• Korean Journal of Metals and Materials
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• v.48 no.11
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• pp.1028-1034
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• 2010

In the development of 3D package, through silicon via (TSV) formation technology by using deep reactive ion etching (DRIE) is one of the key processes. We performed the Bosch process, which consists of sequentially alternating the etch and passivation steps using $SF_6$ with $O_2$ and $C_4F_8$ plasma, respectively. We investigated the effect of changing variables on vias: the gas flow time, the ratio of $O_2$ gas, source and bias power, and process time. Each parameter plays a critical role in obtaining a specified via profile. Analysis of via profiles shows that the gas flow time is the most critical process parameter. A high source power accelerated more etchant species fluorine ions toward the silicon wafer and improved their directionality. With $O_2$ gas addition, there is an optimized condition to form the desired vertical interconnection. Overall, the etching rate decreased when the process time was longer.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.16 no.5
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• pp.414-420
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• 2004

The heat transfer and pressure drop characteristics associated with the gas cooling of the supercritical carbon dioxide in a horizontal tube have been investigated experimentally. This problem is of particular interest in the design of a gas cooler of cooling systems using $CO_2$refrigerant. The test section is consisted of 6 series of 455 mm in length, 4.15 mm ID copper tube, respectively. The effects of the inlet temperature, pressure and mass flow rate on the heat transfer and pressure drop of $CO_2$in a horizontal tube is studied in detail. The heat transfer coefficient of $CO_2$is varied by temperature, inlet pressure, and mass flow rate of $CO_2$. This has maximum value at near the pseudocritical temperature. The pressure drop is changed by inlet pressure and mass flow rate of $CO_2$. The results have been compared with those of previous work. The heat transfer correlation at the supercritical gas cooling process is also suggested.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.18 no.4
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• pp.26-33
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• 2019

This study is a thermal and flow analysis of Organic Rankine Cycle (ORC) pipe line for 250 kW grade waste gas heat recovery. We attempted to obtain the boundary condition data through the process design of the ORC, which can produce an electric power of 250 kW through the recovery of waste heat. Then, we conducted a simulation by using STAR-CCM+ to verify the model for the pipe line stream of the 250 kW class waste heat recovery system. Based on the results of the thermal and flow analyses of each pipe line applied to the ORC system, we gained the following conclusion. The pressure was relatively increased at the pipe outside the refracted part due to the pipe shape. Moreover, the heat transfer amount of the refrigerant gas line is relatively higher than that of the liquid line.

• Journal of the Korean Institute of Gas
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• v.17 no.4
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• pp.51-57
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• 2013

The process of liquefied natural gas is less then $-160^{\circ}C$ to natural gas by cooling at atmospheric pressure. When control strategy was made, one of the most significant is analysis of process. It is important to understand the control variable change according to manipulated variable change. In this study, we experiment natural gas liquefied process using C3MR(Propane Pre-cooled Mixed Refrigerant) process by BSU(Bench Scale Unit). We analyzed the change of refrigerant temperature and natural gas temperature according to the change of refrigerant flow rate so as to search an influence flow rate according to adjust each manipulated variables. One of the manipulated variable affected a number of control variables, but were able to confirm a control variable with a large response.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.852-855
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• 2003

Gas-Assisted Injection Molding(GAIM) process, that can be used to provide a hollow shape in a molding, is a variant of the conventional injection molding process. GAIM has many advantages such as reduction of material, sink mark. warpage. and lower injection pressure. Thus, GAIM has been widely applied in the industry to make moldings with a hollow channel such as handles, TV frames and so on. On the other hand, GAIM has some disadvantages such as slow cooling time and flow marks. In the disadvantages, hot gas core causes slow cooling of a molding and the overflow. which is to prevent flow mark. is waste of materials. To solve these problems, we developed a new GAIM system that we called RGIM(Reverse Gas Injection Molding). The RGIM has two special units; one is the overflow buffer, which is used for reduction of a material, and the other tile air unit, which is used for faster cooling of a molding. We conducted an experiment and simulation to verify the efficiency of the RGIM system. Through experiments and simulation, we confirmed the effectively operating of the RGIM system and extracted the optimum process conditions.

