• Journal of the Semiconductor & Display Technology
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• v.20 no.3
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• pp.27-31
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• 2021

VI probe, which is one of various in-situ plasma monitoring sensor, is frequently used for in-situ process monitoring in mass production environment. In this paper, we correlated the plasma etch results with VI probe data with the small amount of gas flow rate changes to propose usefulness of the VI probe in real-time process monitoring. Several different sized contact holes were employed for the etch experiment, and the etched profiles were measured by scanning electron microscope (SEM). Although the shape of etched hole did not show satisfactory relationship with VI probe data, the chamber status changed along the incremental/decremental modification of the amount of gas flow was successfully observed in terms of impedance monitoring.

• Proceedings of the KSME Conference
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• 2007.05b
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• pp.2038-2043
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• 2007

Analysis of the internal state of the blast furnace is needed to predict and control the operating condition. Especially, it is important to develop modeling of blast furnace for predicting cohesive zone because shape of cohesive zone influences on overall operating condition of blast furnace such as gas flow, temperature distribution and chemical reactions. Because many previous blast furnace models assumed cohesive zone to be fixed, they can't evaluate change of cohesive zone shape by operation condition such as PCR, blast condition and production rate. In this study, an axi-symmetric 2-dimensional steady state model is proposed to simulate blast furnace process using the general purpose-simulation code. And Porous media is assumed for the gas flow and the potential flow for the solid flow. Velocity, pressure and temperature distribution for gas and solid are displayed as the simulation results. The cohesive zones are figured in 3 different operating conditions.

• 한국전산유체공학회:학술대회논문집
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• 2010.05a
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• pp.567-570
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• 2010

With continuously increasing flat panel display size, uniformity of thin film deposition has been drawing more attentions and associated fabrication methodologies are being actively investigated. Since the convective flow field of mixture gas plays a significant role for deposition characteristics of thin film in an APCVD system, it is greatly important to maintain uniform distribution and consistent concentration of mixture gas species. In this paper, computational study has been performed for the improvement of flow uniformity of mixture gas in an APCVD reactor during thin film deposition process. A diffuser slit has bee designed to spread the locally concentrated gas flow exiting from the flow distributor. A uniform flow distributor has been developed which has less dependency on operating conditions for global flow uniformity

• Nuclear Engineering and Technology
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• v.44 no.1
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• pp.21-32
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• 2012

Fluorinated compounds mainly used in the semiconductor industry are potent greenhouse gases. Recently, thermal plasma gas scrubbers have been gradually replacing conventional burn-wet type gas scrubbers which are based on the combustion of fossil fuels because high conversion efficiency and control of byproduct generation are achievable in chemically reactive high temperature thermal plasma. Chemical equilibrium composition at high temperature and numerical analysis on a complex thermal flow in the thermal plasma decomposition system are used to predict the process of thermal decomposition of fluorinated gas. In order to increase economic feasibility of the thermal plasma decomposition process, increase of thermal efficiency of the plasma torch and enhancement of gas mixing between the thermal plasma jet and waste gas are discussed. In addition, noble thermal plasma systems to be applied in the thermal plasma gas treatment are introduced in the present paper.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.25 no.12
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• pp.74-81
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• 2011

A computational approach was developed to understand about the arc quenching process in a gas circuit breaker(GCB). This approach is a program to analyze the gas flow in the breaker. The arc is processed at the same time. The program was used the so-called FLIC method for gas analysis techniques. It was referenced that the arc is interpreted the 'a Simplified Enthalpy Flow Arc Model'. In order to validate about the results of the program, a Auto Puffer GCB was chosen as the test subject. Because, the breaker is the one that arc current is interrupted by using the arc heating. And also, the current interrupting capability can be obtained only owing to the positive utilization(auto puffer) of the clogging phenomenon, without other puffer actions. In this paper, it has been realized that the entire arc quenching process is computerized, which is based on the self-flow current interruption by the auto puffer action. This program, which was verified through experiments, produced good results.

