• Title/Summary/Keyword: process pump

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Characterizations of a Cold Trap System for the Process Stabilization of Al2O3 by ALD Equipment (ALD 장비의 Al2O3 공정 안정화를 위한 저온 트랩 장치의 특성 평가)

  • Yong Hyeok Seo;Won Woo Lee;In Hwan Kim;Ji Eun Han;Yeon Ju Lee;Che Hoo Cho;Yongmin Jeon;Eou-Sik Cho;Sang Jik Kwon
    • Journal of the Semiconductor & Display Technology
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    • v.23 no.1
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    • pp.92-96
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    • 2024
  • The application of the technology for forming Al2O3 thin films using ALD(atomic layer deposition) method is rapidly increasing in the semiconductor and display fields. In order to increase the efficiency of the ALD process in a mass production line, metallic by-products generated from the ALD process chamber must be effectively collected. By collecting by-products flowing out of the chamber with a cold trap device before they go to the vacuum pump, damage to the vacuum pump can be prevented and the work room can be maintained stably, resulting in increased process flow rate. In this study, a cold trap was installed between the ALD process chamber and the dry pump to measure and analyze by-products generated during the Al2O3 thin film deposition process. As a result, it was confirmed that Al and O elements were discharged, and the collection forms were two types: bulk and powder. And the binding energy peaked at 73.7 ~ 74.3 eV, the binding energy of Al 2p, and 530.7 eV, the binding energy of O 1s, indicating that the binding structure was Al-O.

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A Study on the Vibration Analysis of Impeller and Shaft in Cryogenic Submerged Pump (극저온용 액중펌프의 임펠러 및 샤프트 진동해석에 관한 연구)

  • Kweon, Byung Soo;Lee, Chi-Woo;Shin, Yoo In;Yi, Chung-Seob
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.16 no.2
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    • pp.56-62
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    • 2017
  • In this research, reverse engineering was applied to the product manufactured by "Vanzetti" from Italy to develop a localized cryogenic submerged pump used in small-scale LNG liquefaction plants. The results of modal analysis of the impeller and shaft confirmed that the resonance frequency of the impeller and shaft played an important role in the rotor. Modal analysis of the rotor confirmed that the forcing frequency had no influence on the resonance phenomenon.

A Study on Thermal Performance of Cooling System for a Laptop Computer Using a Cold Plate (Cold plate를 이용한 휴대용 컴퓨터 냉각 시스템의 열성능에 관한 연구)

  • Park, Sang-Hee;Cho, Nam-Hea;Choi, Sung-Dae
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.8 no.4
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    • pp.83-89
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    • 2009
  • This study investigates two-phase cooling system of close-loop by using FC-72 and PCM(Phase change material). The cooling system consists of evaporator, cold plate, micro pump, and condenser. The heat input on the performance of evaporator is appreciated by visualizing the boiling on the evaporator. The heat performance of cooling system is investigated to determine the effects of volume fill ratio change at working fluid, pump flow rate change, and volume fill ratio change at PCM in cold plate. Experimental results show the ideal condition when the volume ratio of working fluid, the pump flowing, and the volume ratio of PCM are 60%, 6ml/min, and 60% respectively.

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A Wide Output Range, High Power Efficiency Reconfigurable Charge Pump in 0.18 mm BCD process

  • Park, Hyung-Gu;Jang, Jeong-A;Cho, Sung Hun;Lee, Juri;Kim, Sang-Yun;Tiwari, Honey Durga;Pu, Young Gun;Hwang, Keum Cheol;Yang, Youngoo;Lee, Kang-Yoon;Seo, Munkyo
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.14 no.6
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    • pp.777-788
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    • 2014
  • This paper presents a wide output range, high power efficiency reconfigurable charge pump for driving touch panels with the high resistances. The charge pump is composed of 4-stages and its configuration automatically changes based on the required output voltage level. In order to keep the power efficiency over the wide output voltage range, internal blocks are automatically activated or deactivated by the clock driver in the reconfigurable charge pump minimizing the switching power loss due to the On and Off operations of MOSFET. In addition, the leakage current paths in each mode are blocked to compensate for the variation of power efficiency with respect to the wide output voltage range. This chip is fabricated using $0.18{\mu}m$ BCD process with high power MOSFET options, and the die area is $1870{\mu}m{\times}1430{\mu}m$. The power consumption of the charge pump itself is 79.13 mW when the output power is 415.45 mW at the high voltage mode, while it is 20.097 mW when the output power is 89.903 mW at the low voltage mode. The measured maximum power efficiency is 84.01 %, when the output voltage is from 7.43 V to 12.23 V.

Capacity and Power Input Performance Curves Creation of Water-cooled VRF Heat Pump for EnergyPlus (EnergyPlus 해석용 수랭식 VRF 히트펌프의 냉·난방 능력 및 소비전력 예측식 산출 기법)

  • Kim, Min-Ji;Kwon, Hyuk-Joo;Lee, Kwang Ho
    • Journal of the Korean Society for Geothermal and Hydrothermal Energy
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    • v.13 no.3
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    • pp.1-8
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    • 2017
  • Variable refrigerant flow (VRF) systems have recently attracted attention in many countries due to a variety of advantages over conventional system. Especially, the water-cooled VRF heat pump, including geothermal heat pump, is a system that accurately controls the flow rate of refrigerant for the improved efficiency under part load operation. This paper describe the process of generating the cooling and heating energy performance curve coefficients and performance expressions for modeling water cooled VRF system using EnergyPlus. Through this study, the process for generating performance curves can be implemented into EnergyPlus or other comparable building energy analysis tools for the long-term evaluation of heat pump under dynamic conditions.