• Journal of the Korean Society of Safety
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• v.2 no.3
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• pp.37-43
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• 1987

The combustion process in gas turbine combustor mainly influenced by flow pattern in combustor, and especially the flow pattern near the nozzle and the shape of recirculation zone affect strongly on the flame stabilization, temperature distribution and combustion efficiency in combustor. In this paper, the author has designed and manufactured transparent simplified model combustors on the basis of K. Suzuki's combustor design method to investigate the effects of swirl number and secondary air hold arrays in axial position on the flow characteristics by adopting the tuft method and 5 hole pitot tube.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.8 no.3
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• pp.13-20
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• 2009

Development of a dynamic engine model is essential to predict and analyze of dynamic characteristics from a natural gas engine. Reducing the harmful exhaust emissions can be accomplished by a precise air-fuel ratio control. In this paper, the dynamic engine model was proposed and included mixture formation and intake process because the dynamic characteristics can be affected by the mixture components such as an air and a gaseous fuel. The air mass flow, the partial pressure ratio, and the gas constant are changed by variations of the components in the mixture formation and intake process. The dynamic engine model is applied to the natural gas engine for validation test. Experimental results show that the dynamic engine model is effective to predict the dynamic characteristics of the natural gas engine.

• Journal of Korean Society for Atmospheric Environment
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• v.12 no.4
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• pp.479-485
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• 1996

Volatile organic compounds are air pollutants exhausting from industrial process, evaporation of solvent, and so on. Most of VOCs are the combustible gas of low calorific value as it is diluted by air. The systems burning such a hazardous gas need to increase enthalpy in order to increase flame stability. In this study an incinerator with reciprocating flow in the honeycomb ceramic has been used for the experiment of VOCs control. By the reciprocating flow system, the enthalpy of combustion gas is effectively regenerated into the enthalpy increases of the combustible gas through the honeycomb ceramic, which provides a heat storage. The position of the reaction zone is strongly dependent on the parameters of mixture velocity and time frequency. Flame front is changed to the point where burning velocity is coincided with burning velocity in the honeycomb ceramic. In this system it is important that flame front should be located symmetrically at the center of honeycomb ceramic for the purpose of increasing the reaction rate at one point. Peak temperature becomes higher with decreasing time frequency, at which the flow direction is regularly reversed.

• Journal of Welding and Joining
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• v.19 no.1
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• pp.104-111
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• 2001

This study presents an analysis method for heat flow and deformation of sheet metal laser welding. A heat source model for 2-dimensional heat flow analysis of laser welding process was suggested in this paper. To investigate the availability of the heat source model, the analysis results were compared and estimated with the results of previous researches. We could get a good agreement between the results of numerical analysis and experiments in the temperature distribution of weldment. Due to the characteristics of welding process, some kinds of deformations are usually generated in a welded structure. Generally, the degree of deformation is dependent on the welding sequence constraints as well as input power Therefore, in this paper we evaluate the deformation of gas pressure vessel according to the welding sequence and input power. In the analysis of weld deformation, 2-dimensional thermo-elasto-plastic analysis was performed for the gas pressure vessel by using a commercial FE program package.

• Fire Science and Engineering
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• v.10 no.2
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• pp.40-51
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• 1996

A synthesis process for PZT powder using NH$_3$ gas as a precipitator in a bubble column reactor was experimentally successful in develope a production process of Piezoelectric ceramic PZT powder. Also as a reaction by coprecipitation, the crystalized PZT ceramic powder at the condition of over pH 9 could be attained. The time needed for reaction on the condition of NH$_3$ gas flow rate=0.5 1/min, Ar gas flow rate=2.0 1/min, Feed flow rate=2.33 ml /sec was less than five minutes, so it could synthesize PZT powder for such a few moments. And the synthesized PZT powder was 0.17${\mu}{\textrm}{m}$ in diameter on an average.