• 센서학회지
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• 제24권1호
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• pp.10-14
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• 2015

This paper reports the results of a study on the optimization of the etching profile, which is an important factor in deep-reactive-ion etching (DRIE), i.e., dry etching. Dry etching is the key processing step necessary for the development of the Internet of Things (IoT) and various microelectromechanical sensors (MEMS). Large-area etching (open area > 20%) under a high-frequency (HF) condition with nonoptimized processing parameters results in damage to the etched sidewall. Therefore, in this study, optimization was performed under a low-frequency (LF) condition. The HF method, which is typically used for through-silicon via (TSV) technology, applies a high etch rate and cannot be easily adapted to processes sensitive to sidewall damage. The optimal etching profile was determined by controlling various parameters for the DRIE of a large Si wafer area (open area > 20%). The optimal processing condition was derived after establishing the correlations of etch rate, uniformity, and sidewall damage on a 6-in Si wafer to the parameters of coil power, run pressure, platen power for passivation etching, and $SF_6$ gas flow rate. The processing-parameter-dependent results of the experiments performed for optimization of the etching profile in terms of etch rate, uniformity, and sidewall damage in the case of large Si area etching can be summarized as follows. When LF is applied, the platen power, coil power, and $SF_6$ should be low, whereas the run pressure has little effect on the etching performance. Under the optimal LF condition of 380 Hz, the platen power, coil power, and $SF_6$ were set at 115W, 3500W, and 700 sccm, respectively. In addition, the aforementioned standard recipe was applied as follows: run pressure of 4 Pa, $C_4F_8$ content of 400 sccm, and a gas exchange interval of $SF_6/C_4F_8=2s/3s$.

• Coupled systems mechanics
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• 제8권6호
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• pp.489-500
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• 2019

With drinking water standards becoming more rigorous and increasing demands for additional water quantities, while water resources are becoming more polluted, mathematical models became an important tool to improve water treatment processes performance in the water supply system. Water treatment processes models reflect the knowledge of the processes and they are useful tools for water treatment process optimization, design, operator training for decision making and fundamental research. Unfortunately, in the current practice of drinking-water production and distribution, water treatment processes modeling is not successfully applied. This article presents a review of some existing water treatment processes simulators and the experience of their application and indicating the main weak points of each process. Also, new approaches in the modeling of water treatment are presented and recommendations are given for the work in the future.

• 산업공학
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• 제16권spc호
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• pp.76-81
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• 2003

BPMS (Business Process Management Systems) is aninformation system that systematically supports designing, administrating, and improving the business processes. It can execute the business processes by assigning tasks to human or computer agents according to the predefined definitions of the processes. In this research we developed a task assignment algorithm that can maximize overall process efficiency under the limitation of agents' capacity. Since BPMS manipulates the formal and predictable business processes, we can analyze the processes using queuing theory to achieve overall process efficiency. We first transform the business processes into queuing network model in which the agents are considered as servers. After that, workloads of agents are calculated as server utilization and we can determine the task assignment policy by balancing the workloads. This will make the workloads of all agents be minimized, and the overall process efficiency is achieved in this way. Another application of the results can be capacity planning of agents in advance and business process optimization in reengineering context. We performed the simulation analysis to validate the results and also show the effectiveness of the algorithm by comparing with well known dispatching policies.

• 한국물환경학회지
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• 제22권1호
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• pp.74-82
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• 2006

In this study, development of M2-Dephanox and M3-Dephanox process has been tried to enhance the nitrogen removal of M-Dephanox process on the basis of previous study about M-Dephanox. The results showed that T-N removal efficiency of M3-Dephanox process was 8.9% or 11.3% higher than M-Dephanox or M2-Dephanox processes, respectively. This result is due to the lower $NO_3{^-}-N$ concentration in the effluent of M3-Dephanox than of M-Dephanox and M2-Dephanox processes. This results were recurrenced by PASS simulator. As result of simulation by PASS program, effluent $NO_3{^-}-N$ concentration of M3-Dephanox process was 1.4 mg/L and 3.6 mg/L lower than M-Dephanox and M2-Dephanox processes. In the study about optimization of M3-Dephanox processes by PASS program, SRT greatly affected T-N removal of M3-Dephanox process, whereas, the recycle rate and recirculation rate did little affect T-N removal efficiency of M3-Dephanox. In the study about optimization of reactors following the nitrification reactor of M3-Dephanox process, it was shown that the best optimum volume ratio of denitrification reactor, intermittently aerated reactor and anoxic reactor for the T-N removal were 29.1(%) : 32.7(%) : 38.2(%). T-N removal efficiency at this volume ratio was similar to T-N removal efficiency at the volume ratio of 36.3(%) : 36.3(%) : 27.4(%) designed for the lab-scale M3-Dephanox.

• 한국전산구조공학회논문집
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• 제20권1호
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• pp.19-28
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• 2007

이산화 된 구조물의 위상최적화 과정은 균일하게 분포된 재료 밀도의 위상으로 표현되는 초기 설계영역을 시발점으로 한다. 최적화 과정 동안 구조물의 위상은 고정된 설계영역 내에 주어진 최적화 문제를 만족시키는 방향으로 변화하면서, 최종적으로 최적 위상의 재료 밀도 분포를 생산한다. Eschenauer et al.에 의해 제안되었던 설계영역 안에 구멍을 도입하는 개념은 원래 경계면의 최적화 문제에 대해 설계변수의 유한적인 변화를 촉진시켜 최적화의 수렴성 개선을 도모하기 위함이었으나, 위상최적화의 관점에서는 초기 위상의 정의에 따라 다양한 최적 위상이 생산되는 것을 의미한다. 본 연구에서는 초기 설계영역 안에 국소적인 솔리드 상을 도입해 초기 위상에 변화를 주었을 때, 한정된 재료 하에 구조물에 배치 가능한 다양한 최적 위상을 산출할 수 있음을 검증하였다. 수치 예제로서 초기 설계영역 내에 다양한 치수를 가지는 국부적인 원형 솔리드의 고정된 개수를 투입하여 간단한 MBB-보의 위상최적 설계를 수행하였다.