• Proceedings of the Korean Powder Metallurgy Institute Conference
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• 2006.09a
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• pp.10-11
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• 2006

The use of hot gas in melt atomization has been widely reported, but little detailed experimental data on its precise effects and no satisfactory theory to explain them have been published. In this paper the authors present experimental data on the atomization of metals with gas at temperatures from ambient to 1000C, a semi-empirical equation relating particle size to gas temperature and flow rate, and an analysis of the gas dynamics of the atomization process that allows some insight into the process.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.9 no.1
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• pp.14-18
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• 2010

Car muffler has the role to form the exhaust gas from high temperature- pressure to lower level and reduce the generated noise. Because of this role, its durability decrease as deformation by heat is occurred. This study is to analyze the flow of exhaust gas inside muffler and its coupled thermal deformation with 3-D modeling and ANSYS. There is the fastest flow at the exit of muffler with the maximum velocity of 54 m/s. And the maximum deformation or equivalent stress is shown at this model respectively as 0.00435 mm or 3414.4 MPa by the influence of heat and pressure at part of intersection with inlet and body of muffler.

• Korean Chemical Engineering Research
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• v.49 no.6
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• pp.764-768
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• 2011

The process of $CO_2$ capture using aqueous Monoethanolamine(MEA) has been considered as one of the leading technologies for intermediate-term strategy to reduce the $CO_2$ emission. This MEA process, however, consumes relatively a large amount of energy in the stripper for absorbent regeneration. For this reason, various process alternatives are recently established to reduce the regeneration energy. This paper suggests a flue gas split configuration as one of MEA process alternatives and then simulates this process using commercial simulator. This flue gas splitting has an effect on reducing the temperature of the lower section of absorber as well as decreasing the absorbent flow rate. Compared to the base model, this optimized flue gas split process provides 6.4% reduction of solvent flow rate and 5.8% reduction of absorbent regeneration energy.

• Geosystem Engineering
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• v.21 no.6
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• pp.318-325
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• 2018

Eight tight sandstone reservoir samples from $He_8$ and $Shan_1$ Formations of the Sulige Gas field were selected to perform gas-water micro-displacement experiment based on authentic sandstone micro-model. The gas pressure-relief experiment was proposed for the first time to simulate the pressure change and gas-water percolation characteristics in the process of gas exploitation. The experiment results show that: (1) In the process of gas accumulation, the gas preferentially flows into the well-connected pores and throats with large radius, but rarely flows into the area without pores and throats. (2) Under sufficient gas drive, the water in pores and throats usually exists in the forms of 'thin water film', 'thick water film', and 'water column', but under insufficient gas drive, gas fails to flow into new pathways in time, so that the reservoirs with large pores and throats are high in water cut. (3) Under the same water saturation, the reservoirs with better petrophysical properties has higher gas recovery factor within unit time. Under the same petrophysical conditions, the reservoirs with lower water saturation show higher gas recovery factor within unit time. The higher the permeability, the stronger the liquid carrying capacity of reservoirs.

• Journal of ILASS-Korea
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• v.18 no.4
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• pp.202-208
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• 2013

The present study aims to investigate the flow characteristics with respect to fuel type and equivalence ratio in the flame spray coating process. The flame spray flow is characterized by much complex phenomena including combustion, turbulent flows, and combined heat transfer. The present study numerically simulated the flam spray process and examined the gas dynamics involving combustion, gas temperature and velocity distributions in flame spray process by using commercial computational fluid dynamics (CFD) code of FLUENT (ver. 13.0). In particular, we studied the effect of fuel type and equivalence ratio on thermal and flow characteristics which could substantially affect the coating performance. From the results, it was found that the gas temperature distributions were varied with different fuels because of reaction times were different according to the fuel type. The equivalence ratio also could change the spatial flame distribution and the characteristics of coated layer on the substrate.