constant, experimental results of the mass flow rate were approximately equal to the calculation model. We confirmed the autonomous driving valve performance by experiments, and concluded that this extremely simple valve with no electrical power and controller can be used as the PDE propellant supply system.

• Mass Spectrometry Letters
• /
• v.12 no.4
• /
• pp.131-136
• /
• 2021

Collision-induced dissociation of peptides involves a series of proton-transfer reactions in the activated peptide. To describe the kinetics of energy-variable dissociation, we considered the heat capacity of the peptide and the Marcus-theory-type proton-transfer rate. The peptide ion was activated to the high internal energy states by collision with a target gas in the collision cell. The mobile proton in the activated peptide then migrated from the most stable site to the amide oxygen and subsequently to the amide nitrogen (N-protonated) of the peptide bond to be broken. The N-protonated intermediate proceeded to the product-like complex that dissociated to products. Previous studies have suggested that the proton-transfer equilibria in the activated peptide affect the dissociation kinetics. To take the extent of collisional activation into account, we assumed a soft-sphere collision model, where the relative collision energy was fully available to the internal excitation of a collision complex. In addition, we employed a Marcus-theory-type rate equation to account for the proton-transfer equilibria. Herein, we present results from the integrated thermochemical approach using a tryptic peptide of ubiquitin.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.32 no.1
• /
• pp.64-69
• /
• 2019

Methylammonium lead triiodide ($MAPbI_3$)-based perovskite solar cells potentially have potential advantages such as high efficiency and low-cost manufacturing procedures. However, $MAPbI_3$ is structurally unstable and has low phase-change temperatures ($30^{\circ}C$ and $130^{\circ}C$); it is necessary to solve these problems. We investigated the crystal structure and phase separation using real-time temperature-change X-ray diffraction, transmission electron microscopy, and electron energy loss spectroscopy. $MAPbI_3$ has a tetragonal structure, and at about $35^{\circ}C$ the c-axis contracts, transforming $MAPbI_3$ into the related cubic crystal structure. In addition, at $130^{\circ}C$, phase separation occurs in which $CH_3NH_2$ and HI at the center of the unit cell of the perovskite structure are extracted by gas, leavingand only $PbI_2$ of the three-component structure, is produced as the final solid product.