Analyses of Power Consumption of the Heat Pump Dryer in the Automobile Drying Process by using the Principal Component Analysis and Multiple Regression (주성분 분석과 다중회귀모형을 사용한 자동차 건조 공정의 히트펌프 건조기 소모 전력 분석)

  • Lee, Chang-Yong;Song, Gensoo;Kim, Jinho
    • Journal of Korean Society of Industrial and Systems Engineering
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    • v.38 no.1
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    • pp.143-151
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    • 2015
  • In this paper, we investigate how the power consumption of a heat pump dryer depends on various factors in the drying process by analyzing variables that affect the power consumption. Since there are in general many variables that affect the power consumption, for a feasible analysis, we utilize the principal component analysis to reduce the number of variables (or dimensionality) to two or three. We find that the first component is correlated positively to the entrance temperature of various devices such as compressor, expander, evaporator, and the second, negatively to condenser. We then model the power consumption as a multiple regression with two and/or three transformed variables of the selected principal components. We find that fitted value from the multiple regression explains 80~90% of the observed value of the power consumption. This results can be applied to a more elaborate control of the power consumption in the heat pump dryer.

A Study on the Optimum Design of Charge Pump PLL with Dual Phase Frequency Detectors (두 개의 Frequency Detector를 가지고 있는 Charge Pump PLL 의 최적설계에 관한 연구)

  • Woo, Young-Shin;Jang, Young-Min;Sung, Man-Young
    • The Transactions of the Korean Institute of Electrical Engineers D
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    • v.50 no.10
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    • pp.479-485
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    • 2001
  • In this paper, we introduce a charge pump phase-locked loop (PLL) architecture which employs a precharge phase frequency detector (PFD) and a sequential PFD to achieve a high frequency operation and a fast acquisition. Operation frequency is increased by using the precharge PFD when the phase difference is within $-{\pi}{\sim}{\pi}$ and acquisition time is shortened by using the sequential PFD and the increased charge pump current when the phase difference is larger than ${\pm}{\pi}$. So error detection range of the proposed PLL structure is not limited to $-{\pi}{\sim}{\pi}$ and a high frequency operation and a higher speed lock-up time can be achieved. The proposed PLL was designed using 1.5 ${\mu}m$ CMOS technology with 5V supply voltage to verify the lock in process. The proposed PLL shows successful acquisition for 200 MHz input frequency. On the other hand, the conventional PLL with the sequential PFD cannot operate at up to 160MHz. Moreover, the lock-up time is drastically reduced from 7.0 ${\mu}s\;to\;2.0\;{\mu}s$ only if the loop bandwidth to input frequency ratio is regulated by the divide-by-4 counter during the acquisition process. By virtue of this dual PFDs, the proposed PLL structure can improve the trade-off between acquisition behavior and locked behavior.

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A Durability Evaluation of Remanufactured Industrial Hydraulic Pump and Solenoid Valve (산업용 유압펌프 및 솔레노이드 밸브 재제조품의 내구성 평가)

  • Lee, Kyu-Chang;Park, Sang-Jin;Son, Woo-Hyun;Jeon, Chang-Su;Mok, Hak-Soo
    • Journal of the Korean Society of Industry Convergence
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    • v.24 no.5
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    • pp.537-546
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    • 2021
  • Remanufacturing is one of the most important resource recycling technology in response to resource depletion and environmental pollution. Domestic remanufacturing industry don't invigorate compared to other advanced countries because of low price and reliability of remanufactured product. In this study, remanufactured hydraulic pump and solenoid valve were evaluated durability by accelerated life test. In order that standard remanufacturing process was developed by core analysis and failure mode and effect analysis. And cores were remanufactured by standard remanufacturing process. For accelerated life test, the evaluation item and criteria were deduced by results of FMEA, reliability standards and enterprise interior criteria. To evaluate durability of remanufactured product, the remanufactured hydraulic pump and solenoid valve were evaluated performance after accelerated life test and the results were satisfied with criteria. This study showed that remanufactured products have a similar level of durability to new products by definition of remanufacturing.

Evaluation of Safety Characteristic in Chemical Decontamination at Extremely Severe Condition of Stainless Steels for Coolant Pump (가장 가혹한 조건에서 화학 제염한 경우 냉각재 펌프용 스테인리스강의 안정성 평가)

  • Kim, Seong-Jong;Jang, Seok-Ki;Kim, Ki-Joon
    • Journal of the Korean Society of Marine Environment & Safety
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    • v.12 no.4 s.27
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    • pp.253-259
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    • 2006
  • This paper investigated on anti-corrosion characteristic in chemical decontamination at extremely severe condition{process model-2) of stainless steels used with reactor coolant pump. The electrochemical properties of stainless steel{STS) 304 with the lapse qf cycle is better than those of STS 415 and STS 431. The STS 304 in process model-1 and process model-2 present the lowest weightloss ratio. The experiment results for STS 304, STS 415, and STS 431 in process model-2 solution, it was ascertained that weightloss ratio of process model-2 solution for process model-1 solution show 2..908, 2.572, and 2.370 times, respectively. The reason suggests that process model-2 is higher concentration of chemical and temperature compare to process model-1.

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