• 한국소음진동공학회논문집
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• 제19권5호
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• pp.482-490
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• 2009

In this paper, the author proposes a new method for acoustic radiation optimum design to minimize noise from a vibrating panel-like structure using a collaborative population-based search method called the particle swarm optimization algorithm(PSOA). The PSOA is a parallel evolutionary computation technique initially developed by Kennedy and Eberhart. The acoustic radiation optimization method based on the PSOA consists of two processes. In the first process, the acoustic radiation analysis by an integrated p-version FEM/BEM, which was developed by using MATLAB, is performed to evaluate the exterior acoustic radiation field of the panel. The second process is to search the optimum design variables: 1) Shape of Bezier curves and 2) Shape and position of ribs, to minimize noise from the panel using the PSOA. The optimization method based on the PSOA is compared to that based on the steady state genetic algorithm(SSGA) in order to verify the effectiveness and validity of the optimal solution by PSOA. Finally, it is shown that the optimal designs of the panel obtained by using the PSOA can achieve effective reductions in radiated sound power.

• Journal of Multimedia Information System
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• 제4권4호
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• pp.311-316
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• 2017

High Efficiency Video Coding (HEVC) is the newest video coding standard for improvement in video data compression. This new standard provides a significant improvement in picture quality, especially for high-resolution videos. A quadtree-based structure is created for the encoding and decoding processes and the rate-distortion (RD) cost is calculated for all possible dimensions of coding units in the quadtree. To get the best combination of the block an optimization process is performed in the encoder, called rate distortion optimization (RDO). In this work we are proposing a novel approach to enhance the overall RDO process of HEVC encoder. The proposed algorithm is performed in two steps. In the first step, like HEVC, it performs general rate distortion optimization. The second step is an extra checking where a SSIM based cost is evaluated. Moreover, a fast SSIM (FSSIM) calculation technique is also proposed in this paper.

• 한국강구조학회 논문집
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• 제12권1호통권44호
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• pp.93-102
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• 2000

본 연구는 부구조화에 기초한 계층적 접근방법을 이용하여 프레임구조에 대한 설계민감도해석과 최적화를 수행한다. 이 방법의 개념적 틀은 유형의 구조계와 무형의 설계과정을 계층적으로 모델링하고 부구조화해석과 다단계최적화를 결합하는데 있다. 여기서 해석과 총합을 위한 수학적 모델은 공통의 부구조화체계와 기반위에서 설정된다. 이러한 수학적 구조적 기반위에서 모듈화된 거동해석과 민감도해석 및 최적화과정이 서로 연계되고 통합된다. 여기서 설계민감도정보는 상태공간방법으로 계산되고, 시스템단계의 활성조건과 중량비 규준을 통해 부구조들의 조율이 이루어진다. 대형프레임구조에 대한 수치 예제들을 통해 본 연구의 타당성 및 효율성과 유용성을 검증한다.

• 한국정밀공학회지
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• 제19권10호
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• pp.66-76
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• 2002

Automated welding and soldering are an important manufacturing issue in order to lower the cost, increase the quality, and avoid labor problems. An off-line programming, OLP, is one of the powerful methods to solve this kind of diversity problem. Unless an OLP system is ready for the path optimization in welding and soldering, the waste of time and cost is unavoidable due to inefficient paths in welding and soldering processes. Therefore, this study attempts to obtain path optimization using a genetic algorithm based on artificial intelligences. The problem of welding path optimization is defined as a conventional TSP (traveling salesman problem), but still paths have to go through welding lines. An improved genetic algorithm was suggested and the problem was formulated as a TSP problem considering the both end points of each welding line read from database files, and then the transit problem of welding line was solved using the improved suggested genetic algorithm.

• 품질경영학회지
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• 제46권1호
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• pp.39-74
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• 2018

Purpose: For more than 30 years, robust parameter design (RPD), which attempts to minimize the process bias (i.e., deviation between the mean and the target) and its variability simultaneously, has received consistent attention from researchers in academia and industry. Based on Taguchi's philosophy, a number of RPD methodologies have been developed to improve the quality of products and processes. The primary purpose of this paper is to review and discuss existing RPD methodologies in terms of the three sequential RPD procedures of experimental design, parameter estimation, and optimization. Methods: This literature study composes three review aspects including experimental design, estimation modeling, and optimization methods. Results: To analyze the benefits and weaknesses of conventional RPD methods and investigate the requirements of future research, we first analyze a variety of experimental formats associated with input control and noise factors, output responses and replication, and estimation approaches. Secondly, existing estimation methods are categorized according to their implementation of least-squares, maximum likelihood estimation, generalized linear models, Bayesian techniques, or the response surface methodology. Thirdly, optimization models for single and multiple responses problems are analyzed within their historical and functional framework. Conclusion: This study identifies the current RPD foundations and unresolved problems, including ample discussion of further directions of study.